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JPH06197573A - Actuator and pump incorporating magnetostriction element - Google Patents

Actuator and pump incorporating magnetostriction element

Info

Publication number
JPH06197573A
JPH06197573A JP4347101A JP34710192A JPH06197573A JP H06197573 A JPH06197573 A JP H06197573A JP 4347101 A JP4347101 A JP 4347101A JP 34710192 A JP34710192 A JP 34710192A JP H06197573 A JPH06197573 A JP H06197573A
Authority
JP
Japan
Prior art keywords
elastic body
liquid
casing
magnetostrictive element
magnetostrictive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4347101A
Other languages
Japanese (ja)
Other versions
JP3055338B2 (en
Inventor
Takasuke Kaneda
敬右 金田
Osamu Yoneda
修 米田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Motor Corp
Original Assignee
Toyota Motor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Corp filed Critical Toyota Motor Corp
Priority to JP4347101A priority Critical patent/JP3055338B2/en
Publication of JPH06197573A publication Critical patent/JPH06197573A/en
Application granted granted Critical
Publication of JP3055338B2 publication Critical patent/JP3055338B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Electromagnetic Pumps, Or The Like (AREA)
  • Magnetically Actuated Valves (AREA)
  • Apparatuses For Generation Of Mechanical Vibrations (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To simplify the structure of a magnetostriction actuator or magnetostriction pump utilizing a magnetostriction element, and, at the same time, to reduce the number of parts used in the actuator or pump. CONSTITUTION:This is actuator is composed of a magnetostriction element 11, cylindrical elastic body 12 incorporating the element 11, casing 13 housing the elastic body 12 and provided with a hydraulic pressure chamber 16 on the top of the elastic body 12, piston 17 which is installed to the casing 13 in a slidable state while the piston is brought into contact with the liquid contained in the chamber 16, and coil 14 surrounding the casing 13. The pump incorporating the magnetostriction element is provided with a check valve in place of the piston 17 for sucking up the liquid into the liquid chamber and another check valve for discharging the liquid.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、磁歪素子を利用した磁
歪アクチュエータないし磁歪ポンプに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetostrictive actuator or a magnetostrictive pump using a magnetostrictive element.

【0002】[0002]

【従来の技術】アクチュエータとして応答速度の速い圧
電(電歪)素子や磁歪素子を利用することが試みられて
いる。例えば、電歪体駆動のアクチュエータが特開昭6
2−28507号公報で提案され、電歪素子積層体がそ
の上のポンプ室を縮めて液体を吐出用逆止弁付き作動室
へ送り、出力ロッドを押し上げるようになっている。自
動車のサスペンションのショクアブソーバにピエゾ(圧
電)アクチュエータが利用されている(佐藤他、「ピエ
ゾTEMSの開発−セルシオの足廻り−」、トヨタ技
術、39巻、2号(1989年12月)、17−25頁
参照)。この場合には、圧電素子の微小伸びを変位拡大
機構(油圧システム)で大きくしている。
2. Description of the Related Art It has been attempted to use a piezoelectric (electrostrictive) element or a magnetostrictive element having a high response speed as an actuator. For example, an actuator driven by an electrostrictive body is disclosed in Japanese Patent Laid-Open No.
As disclosed in JP-A-2-28507, the electrostrictive element laminate contracts the pump chamber above it to send the liquid to the working chamber with a check valve for discharge, and pushes up the output rod. Piezoelectric (piezoelectric) actuators are used for shock absorbers of automobile suspensions (Sato et al., "Development of Piezo-TEMS -Cersior Suspension-", Toyota Technology, Vol. 39, No. 2, December 1989, 17). See page 25). In this case, the minute expansion of the piezoelectric element is increased by the displacement magnifying mechanism (hydraulic system).

