JPH09270449A - Wafer cassette transport jig - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable a wafer Cassette to be surely held by an operator independent of his grasping power by a method wherein a pair of clamp blocks are mounted sandwiching a pair of side protrudent plates between them from the sides, and the clamp blocks are fixed and locked in position. SOLUTION: A lever 8 is pulled by an operator with his finger, whereby a clamp arm 7 is inwardly closed, the press member 71 of the clamp arm 7 is pressed against the cutout of a movable block 4 to press the movable block 4 inwards, two clamp blocks 5 are energized in opposed directions, and the side protrudent plate 531 is inserted into a groove. When the clamp arm 7 is inwardly closed, the movable block 4 is pressed inwards by the pressing member 22 of the clamp arm 7. By this setup, a lock shaft is slided towards a locking piece, and the projection of the locking piece is engaged with the cutout of the lock shaft to lock the movable block 4.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wafer cassette carrying jig, and more particularly to a wafer cassette carrying jig which prevents the wafer cassette from falling during carrying.

[0002]

2. Description of the Related Art FIG. 12 and FIG. 13 show a carrier handle described in JP-A-6-124993 as an example of a conventional wafer cassette carrying jig. FIG. 12 is a perspective view showing a state before a carrier handle is attached to a carrier (wafer cassette) that accommodates a semiconductor wafer (hereinafter referred to as a wafer), and FIG. 13 is a perspective view showing a state where the carrier handle is attached to the carrier. Is.

In FIG. 12, a carrier handle 601.
Includes two arms 602 extending vertically from both ends of a support rod 603 fixed to the grip handle 631, and a front convex piece 61.
It has two locking rods 604 that engage with 0b and a rotation shaft 642 that rotates the locking rod 604 in conjunction with the lever 641.

Next, the operation will be described. As shown in FIG. 13, the arm 602 of the carrier handle 601 is inserted so as to come into contact with the lower surface of the upper convex piece 610a of the carrier 610 accommodating the wafer 611. Then, as shown in FIG. B, after inserting the arm 602 to the end, the lever 641 is pulled by a finger and the concentric shaft 642 is rotated to engage the locking rod 604 with the front convex piece 610b, so that the engagement is performed. The stop rod 604 is fixed.

In this state, the carrier 610 is lifted and transported to a desired place. When the carrier 610 arrives at the intended place, after placing the carrier 610 horizontally or vertically, the lever 641 is loosened, the locking rod 604 is removed from the front convex piece 610b, and the carrier handle 601 is removed.
Remove from

[0006]

As described above,
The conventional wafer cassette carrying jig fixes the carrier handle 601 to the carrier 610 by pulling the lever 641 with fingers and engaging the locking bar 604 with the front convex piece 610b. Therefore, the fixed state of the carrier handle 601 and the carrier 610 is determined by the engagement state of the locking rod 604 and the front projection 610b. However, the engagement state between the locking rod 604 and the front convex piece 610b is the lever 64.
Since it depends on the strength of the finger force applied to No. 1, the individual difference in the finger force of the person who uses the carrier handle 601 has a great influence.

[0007] For example, when used by a person with strong finger strength,
Since the locking rod 604 strongly engages with the front convex piece 610b,
At this time, the front convex pieces 610b may be deformed or damaged, so that the fragments of the front convex pieces 610b may scatter and adhere to the wafer 611 as foreign matter.

On the other hand, when a person with weak finger strength is used, if the engagement between the locking bar 604 and the front convex piece 610b is weak, the locking bar 604 will come off during transportation and the carrier 610 will fall out. there is a possibility.

Further, since it is necessary to continue to pull the lever 641 with fingers during transportation, it imposes a burden on the user. If the lever 641 is mistakenly released, the locking rod 604 will come off and the carrier 610 will fall off. there is a possibility.

Further, in order to use the carrier handle 601, like the front projection 610b of the carrier 610,
There is a problem in that a projection structure having a special shape for engaging the locking rod 604 is required, which is not versatile.
That is, a commonly used wafer carrier (wafer cassette) has a protruding structure corresponding to the front convex piece 610b, but its shape is a simple flat plate shape,
The shape is not such that the locking rod 604 can be engaged.

The present invention has been made to solve the above problems, and can reliably hold the wafer cassette regardless of the strength of the user's fingers, and lock the wafer cassette during transportation. Provided is a wafer cassette carrying jig which prevents the wafer cassette from falling off in a state.

[0012]

A wafer cassette carrying jig according to a first aspect of the present invention is a wafer cassette carrying jig for carrying a wafer cassette containing a wafer, wherein the wafer cassette has a bottom. An open-ended box-shaped cassette body, a pair of upper projecting plates that are provided at the edge of the upper opening of the cassette body in the direction of arrangement of the wafers and project away from the cassette body, and both sides of the cassette body. The wafer cassette carrying jig has a pair of side surface projecting plates that are provided at the end edges of the surfaces and project away from the cassette body, and the wafer cassette carrying jig is mounted on the wafer cassette. A pair of arms that are arranged so as to contact the lower surfaces respectively, and can be freely attached to and detached from the pair of side surface protruding plates, and the pair of side surface protruding plates can be mounted so as to be sandwiched from both sides. By doing so, a pair of clamp blocks holding the pair of side surface protruding plates, a support frame for attaching the pair of arms and the pair of clamp blocks substantially in parallel at a predetermined interval, and being connected to the pair of clamp blocks. Moving means for freely attaching and detaching the pair of clamp blocks to and from the pair of side surface protruding plates;
When the pair of side projecting plates are held, at least one locking means for fixing the position of the pair of clamp blocks to a locked state and at least one for lifting all the structures supported by the support frame. It is equipped with a handle.

