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JPS5661608A - Device for minute displacement measuring and positioning - Google Patents

Device for minute displacement measuring and positioning

Info

Publication number
JPS5661608A
JPS5661608A JP13766079A JP13766079A JPS5661608A JP S5661608 A JPS5661608 A JP S5661608A JP 13766079 A JP13766079 A JP 13766079A JP 13766079 A JP13766079 A JP 13766079A JP S5661608 A JPS5661608 A JP S5661608A
Authority
JP
Japan
Prior art keywords
diffraction grating
transmissive diffraction
diffracted
positioning
transmissive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13766079A
Other languages
English (en)
Other versions
JPS5938521B2 (ja
Inventor
Yasuhiro Torii
Yoshihiko Mizushima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP13766079A priority Critical patent/JPS5938521B2/ja
Publication of JPS5661608A publication Critical patent/JPS5661608A/ja
Publication of JPS5938521B2 publication Critical patent/JPS5938521B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
JP13766079A 1979-10-26 1979-10-26 微小変位測定および位置合わせ装置 Expired JPS5938521B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13766079A JPS5938521B2 (ja) 1979-10-26 1979-10-26 微小変位測定および位置合わせ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13766079A JPS5938521B2 (ja) 1979-10-26 1979-10-26 微小変位測定および位置合わせ装置

Publications (2)

Publication Number Publication Date
JPS5661608A true JPS5661608A (en) 1981-05-27
JPS5938521B2 JPS5938521B2 (ja) 1984-09-18

Family

ID=15203829

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13766079A Expired JPS5938521B2 (ja) 1979-10-26 1979-10-26 微小変位測定および位置合わせ装置

Country Status (1)

Country Link
JP (1) JPS5938521B2 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207805A (en) * 1981-06-17 1982-12-20 Hitachi Ltd Displacement measuring device
JPS60260813A (ja) * 1984-05-31 1985-12-24 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング 変位測定方法及びその装置
US4656347A (en) * 1984-01-30 1987-04-07 Nippon Telegraph & Telephone Public Corporation Diffraction grating position adjuster using a grating and a reflector
JPS62121314A (ja) * 1985-11-21 1987-06-02 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング 光電位置測定装置
JPS62172203A (ja) * 1986-01-27 1987-07-29 Agency Of Ind Science & Technol 相対変位測定方法
JPS62255803A (ja) * 1986-04-28 1987-11-07 Nippon Telegr & Teleph Corp <Ntt> 回折格子による位置合わせ方法および位置合わせ装置
JPS6375518A (ja) * 1986-09-18 1988-04-05 Tokyo Seimitsu Co Ltd 移動量検出装置

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57207805A (en) * 1981-06-17 1982-12-20 Hitachi Ltd Displacement measuring device
JPH038491B2 (ja) * 1981-06-17 1991-02-06 Hitachi Ltd
US4656347A (en) * 1984-01-30 1987-04-07 Nippon Telegraph & Telephone Public Corporation Diffraction grating position adjuster using a grating and a reflector
JPS60260813A (ja) * 1984-05-31 1985-12-24 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング 変位測定方法及びその装置
JPS62121314A (ja) * 1985-11-21 1987-06-02 ドクトル・ヨハネス・ハイデンハイン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング 光電位置測定装置
JPH0130089B2 (ja) * 1985-11-21 1989-06-16 Dokutoru Yohanesu Haidenhain Gmbh
JPS62172203A (ja) * 1986-01-27 1987-07-29 Agency Of Ind Science & Technol 相対変位測定方法
JPH0466295B2 (ja) * 1986-01-27 1992-10-22 Kogyo Gijutsuin
JPS62255803A (ja) * 1986-04-28 1987-11-07 Nippon Telegr & Teleph Corp <Ntt> 回折格子による位置合わせ方法および位置合わせ装置
JPS6375518A (ja) * 1986-09-18 1988-04-05 Tokyo Seimitsu Co Ltd 移動量検出装置

Also Published As

Publication number Publication date
JPS5938521B2 (ja) 1984-09-18

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