JPH04329543A - Composition of electrodeposition coating material for forming photoresist film - Google Patents
Composition of electrodeposition coating material for forming photoresist filmInfo
- Publication number
- JPH04329543A JPH04329543A JP12663391A JP12663391A JPH04329543A JP H04329543 A JPH04329543 A JP H04329543A JP 12663391 A JP12663391 A JP 12663391A JP 12663391 A JP12663391 A JP 12663391A JP H04329543 A JPH04329543 A JP H04329543A
- Authority
- JP
- Japan
- Prior art keywords
- compd
- spiropyran
- electrodeposition
- parts
- photoresist film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229920002120 photoresistant polymer Polymers 0.000 title claims abstract description 21
- 238000004070 electrodeposition Methods 0.000 title claims description 51
- 239000000203 mixture Substances 0.000 title description 9
- 239000011248 coating agent Substances 0.000 title description 6
- 238000000576 coating method Methods 0.000 title description 6
- 239000000463 material Substances 0.000 title description 3
- 150000001875 compounds Chemical class 0.000 claims description 24
- 239000008199 coating composition Substances 0.000 claims description 13
- BCHZICNRHXRCHY-UHFFFAOYSA-N 2h-oxazine Chemical compound N1OC=CC=C1 BCHZICNRHXRCHY-UHFFFAOYSA-N 0.000 abstract description 3
- 230000007774 longterm Effects 0.000 abstract description 2
- 239000003086 colorant Substances 0.000 abstract 1
- 239000003973 paint Substances 0.000 description 33
- 239000011347 resin Substances 0.000 description 23
- 229920005989 resin Polymers 0.000 description 23
- 239000000975 dye Substances 0.000 description 13
- 239000002253 acid Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 239000000178 monomer Substances 0.000 description 8
- 239000000243 solution Substances 0.000 description 7
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 6
- 125000000129 anionic group Chemical group 0.000 description 6
- 238000005530 etching Methods 0.000 description 5
- OZAIFHULBGXAKX-UHFFFAOYSA-N 2-(2-cyanopropan-2-yldiazenyl)-2-methylpropanenitrile Chemical compound N#CC(C)(C)N=NC(C)(C)C#N OZAIFHULBGXAKX-UHFFFAOYSA-N 0.000 description 4
- 229920000178 Acrylic resin Polymers 0.000 description 4
- 239000004925 Acrylic resin Substances 0.000 description 4
- 239000003999 initiator Substances 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 125000002091 cationic group Chemical group 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- -1 fluororesin Polymers 0.000 description 3
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 2
- VVBLNCFGVYUYGU-UHFFFAOYSA-N 4,4'-Bis(dimethylamino)benzophenone Chemical compound C1=CC(N(C)C)=CC=C1C(=O)C1=CC=C(N(C)C)C=C1 VVBLNCFGVYUYGU-UHFFFAOYSA-N 0.000 description 2
- GUUVPOWQJOLRAS-UHFFFAOYSA-N Diphenyl disulfide Chemical compound C=1C=CC=CC=1SSC1=CC=CC=C1 GUUVPOWQJOLRAS-UHFFFAOYSA-N 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 2
- 125000003647 acryloyl group Chemical group O=C([*])C([H])=C([H])[H] 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- ISAOCJYIOMOJEB-UHFFFAOYSA-N benzoin Chemical compound C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 2
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 2
- 238000004040 coloring Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 2
- FDZZZRQASAIRJF-UHFFFAOYSA-M malachite green Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1C(C=1C=CC=CC=1)=C1C=CC(=[N+](C)C)C=C1 FDZZZRQASAIRJF-UHFFFAOYSA-M 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- QVEIBLDXZNGPHR-UHFFFAOYSA-N naphthalene-1,4-dione;diazide Chemical group [N-]=[N+]=[N-].[N-]=[N+]=[N-].C1=CC=C2C(=O)C=CC(=O)C2=C1 QVEIBLDXZNGPHR-UHFFFAOYSA-N 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 230000036211 photosensitivity Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229920002818 (Hydroxyethyl)methacrylate Polymers 0.000 description 1
- CQTRKDFIQFOAQV-UHFFFAOYSA-N 1',3',3'-trimethylspiro[benzo[f][1,4]benzoxazine-3,2'-indole] Chemical compound C1=CC=CC2=C(N=CC3(C(C)(C)C4=CC=CC=C4N3C)O3)C3=CC=C21 CQTRKDFIQFOAQV-UHFFFAOYSA-N 0.000 description 1
