JPH0565478B1 - - Google Patents
Info
- Publication number
- JPH0565478B1 JPH0565478B1 JP25597385A JP25597385A JPH0565478B1 JP H0565478 B1 JPH0565478 B1 JP H0565478B1 JP 25597385 A JP25597385 A JP 25597385A JP 25597385 A JP25597385 A JP 25597385A JP H0565478 B1 JPH0565478 B1 JP H0565478B1
- Authority
- JP
- Japan
- Prior art keywords
- diameter
- single crystal
- crystal
- amount
- optical means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 claims description 54
- 230000003287 optical effect Effects 0.000 claims description 21
- 238000012937 correction Methods 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 11
- 230000010355 oscillation Effects 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000008710 crystal-8 Substances 0.000 description 31
- 238000012545 processing Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 8
- 238000009826 distribution Methods 0.000 description 6
- 230000004927 fusion Effects 0.000 description 6
- 230000033001 locomotion Effects 0.000 description 5
- 238000004033 diameter control Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25597385A JPS62119190A (ja) | 1985-11-14 | 1985-11-14 | 単結晶の直径制御方法および装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25597385A JPS62119190A (ja) | 1985-11-14 | 1985-11-14 | 単結晶の直径制御方法および装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62119190A JPS62119190A (ja) | 1987-05-30 |
| JPH0565478B1 true JPH0565478B1 (ru) | 1993-09-17 |
Family
ID=17286140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25597385A Pending JPS62119190A (ja) | 1985-11-14 | 1985-11-14 | 単結晶の直径制御方法および装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62119190A (ru) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0780717B2 (ja) * | 1988-12-16 | 1995-08-30 | コマツ電子金属株式会社 | 単結晶直径自動制御装置 |
| JPH0668799U (ja) * | 1993-03-11 | 1994-09-27 | 株式会社丸正 | しゃぼん玉発生玩具 |
| JP4815766B2 (ja) * | 2004-08-03 | 2011-11-16 | 株式会社Ｓｕｍｃｏ | シリコン単結晶製造装置及び製造方法 |
-
1985
- 1985-11-14 JP JP25597385A patent/JPS62119190A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62119190A (ja) | 1987-05-30 |
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