JPS58150254A - Radiation image intensifying tube and its manufacture - Google Patents
Radiation image intensifying tube and its manufactureInfo
- Publication number
- JPS58150254A JPS58150254A JP3332082A JP3332082A JPS58150254A JP S58150254 A JPS58150254 A JP S58150254A JP 3332082 A JP3332082 A JP 3332082A JP 3332082 A JP3332082 A JP 3332082A JP S58150254 A JPS58150254 A JP S58150254A
- Authority
- JP
- Japan
- Prior art keywords
- image intensifier
- intensifier tube
- radiation image
- fiber plate
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005855 radiation Effects 0.000 title claims description 20
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000000835 fiber Substances 0.000 claims abstract description 40
- 229910052751 metal Inorganic materials 0.000 claims abstract description 22
- 239000002184 metal Substances 0.000 claims abstract description 22
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 8
- XQPRBTXUXXVTKB-UHFFFAOYSA-M caesium iodide Chemical compound [I-].[Cs+] XQPRBTXUXXVTKB-UHFFFAOYSA-M 0.000 claims abstract description 5
- 238000003384 imaging method Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 7
- 229910052738 indium Inorganic materials 0.000 claims description 3
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 238000005304 joining Methods 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims 1
- 238000001771 vacuum deposition Methods 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 description 8
- 238000010168 coupling process Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- APFVFJFRJDLVQX-IGMARMGPSA-N indium-115 Chemical compound [115In] APFVFJFRJDLVQX-IGMARMGPSA-N 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 239000011593 sulfur Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
- H01J29/86—Vessels; Containers; Vacuum locks
- H01J29/89—Optical or photographic arrangements structurally combined or co-operating with the vessel
- H01J29/892—Optical or photographic arrangements structurally combined or co-operating with the vessel using fibre optics
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
- Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
Abstract
Description
【発明の詳細な説明】
この発明は撮像装置を内蔵した放射線像増強管装置及び
その製造方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a radiation image intensifier tube device incorporating an imaging device and a method for manufacturing the same.
一般にＸ線やガンマ線，その他の入射放射線像を増倍さ
れた可視光像に変換する増強管は広く利用されており、
この可視光像は光学レンズにより撮像装置のターグツト
面に結像して電気信号に変換される。しかしこの方式で
は、光学レンズ系の存在により装置が大きくなってしま
うこと、更には光学レンズ系の光損失が大きいという欠
点がある。Generally, intensifier tubes that convert X-rays, gamma rays, and other incident radiation images into multiplied visible light images are widely used.
This visible light image is focused on the target surface of the imaging device by an optical lens and converted into an electrical signal. However, this method has the drawback that the presence of the optical lens system increases the size of the apparatus, and furthermore, the optical lens system has a large light loss.
この欠点を解決する手段として幾つかの方式が提案され
ているが、その一例として第１図に示すようにＸ線像増
強管装置があり、このＸ線像増強管装置はＸ線像増強管
Ｌと撮像装置である撮像管１００とを組合せて一体化し
たものである。即ち、Ｘ線増強管Ｌは、一部にファイバ
ープレート８を有する真空外囲器２内に、入力面４、集
束電極５、陽極６及び出力面ＩＯを内蔵している。そし
て、ファイ／４−プレート８を取付けたメタルフレーム
９と真空外囲器２のメタルフレーム３とは、封着点１ノ
で真空気密に溶接されている。このようなＸ線像増強管
Ｌにおいては、入力面４に入射したＸ線像は電子束に変
換されて、集束電極５、陽極６で集束・加速作用を受け
て出力面１０に明るい可視像を結ぶ。Several methods have been proposed to solve this drawback, one example of which is an X-ray image intensifier device as shown in Figure 1. This is a combination of L and an imaging tube 100 which is an imaging device. That is, the X-ray intensifier tube L includes an input surface 4, a focusing electrode 5, an anode 6, and an output surface IO in a vacuum envelope 2 that partially includes a fiber plate 8. The metal frame 9 to which the Phi/4-plate 8 is attached and the metal frame 3 of the vacuum envelope 2 are vacuum-tightly welded at a sealing point 1. In such an X-ray image intensifier tube L, the X-ray image incident on the input surface 4 is converted into a flux of electrons, which is focused and accelerated by the focusing electrode 5 and the anode 6 to produce a bright visible image on the output surface 10. Tie the statue.