In the wafer cassette carrying jig according to a second aspect of the present invention, the movable means includes at least first urging means for urging the pair of clamp blocks in a direction facing each other. Clamp block of
The lock means extend from surfaces facing each other and move with the movement of the pair of clamp blocks, and the locking means is biased in a direction in which the pair of clamp blocks face each other. When the lock tool engages with a predetermined position of the lock shaft and restricts the movement of the lock shaft, and when the lock tool engages with the predetermined position of the lock shaft, the engagement is performed. A lock tool urging means for urging the lock tool in a strengthening direction.

According to a third aspect of the present invention, there is provided a wafer cassette carrying jig for urging the lock member in a direction opposite to the urging direction of the lock member urging means. It further comprises lock releasing means for releasing the engagement of the shaft with a predetermined position to release the locked state of the pair of clamp blocks.

In a wafer cassette carrying jig according to a fourth aspect of the present invention, the first urging means has a pair of belt-shaped clamp arms whose one end contacts the clamp block, and the pair of clamp arms. And a pair of rotation shafts that are attached to the support frame by penetrating the main surface of the pair and serve as rotation centers of the pair of clamp arms. The lock release means further comprises at least one trigger lever for moving the other end of the pair of clamp arms in a predetermined direction so as to bias the pair of clamp blocks in a direction facing each other. A lock release member having one end attached to the lock tool so that the lock tool can be biased in a direction opposite to the biasing direction by the means. And it has a shaft.

A wafer cassette carrying jig according to a fifth aspect of the present invention is arranged such that the at least one trigger lever and the other end of the lock release shaft are located near the at least one handle. ing.

In the wafer cassette carrying jig according to a sixth aspect of the present invention, the movable means further comprises second urging means for urging the pair of clamp blocks in a direction away from each other, and the lock is provided. When the engagement between the tool and the predetermined position of the lock shaft is released, the second urging means urges the pair of clamp blocks in a direction away from each other, and the pair of clamp blocks causes the pair of clamp blocks to move. The holding of the pair of side protruding plates is automatically released.

According to a seventh aspect of the present invention, there is provided a wafer cassette carrying jig, wherein the at least one handle is a first and a second handle arranged at a predetermined interval,
The at least one trigger lever is a first and a second trigger lever arranged in the vicinity of the first and the second handles, and the first and the second trigger levers are the first and the second trigger levers. It is arranged so as to be located in the vicinity of the second handle, and the other end of the unlocking shaft is arranged so as to be located substantially in the middle of the first and second handles.

In the wafer cassette carrying jig according to claim 8 of the present invention, the pair of clamp blocks each have a groove portion corresponding to the shape of the pair of side surface projecting plates at predetermined positions on the surfaces facing each other. The pair of side surface protruding plates are held only when the pair of side surface protruding plates are inserted into the groove portion.

According to a ninth aspect of the present invention, there is provided the wafer cassette carrying jig, wherein the wafer, which is accommodated in the wafer cassette, is provided on a surface of the support frame facing the wafer cassette when the wafer cassette is mounted on the wafer cassette. Further provided is a dustproof plate arranged so as to prevent dust from falling onto the exposed surface of the.

[0021]

BEST MODE FOR CARRYING OUT THE INVENTION

<A. First Embodiment><A-1. Structure of Wafer Cassette> FIG. 1 is a perspective view of a wafer cassette which is generally used as a container for storing wafers during wafer storage and wafer transportation. In FIG. 1, the wafer cassette is a box-shaped cassette main body 51 with an open bottom, which holds a plurality of wafers 99 individually so as not to contact each other, and the cassette main body 51.
End face plates 53 and 54 provided at both ends of the.

The cassette body 51 has an opening at the top so that the wafer 99 can be taken in and out.
Is housed so that its main surface faces the end plates 53 and 54. An upper protruding plate 52 that horizontally protrudes away from the cassette body 51 is provided in the upper opening along the edge of the wafer 99 in the arrangement direction.

The end plates 53 and 54 are the main body 5 of the cassette.
Although the main surface of the first wafer 99 is provided at both end portions on the opposite side, it is not provided so as to completely cover both end portions of the cassette body 51, but a predetermined portion below the upper projecting plate 52. The area is not covered by the end plates 53 and 54,
The end surface of the upper projecting plate 52 and the end surface of the cassette body 51 are exposed. When viewed from the front facing the end face plate 53, the region sandwiched between the upper projecting plate 52 and the end face plate 53 on both sides of the wafer cassette looks like a gap. This portion is called a gap area.

Further, the end face plate 53 not only completely covers the lateral width (horizontal direction) of the cassette body 51, but also protrudes horizontally, and this portion is referred to as a side face protruding plate 531. The end face plate 54 has a plan view shape different from that of the end face plate 53, but the side face projecting plate 5 similar to the side face projecting plate 531.
41.

The presence or absence of the end plates 53 and 54 is irrelevant in the practice of the present invention, and the side projecting plate 53 is present.
It suffices to have a configuration corresponding to 1 and 541. That is, the side surface protruding plates may be provided on both side edges of the cassette body 51 without the end surface plate. Further, the protrusion provided on the plane of the end face plate 53 is provided for mechanical transportation in the semiconductor manufacturing apparatus, but since it has little relation to the present invention, detailed description thereof will be omitted.