【0003】圧電素子を伸縮させるためには、数百ボル
トの高電圧を印加しなければならず、素子の両端に電極
が設けられ、そのための接続機構が必要であり、場合に
よってはシール機構も必要であり、複雑な構造となりか
つ部品点数が多い。さらに、磁歪アクチュエータが特開
平2−237477号公報で提案され、磁歪素子の廻り
にコイルが配置され、その周囲に永久磁石が配置され、
該永久磁石の両端面からの磁束を磁歪素子に導く一対の
磁極ヨークが配置され、そして磁歪素子によって動かさ
れかつ磁極ヨークの一方に移動部材が取り付けられてい
る。磁歪素子も電歪素子と同様にその伸び量(変移量)
は非常に小さいので、アクチュエータとしての作用移動
量を得るために、液圧(油圧)による変位拡大機構を備
えている。
In order to expand and contract the piezoelectric element, it is necessary to apply a high voltage of several hundreds of volts, electrodes are provided at both ends of the element, and a connecting mechanism therefor is required, and in some cases, a sealing mechanism is also required. It is necessary, has a complicated structure, and has a large number of parts. Further, a magnetostrictive actuator is proposed in JP-A-2-237477, a coil is arranged around the magnetostrictive element, and a permanent magnet is arranged around the coil.
A pair of magnetic pole yokes that guide the magnetic flux from both end faces of the permanent magnet to the magnetostrictive element are arranged, and are moved by the magnetostrictive element and a moving member is attached to one of the magnetic pole yokes. Magnetostrictive element, like the electrostrictive element, its elongation (displacement)
Is very small, so a displacement magnifying mechanism by hydraulic pressure (hydraulic pressure) is provided in order to obtain the acting movement amount as an actuator.

【0004】また、ポンプとしては各種のものがある
(例えば、橋本明:油圧技術入門、工業調査会、(19
84)、23〜43頁参照)。
There are various types of pumps (for example, Akira Hashimoto: Introduction to Hydraulic Technology, Industrial Research Committee, (19
84), pp. 23-43).

【0005】[0005]

【発明が解決しようとする課題】従来の電歪アクチュエ
ータないし磁歪アクチュエータはその構造が複雑となり
(部品点数が多く)、装置の小型化、高信頼性化の阻害
要因となっている。また、従来のポンプでは、一般的に
複雑構造であり、微小流量制御が困難であった。
The structure of the conventional electrostrictive actuator or magnetostrictive actuator is complicated (the number of parts is large), which is an obstacle to miniaturization and high reliability of the device. Further, the conventional pump generally has a complicated structure, and it is difficult to control the minute flow rate.

【0006】本発明の目的は、構造が簡単でかつ部品数
の少ない磁歪アクチュエータおよび磁歪ポンプをを提供
することである。
An object of the present invention is to provide a magnetostrictive actuator and a magnetostrictive pump which have a simple structure and a small number of parts.

【0007】[0007]

【課題を解決するための手段】上述の目的が、磁歪素子
と、該磁歪素子を内部に備えた筒状弾性体と、該筒状弾
性体を内部に備えかつ該筒状弾性体の上部に液圧室を有
するケーシングと、該液体室の液体に接しかつ該ケーシ
ングに摺動可能に設けられるピストンと、該ケーシング
を取り巻くコイルとからなることを特徴とする磁歪素子
内蔵のアクチュエータによって達成される。
Means for Solving the Problems The above-mentioned object is to provide a magnetostrictive element, a cylindrical elastic body having the magnetostrictive element inside, a cylindrical elastic body inside and an upper part of the cylindrical elastic body. An actuator having a magnetostrictive element, which comprises a casing having a hydraulic chamber, a piston in contact with the liquid in the liquid chamber and slidably provided on the casing, and a coil surrounding the casing. .