このＸ線像増強管Ｌには、入力窓がファイバープレート
１０２よりなる撮像管１００とファイバー面１２，１１
０で光学的に接合されている。そして上記Ｘ線像増強管
Ｌの出力螢光面１０上の可視像は，ファイバープレート
８によってファイバー外面１２に導かれ、この面より撮
像管１００のファイバープレート１０２を通して光導電
膜ターグツト１０３に導かれる。この光導電膜ターゲッ
ト１０３に導かれたり視像は通常の撮像管の動作原理に
より電気信号に変換され、外部へ取出される。This X-ray image intensifier tube L includes an image pickup tube 100 whose input window is composed of a fiber plate 102, and fiber surfaces 12, 11.
Optically bonded at 0. The visible image on the output fluorescent surface 10 of the X-ray image intensifier tube L is guided by the fiber plate 8 to the fiber outer surface 12, and from this surface to the photoconductive film target 103 through the fiber plate 102 of the image pickup tube 100. It will be destroyed. The visual image guided to the photoconductive film target 103 is converted into an electrical signal according to the operating principle of a normal image pickup tube, and is taken out to the outside.
上記のような放射線像増強管と一階と硫合技放射線像増
強管装置では、それぞれのファイバーグレート８，１０
２は真空外囲器の一部であるため、強度と真空気密性を
保つ必要があり、その厚みは一般に４ｗ以１は必要であ
る。しかるに２枚のファイバープレー）８ 、 １ ０
２の合計の厚さは、８■以上となっている。他方、ファ
イバープレートの面品位について考えると、厚くなれば
なる程ファイバーグレートの製造に起因する欠点が発生
し、モニター上では黒点となり画質を著しく悪化させる
。更に、Ｘ線像増強管Ｌのファイバープレート外面１２
と撮像管１００のファイバープレート外面１１０との光
学的結合を完全にするのは、極めて困難であり、解像度
の低下をきたす。In the above-mentioned radiographic image intensifier tube and first floor and sulfur technology radiographic image intensifier tube devices, fiber grades of 8 and 10 are used, respectively.
Since 2 is a part of the vacuum envelope, it is necessary to maintain strength and vacuum tightness, and its thickness generally needs to be 4w or more. However, two fiber plays) 8, 1 0
The total thickness of 2 is 8 cm or more. On the other hand, considering the surface quality of the fiber plate, the thicker it becomes, the more defects will occur due to the manufacturing of the fiber plate, which will appear as black spots on the monitor and significantly deteriorate the image quality. Furthermore, the fiber plate outer surface 12 of the X-ray image intensifier tube L
It is extremely difficult to achieve perfect optical coupling between the fiber plate outer surface 110 of the image pickup tube 100 and the resolution deteriorates.
この発明の目的は、ファイバープレートの面品位が極め
て良く、解像度が優れ、且つ光学レレズ結合方式の欠点
を改善した放射線像増強管装置及びその製造方法を提供
することである。An object of the present invention is to provide a radiation image intensifier tube device that has a fiber plate with extremely good surface quality and excellent resolution, and that improves the drawbacks of the optical lens-lethal coupling method, and a method for manufacturing the same.
この発明は真壁外囲器内に入力面、集束電極。 This invention has an input surface and a focusing electrode inside the Makabe envelope.