- WJFKNYWRSNBZNX-UHFFFAOYSA-N 10H-phenothiazine Chemical compound C1=CC=C2NC3=CC=CC=C3SC2=C1 WJFKNYWRSNBZNX-UHFFFAOYSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- HEQOJEGTZCTHCF-UHFFFAOYSA-N 2-amino-1-phenylethanone Chemical compound NCC(=O)C1=CC=CC=C1 HEQOJEGTZCTHCF-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 1
- BQZJOQXSCSZQPS-UHFFFAOYSA-N 2-methoxy-1,2-diphenylethanone Chemical compound C=1C=CC=CC=1C(OC)C(=O)C1=CC=CC=C1 BQZJOQXSCSZQPS-UHFFFAOYSA-N 0.000 description 1
- LWRBVKNFOYUCNP-UHFFFAOYSA-N 2-methyl-1-(4-methylsulfanylphenyl)-2-morpholin-4-ylpropan-1-one Chemical compound C1=CC(SC)=CC=C1C(=O)C(C)(C)N1CCOCC1 LWRBVKNFOYUCNP-UHFFFAOYSA-N 0.000 description 1
- CFVWNXQPGQOHRJ-UHFFFAOYSA-N 2-methylpropyl prop-2-enoate Chemical compound CC(C)COC(=O)C=C CFVWNXQPGQOHRJ-UHFFFAOYSA-N 0.000 description 1
- WTQZSMDDRMKJRI-UHFFFAOYSA-N 4-diazoniophenolate Chemical group [O-]C1=CC=C([N+]#N)C=C1 WTQZSMDDRMKJRI-UHFFFAOYSA-N 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- QSJXEFYPDANLFS-UHFFFAOYSA-N Diacetyl Chemical group CC(=O)C(C)=O QSJXEFYPDANLFS-UHFFFAOYSA-N 0.000 description 1
- WOBHKFSMXKNTIM-UHFFFAOYSA-N Hydroxyethyl methacrylate Chemical compound CC(=C)C(=O)OCCO WOBHKFSMXKNTIM-UHFFFAOYSA-N 0.000 description 1
- OWYWGLHRNBIFJP-UHFFFAOYSA-N Ipazine Chemical compound CCN(CC)C1=NC(Cl)=NC(NC(C)C)=N1 OWYWGLHRNBIFJP-UHFFFAOYSA-N 0.000 description 1
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 1
- OAZWDJGLIYNYMU-UHFFFAOYSA-N Leucocrystal Violet Chemical compound C1=CC(N(C)C)=CC=C1C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 OAZWDJGLIYNYMU-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- DAKWPKUUDNSNPN-UHFFFAOYSA-N Trimethylolpropane triacrylate Chemical compound C=CC(=O)OCC(CC)(COC(=O)C=C)COC(=O)C=C DAKWPKUUDNSNPN-UHFFFAOYSA-N 0.000 description 1
- LEEBETSNAGEFCY-UHFFFAOYSA-N [N-]=[N+]=[N-].[N-]=[N+]=[N-].O=C1C=CC(=O)C=C1 Chemical group [N-]=[N+]=[N-].[N-]=[N+]=[N-].O=C1C=CC(=O)C=C1 LEEBETSNAGEFCY-UHFFFAOYSA-N 0.000 description 1
- RZUBARUFLYGOGC-MTHOTQAESA-L acid fuchsin Chemical compound [Na+].[Na+].[O-]S(=O)(=O)C1=C(N)C(C)=CC(C(=C\2C=C(C(=[NH2+])C=C/2)S([O-])(=O)=O)\C=2C=C(C(N)=CC=2)S([O-])(=O)=O)=C1 RZUBARUFLYGOGC-MTHOTQAESA-L 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- PYKYMHQGRFAEBM-UHFFFAOYSA-N anthraquinone Natural products CCC(=O)c1c(O)c2C(=O)C3C(C=CC=C3O)C(=O)c2cc1CC(=O)OC PYKYMHQGRFAEBM-UHFFFAOYSA-N 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 230000003078 antioxidant effect Effects 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- ZXJXZNDDNMQXFV-UHFFFAOYSA-M crystal violet Chemical compound [Cl-].C1=CC(N(C)C)=CC=C1[C+](C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 ZXJXZNDDNMQXFV-UHFFFAOYSA-M 0.000 description 1
- 150000001923 cyclic compounds Chemical class 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 229940075557 diethylene glycol monoethyl ether Drugs 0.000 description 1
- SBZXBUIDTXKZTM-UHFFFAOYSA-N diglyme Chemical compound COCCOCCOC SBZXBUIDTXKZTM-UHFFFAOYSA-N 0.000 description 1
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- YQGOJNYOYNNSMM-UHFFFAOYSA-N eosin Chemical compound [Na+].OC(=O)C1=CC=CC=C1C1=C2C=C(Br)C(=O)C(Br)=C2OC2=C(Br)C(O)=C(Br)C=C21 YQGOJNYOYNNSMM-UHFFFAOYSA-N 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005886 esterification reaction Methods 0.000 description 1
- JVICFMRAVNKDOE-UHFFFAOYSA-M ethyl violet Chemical compound [Cl-].C1=CC(N(CC)CC)=CC=C1C(C=1C=CC(=CC=1)N(CC)CC)=C1C=CC(=[N+](CC)CC)C=C1 JVICFMRAVNKDOE-UHFFFAOYSA-M 0.000 description 1
- VOZRXNHHFUQHIL-UHFFFAOYSA-N glycidyl methacrylate Chemical compound CC(=C)C(=O)OCC1CO1 VOZRXNHHFUQHIL-UHFFFAOYSA-N 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 125000000623 heterocyclic group Chemical group 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229940107698 malachite green Drugs 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 125000000449 nitro group Chemical group [O-][N+](*)=O 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229950000688 phenothiazine Drugs 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 125000004309 pyranyl group Chemical class O1C(C=CC=C1)* 0.000 description 1