【0008】さらに、磁歪素子と、該磁歪素子を内部に
備えた筒状弾性体と、該筒状弾性体を内部に備えかつ該
筒状弾性体の上部に液圧室を有するケーシングと、該液
体室への液体吸入用逆止弁と、該液体室からの液体吐出
用逆止弁と、該ケーシングを取り巻くコイルとからなる
ことを特徴とする磁歪素子内蔵のポンプによっても本発
明の目的が達成される。
Further, a magnetostrictive element, a cylindrical elastic body having the magnetostrictive element inside, a casing having the cylindrical elastic body inside and a hydraulic chamber above the cylindrical elastic body, The object of the present invention is also achieved by a pump having a built-in magnetostrictive element, which comprises a check valve for sucking a liquid into a liquid chamber, a check valve for discharging a liquid from the liquid chamber, and a coil surrounding the casing. To be achieved.

【0009】[0009]

【作用】磁歪素子は磁界を印加した時に、形状変化をす
る。正の磁歪材料であれば、磁場印加によって磁界方向
に磁歪素子が素子軸方向へ伸びる(図1での破線で示し
た磁歪素子1A)。この時、同時に磁歪素子は径方向へ
収縮して、実質的に磁歪素子の体積変化はない。本願発
明では、磁界印加によって磁歪素子を伸ばした(径方向
に縮めた)状態で筒状弾性体の内部に押し込んでおく。
さらに、この状態の筒状弾性体(図1での破線で示した
弾性体2A)をケーシング3の内部に押し込んでおき、
この弾性体は磁歪素子とケーシングとによって挟まれて
収縮量yで設置されている。磁界印加を解除すると、磁
歪素子は縮むように戻り(図1での1Bにて示すよう
に)、そして、径方向には(Δrだけ)膨張するように
戻り、弾性体2Bは磁歪素子1Bに押されて径方向に縮
みかつ長手方向に(ΔLだけ)伸びる。なお、この時の
弾性体の収縮量xは磁界印加時の収縮量yよりも大き
い。弾性体の材料には、ゴム、金属、プラスチック(F
RPを含む)などがある。
The function of the magnetostrictive element changes when a magnetic field is applied. When the material is a positive magnetostrictive material, the magnetostrictive element extends in the element axial direction in the magnetic field direction when a magnetic field is applied (magnetostrictive element 1A shown by the broken line in FIG. 1). At this time, the magnetostrictive element contracts in the radial direction at the same time, and the volume of the magnetostrictive element does not substantially change. In the present invention, the magnetostrictive element is pushed into the tubular elastic body in a state where the magnetostrictive element is extended (contracted in the radial direction) by applying a magnetic field.
Further, the tubular elastic body (the elastic body 2A shown by the broken line in FIG. 1) in this state is pushed into the inside of the casing 3,
This elastic body is sandwiched between the magnetostrictive element and the casing and installed with a contraction amount y. When the magnetic field application is released, the magnetostrictive element returns to contract (as indicated by 1B in FIG. 1) and expands in the radial direction (by Δr), and the elastic body 2B pushes against the magnetostrictive element 1B. And contracts in the radial direction and extends in the longitudinal direction (by ΔL). The contraction amount x of the elastic body at this time is larger than the contraction amount y when the magnetic field is applied. Rubber, metal, plastic (F
(Including RP).

【0010】そこで、筒状弾性体の磁界印加時の体積V
H と磁界なしの体積V0 との体積変化ΔVは、図1を参
照して、次数式から数式(A)で示すようになる。 ΔV=VH −V0H =π{R2 −(r−Δr)2 }(L−ΔL) V0 =π(R2 −r2 )L ΔV=π〔2rL・Δr−(R2 −r2 )ΔL〕
Therefore, the volume V of the cylindrical elastic body when a magnetic field is applied
The volume change ΔV between H and the volume V 0 without a magnetic field is represented by the following mathematical expression (A) with reference to FIG. 1. ΔV = V H −V 0 V H = π {R 2 − (r−Δr) 2 } (L−ΔL) V 0 = π (R 2 −r 2 ) L ΔV = π [2rL · Δr− (R 2 -R 2 ) ΔL]