陽極を設けた放射線像増強管と、入力窓がファイバーグ
レートからなる撮像装置とを一体化してなる放射線像増
強管装ｆＨｃおいて、上記ファイバープレートの外面に
出力螢光面を形成し、該出力螢光面を上記放射線像増強
管の電子レンズ焦点位置に合致するように、上記真空外
囲器の一部をなすメタルフレームで結合し気密封着した
ことを特徴とする放射線像増強管装置である。In the radiation image intensifier tube fHc which is formed by integrating a radiation image intensifier tube provided with an anode and an imaging device whose input window is a fiber plate, an output fluorescent surface is formed on the outer surface of the fiber plate, and the output fluorescent surface is formed on the outer surface of the fiber plate. A radiation image intensifier tube device characterized in that the fluorescent surface is joined and hermetically sealed with a metal frame forming a part of the vacuum envelope so as to match the focal position of the electron lens of the radiation image intensifier tube. be.
又、この発明は、少なくとも下記工程を具備したことを
特徴とする放射線像ｊ＋４強管装置の製造方法である。Further, the present invention is a method for manufacturing a radiographic image j+4 strong tube device, characterized by comprising at least the following steps.
■ 撮像装置の外囲器一端に、光導電膜ターグツトを形
成したファイバーグレートとメタルフレームとを同時に
インジウムにより冷間圧接する工程、
■ 次に、上記外囲器内に電子銃を封止した後、排気す
る工程、
■ 次に、上記ファイバープレートの外面に出力螢光面
を形成する工程、
■ 次に、出力螢光面を有せず且つ真空外囲器の出力側
にメタルクレームを備えた放射線像増強管の電子レンズ
焦点位置に、上記ファイノぐ一プレートを押入し、上記
両メタルフし・−ムを真空気密に接合する工程、
次に、上記放射線像増強管の管内を高真空に排気し、人
力面を構成する光電面を形成する工程。■ The process of simultaneously cold-welding the fiber grate with the photoconductive film target and the metal frame to one end of the envelope of the imaging device using indium. ■ Next, after sealing the electron gun inside the envelope. , a step of evacuation; ■ Next, a step of forming an output fluorescent surface on the outer surface of the fiber plate; ■ Next, a step of forming an output fluorescent surface on the outer surface of the fiber plate; A process of pushing the above-mentioned fine gun plate into the electron lens focus position of the radiation image intensifier tube and joining the two metal frames in a vacuum-tight manner.Next, evacuating the inside of the radiation image intensifier tube to a high vacuum. The process of forming the photocathode that makes up the human-powered surface.
従来例（第１図）と同一箇所は同一符号を利すと、第２
図に示すように、この発明の一実施例として示すＸ線像
増強管装置はＸ線像増強管↓と撮１象装置例えば撮像管
１００とを組合せてなり一体化されている。即ち、Ｘ線
像増強管りは、後部にメタルフレーム３を有するガラス
製真輩外囲器２内の入力側に、入力面４が配設されてい
る。この入力面は、 ＩＮ示していないが、基板に例え
ば沃化セシウム入力螢光面と光電面を形成してガってい
る。又、真空外囲器２内の側壁に沿って集束電極５が設
けられ、後部には陽極６が配設されている。The same parts as the conventional example (Fig. 1) are given the same symbols, and the second
As shown in the figure, the X-ray image intensifier device shown as an embodiment of the present invention is integrated by combining an X-ray image intensifier tube ↓ and an imaging device such as an image pickup tube 100. That is, the X-ray image intensifier tube has an input surface 4 disposed on the input side of a glass envelope 2 having a metal frame 3 at the rear. Although not shown, this input surface is formed by forming, for example, a cesium iodide input fluorescent surface and a photocathode on the substrate. Further, a focusing electrode 5 is provided along the side wall inside the vacuum envelope 2, and an anode 6 is provided at the rear.
一方、撮像管−１００は、有底筒状のガラス製外囲器１
０１の開口端には、入力窓となるガラスファイバープレ
ート１０２が真空気密に封着されている。このファイバ
ープレート１０２は厚さが４ｎ以下に設定され、内面に
け光電変換用の光導電膜ターグットｌＯ３が形成され、
外面には螢光体層とアルミパック層（いずれも後述）か
らなる出力螢光面１１１が形成されている。勿論、この
出力螢光面１１１は上記Ｘ線像増強管ｌの出力螢光面と
なるが、出力螢光面は例えば真空蒸着法により形成され
、沃化セシウムからなっている。更に、外囲器ＪＯＪ内
には、電子銃を構成する電極Ｊ ０４．Ｊ ０５．Ｊ
０６が配設されている。又、外囲器１０１の外側には、
偏向手段１１３と集束手段Ｊ１４が設けられている。更
に、外囲器１０１とファイバープレート１０２との封着
箇所には、メタルフレーム１１２が取付けられている。On the other hand, the image pickup tube 100 has a bottomed cylindrical glass envelope 1.