Next, as the first embodiment of the wafer cassette carrying jig according to the present invention, the structure and operation of the wafer cassette carrying jig 100 will be described with reference to FIGS.

<A-2. Wafer cassette carrying jig 100
Configuration> FIG. 2 is a perspective view for explaining the configuration and operation of the wafer cassette carrying jig 100. In FIG. 2, the wafer cassette carrying jig 100 is a main frame 1 whose external view has a substantially rectangular shape in a plan view, and an external appearance which is arranged above one end of the main frame 1 so as to intersect at an angle of 90 degrees. A support frame 2 having a substantially rectangular shape in plan view, two arms 3 disposed at both ends of the support frame 2, a movable block 4 disposed below each of the two arms 3, and the movable block. The structure is roughly divided into a clamp block 5 attached to the block 4, a handle 6 arranged at the lower end of the other end of the main frame 1, and a dustproof plate 10 arranged on the front surface of the support frame 2. As the material, the same resin as the material of the wafer cassette, such as polypropylene, may be used, but fluororesin or the like may be used. Each configuration will be described below.

<A-2-1. Main frame 1> One of the main structures of the wafer cassette carrying jig 100, to which the support frame 2 and the handle 6 are attached. The plan view shape of the appearance part is substantially rectangular, the support frame 2 is arranged at one end upper part, and the lock release shaft 91 connected to the lock release button 9 is inserted at the other end (terminal end).
It penetrates through the main frame 1 and reaches the lower part of the support frame 2. The function of the unlock shaft 91 will be described later.

<A-2-2. Support frame 2> is one of the main structures of the wafer cassette carrying jig 100, and the shape of the external appearance is substantially rectangular in plan view, and the arms 3 are provided at both ends.
Are arranged respectively. The mounting surface of the arm 3 is an end surface of the stopper 23 protruding in the same direction as the arm 3.

Then, two projecting portions 21 are provided at the end edge portion on the side opposite to the direction in which the arm 3 projects. The protrusion 21 has a clamp arm 7 for moving the movable block 4 and a metal rotation shaft 2 serving as a rotation center thereof.
2 are provided respectively.

The clamp arm 7 is a strip-shaped metal plate rotatably attached to one end of the rotary shaft 22, and one end of the clamp arm 7 contacts the movable block 4 and presses the movable block 4 to move the movable block 4. A pressing member 22 for regulating is provided,
The other end is connected to a metal lever 8 located substantially in the center of the lower surface of the main frame 1. The operations of the lever 8 and the clamp arm 7 will be described later. Also,
A mechanism for moving the movable block 4 and a lock mechanism for locking the movable block 4 are provided on the lower surface of the support frame 2, but a detailed description will be given later.

<A-2-3. Arm 3> It contacts the lower surface of the upper projecting plate 52 of the wafer cassette described with reference to FIG. 1 and serves as a support for lifting the wafer cassette, and both ends of the support frame 2 (here, the end surface of the stopper 23). Installed on.

<A-2-4. Movable block 4> Arm 3
It has a function of moving inward (toward the end of the support frame 2) or outward (to the opposite side of the end of the support frame 2) in parallel by being pressed by the clamp arm 7.

The shape thereof is a block shape having a cutout portion on the outer side surface, and the pressing member 22 provided at one end of the clamp arm 7 comes into contact with the cutout portion.

<A-2-5. The clamp block 5 is attached to the front surface (the surface facing the wafer cassette) of the movable block 4, and the inner side surface (the surface facing the end portion of the support frame 2) has a groove portion corresponding to the side surface protruding plate 531 of the wafer cassette. ing. Since the movable block 4 moves in parallel and in parallel with the parallel movement of the movable block 4, when mounting the wafer cassette carrying jig 100 on the wafer cassette,
The side surface protruding plate 531 of the wafer cassette is inserted into the groove portion by arranging the groove portion so as to face the side surface protruding plate 531 of the wafer cassette and moving the clamp block 5 inward, and the side surface protruding plate 531 of the wafer cassette is held. Will be. The movable block 4 and the clamp block 5
May be integrally formed, and a combination of both may be used as a clamp block.

<A-3. Mounting on Wafer Cassette><A-3-1. Preparation for Mounting> FIG. 2 is a view showing a state before the wafer cassette carrying jig 100 is mounted on the wafer cassette, in which the clamp arm 7 is open to the outside.
Only the pressing member 22 of the clamp arm 7 is in contact with the cutout portion of the movable block 4, and the movable block 4 is also open to the outside.

Next, 2 of the wafer cassette carrying jig 100
The two arms 3 are inserted into the gap regions on both sides of the upper part of the wafer cassette, and are brought close to the end face plate 53 of the wafer cassette until the groove portion of the clamp block 5 faces the side projecting plate 531 of the wafer cassette. Then, the stoppers 23 provided at both ends of the support frame 2 are brought into contact with the end face plates 53, whereby the above arrangement is completed. In FIG. 2, the wafer cassette carrying jig 100 is arranged on the end face plate 53, but it goes without saying that it may be arranged on the end face plate 54.

FIG. 3 is a plan view showing a state in which the wafer cassette carrying jig 100 is ready to be mounted on the wafer cassette through the above process, as viewed from above. The figure has been omitted.

In this state, the movable block 4 is open to the outside, and the groove portion 501 of the clamp block 5 is only arranged so as to face the side surface projecting plate 531 of the wafer cassette. In this case, the lock mechanism for fixing the movable block 4 provided in the lower part of the support frame 2 does not function, and the movable block 4 is in a state in which parallel movement is free.