【0011】[0011]

【数1】 [Equation 1]

【0012】数式中、μは弾性体のポアソン比であり、
磁歪素子の軸方向への磁気ひずみをλS とすると、
In the equation, μ is the Poisson's ratio of the elastic body,
Letting λ S be the magnetostriction of the magnetostrictive element in the axial direction,

【0013】[0013]

【数2】 [Equation 2]

【0014】となり、したがって、And therefore,

【0015】[0015]

【数3】 [Equation 3]

【0016】例えば、筒状弾性体として一般のゴム材料
(ポアソン比μ=0.5)を用い、磁歪素子(直径6mm×
長さ50mm)を用いてr=3、L=50とし、ケーシン
グ内径Rを4mmとし、磁歪素子の磁気ひずみをλS =1
000×10-6とすると、ΔV=0.31mm3 の体積変化
が生じる。そして、本発明ではこれら磁歪素子と弾性体
との上部にケーシングの液圧室が設けられており、この
液圧室内で磁気印加有りと無しとで弾性体の体積変化Δ
Vが生じて、液圧室内の液体をΔVだけ液圧室から押し
出すことができる。この押し出した液体でケーシングに
摺動可能に設けられたピストンを動かすことができ、ア
クチュエータの働きが得られる。さらに、液体室への液
体吸入用逆止弁および液体室からの液体吐出用逆止弁を
設けることによって、1サイクル当たりΔVの排出量の
ポンプが得られる。
For example, a general rubber material (Poisson's ratio μ = 0.5) is used as the tubular elastic body, and a magnetostrictive element (diameter 6 mm ×
Length 50 mm), r = 3, L = 50, casing inner diameter R 4 mm, magnetostriction of magnetostrictive element λ S = 1
At 000 × 10 -6 , a volume change of ΔV = 0.31 mm 3 occurs. In the present invention, the hydraulic chamber of the casing is provided above the magnetostrictive element and the elastic body, and the volume change Δ of the elastic body with and without magnetism applied in this hydraulic chamber.
V is generated, and the liquid in the hydraulic chamber can be pushed out by ΔV from the hydraulic chamber. This pushed liquid can move the piston slidably provided in the casing, and the action of the actuator can be obtained. Further, by providing a check valve for sucking liquid into the liquid chamber and a check valve for discharging liquid from the liquid chamber, a pump having a discharge amount of ΔV per cycle can be obtained.

【0017】さらに、数式(A)で示すように、ΔVを
大きくするためには、弾性体のポアソン比がなるべく大
きな材料が望ましく、特に、ゴム材料などが望ましい。
また、R/rも小さいほうが良く、1<R/r<1.2で
あるのが好ましい。
Further, as shown in the formula (A), in order to increase ΔV, a material having a Poisson's ratio of the elastic body as large as possible is desirable, and a rubber material or the like is particularly desirable.
Further, it is preferable that R / r is also small, and 1 <R / r <1.2 is preferable.

【0018】[0018]

【実施例】以下、添付図面を参照して、本発明の実施態
様例によって本発明を詳細に説明する。本発明に係る磁
歪アクチュエータおよび磁歪ポンプは、ケーシングの液
圧室内の液体に磁歪素子および筒状弾性体が作用するよ
うになっており、先ず、磁歪素子および筒状(円筒状)
弾性体のケーシングへの組み込みを、2図を参照して説
明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to the accompanying drawings by way of example embodiments of the present invention. In the magnetostrictive actuator and the magnetostrictive pump according to the present invention, the magnetostrictive element and the tubular elastic body act on the liquid in the hydraulic chamber of the casing. First, the magnetostrictive element and the tubular (cylindrical) shape.
The incorporation of the elastic body into the casing will be described with reference to FIG.