A glass fiber plate 102 serving as an input window is vacuum-tightly sealed to the open end of 01. The thickness of this fiber plate 102 is set to 4n or less, and a photoconductive film targut lO3 for photoelectric conversion is formed on the inner surface.
An output phosphor surface 111 consisting of a phosphor layer and an aluminum pack layer (both of which will be described later) is formed on the outer surface. Of course, this output fluorescent surface 111 becomes the output fluorescent surface of the X-ray image intensifier tube 1, and the output fluorescent surface is formed by, for example, a vacuum evaporation method and is made of cesium iodide. Further, inside the envelope JOJ, there are electrodes J04.04 constituting the electron gun. J05. J
06 is installed. Moreover, on the outside of the envelope 101,
Deflecting means 113 and focusing means J14 are provided. Further, a metal frame 112 is attached to a portion where the envelope 101 and the fiber plate 102 are sealed.
このような撮像管１００は上記Ｘ線像増強管りと真空気
密に接合され一体化されるがこの場合、ファイバープレ
ート１０２の外面１１０の出力螢光面１１１がＸ線像増
強管上の電子レンズ焦点位置に合致するように、両メタ
ルフレーム３，１１２が封着点１３で接合されている。Such an image pickup tube 100 is vacuum-tightly joined and integrated with the X-ray image intensifier tube. In this case, the output fluorescent surface 111 of the outer surface 110 of the fiber plate 102 is connected to the electron lens on the X-ray image intensifier tube. Both metal frames 3 and 112 are joined at a sealing point 13 so as to match the focal point position.
この両メタルフレーム３，１１２は真空外囲器の一部を
構成している。Both metal frames 3 and 112 constitute a part of the vacuum envelope.
次に上記Ｘ線像増強管装置の製造方法について説明する
。先ず第３図Ｃａ）に示すように撮像管１００を組立る
が通常の撮像管との違いは既述のように入力窓にファイ
バープレート１０２を用いたことであυ、そして、内面
に光導電膜ターダツ）Ｊ ０３が形成されたファイバー
プレート１０２とガラ、割裂外囲器１０１をインジウム
１１５により冷間圧接する際に、メタルフレーム１１２
も同時に接合する。この後、電子銃を構成する電極１０
４，１０５，１０６を封止して排気を行なう。Next, a method of manufacturing the above-mentioned X-ray image intensifier tube device will be explained. First, the image pickup tube 100 is assembled as shown in FIG. When cold-pressure welding the fiber plate 102 on which J03 is formed and the split envelope 101 using indium 115, the metal frame 112
are also joined at the same time. After this, the electrode 10 constituting the electron gun
4, 105, and 106 are sealed and evacuated.
次に同図（ｂｌに示すように、上記ファイバープレート
１０２の外面に真空蒸着法により沃化セシウムからなる
螢光体層１２１を形成し、更にこの螢光体層１２）上に
メタルバック層１２２を形成することにより、出力螢光
面Ｌ±丈ができあがる。Next, as shown in FIG. By forming the output fluorescent surface L±length is completed.