The lock mechanism will be described with reference to FIG. 3. A metal fitting called a lock 242 is provided at the center of the lower surface of the support frame 2. The lock tool 242 has a substantially rectangular shape in a plan view, and is arranged in a box with a bottom and an open lid, which is called a lock tool block 244. A non-through hole is provided in the end surface of the lock tool 242 facing the bottom surface of the lock tool block 244, and a coil spring 243 is housed in the non-through hole. Further, on the surface opposite to the surface on which the non-through holes are provided, the protrusions 24P are provided on both ends thereof. The lock 242 is connected to a lock release shaft 91 that penetrates through the main frame 1.

A metal column called a lock shaft 241 is provided on the lower surface of the support frame 2 so as to extend from the inner surfaces (surfaces facing each other) of the two movable blocks 4 toward the lock 242. There is. The tip of the lock shaft 241 on the lock tool 242 side has a notch 24H formed along the cylindrical surface thereof. Since the lock shaft 241 is attached to the inner surface of the movable block 4, it moves with the movement of the movable block 4.

In FIG. 3, since the movable block 4 is not pressed by the pressing member 22 of the clamp arm 7, the protrusion 24P of the lock 242 is not engaged with the notch 24H of the lock shaft 241. The movable block 4 is not locked.

<A-3-2. Mounting> When the preparation for mounting the wafer cassette carrying jig 100 on the wafer cassette is completed as described with reference to FIG. 3, next, as shown in FIG. Is closed inside, and the pressing member 71 of the clamp arm 7 is pressed against the cutout portion of the movable block 4, and the movable block 4 is pressed inside. When the movable block 4 is pressed inward, the clamp block 5 is also pressed inward, that is, the two clamp blocks 5 are biased in the direction in which they face each other, and the side surface protruding plate 5 of the wafer cassette is inserted into the groove 501.
31 will be inserted. Here, since the operation of closing the clamp arm 7 inward is induced by pulling the lever 8 with fingers, the lever 8 may be referred to as a trigger lever.

FIG. 5 is a partial plan view of the support frame 2 as seen from the lower surface direction, but the cover and the like are omitted for easy understanding of the configuration. As shown in FIG. 5, at the end of the clamp arm 7 on the support frame 2 side, a cylindrical member 72 is provided.
Is mounted perpendicular to the main surface. Further, a horizontal shaft 81 is attached to the lever 8 so as to intersect with the lever 8, and the horizontal shaft 81 is arranged so as to contact the cylindrical surface of the cylindrical member 7 of the support frame 2.
Then, by pulling the lever 8, the horizontal shaft 81 moves the cylindrical member 7 in the direction of the handle 6, and accordingly, the clamp arm 7 rotates and closes inward. The lever 8 is attached to a lever slide shaft 82 slidably embedded in the handle 6.

When the clamp arm 7 is closed inward, the movable block 4 is pressed inward by the pressing member 22 of the clamp arm 7. With the inward movement of the movable block 4, the lock shaft 241 slides toward the lock tool 242, and the cutout portion 2 of the lock shaft 241.
4H is engaged with the protrusion 24P of the lock tool 242, the movable block 4 is locked, and the wafer cassette carrying jig 100
Mounting of the wafer into the wafer cassette is completed.

Here, the clamp arm 7, the rotating shaft 22,
The pressing member 71 can be said to be a means (first urging means) for urging the two clamp blocks 5 in the directions facing each other. Since the lever 8 is also closely related to the clamp arm 7, it can be said to be a part of the above means.

The lock 242 is a coil spring 243.
Since the protrusion 24P is urged in the direction of the lock shaft 241, the protrusion 24P does not disengage naturally once the notch 24H is engaged with the protrusion 24P.

Further, the clamp arm 7 multiplies and transmits the operation of the lever 8 to the movable block 4 by utilizing the principle of leverage with the pivot shaft 22 as a fulcrum, so that the lever must be locked to lock the movable block 4. It suffices to pull 8 lightly, and the influence of the individual difference in the finger force of the user of the wafer cassette carrying jig 100 is small. Further, since the lever 8 is provided in the vicinity of the handle 6, it is possible to pull the lever 8 with the finger of the hand holding the handle 6, and the operation with only one hand is possible. Further, after the movable block 4 is locked, the lever 8 does not exert any action on the movable block 4, so that the lock is not released even if the finger is released.

When the movable block 4 is locked, the side surface projecting plate 531 of the wafer cassette is held by the groove portion 501 of the clamp block 5. Therefore, even when the wafer cassette carrying jig 100 is tilted, the wafer cassette is armed. It is prevented that the wafer cassette slips off and the wafer cassette falls off.

The wafer cassette may be mounted horizontally (so that the end plates 53 and 54 are perpendicular to the table surface) on a predetermined table as in the case of transportation, but in various semiconductor manufacturing apparatuses. In many cases, in order to take out the wafer 99, the wafer cassette is placed vertically on the table (so that the end plate 54 faces the table surface). In such a case, the wafer cassette carrying jig 100 is tilted up to 90 degrees, but since the side surface protruding plate 531 of the wafer cassette is held by the groove portion 501 of the clamp block 5, the wafer cassette carrying jig 100 is The wafer cassette is reliably prevented from falling off.

<A-4. Wafer cassette carrying jig 100
Removal><A-4-1. Unlocking Movable Block 4> When the predetermined transportation work is completed, the movable block 4 is unlocked and the wafer cassette transportation jig 100 is removed from the wafer cassette. The unlocking operation of the movable block 4 will be described below with reference to FIGS. 6 and 7.