【0019】磁歪素子11を通常方法にしたがって製造
して用意する。磁歪材料には、例えば、Tb0.3 Dy
0.7 Fe1.9 などがある。弾性体12としてゴム製の円
筒体を用意し、その内径は磁界印加時の磁歪素子11の
直径よりも少し小さいようにかつその外径がケーシング
13の内径よりも少し大きいようになっている。ケーシ
ング13は非磁性の金属材料から製作され、そして、磁
界発生用のコイル14が、ケーシング13を取り囲むよ
うに製作されている。
The magnetostrictive element 11 is manufactured and prepared according to a usual method. For the magnetostrictive material, for example, Tb 0.3 Dy
0.7 Fe 1.9 etc. A cylindrical cylinder made of rubber is prepared as the elastic body 12, and its inner diameter is slightly smaller than the diameter of the magnetostrictive element 11 when a magnetic field is applied, and its outer diameter is slightly larger than the inner diameter of the casing 13. The casing 13 is made of a non-magnetic metal material, and the coil 14 for generating a magnetic field is made so as to surround the casing 13.

【0020】図2に示すように、コイル14に電流を流
して磁界を発生させ、該コイルの中心に磁歪素子11を
配置して、磁気ひずみ現象により磁歪素子を長手方向に
伸ばし(素子直径が縮み)、この状態を維持して磁歪素
子11を筒状弾性体12の貫通孔内へ押し込む。続い
て、コイル磁界内に弾性体12を維持し、該弾性体をケ
ーシング13の中へ押し込む。図2では、コイル14を
磁歪素子11と一緒に下降してケーシング13内に磁歪
素子11および弾性体12を順に押し込むことになる。
逆に、磁歪素子に弾性体およびケーシングを順に嵌め込
むようにして組み立てることもできる。
As shown in FIG. 2, a current is passed through the coil 14 to generate a magnetic field, the magnetostrictive element 11 is disposed at the center of the coil, and the magnetostrictive phenomenon extends the magnetostrictive element in the longitudinal direction (the element diameter is Shrinkage), while maintaining this state, the magnetostrictive element 11 is pushed into the through hole of the cylindrical elastic body 12. Then, the elastic body 12 is maintained in the coil magnetic field, and the elastic body is pushed into the casing 13. In FIG. 2, the coil 14 is lowered together with the magnetostrictive element 11, and the magnetostrictive element 11 and the elastic body 12 are sequentially pushed into the casing 13.
On the contrary, it is also possible to assemble the magnetostrictive element by fitting the elastic body and the casing in order.

【0021】図3および図4は、本発明に係る磁歪アク
チュエータの概略断面図であり、図2にて組み込んだケ
ーシング13に、摺動ピストン17を備えかつ液体15
の満ちた液圧室16を形成するシリンダー部が取り付け
られている。図3が磁界印加なしの場合であり、図4が
コイル14による磁界を印加した場合である。摺動ピス
トン17には液体漏れを防止する密封手段のOリング1
8が取り付けられている。
FIGS. 3 and 4 are schematic sectional views of the magnetostrictive actuator according to the present invention. The casing 13 incorporated in FIG.
A cylinder portion is formed which forms a hydraulic chamber 16 filled with water. FIG. 3 shows the case where no magnetic field is applied, and FIG. 4 shows the case where a magnetic field is applied by the coil 14. The sliding piston 17 has an O-ring 1 as a sealing means for preventing liquid leakage.
8 is attached.