- 238000007142 ring opening reaction Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 125000003003 spiro group Chemical group 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 125000004434 sulfur atom Chemical group 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- ANRHNWWPFJCPAZ-UHFFFAOYSA-M thionine Chemical compound [Cl-].C1=CC(N)=CC2=[S+]C3=CC(N)=CC=C3N=C21 ANRHNWWPFJCPAZ-UHFFFAOYSA-M 0.000 description 1
- JEVGKYBUANQAKG-UHFFFAOYSA-N victoria blue R Chemical compound [Cl-].C12=CC=CC=C2C(=[NH+]CC)C=CC1=C(C=1C=CC(=CC=1)N(C)C)C1=CC=C(N(C)C)C=C1 JEVGKYBUANQAKG-UHFFFAOYSA-N 0.000 description 1
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
Landscapes
- Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
- Paints Or Removers (AREA)
- Manufacturing Of Printed Circuit Boards (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は、フォトレジスト膜形成
用電着塗料組成物(以下単に電着塗料ともいう)に関し
、詳しくは紫外線、電子線及びレーザー光線等の活性エ
ネルギー線の照射により露光部が発色又は消色し、露光
部と未露光部を高いコントラストで識別でき、かつ塗料
組成物を長期間貯蔵した後も、識別能の高いフォトレジ
スト膜を形成することができる該電着塗料組成物に関す
るものである。[Field of Industrial Application] The present invention relates to an electrodeposition coating composition for forming a photoresist film (hereinafter also simply referred to as electrodeposition coating composition), and more specifically, the present invention relates to an electrodeposition coating composition for forming a photoresist film (hereinafter simply referred to as electrodeposition coating composition). The electrodeposition coating composition is capable of developing or decoloring, is capable of distinguishing exposed areas and unexposed areas with high contrast, and is capable of forming a photoresist film with high discrimination ability even after the coating composition is stored for a long period of time. It is about things.
【0002】0002
【従来の技術】プリント配線板の多くは、銅箔を張った
積層板(以下「銅張積層板」と略す)の表面に感光性フ
ィルムをラミネートした後、写真ネガを重ねて露光及び
現像を行いエッチングレジスト膜を形成した後、エッチ
ングによって回路パターン以外の不要な銅箔を除去し、
しかる後前記エッチングレジスト膜を脱膜することによ
って製造されている。[Prior Art] Most printed wiring boards are made by laminating a photosensitive film on the surface of a laminate covered with copper foil (hereinafter abbreviated as "copper-clad laminate"), and then exposing and developing a photographic negative film. After forming an etching resist film, unnecessary copper foil other than the circuit pattern is removed by etching.
After that, the etching resist film is removed.
【0003】この方法において使用される感光性フィル
ムは、活性エネルギー線の照射により露光部を発色させ
、露光工程を経たかどうか容易に確認できるようにする
ため、発色性色素であるロイコ色素を含有するものが一
般的である。このように発色性色素を含有させることに
より、未露光であるため回路パターンを形成していない
にもかかわらず、次の現像工程に進み、感光性フィルム
を除去してしまったり、あるいは既に露光してあるにも
かかわらず、二重に露光してしまう誤操作を防止してい
る。[0003] The photosensitive film used in this method contains a leuco dye, which is a color-forming dye, so that the exposed area becomes colored by irradiation with active energy rays, making it easy to confirm whether the exposure process has been completed. It is common to do so. By including a chromogenic dye in this way, the photosensitive film may be removed even though it has not been exposed and no circuit pattern has been formed by proceeding to the next development process, or the photosensitive film may be removed even though it has not been exposed to light and no circuit pattern has been formed. This prevents erroneous operations that would result in double exposure, even though the
【0004】一方、上記の感光性フィルムを用いない方
法としては、電着により感光性塗膜を形成する方法があ
り、この方法に関しても、感光性電着塗料浴中にロイコ
色素(還元型色素)を含有せしめることを特徴とするプ
リント配線板の製造方法が提案されている(特開平2−
249296号公報)。On the other hand, as a method that does not use the above-mentioned photosensitive film, there is a method of forming a photosensitive coating film by electrodeposition, and this method also uses leuco dye (reduced dye) in the photosensitive electrodeposition paint bath. ) has been proposed (Japanese Unexamined Patent Application Publication No. 2003-1990)
249296).