FIG. 6 is a plan view showing a state in which the wafer cassette is vertically mounted on the table. As shown in FIG. 6, by pushing the lock release button 9 with a finger, the lock of the movable block 4 is released, the movable block 4 and the clamp arm 7 are opened to the outside, and the groove portion 501 of the clamp block 5 is formed in the wafer cassette. Side protruding plate 531
It has moved away from and moved to the opposite position. In this state, by pulling out the arm 3 from the wafer cassette, the wafer cassette carrying jig 100 can be removed from the wafer cassette.

The dustproof plate 1 is provided on the front surface of the support frame 2.
Since 0 is provided, foreign matter adhering to the wafer cassette carrying jig 100 can be prevented from dropping onto the wafer 99 when the wafer cassette is placed vertically on the table as shown in FIG. .

<A-4-2. Lock Release Mechanism of Movable Block 4> The lock release mechanism of the movable block 4 will be described below. FIG. 7 shows a wafer cassette carrying jig 100.
FIG. 3 is a plan view of the support frame 2 as viewed from the lower surface direction.
Unnecessary components are omitted for ease of understanding.
As shown in FIG. 7, on the lower surface of the support frame 2, shaft holding blocks 245 are fixedly arranged near both ends thereof.

The shaft holding block 245 has a structure (bearings or the like) for smoothly sliding the lock shaft 241 in accordance with the movement of the movable block 4, and also urges the movable block 4 to the outside. It has a function as a pedestal to which the coil spring 246 is attached.

An auxiliary shaft 247, one end of which is attached to the inner surface of the movable block 4, is arranged at a position facing the lock shaft 241. Auxiliary shaft 24
Reference numeral 7 is provided to prevent the movable block 4 from coming off together with the lock shaft 241 by the coil spring 246 urging the movable block 4 to the outside.

As described with reference to FIG. 5, the movable block 4 is locked by the cutout portion 24H of the lock shaft 241.
Is achieved by engaging the protrusion 24P of the lock tool 242 with the lock tool 242, and the lock tool 242 is biased toward the lock shaft 241 by the coil spring 243.
Once the protruding portion 24P is engaged with the cutout portion 24H, the protruding portion 24P does not disengage naturally. However, when the lock release button 9 is pushed in, the lock release shaft 91 connected to the lock tool 242 moves the lock tool 242 in the direction of contracting the coil spring 243, and the protrusion 24P.
Will be removed from the cutout portion 24H.

When the projecting portion 24P is disengaged from the cutout portion 24H, the movable block 4 is biased outward by the coil spring 246, and the lock shaft 241 slides accordingly, and the movable block 4 is unlocked. .

At the same time, the clamp arm 7 is automatically opened outward by being pushed by the movable block 4, the cylindrical member 72 of the clamp arm 7 pushes the lateral shaft 81 back to the side opposite to the handle 6, and the lever 8 is moved to the initial position. Will return. Further, since the lock release shaft 91 freely slides in the main frame 1, the lock tool 242 urged by the coil spring 243 is released when the fingers are released.
1 is pushed back, the unlock button 9 returns to the initial position, and the state shown in FIG. 7 is obtained.

The coil spring 246 is used for the movable block 4
Can be referred to as a means (second biasing means) for biasing the two in a direction away from each other.

As described above, the lock mechanism and the lock release mechanism of the movable block 4 are assembled by a simple structure, but they sufficiently perform their functions, and the structure is simple and a failure or the like may occur. Less likely.

<A-5. Incomplete Lock Prevention Structure> The clamp block 5 is designed to prevent the movable block 4 from being incompletely locked. FIG.
The structure for preventing incomplete locking will be described with reference to FIGS. 8 and 9, the wafer cassette carrying jig 1 is shown.
A process until the preparation for mounting 00 into the wafer cassette is completed will be described. 8 and 9, only the structure in the vicinity of the groove 501 of the clamp block 5 is shown, and the other structures are omitted.

As shown in FIG. 8, the groove portion 501 is formed at a position separated from the tip portion of the clamp block 5 by a distance L, and when the outermost surface of the end face plate 53 of the wafer cassette is used as a reference, the clamp block 5 is formed. The groove portion 501 of the clamp block 5 does not face the side surface projecting plate 531 of the wafer cassette unless the tip portion of is moved forward the distance L from the outermost surface of the end face plate 53 of the wafer cassette. Therefore, even if the lever 8 is pulled to move the clamp block 5 inward in the state shown in FIG.
1, the movable block 4 is not locked.

However, as shown in FIG. 9, when the tip portion of the clamp block 5 moves forward by a distance L from the outermost surface of the end face plate 53 of the wafer cassette, the groove portion 501 of the clamp block 5 causes the side surface protruding plate of the wafer cassette. Facing 531,
The movable block 4 can be locked.

As described above, the groove 501 is formed at the position separated from the tip of the clamp block 5 by the distance L, so that the clamp block 5 must be securely inserted along the wafer cassette by the distance L. The side projecting plate 531 of the wafer cassette is not held in the groove 501, and the movable block 4 is not locked.

Since the user of the wafer cassette carrying jig 100 can clearly see that the movable block 4 is not locked, the wafer cassette carrying jig 100 is further moved in the wafer cassette direction until the locked state is confirmed. You can do it.

Therefore, even if the user is not accustomed to it, the movable block 4 can be surely locked, and it is possible to avoid the situation where the movable block 4 is incompletely locked and the wafer cassette falls off during transportation. By providing the distance L, incomplete lock can be prevented.
Is referred to as "preventive dimension of incomplete lock".

