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JPS5191669A - Doopudo okisaidonoseiseihoho - Google Patents

Doopudo okisaidonoseiseihoho

Info

Publication number
JPS5191669A
JPS5191669A JP50012578A JP1257875A JPS5191669A JP S5191669 A JPS5191669 A JP S5191669A JP 50012578 A JP50012578 A JP 50012578A JP 1257875 A JP1257875 A JP 1257875A JP S5191669 A JPS5191669 A JP S5191669A
Authority
JP
Japan
Prior art keywords
okisaidonoseiseihoho
doopudo
doopudo okisaidonoseiseihoho
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50012578A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50012578A priority Critical patent/JPS5191669A/en
Publication of JPS5191669A publication Critical patent/JPS5191669A/en
Pending legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
JP50012578A 1975-01-31 1975-01-31 Doopudo okisaidonoseiseihoho Pending JPS5191669A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50012578A JPS5191669A (en) 1975-01-31 1975-01-31 Doopudo okisaidonoseiseihoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50012578A JPS5191669A (en) 1975-01-31 1975-01-31 Doopudo okisaidonoseiseihoho

Publications (1)

Publication Number Publication Date
JPS5191669A true JPS5191669A (en) 1976-08-11

Family

ID=11809230

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50012578A Pending JPS5191669A (en) 1975-01-31 1975-01-31 Doopudo okisaidonoseiseihoho

Country Status (1)

Country Link
JP (1) JPS5191669A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62238628A (en) * 1986-04-04 1987-10-19 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Method of forming layer containing silicon and oxygen
JPH03278435A (en) * 1990-02-05 1991-12-10 Mitsubishi Electric Corp Semiconductor device and manufacture thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4831027A (en) * 1971-08-25 1973-04-24
JPS4921991A (en) * 1972-04-25 1974-02-26

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4831027A (en) * 1971-08-25 1973-04-24
JPS4921991A (en) * 1972-04-25 1974-02-26

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62238628A (en) * 1986-04-04 1987-10-19 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Method of forming layer containing silicon and oxygen
JPH03278435A (en) * 1990-02-05 1991-12-10 Mitsubishi Electric Corp Semiconductor device and manufacture thereof

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