次に同図（Ｃ１に示すように、出力螢光面を有しないＸ
線像増強管Ｊの電子レンズ焦点位置に撮像管１００のフ
ァイ・々−プレート１０２を押入して、それぞれメタル
フレーム３，１１２を封着点１３において真空気密に接
合する。この後、排気管１４により管内を高真空に排気
し、入力面４を構成する光電面（図示せず）を形成する
と、第２図に示すこの考案のＸ線像Ｍ価管装置が完成す
る。Next, as shown in the same figure (C1),
The phi-plate 102 of the image pickup tube 100 is pushed into the focal position of the electron lens of the line image intensifier tube J, and the metal frames 3 and 112 are vacuum-tightly joined at the sealing points 13, respectively. Thereafter, the inside of the tube is evacuated to a high vacuum using the exhaust pipe 14, and a photocathode (not shown) constituting the input surface 4 is formed to complete the X-ray image M value tube device of this invention as shown in FIG. .
上記のようなＸ線像増強管装置は、動作時には、入力面
４でＸ線像が電子束に変換され、集束電極５．陽極６に
よって集束・加速作用を受けて出力螢光面１１１で可視
光像に変換される。During operation, the X-ray image intensifier tube device as described above converts an X-ray image into an electron flux at the input surface 4, and the focusing electrode 5. The light is focused and accelerated by the anode 6 and converted into a visible light image by the output fluorescent surface 111.
このｉ」視光像は、ファイバープレート１０２で光導電
膜ターゲット１０３に導かれて電荷像を形成する。そし
て、この電荷像は電子ビーム発生源である電極１０４よ
り発生した読取ビームを偏向手段１１３と集束手段１１
４によって走査することにより、出力端子１０９に電気
信号として取出される。This i'' visual light image is guided to a photoconductive film target 103 by a fiber plate 102 to form a charge image. This charge image directs the reading beam generated from the electrode 104, which is an electron beam generation source, into the deflecting means 113 and the focusing means 11.
4, the signal is output to the output terminal 109 as an electrical signal.
この発明によれば、ファイバープレートノ０２の外面に
出力螢光面１２１を形成し、これを真空外囲器の一部で
あるメタルフレーム１１２でＸ線像増強管りの電子レン
ズ焦点位置に合致するように結合しているので、ファイ
バープレート１０２は１枚でよく而も大気圧が加わらな
いため、厚さ、３〜４龍の薄いものが使用できる。According to this invention, an output fluorescent surface 121 is formed on the outer surface of the fiber plate 02, and this is aligned with the focal position of the electron lens of the X-ray image intensifier tube using the metal frame 112 which is a part of the vacuum envelope. Since the fiber plates 102 are connected in such a manner that only one fiber plate 102 is required, a thin one having a thickness of 3 to 4 mm can be used since atmospheric pressure is not applied.
又、ファイバーグレート１０２１枚で出力螢光［１１１
１１１の光学像が光導電膜ターグット１０３に伝達され
るので、解像厩が優れ、効率も向上した。父、Ｘ線像増
強管のような放射線像増強管部分と、撮像装置部分とを
各々個別的につくり、はぼ最終段階で気密接合し、増強
管部分を排気して完成させうるので、製造が確実、容易
である。とくに撮像装置部分は単独で完成させることが
できるため、光電感度を所望特性になしうる。In addition, the output fluorescent light [111
Since the optical image 111 is transmitted to the photoconductive film target 103, resolution is excellent and efficiency is also improved. Father, since the radiation image intensifier tube part such as an X-ray image intensifier tube and the imaging device part can be made separately, they are hermetically sealed together in the final stage, and the intensifier tube part is evacuated to complete the manufacturing process. is reliable and easy. In particular, since the imaging device portion can be completed independently, the photoelectric sensitivity can be made to have desired characteristics.
尚、上記実施例では出力螢光面１２１は沃化セシウムの
蒸着螢光面であったが、これに限定されるものではなく
、あらゆる種類、あらゆる製造方法のものを含む。In the above embodiment, the output fluorescent surface 121 is a vapor-deposited fluorescent surface of cesium iodide, but it is not limited to this, and may include any type and any manufacturing method.
又、上記実施例では、撮像装置として撮像管１００を用
いたが、これに限定されるものではなく、入力窓にファ
イバーグレートを用い、その外面に出力螢光面を形成し
た全ての撮像装置が含まれる。Further, in the above embodiment, the image pickup tube 100 is used as the image pickup device, but the present invention is not limited to this, and all image pickup devices that use a fiber grating for the input window and have an output fluorescent surface formed on its outer surface can be used. included.