【0022】図3に示すように、コイル14へ電流を流
すのを停止して、磁歪素子11への磁界を印加しない
と、磁歪素子11は図2での組立て時よりも長手方向に
縮みかつ半径方向に拡張する。この素子11の横方向拡
張により弾性体12は半径方向にΔrだけ縮みかつ長手
方向にΔLだけ伸び(図1参照)、磁界印加時と比較し
て弾性体12はΔVだけ体積減少する(縮む)ことにな
る。このときケーシング13の液圧室16の液体(例え
ば、オイル)15の収容容量がΔVだけ増加したことに
なり、ピストン17を押し上げる液体が液圧室16へ押
し戻されて、ピストン17が降下する(通常はピストン
17を押し下げる弱い力が予めかけられているので)。
As shown in FIG. 3, when the current flow to the coil 14 is stopped and the magnetic field is not applied to the magnetostrictive element 11, the magnetostrictive element 11 contracts in the longitudinal direction more than in the assembly in FIG. Expand radially. Due to the lateral expansion of the element 11, the elastic body 12 contracts by Δr in the radial direction and expands by ΔL in the longitudinal direction (see FIG. 1), and the elastic body 12 decreases in volume (contracts) by ΔV as compared with when a magnetic field is applied. It will be. At this time, the storage capacity of the liquid (for example, oil) 15 in the hydraulic chamber 16 of the casing 13 is increased by ΔV, the liquid that pushes up the piston 17 is pushed back to the hydraulic chamber 16, and the piston 17 descends ( Usually, a weak force that pushes down the piston 17 is applied in advance).

【0023】次に、図4に示すように、コイル14へ電
流を流して磁界を発生させ、磁歪素子11に磁界を印加
して、磁歪効果によって磁歪素子11が長手方向に伸び
かつ半径方向に縮む。結果として、上述したように弾性
体12の体積がΔVだけ増加して、液圧室16の収容容
量がそれだけ減少して液圧室から液体15を押し出し、
ピストン17を押し上げる。例えば、ピストン17の直
径を1mmとすると、上述のΔV=0.31mm3 の体積変化
(増加)であれば、約0.39mmの距離でピストン17を
動かすことになる。このようにしてピストンを往復運動
させることのできる磁歪アクチュエータが得られる。
Next, as shown in FIG. 4, a current is applied to the coil 14 to generate a magnetic field, and the magnetic field is applied to the magnetostrictive element 11, so that the magnetostrictive effect causes the magnetostrictive element 11 to extend in the longitudinal direction and in the radial direction. Shrink. As a result, as described above, the volume of the elastic body 12 increases by ΔV, the accommodation capacity of the hydraulic chamber 16 decreases by that amount, and the liquid 15 is pushed out from the hydraulic chamber,
Push up the piston 17. For example, assuming that the diameter of the piston 17 is 1 mm, if the volume change (increase) of ΔV = 0.31 mm 3 described above, the piston 17 is moved by a distance of about 0.39 mm. Thus, a magnetostrictive actuator capable of reciprocating the piston can be obtained.

【0024】図5は、本発明に係る磁歪ポンプ概略断面
図であり、図2にて組み込んだケーシング13に、液体
吸入用逆止弁21および液体吐出用逆止弁22を備えた
液圧室23を形成するシリンダー部が取り付けられてい
る。この図5の場合は、磁界印加なしで筒状弾性体13
のΔV体積収縮によって、液体吸入用逆止弁21が開い
てリザーブタンク25から液体を液体室23内へ入れ、
一方、液体吐出用逆止弁22は閉じられている。コイル
14に電流を流して磁界を発生させて、磁歪素子11を
歪ませ、弾性体12のΔV体積膨張させることによって
液圧室23内の液体を液体吐出用逆止弁22を通して油
圧システム26へ送る。このとき、液体吸入用逆止弁2
1は閉じることになる。
FIG. 5 is a schematic sectional view of the magnetostrictive pump according to the present invention, in which the casing 13 incorporated in FIG. 2 is provided with a liquid suction check valve 21 and a liquid discharge check valve 22. A cylinder portion forming 23 is attached. In the case of FIG. 5, the cylindrical elastic body 13 is applied without applying a magnetic field.
Due to the ΔV volume contraction of, the check valve for liquid suction 21 is opened and the liquid is put into the liquid chamber 23 from the reserve tank 25.
On the other hand, the liquid discharge check valve 22 is closed. A current is applied to the coil 14 to generate a magnetic field, which causes the magnetostrictive element 11 to be distorted and causes the ΔV volume expansion of the elastic body 12 to cause the liquid in the hydraulic chamber 23 to pass through the liquid discharge check valve 22 to the hydraulic system 26. send. At this time, the check valve 2 for liquid suction
1 will be closed.