When the side projection plate 531 is inserted into the groove 501 of the clamp block 5, the groove 501 is formed to be large so that a slight clearance is left between the side projection plate 531 and the groove 501. It is possible to prevent the generation of foreign matter.

<A-6. Characteristic Effects> According to the first embodiment of the wafer cassette carrying jig according to the present invention described above, by locking the movable block 4, the side surface protruding plate 531 of the wafer cassette is set by the groove portion 501 of the clamp block 5. Since the wafer cassette is held, even if the wafer cassette carrying jig 100 is tilted by 90 degrees, the wafer cassette is prevented from slipping on the arm 3 and falling off.

Further, in order to lock the movable block 4, it suffices to pull the lever 8 lightly, and the influence of the individual difference of the finger force of the user of the wafer cassette carrying jig 100 is small. Furthermore, since the lever 8 is provided in the vicinity of the handle 6, it can be operated with only one hand, and the other hand can be used freely.

Further, since the lock release button 9 for releasing the lock of the movable block 4 is provided in the vicinity of the handle 6, the lock can be released with one hand while the handle 6 is supported, and the workability is improved. Is good.

After the movable block 4 is locked, the lever 8 does not exert any action on the movable block 4, so that the lock is not released even if the finger is released.
There is no burden on the user.

<A-7. Modification of First Embodiment> In the first embodiment described above, the lower surface of the support frame 2 is provided with the coil spring 246 for biasing the movable block 4 to the outside, and the lock of the movable block 4 is released. When,
The movable block 4 was pushed by the coil spring 246 and automatically opened outward. However, if the movable block 4 is manually opened outward after the lock of the movable block 4 is released, the coil spring 246 may be used. Is not always necessary. However, in this case, it is necessary to prevent the lock release shaft 91 once pushed in from returning immediately or to fix the lock release button 9.

<B. Embodiment 2> As the diameter of a wafer increases, the weight of a wafer cassette accommodating the wafer also increases. For example, the weight of a 10-inch wafer is about 50% larger than that of an 8-inch wafer, and the total weight of a wafer cassette accommodating a plurality of wafers is significantly heavier than that for an 8-inch wafer. Furthermore, the introduction of 12-inch wafers is near.

In the first embodiment according to the present invention, the wafer cassette carrying jig 100 for carrying the wafer cassette with one hand has been described. However, the wafer that can be carried by this is limited to 8 inches, and 10 inches or more. To carry a wafer cassette containing wafers, it is necessary to hold it with both hands. Hereinafter, the wafer cassette carrying jig 200 for both hands will be described.

<B-1. Wafer cassette carrying jig 200
Configuration> FIG. 10 is a perspective view showing a state in which the wafer cassette carrying jig 200 is mounted on the wafer cassette. The structure of the wafer cassette carrying jig 200 is basically the same as that of the wafer cassette carrying jig 100, except that the handle and the lever are two, and the main frame, the support frame, and the arm are integrated. Are different.

In FIG. 10, a wafer cassette carrying jig 200 is provided with a main frame of the wafer cassette carrying jig 100, a supporting frame, a supporting frame 2A in which an arm is integrated, and both ends of the supporting frame 2A. Two movable arms 3A, a movable block 4A respectively disposed under the two arms 3A, and the movable block 4
Clamp block 5A attached to the support frame 2
The structure is roughly divided into a handle 6A disposed under the two protruding portions 21A of A and a dustproof plate 10A disposed on the front surface of the support frame 2A.

Since the basic structure and function of each structure have already been described in the wafer cassette carrying jig 100, duplicate description will be omitted. The main frame, the support frame, and the arms are integrated to increase the strength, and to support the transportation of the wafer cassette, which is heavier as the diameter of the wafer is increased.

Further, the lock release button 9A is directly attached to the support frame 2A and is provided so as to be positioned approximately in the middle of the two handles 6A. By disposing in this way, the handle 6A is gripped. You can operate it with either thumb while you are doing it.

<B-2. Wafer cassette carrying jig 200
Mounting> To mount on the wafer cassette, as shown in FIG. 10, pull the two levers 8A with left and right fingers to close the two clamp arms 7A inward and press the movable block 4A inward. Completed by.

The transportation is performed with the two clamp arms 7A being held by the left and right hands, respectively.

<B-3. Wafer cassette carrying jig 200
Removal> When the predetermined transportation work is completed, the movable block 4A is unlocked and the wafer cassette transportation jig 2
00 will be removed from the wafer cassette. FIG.
[FIG. 6] is a plan view showing a state in which a wafer cassette is vertically mounted on a table. As shown in FIG. 11, by pushing the lock release button 9A with a finger, the lock of the movable block 4A is released, the movable block 4A and the clamp arm 7A are opened outward, and the clamp block 5A is opened.
Groove (not shown) separates from the side projection plate (not shown) of the wafer cassette. By pulling out the arm 3A from the wafer cassette in this state, the wafer cassette carrying jig 2
00 can be removed from the wafer cassette.

<B-4. Characteristic Effects> According to the second embodiment of the wafer cassette carrying jig according to the present invention described above, since two handles are provided and the wafer cassette is carried by both hands, the wafer cassette is kept stable. It can be carried easily even if it is heavy.
Therefore, the wafer cassette is suitable for transporting a wafer cassette that has increased in weight as the diameter of the wafer is increased, and it is possible to compensate individual differences in the user's arm strength.

The second embodiment can be applied not only to the transportation of a wafer cassette accommodating a wafer of 10 inches or more, but also to the transportation of a wafer cassette accommodating an 8-inch wafer. Can improve safety.