【0005】[0005]
【発明が解決しようとする課題】フォトレジスト膜の発
色用色素として電着塗料中に配合されたロイコ色素は、
活性エネルギー線の露光後かなり鮮明に発色し、フォト
レジスト膜に充分なコントラストを付与し、フォトレジ
スト膜の感光性にも実用上悪影響を与えない。また、該
電着塗料を調製する際にも、特に問題となることはなく
、ロイコ色素は優れた発色用色素として使用されている
。[Problems to be Solved by the Invention] Leuco dyes blended into electrodeposition paints as coloring dyes for photoresist films are
It develops a fairly clear color after exposure to active energy rays, imparts sufficient contrast to the photoresist film, and does not have a practical negative effect on the photosensitivity of the photoresist film. Furthermore, there are no particular problems when preparing the electrodeposition paint, and leuco dyes are used as excellent coloring dyes.
【0006】しかし、ロイコ色素を含有させた電着塗料
は、一旦調製すると室温で暗所に保存しておいても、短
期間に発色する。この発色した電着塗料を用いて銅張積
層板上にフォトレジスト膜を形成させると、露光工程に
おいて、露光部と未露光部のコントラストが非常に悪く
、露光の有無を確認したり、二重露光を防止する目的は
充分果たせなかった。その原因は、ほぼ無色である還元
型のロイコ色素が、電着塗料中の溶存酸素等により酸化
を受け、発色したためであると推定されたので、種々の
抗酸化剤を添加することにより酸化の防止を図ったが、
発色の進行をわずかに遅らせた程度にとどまり、抗酸化
剤の添加は実用上役に立たなかった。本発明は、貯蔵安
定性に優れ、長期間貯蔵した後においても、露光部と未
露光部とのコントラストが高いフォトレジスト膜を形成
することができるフォトレジスト膜形成用電着塗料組成
物を提供するものである。However, once an electrodeposition paint containing a leuco dye is prepared, it develops color in a short period of time even if it is stored in a dark place at room temperature. When a photoresist film is formed on a copper-clad laminate using this colored electrodeposition paint, the contrast between the exposed and unexposed areas is very poor during the exposure process, making it difficult to confirm whether there has been exposure or not. The purpose of preventing exposure to light could not be fully achieved. It was assumed that the cause of this was that the almost colorless reduced leuco dye was oxidized by dissolved oxygen in the electrodeposition paint and developed color. I tried to prevent it, but
Addition of an antioxidant was of no practical use, as the progress of color development was only slightly delayed. The present invention provides an electrodeposition coating composition for forming a photoresist film that has excellent storage stability and is capable of forming a photoresist film with high contrast between exposed and unexposed areas even after long-term storage. It is something to do.
【0007】[0007]
【課題を解決するための手段】前記課題を解決するため
に鋭意検討した結果、フォトクロミズム特性を有するス
ピロピラン化合物を使用すると、貯蔵時においては長期
間にわたり電着塗料の発色又は消色がなく、しかも活性
エネルギー線の照射後は露光部と未露光部の識別が容易
な、コントラストの高いフォトレジスト膜を形成できる
ことを見出し、本発明を完成するに至った。即ち、本発
明はフォトクロミズム特性を有するスピロピラン化合物
を含むことを特徴とするフォトレジスト膜形成用電着塗
料組成物である。[Means for Solving the Problems] As a result of intensive studies to solve the above problems, it has been found that when a spiropyran compound having photochromic properties is used, the electrodeposition paint does not develop or discolor for a long period of time during storage, and The present inventors have discovered that after irradiation with active energy rays, it is possible to form a high-contrast photoresist film in which exposed areas and unexposed areas can be easily distinguished, and the present invention has been completed. That is, the present invention is an electrodeposition coating composition for forming a photoresist film, which is characterized by containing a spiropyran compound having photochromic properties.