又、第４図はこの発明の他の実施例を示したもので、撮
像装置としてＣＯＤ等の固体撮像素子を用いたものであ
る。即ち、固体撮像素子２００の光入力窓はファイバー
グレート２０１よシなシ、その外面には出力螢光面２０
２が形成されている。他方、固体撮像素子２００の駆動
、信号取出しのための端子２０５は、セラミック等から
なる絶縁板２０３を通して管外へ取出される。この絶縁
板２０３にはメタルフレーム２０４が真空気密に接合さ
れておシ、このメタルフレーム２０４とＸ線像増強管り
の出力側メタルフレーム３とは封着点２０６において真
空気密に接合されている。この他の実施例の場合、ファ
イバープレート２０１は管内にあるので、真空気密であ
る必要はなく、欠点の面から考えると割れない範囲でで
きるだけ薄い方がよい。その厚さはおよそ２〜３ ｍｍ
である。Further, FIG. 4 shows another embodiment of the present invention, in which a solid-state imaging device such as a COD is used as the imaging device. That is, the optical input window of the solid-state image sensor 200 is similar to the fiber plate 201, and the output fluorescent surface 20 is provided on the outer surface of the optical input window.
2 is formed. On the other hand, a terminal 205 for driving the solid-state image sensor 200 and for taking out signals is taken out to the outside of the tube through an insulating plate 203 made of ceramic or the like. A metal frame 204 is vacuum-tightly bonded to this insulating plate 203, and this metal frame 204 and the output-side metal frame 3 of the X-ray image intensifier tube are vacuum-tightly bonded at a sealing point 206. . In the case of this other embodiment, since the fiber plate 201 is inside the tube, it does not need to be vacuum-tight, and considering the disadvantages, it is better to make it as thin as possible without breaking. Its thickness is approximately 2-3 mm
It is.
第１図は従来のＸ線像増強管装置を示す断面図、第２図
はこの発明の一実施例に係るＸ線像増強管装置を示す断
面図、第３図（ａｌ〜（Ｃ）はこの発明の一実施例に係
るＸ線像増強管装置の製造方法を示す断面図、第４図は
この発明の他の実施例を示す断面図である。
Ｌ・・・Ｘ線像増強管、２・・・真空外囲器、 ３，１
１２・・・メタルフレーム、４・・・入力面、５・・・
集束電極、６・・・ｊ陽極、１３・・・封着点、１４・
・・排気管、ガニ・・・撮像管、１０ノ・・・外囲器、
１０２ 用ファイノ々−ｆｖ−ト、１ｏ３・・・光導電
膜ターグット、１０４゜１０５．１０６・・・電極、１
０９・・・出力端子％１１０・・・外面、１１１・・・
出力螢光面、１１３・・・偏向手段、１１４・・・集束
手段、１１５・・・インジウム、１２１・・・螢光体層
％１２２・・・メタルバック層。
出願人代理人 弁理士 鈴 江 武 彦第３図
（Ｃ）
第４図
２４９−
（ｂ）FIG. 1 is a sectional view showing a conventional X-ray image intensifier tube device, FIG. 2 is a sectional view showing an X-ray image intensifier device according to an embodiment of the present invention, and FIGS. A sectional view showing a method of manufacturing an X-ray image intensifier device according to an embodiment of the present invention, and FIG. 4 is a sectional view showing another embodiment of the invention.L...X-ray image intensifier tube, 2...vacuum envelope, 3,1
12...Metal frame, 4...Input surface, 5...
Focusing electrode, 6...j anode, 13... Sealing point, 14.
...exhaust pipe, crab...imaging tube, 10...envelope,
102 Fino-fv-to, 1o3... Photoconductive film targut, 104°105.106... Electrode, 1
09... Output terminal %110... Outer surface, 111...