[0085]

According to the wafer cassette carrying jig of the first aspect of the present invention, at least one handle is grasped and lifted, and the pair of arms are brought into contact with the lower surfaces of the pair of upper projecting plates of the wafer cassette. When carrying it by transporting it, by mounting a pair of clamp blocks so that a pair of side surface protruding plates are sandwiched from both sides and fixing the position of the clamp block into a locked state, the strength of the user's finger is weakened. Even if the wafer cassette carrying jig is tilted by 90 degrees, the wafer cassette is prevented from slipping over the pair of arms and falling off, and the wafer cassette is carried safely and securely. be able to.

According to the wafer cassette carrying jig of the second aspect of the present invention, when the pair of clamp blocks are urged in the direction facing each other by the first urging means,
The lock shaft moves along with the movement of the pair of clamp blocks, the lock tool engages with a predetermined position of the lock shaft, and the movement of the lock shaft is restricted, and the positions of the pair of clamp blocks are fixed and locked. Becomes Then, once engaged, the locking device is biased in the direction in which the locking device is strengthened by the locking device biasing means, so the lock is not naturally released and the wafer cassette is securely prevented from falling during transportation. can do.

According to the wafer cassette carrying jig of the third aspect of the present invention, the pair of clamp blocks is urged by urging the lock tool in a direction opposite to the urging direction of the lock tool urging means. Since the lock releasing means for releasing the locked state of the wafer cassette is provided, the wafer cassette carrying jig can be easily removed after the transportation is completed. Moreover, since the lock releasing means has an extremely simple structure, there is little possibility of causing a failure. It is possible to prevent a problem caused by becoming unable to cancel.

According to the wafer cassette carrying jig of the fourth aspect of the present invention, the pair of clamp arms uses the principle of leverage with respect to the operation of the trigger lever and the pivot as the fulcrum. The trigger lever can be lightly pulled to urge the pair of clamp blocks to face each other, and the influence of the individual difference in the finger force of the user of the wafer cassette carrying jig is reduced. In addition, it is possible to obtain a specific configuration for releasing the locked state of the pair of clamp blocks.

According to the wafer cassette carrying jig of the fifth aspect of the present invention, at least one of the trigger lever and the other end of the lock release shaft are arranged so as to be located in the vicinity of the at least one handle. Therefore, in the case where there is only one handle, the trigger lever and the lock release shaft can be operated only by the finger holding the handle, and a wafer cassette carrying jig with excellent workability can be obtained.

According to the wafer cassette carrying jig of the sixth aspect of the present invention, when the engagement between the lock tool and the predetermined position of the lock shaft is released, the pair of the pair is moved by the second urging means. The clamp blocks are urged away from each other, and the holding of the pair of side protruding plates by the pair of clamp blocks is automatically released. Therefore, a wafer cassette carrying jig with excellent workability during removal from the wafer cassette. Can be obtained.

According to the wafer cassette carrying jig of the seventh aspect of the present invention, since the wafer cassette is carried with two handles and the wafer cassette is carried by both hands, the wafer cassette can be kept more stable and the weight is heavy. But you can carry it easily. Therefore, it is possible to compensate for individual differences in the user's arm strength even when the wafer cassette, which is heavier as the diameter of the wafer is increased, is transported. Further, the first and second trigger levers are arranged so as to be located in the vicinity of the first and second handles, and the other end of the lock release shaft is located substantially in the middle of the first and second handles. Since it is arranged as described above, the trigger lever and the lock release shaft can be operated even when the first and second handles are held by both hands, and a wafer cassette carrying jig having excellent workability can be obtained. it can.

According to the wafer cassette carrying jig of the eighth aspect of the present invention, the pair of side surface protruding plates are held in the groove portions of the pair of clamp blocks only when the pair of side surface protruding plates are inserted. Since the user of the wafer cassette carrying jig can clearly understand that the clamp block of is locked and the pair of clamp blocks is not locked, keep the wafer cassette carrying jig until the locked state is confirmed. Furthermore, it suffices to move it in the direction of the wafer cassette.
It is possible to avoid a situation where the wafer cassette is dropped during the transfer.

According to the wafer cassette carrying jig of the ninth aspect of the present invention, since it is equipped with the dustproof plate, it is attached to the wafer cassette carrying jig when the wafer cassette is placed vertically on the table. It is possible to prevent the foreign matter from falling onto the wafer.

[Brief description of drawings]

FIG. 1 is a perspective view illustrating the configuration of a general wafer cassette.

FIG. 2 is a perspective view illustrating the configuration of the first embodiment of the wafer cassette carrying jig according to the present invention.

FIG. 3 is a diagram showing a state where a wafer cassette carrying jig according to the present invention is ready for mounting on a wafer cassette according to the first embodiment.

FIG. 4 is a perspective view for explaining a mounting state of the wafer cassette carrying jig according to the present invention to the wafer cassette according to the first embodiment.

FIG. 5 is a diagram illustrating a lock mechanism of the first embodiment of the wafer cassette carrying jig according to the present invention.

FIG. 6 is a diagram illustrating the removal of the wafer cassette carrying jig according to the present invention from the wafer cassette according to the first embodiment.

FIG. 7 is a diagram illustrating a lock mechanism and a lock release mechanism of the first embodiment of the wafer cassette carrying jig according to the present invention.

FIG. 8 is a diagram illustrating a configuration of a clamp block of the wafer cassette carrying jig according to the present invention.

FIG. 9 is a diagram illustrating a configuration of a clamp block of the wafer cassette carrying jig according to the present invention.