【0008】以下、本発明を更に詳細に説明する。電着
塗料にはアニオン型とカチオン型があり、フォトレジス
ト膜にはネガ型とポジ型があるので、両者の組合せによ
り4種類の電着塗料がある。本発明に係わるスピロピラ
ン化合物は従来より用いられている上記4種類のどの電
着塗料においても使用可能である。スピロピラン化合物
を配合する電着塗料として、例えば特開平2−2492
96号公報(第2頁右上欄18行〜第4頁左下欄17行
を参照)に記載された組成物等の他、従来より用いられ
ているものはいずれも使用可能であり、より具体的に例
示すれば以下の電着塗料がある。The present invention will be explained in more detail below. There are anionic and cationic types of electrodeposition paints, and there are negative and positive types of photoresist films, so there are four types of electrodeposition paints depending on the combination of the two types. The spiropyran compound according to the present invention can be used in any of the above-mentioned four types of conventionally used electrodeposition paints. As an electrodeposition paint containing a spiropyran compound, for example, JP-A-2-2492
In addition to the compositions described in Publication No. 96 (see page 2, upper right column, line 18 to page 4, lower left column, line 17), any conventionally used compositions can be used, and more specific Examples include the following electrodeposition paints.
【0009】ネガ型アニオン性電着塗料は、水溶性又は
水分散性であり、膜形成性があり、陰イオン性を有し、
活性エネルギー線の照射によって重合可能な重合性不飽
和樹脂と非水溶性光重合開始剤を含有する、水溶性又は
水分散性の光硬化性組成物からなるものであり、重合性
不飽和樹脂は、酸価が20〜300であり、不飽和当量
が約150〜3000であり及び数平均分子量が約30
0〜300,000であるものが好ましい。[0009] Negative anionic electrodeposition paints are water-soluble or water-dispersible, have film-forming properties, and have anionic properties.
It consists of a water-soluble or water-dispersible photocurable composition containing a polymerizable unsaturated resin that can be polymerized by irradiation with active energy rays and a water-insoluble photopolymerization initiator, and the polymerizable unsaturated resin is , an acid value of 20 to 300, an unsaturation equivalent of about 150 to 3000, and a number average molecular weight of about 30.
0 to 300,000 is preferred.
【0010】重合性不飽和樹脂の基本骨格を構成する樹
脂としては、例えばアクリル樹脂、ウレタン樹脂、エポ
キシ樹脂、ポリエステル樹脂、ポリエーテル樹脂、アル
キド樹脂、ポリ塩化ビニル樹脂、フッ素樹脂、シリコン
樹脂、酢酸ビニル樹脂及びポリビニルアルコール等があ
り、重合性不飽和樹脂はこれら樹脂の基本骨格に、カル
ボキシル基等の酸性基を有する単量体及びアクリロイル
基又はメタクリロイル基等のエチレン性不飽和基を有す
る単量体を構成成分として組み込んだものである。Examples of resins constituting the basic skeleton of the polymerizable unsaturated resin include acrylic resin, urethane resin, epoxy resin, polyester resin, polyether resin, alkyd resin, polyvinyl chloride resin, fluororesin, silicone resin, and acetic acid resin. There are vinyl resins, polyvinyl alcohol, etc., and polymerizable unsaturated resins include monomers with acidic groups such as carboxyl groups and monomers with ethylenically unsaturated groups such as acryloyl or methacryloyl groups in the basic skeleton of these resins. It incorporates the body as a component.
【0011】ネガ型カチオン性電着塗料は、重合性不飽
和樹脂と非水溶性光重合開始剤を含有する、水溶性又は
水分散性の光硬化性組成物からなるものであり、重合性
不飽和樹脂は上記ネガ型アニオン性電着塗料における重
合性不飽和樹脂と同様の基本骨格を有し、この基本骨格
中に、アミノ基等の塩基性基を有する単量体及びアクリ
ロイル基又はメタクリロイル基等のエチレン性不飽和基
を有する単量体を構成成分として組み込んだ公知の樹脂
である。Negative cationic electrodeposition paints are composed of a water-soluble or water-dispersible photocurable composition containing a polymerizable unsaturated resin and a water-insoluble photopolymerization initiator. The saturated resin has the same basic skeleton as the polymerizable unsaturated resin in the above-mentioned negative anionic electrodeposition paint, and in this basic skeleton, a monomer having a basic group such as an amino group and an acryloyl group or a methacryloyl group. This is a known resin that incorporates a monomer having an ethylenically unsaturated group such as
【0012】ネガ型の電着塗料に配合する非水溶性光重
合開始剤としては、従来より使用されているものはいず
れも使用でき、具体的にはベンゾイン、ベンゾインメチ
ルエーテル、ベンジル、ジフェニルジスルフィド、エオ
シン、チオニン、ジアセチル、ミヒラーケトン及びアン
トラキノン等があり、これらの使用量は電着塗料の不揮
発分の100重量部(以下単に部と略す)当たり0.1
〜10部の範囲とすることが好ましい。[0012] As the water-insoluble photopolymerization initiator to be added to the negative electrodeposition paint, any conventionally used initiator can be used, specifically benzoin, benzoin methyl ether, benzyl, diphenyl disulfide, Eosin, thionine, diacetyl, Michler's ketone, anthraquinone, etc. are used in an amount of 0.1 per 100 parts by weight (hereinafter simply referred to as parts) of the non-volatile content of the electrodeposition paint.