Output fluorescent surface, 113... Deflection means, 114... Focusing means, 115... Indium, 121... Fluorescent layer% 122... Metal back layer. Applicant's agent Patent attorney Takehiko Suzue Figure 3 (C) Figure 4 249- (b)
Claims (1)
設けた放射線像増強管と、入力窓がファイバープレート
からなる撮像装置とを一体化してなる放射線像増強管装
置において、 上記ファイバープレートの外向に出力螢光面を形成し、
この出力螢光面を上記放射線像増強管の電子レンズ焦点
位置に合致するように、上記真空外囲器の一部をなすメ
タルフレームで結合し気密封着したことを特徴とする放
射線像増強管１６ （２） 上記出力螢光面は、蒸着螢光体層である特許
請求の範囲第１項記載の放射線像増強管装置。 （３］ 上記入力向は、沃化セシウム人力螢光向と光
電面とよシなる特許請求の範囲第１項記載の放射線像増
強管装置〇 （４）上記ファイバープレートの厚さが４膿以下である
特許請求の範囲第１項記載の放射線像増強管装置。 （５）少なくとも下記工程を具備したことを特徴とする
放射線像増強管装置の製造方法。 ■ 撮像装置の外囲器一端に、光導′屯膜ターケ°ット
を形成したファイバープレートとメタルフレームとを同
時にインジウムにより冷間圧接する工程、 ■ 次に、上記外囲器内に電子銃を封止した後、排気す
る工程、 ■ 次に、上記ファイバーグレートの外面に出力螢光面
を形成する工程、 ■ 次に、出力螢光面を有せず目つ真空外囲器の出力側
にメタルフレームを備えた放射線像増強管の電子レンズ
焦点位置に、上記ファイバープレートを押入し、上記両
メタルフレームを真空気密に接合する工程、 ■ 次に、上記放射線像増強管の管内を高真空に排気し
、入力面を構成する光電面を形成する工程。[Scope of Claims] (il) A radiation image intensifier tube formed by integrating a radiation image intensifier tube with an input surface, a Tokyo electrode, and an anode provided in a Makabe envelope, and an imaging device whose input window is a fiber plate. In the apparatus, an output fluorescent surface is formed outwardly of the fiber plate;
A radiation image intensifier tube characterized in that the output fluorescent surface is connected and hermetically sealed with a metal frame forming a part of the vacuum envelope so as to match the focal position of the electron lens of the radiation image intensifier tube. 16 (2) The radiation image intensifier tube device according to claim 1, wherein the output phosphor surface is a vapor-deposited phosphor layer. (3) The radiation image intensifier tube device according to claim 1, wherein the input direction is a cesium iodide manual fluorescence direction and a photocathode. (4) The thickness of the fiber plate is 4 mm or less. A radiation image intensifier tube device according to claim 1. (5) A method for manufacturing a radiation image intensifier tube device, characterized by comprising at least the following steps: (1) At one end of an envelope of an imaging device, A step of simultaneously cold-welding the fiber plate on which the light guide membrane target is formed and a metal frame with indium; ■ Next, a step of sealing the electron gun in the envelope and then evacuating it; Next, a step of forming an output fluorescent surface on the outer surface of the fiber grate; A step of pushing the fiber plate into the focal position of the electron lens and vacuum-tightly joining the two metal frames. ■ Next, the inside of the radiation image intensifier tube is evacuated to a high vacuum, and the photocathode forming the input surface is removed. The process of forming.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3332082A JPS58150254A (en) | 1982-03-03 | 1982-03-03 | Radiation image intensifying tube and its manufacture |
| EP83301033A EP0087961A1 (en) | 1982-03-03 | 1983-02-25 | Radiant ray image intensifier tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3332082A JPS58150254A (en) | 1982-03-03 | 1982-03-03 | Radiation image intensifying tube and its manufacture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58150254A true JPS58150254A (en) | 1983-09-06 |
Family
ID=12383262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3332082A Pending JPS58150254A (en) | 1982-03-03 | 1982-03-03 | Radiation image intensifying tube and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58150254A (en) |
-
1982
- 1982-03-03 JP JP3332082A patent/JPS58150254A/en active Pending
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