FIG. 10 is a perspective view for explaining a mounting state of a wafer cassette carrying jig according to the present invention on a wafer cassette according to a second embodiment.

FIG. 11 is a diagram illustrating the removal of the wafer cassette carrying jig according to the present invention from the wafer cassette according to the second embodiment.

FIG. 12 is a perspective view showing a configuration of a conventional wafer cassette carrying jig.

FIG. 13 is a perspective view illustrating a mounting state of a conventional wafer cassette carrying jig to a wafer cassette.

[Explanation of symbols]

1 main frame, 2,2A support frame, 3,3
A arm, 4,4A movable block, 5,5A clamp block, 6,6A handle, 7,7A clamp arm, 8,8A lever, 9,9A lock release button, 10,10A dustproof plate, 21,21A protruding part, Two
2, 22A Rotating shaft, 23 Stopper, 24P Projection part, 24H Notch part, 51 Cassette body, 52 Upper projection plate, 53, 54 End face plate, 71 Pressing member, 91
Unlock shaft, 99 wafer, 241 lock shaft, 242 lock tool, 243 coil spring, 2
44 lock tool block, 245 shaft holding block, 246 coil spring, 247 auxiliary shaft, 50
1 Groove portion, 531, 541 Side protruding plate.

Claims (9)

[Claims] 1. A wafer cassette carrying jig for carrying a wafer cassette containing a wafer, wherein the wafer cassette comprises a box-shaped cassette body having a bottom and an open lid, and the wafer at the upper opening of the cassette body. A pair of upper projecting plates provided at the edges in the array direction and projecting away from the cassette body, and a pair of side surfaces provided at the edge of both side surfaces of the cassette body and projecting away from the cassette body. The wafer cassette carrying jig has a pair of arms arranged to contact the lower surfaces of the pair of upper projecting plates when mounted on the wafer cassette, and the pair of side surfaces. A pair of clamp blocks that can be attached to and detached from the projecting plates and that hold the pair of side projecting plates by sandwiching the pair of side projecting plates from both sides. A support frame for mounting the pair of arms and the pair of clamp blocks substantially in parallel at a predetermined interval, and a support frame that is connected to the pair of clamp blocks and is freely attachable to and detachable from the pair of side projection plates. The movable means, the locking means for fixing the positions of the pair of clamp blocks to the locked state when the pair of side surface protruding plates are held, and all the structures supported by the support frame. A wafer cassette carrying jig having at least one handle for lifting. 2. The movable means includes at least a first urging means for urging the pair of clamp blocks in directions facing each other, and the pair of clamp blocks extend from surfaces facing each other. Each has a lock shaft that moves with the movement of the pair of clamp blocks, and the locking means is biased in a direction in which the pair of clamp blocks face each other, and when the lock shaft moves, A lock tool that engages at a predetermined position and restricts movement of the lock shaft, and, when the lock tool engages at a predetermined position of the lock shaft, urges the lock tool in a direction to strengthen the engagement. 2. The wafer cassette carrying jig according to claim 1, further comprising: a lock tool urging means. 3. The lock tool is biased in a direction opposite to the biasing direction of the lock tool biasing means to release the engagement between the lock tool and a predetermined position of the lock shaft, 3. The wafer cassette carrying jig according to claim 2, further comprising lock releasing means for releasing the locked state of the pair of clamp blocks. 4. The first urging means is attached to the support frame by penetrating through a pair of belt-shaped clamp arms, one ends of which contact the clamp block, and main surfaces of the pair of clamp arms. A pair of rotation shafts serving as rotation centers of the pair of clamp arms, and the one end biases the pair of clamp blocks in a direction facing each other by the rotation of the pair of clamp arms. And further comprising at least one trigger lever for moving the other ends of the pair of clamp arms in a predetermined direction, wherein the lock release means is in the direction opposite to the biasing direction of the lock tool biasing means. 4. The wafer cassette carrier according to claim 3, further comprising an unlock shaft attached to the lock member at one end thereof so that the wafer can be biased. Jig. 5. The wafer cassette carrying jig according to claim 4, wherein the at least one trigger lever and the other end of the lock release shaft are arranged so as to be located near the at least one handle. 6. The movable means further comprises second urging means for urging the pair of clamp blocks in directions away from each other, and the engagement between the lock tool and a predetermined position of the lock shaft is released. In the case where it is done, by the second biasing means,
The pair of clamp blocks are urged in a direction away from each other, and the holding of the pair of side surface projecting plates by the pair of clamp blocks is automatically released. The wafer cassette carrying jig described. 7. The at least one handle is first and second handles arranged at a predetermined interval, and the at least one trigger lever is provided in the vicinity of the first and second handles. The first and second trigger levers are provided, wherein the first and second trigger levers are provided so as to be located in the vicinity of the first and second handles, and 5. The wafer cassette carrying jig according to claim 4, wherein the other end is arranged so as to be located substantially in the middle of the first and second handles. 8. The pair of clamp blocks each have a groove portion corresponding to the shape of the pair of side surface protruding plates at a predetermined position on the surfaces facing each other, and when the pair of side surface protruding plates are inserted into the groove portions. 2. The wafer cassette carrying jig according to claim 1, wherein only the pair of side surface protruding plates are held. 9. A surface of the support frame facing the wafer cassette when mounted on the wafer cassette is disposed so as to prevent dust from falling onto an exposed surface of the wafer stored in the wafer cassette. The wafer cassette carrying jig according to claim 1, further comprising a dustproof plate.