It is preferable to set it as the range of -10 parts.
【0013】ポジ型電着塗料としては、ベンゾキノンジ
アジド基又はナフトキノンジアジド基等のキノンジアジ
ド基を有する水溶性もしくは水分散性樹脂を主成分とす
る公知のものを用いることができる。[0013] As the positive electrodeposition coating material, a known one containing as a main component a water-soluble or water-dispersible resin having a quinonediazide group such as a benzoquinonediazide group or a naphthoquinonediazide group can be used.
【0014】ポジ型アニオン性電着塗料となる水溶性も
しくは水分散性樹脂の具体例としては、不飽和単量体が
有する水酸基とナフトキノンジアジドスルホン酸が有す
る酸基とのエステル化反応によって得られた不飽和単量
体を、カルボキシル基等の酸性基を有する他の不飽和単
量体とを共重合させた樹脂等があり、ポジ型カチオン性
電着塗料となる水溶性もしくは水分散性樹脂の具体例と
しては、不飽和単量体が有する水酸基とナフトキノンジ
アジドスルホン酸が有する酸基とのエステル化反応によ
って得られた不飽和単量体を、アミノ基等の塩基性基を
有する他の不飽和単量体と共重合させた樹脂等がある。Specific examples of water-soluble or water-dispersible resins that can be used as positive-type anionic electrodeposition paints include resins obtained by an esterification reaction between hydroxyl groups of unsaturated monomers and acid groups of naphthoquinonediazide sulfonic acid. There are resins made by copolymerizing unsaturated monomers with other unsaturated monomers having acidic groups such as carboxyl groups, and water-soluble or water-dispersible resins that can be used as positive-type cationic electrodeposition paints. As a specific example of There are resins copolymerized with unsaturated monomers.
【0015】本発明に用いるフォトクロミズム特性を有
するスピロピラン化合物は、スピロ原子を有するピラン
誘導体であり、その一例は以下に示す構造を有する環状
の化合物である。これらの化合物は活性エネルギー線の
照射によって開環し、発色するか消色する性質を有して
おり、電着塗料中の溶存酸素等の酸化による影響を受け
にくいため、長期間にわたる電着塗料の貯蔵後も、優れ
た識別能を発揮する。The spiropyran compound having photochromic properties used in the present invention is a pyran derivative having a spiro atom, and one example thereof is a cyclic compound having the structure shown below. These compounds have the property of ring-opening and developing or decoloring when irradiated with active energy rays, and are not easily affected by oxidation such as dissolved oxygen in the electrodeposition paint, so the electrodeposition paint can be used for a long period of time. It exhibits excellent discrimination ability even after storage.
【0016】[0016]
【化1】[Chemical formula 1]
【0017】本発明に用いるスピロピラン化合物として
は、活性エネルギー線の照射により発色するもの及び消
色するもののいずれも使用できるが、より鮮明な識別能
力を存している点で発色する化合物が好ましく、活性エ
ネルギー線の照射前は無色乃至ほぼ無色であり、照射後
に濃い青、紫或いは赤紫等に発色し、露光部と未露光部
の識別を容易にするものが更に好ましい。スピロピラン
化合物の好ましい具体例としては、インドリノスピロピ
ラン系化合物、ベンゾチアゾリノスピロピラン系化合物
、オキサジン系スピロピラン化合物等があり、これらの
化合物の中ではインドリノスピロピラン系化合物がより
好ましく、特に、ニトロ基、長鎖アルキル基、窒素原子
又は硫黄原子を構成原子とする複素環を有するスピロピ
ラン化合物が好ましい。以下スピロピラン化合物の具体
例を例示する。[0017] As the spiropyran compound used in the present invention, both those that develop color and those that discolor when irradiated with active energy rays can be used, but compounds that develop color are preferred because they have a clearer discrimination ability. It is more preferable that the material is colorless or almost colorless before irradiation with active energy rays, and develops a deep blue, purple, or reddish-purple color after irradiation, so that exposed areas and unexposed areas can be easily distinguished. Preferred specific examples of spiropyran compounds include indolinospiropyran compounds, benzothiazolinospiropyran compounds, oxazine spiropyran compounds, etc. Among these compounds, indolinospiropyran compounds are more preferable, especially those with nitro group. , a long-chain alkyl group, a spiropyran compound having a heterocycle having a nitrogen atom or a sulfur atom as a constituent atom is preferred. Specific examples of spiropyran compounds are illustrated below.
