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JPS57165831A - Projection printing device - Google Patents

Projection printing device

Info

Publication number
JPS57165831A
JPS57165831A JP56052211A JP5221181A JPS57165831A JP S57165831 A JPS57165831 A JP S57165831A JP 56052211 A JP56052211 A JP 56052211A JP 5221181 A JP5221181 A JP 5221181A JP S57165831 A JPS57165831 A JP S57165831A
Authority
JP
Japan
Prior art keywords
arm
supported
printing device
guide rail
coupling member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56052211A
Other languages
Japanese (ja)
Inventor
Junji Isohata
Sekinori Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP56052211A priority Critical patent/JPS57165831A/en
Priority to US06/260,387 priority patent/US4370054A/en
Priority to GB8114118A priority patent/GB2096334B/en
Priority to DE19813118632 priority patent/DE3118632A1/en
Publication of JPS57165831A publication Critical patent/JPS57165831A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70358—Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To prevent the inclination of a projection optical axis based upon the nonlinearity of a guide rail by using a guide with a buffer device. CONSTITUTION:A supporting tool 22 for a mask 8 and a supporting tool 23 for a wafer 10 are moved in one body by a coupling member 24. This coupling member 24 is supported and guided by an arm 25 through a guide rail 26 and a fluid bearing 31, and the arm 25 is supported on a spherical seat 50 as a buffer member at an upper left side in the figure. Consequently, even if one of left and right rails oscillates, the oscillation is absorbed by the spherical seat 50, so that neither rolling nor pitching is caused.
JP56052211A 1981-04-02 1981-04-07 Projection printing device Pending JPS57165831A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP56052211A JPS57165831A (en) 1981-04-07 1981-04-07 Projection printing device
US06/260,387 US4370054A (en) 1981-04-02 1981-05-04 Projection exposure apparatus
GB8114118A GB2096334B (en) 1981-04-02 1981-05-08 Producing printed circuits
DE19813118632 DE3118632A1 (en) 1981-04-02 1981-05-11 EXPOSURE PROJECTION DEVICE

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56052211A JPS57165831A (en) 1981-04-07 1981-04-07 Projection printing device

Publications (1)

Publication Number Publication Date
JPS57165831A true JPS57165831A (en) 1982-10-13

Family

ID=12908422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56052211A Pending JPS57165831A (en) 1981-04-02 1981-04-07 Projection printing device

Country Status (1)

Country Link
JP (1) JPS57165831A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5978533A (en) * 1982-10-27 1984-05-07 Canon Inc Exposure device
JP2007299925A (en) * 2006-04-28 2007-11-15 Yaskawa Electric Corp Stage device, and exposure apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5978533A (en) * 1982-10-27 1984-05-07 Canon Inc Exposure device
JP2007299925A (en) * 2006-04-28 2007-11-15 Yaskawa Electric Corp Stage device, and exposure apparatus

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