【0025】このようにして、液体(油など)を磁界印
加の1サイクル当たりΔVの排出量の磁歪ポンプが得ら
れる。上述の説明では、磁界を印加した時に磁界方向に
伸びる正の磁気ひずみ係数を有する磁歪材料を用いた
が、負の磁気ひずみ係数の磁歪材料を同様にして用いる
ことも可能である。
In this way, a magnetostrictive pump having a discharge amount of ΔV per cycle of magnetic field application of liquid (oil or the like) can be obtained. In the above description, a magnetostrictive material having a positive magnetostriction coefficient that extends in the magnetic field direction when a magnetic field is applied is used, but a magnetostrictive material having a negative magnetostriction coefficient can be used as well.

【0026】[0026]

【発明の効果】以上説明したように、本発明に係る磁歪
素子内蔵のアクチュエータおよびポンプは従来の場合と
比べて非常に簡単な構造であり、構成部品の数が少な
い。したがって、故障トラブルの発生を大幅に減少させ
て、信頼性を高めた磁歪アクチュエータおよび磁歪ポン
プを提供することができる。
As described above, the actuator and pump having the magnetostrictive element according to the present invention have a very simple structure as compared with the conventional case, and the number of components is small. Therefore, it is possible to significantly reduce the occurrence of troubles and to provide a magnetostrictive actuator and a magnetostrictive pump with improved reliability.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明に係る磁歪素子および筒状弾性体の変化
を説明する概略断面図である。
FIG. 1 is a schematic cross-sectional view illustrating changes in a magnetostrictive element and a tubular elastic body according to the present invention.

【図2】本発明に係る磁歪素子、筒状弾性体およびケー
シングの組立てを説明する概略分解図である。
FIG. 2 is a schematic exploded view illustrating assembly of a magnetostrictive element, a tubular elastic body, and a casing according to the present invention.

【図3】本発明に係る磁歪アクチュエータの磁界印加し
ていない時の概略断面図である。
FIG. 3 is a schematic sectional view of the magnetostrictive actuator according to the present invention when a magnetic field is not applied.

【図4】本発明に係る磁歪アクチュエータの磁界印加時
の概略断面図である。
FIG. 4 is a schematic sectional view of the magnetostrictive actuator according to the present invention when a magnetic field is applied.

【図5】本発明に係る磁歪ポンプの磁界印加していない
時の概略断面図である。
FIG. 5 is a schematic sectional view of the magnetostrictive pump according to the present invention when a magnetic field is not applied.

【符号の説明】[Explanation of symbols]

1A…磁界印加時の磁歪素子 1B…磁界印加していない時の磁歪素子 2A…磁界印加時の筒状弾性体 2B…磁界印加していない時の筒状弾性体 3…ケーシング 11…磁歪素子 12…筒状弾性体 13…ケーシング 14…コイル 15…液体 16…液圧室 17…ピストン 21…液体吸入用逆止弁 22…液体吐出用逆止弁 23…液圧室 25…リザーブタンク 1A ... Magnetostrictive element when magnetic field is applied 1B ... Magnetostrictive element when magnetic field is not applied 2A ... Cylindrical elastic body when magnetic field is applied 2B ... Cylindrical elastic body when magnetic field is not applied 3 ... Casing 11 ... Magnetostrictive element 12 ... Cylindrical elastic body 13 ... Casing 14 ... Coil 15 ... Liquid 16 ... Liquid pressure chamber 17 ... Piston 21 ... Liquid suction check valve 22 ... Liquid discharge check valve 23 ... Liquid pressure chamber 25 ... Reserve tank