【0018】インドリノスピロピラン系化合物等として
、1,3,3−トリメチル−6’−ヒドロキシスピロ[
2’H−1’−ベンゾピラン−2,2’−インドリン]
、1,3,3−トリメチル−6’−ニトロスピロ[2’
H−1’−ベンゾピラン−2,2’−インドリン]、1
,3,3−トリメチル−8’−メトキシスピロ[2’H
−1’−ベンゾピラン−2,2’−インドリン]、1,
3,3−トリメチル−6’−ニトロ−8’−メトキシス
ピロ[2’H−1’−ベンゾピラン−2,2’−インド
リン]、1,3,3−トリメチル−5−メチルスルホニ
ル−6’−ニトロ−8’−メトキシスピロ[2’H−1
’−ベンゾピラン−2,2’−インドリン]、1−n−
ブチル−3,3−ジメチル−5−メチルスルホニル−6
’−ニトロ−8’−メトキシスピロ[2’H−1’−ベ
ンゾピラン−2,2’−インドリン]、1−n−ヘキサ
デシル−3,3−ジメチル−6’−ニトロ−8’−n−
ドデカノイルオキシメチルスピロ[2’H−1’−ベン
ゾピラン−2,2’−インドリン]、1−n−オクタデ
シル−3,3−ジメチル−6’−ニトロ−8’−n−ド
コサノイルオキシスピロ[2’H−1’−ベンゾピラン
−2,2’−インドリン]、1−n−オクタデシル−3
,3−ジメチル−6’−ニトロ−8’−n−ドデカノイ
ルオキシメチルスピロ[2’H−1’−ベンゾピラン−
2,2’−インドリン]、1,3,3−トリメチル−6
’−ニトロ−8’−n−ドコサノイルオキシメチルスピ
ロ[2’H−1’−ベンゾピラン−2,2’−インドリ
ン]、1−n−オクタデシル−3,3−ジメチル−6’
−ニトロ−8’−n−ドコサノイルオキシメチルスピロ
[2’H−1’−ベンゾピラン−2,2’−インドリン
]、1−n−オクタデシル−3,3−ジメチル−6’−
ニトロ−8’−n−トリアコンタノイルオキシメチルス
ピロ[2’H−1’−ベンゾピラン−2,2’−インド
リン]、1,3,3−トリメチル−6’−ニトロスピロ
[2’H−1’−ベンゾチオピラン−2,2’−インド
リン]、1−n−ヘキシル−3,3−ジメチル−6’−
ニトロ−8’−メトキシスピロ[2’H−1’−ベンゾ
チオピラン−2,2’−インドリン]、1,3,3−ト
リメチル−5−メトキシ−6’−ニトロ−8’−クロロ
スピロ[2’H−1’−ベンゾチオピラン−2,2’−
インドリン]、1,3,3−トリメチル−5,7−ジメ
トキシ−6’−ニトロ−8’−メトキシスピロ[2’H
−1’−ベンゾチオピラン−2,2’−インドリン]及
び1,3,3−トリメチル−5−ジメチルアミノ−6’
−ニトロスピロ[2’H−1’−ベンゾチオピラン−2
,2’−インドリン]等がある。Examples of indolinospiropyran compounds include 1,3,3-trimethyl-6'-hydroxyspiro[
2'H-1'-benzopyran-2,2'-indoline]
, 1,3,3-trimethyl-6'-nitrospiro[2'
H-1'-benzopyran-2,2'-indoline], 1
,3,3-trimethyl-8'-methoxyspiro[2'H
-1'-benzopyran-2,2'-indoline], 1,
3,3-trimethyl-6'-nitro-8'-methoxyspiro[2'H-1'-benzopyran-2,2'-indoline], 1,3,3-trimethyl-5-methylsulfonyl-6'- Nitro-8'-methoxyspiro[2'H-1
'-benzopyran-2,2'-indoline], 1-n-
Butyl-3,3-dimethyl-5-methylsulfonyl-6
'-Nitro-8'-methoxyspiro[2'H-1'-benzopyran-2,2'-indoline], 1-n-hexadecyl-3,3-dimethyl-6'-nitro-8'-n-
dodecanoyloxymethylspiro[2'H-1'-benzopyran-2,2'-indoline], 1-n-octadecyl-3,3-dimethyl-6'-nitro-8'-n-docosanoyloxyspiro[ 2'H-1'-benzopyran-2,2'-indoline], 1-n-octadecyl-3
,3-dimethyl-6'-nitro-8'-n-dodecanoyloxymethylspiro[2'H-1'-benzopyran-
2,2'-indoline], 1,3,3-trimethyl-6
'-Nitro-8'-n-docosanoyloxymethylspiro[2'H-1'-benzopyran-2,2'-indoline], 1-n-octadecyl-3,3-dimethyl-6'
-Nitro-8'-n-docosanoyloxymethylspiro[2'H-1'-benzopyran-2,2'-indoline], 1-n-octadecyl-3,3-dimethyl-6'-
Nitro-8'-n-triacontanoyloxymethylspiro[2'H-1'-benzopyran-2,2'-indoline], 1,3,3-trimethyl-6'-nitrospiro[2'H-1'-benzothiopyran-2,2'-indoline],1-n-hexyl-3,3-dimethyl-6'-