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 磁歪素子(11)と、該磁歪素子を内部
に備えた筒状弾性体(12)と、該筒状弾性体を内部に
備えかつ該筒状弾性体の上部に液圧室(16)を有する
ケーシング(13)と、該液体室の液体(15)に接し
かつ該ケーシングに摺動可能に設けられるピストン(1
7)と、前記ケーシングを取り巻くコイル(14)とか
らなることを特徴とする磁歪素子内蔵のアクチュエー
タ。
1. A magnetostrictive element (11), a cylindrical elastic body (12) having the magnetostrictive element inside, and a hydraulic chamber provided inside the cylindrical elastic body and above the cylindrical elastic body. A casing (13) having (16), and a piston (1) in contact with the liquid (15) in the liquid chamber and slidably provided on the casing.
7) and a coil (14) surrounding the casing, the actuator having a built-in magnetostrictive element.
【請求項2】 磁歪素子(11)と、該磁歪素子を内部
に備えた筒状弾性体(12)と、該筒状弾性体を内部に
備えかつ該筒状弾性体の上部に液圧室(23)を有する
ケーシング(13)と、該液体室への液体吸入用逆止弁
(21)と、該液体室からの液体吐出用逆止弁(22)
と、前記ケーシングを取り巻くコイル(14)とからな
ることを特徴とする磁歪素子内蔵のポンプ。
2. A magnetostrictive element (11), a cylindrical elastic body (12) having the magnetostrictive element inside, and a hydraulic chamber provided with the cylindrical elastic body inside and above the cylindrical elastic body. A casing (13) having (23), a check valve (21) for sucking liquid into the liquid chamber, and a check valve (22) for discharging liquid from the liquid chamber.
And a coil (14) surrounding the casing, the pump having a built-in magnetostrictive element.
JP4347101A 1992-12-25 1992-12-25 Actuator and pump with built-in magnetostrictive element Expired - Lifetime JP3055338B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4347101A JP3055338B2 (en) 1992-12-25 1992-12-25 Actuator and pump with built-in magnetostrictive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4347101A JP3055338B2 (en) 1992-12-25 1992-12-25 Actuator and pump with built-in magnetostrictive element

Publications (2)

Publication Number Publication Date
JPH06197573A true JPH06197573A (en) 1994-07-15
JP3055338B2 JP3055338B2 (en) 2000-06-26

Family

ID=18387919

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4347101A Expired - Lifetime JP3055338B2 (en) 1992-12-25 1992-12-25 Actuator and pump with built-in magnetostrictive element

Country Status (1)

Country Link
JP (1) JP3055338B2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6398509B1 (en) 1999-06-21 2002-06-04 Nsk Ltd. Lubricating device
WO2002084119A1 (en) * 2001-04-10 2002-10-24 Newlands Technology Limited Actuator with hydraulics
US6623251B2 (en) 1999-06-21 2003-09-23 Nsk Ltd. Spindle apparatus
CN102778200A (en) * 2011-05-09 2012-11-14 重庆师范大学 Optical lever measurement method for magnetostrictive effect based on magnetorhrologic grease and measuring device for optical lever measurement method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6398509B1 (en) 1999-06-21 2002-06-04 Nsk Ltd. Lubricating device
US6623251B2 (en) 1999-06-21 2003-09-23 Nsk Ltd. Spindle apparatus
US7000734B2 (en) 1999-06-21 2006-02-21 Nsk Ltd. Lubricating device
WO2002084119A1 (en) * 2001-04-10 2002-10-24 Newlands Technology Limited Actuator with hydraulics
CN102778200A (en) * 2011-05-09 2012-11-14 重庆师范大学 Optical lever measurement method for magnetostrictive effect based on magnetorhrologic grease and measuring device for optical lever measurement method

Also Published As

Publication number Publication date
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