Nitro-8'-methoxyspiro[2'H-1'-benzothiopyran-2,2'-indoline],1,3,3-trimethyl-5-methoxy-6'-nitro-8'-chlorospiro[2'H-1'-Benzothiopyran-2,2'-
indoline], 1,3,3-trimethyl-5,7-dimethoxy-6'-nitro-8'-methoxyspiro[2'H
-1'-benzothiopyran-2,2'-indoline] and 1,3,3-trimethyl-5-dimethylamino-6'
-Nitrospiro[2'H-1'-benzothiopyran-2
, 2'-indoline], etc.
【0019】ベンゾチアゾリノスピロピラン系化合物と
して、3−メチル−3’,8’−ジメトキシ−6’−ニ
トロスピロ[2’H−1’−ベンゾピラン−2,2’−
ベンゾチアゾリン]、3−エチル−3’,8’−ジメト
キシ−6’−ニトロスピロ[2’H−1’−ベンゾピラ
ン−2,2’−ベンゾチアゾリン]、3−メチル−3’
−エトキシ−6’−ニトロ−8’−メトキシスピロ[2
’H−1’−ベンゾピラン−2,2’−ベンゾチアゾリ
ン]、3−メチル−3’−フェノキシ−6’−ニトロ−
8’−メトキシスピロ[2’H−1’−ベンゾピラン−
2,2’−ベンゾチアゾリン]等がある。As a benzothiazolinospiropyran compound, 3-methyl-3',8'-dimethoxy-6'-nitrospiro[2'H-1'-benzopyran-2,2'-
benzothiazoline], 3-ethyl-3',8'-dimethoxy-6'-nitrospiro[2'H-1'-benzopyran-2,2'-benzothiazoline], 3-methyl-3'
-ethoxy-6'-nitro-8'-methoxyspiro[2
'H-1'-benzopyran-2,2'-benzothiazoline], 3-methyl-3'-phenoxy-6'-nitro-
8'-methoxyspiro[2'H-1'-benzopyran-
2,2'-benzothiazoline] and the like.
【0020】オキサジン系スピロピラン化合物として、
1,3,3−トリメチルインドリノナフトスピロオキサ
ジン等がある。As an oxazine spiropyran compound,
Examples include 1,3,3-trimethylindolinonaphthospirooxazine.
【0021】スピロピラン化合物の好ましい添加量は、
電着塗料中の不揮発成分100部当り、0.1〜10部
である。0.1部未満では露光時の発色が充分ではなく
、コントラストが悪い。一方、10部を超えると感光性
が低下するとともに、コストアップとなる。The preferred amount of the spiropyran compound to be added is as follows:
The amount is 0.1 to 10 parts per 100 parts of nonvolatile components in the electrodeposition paint. If it is less than 0.1 part, the color development upon exposure will not be sufficient and the contrast will be poor. On the other hand, if the amount exceeds 10 parts, photosensitivity decreases and costs increase.
【0022】本発明に係わるスピロピラン化合物は単独
で用いても良いが、コントラストを高めるために、例え
ばマラカイトグリーン、アシッドマゼンダ、メチルバイ
オレット、エチルバイオレット、ビクトリアグリーン及
びビクトリアブルー等の染料を併用することもできる。The spiropyran compound according to the present invention may be used alone, but dyes such as malachite green, acid magenta, methyl violet, ethyl violet, Victoria green, and Victoria blue may also be used in combination to enhance the contrast. can.
【0023】上記染料の配合割合は常法に従えば良く、
例えばスピロピラン化合物の100部当たり各々50部
以下を配合すれば良い。[0023] The blending ratio of the above dyes may be determined according to a conventional method.
For example, 50 parts or less of each may be blended per 100 parts of the spiropyran compound.
【0024】本発明の電着塗料組成物を調製するには、
上記各成分を常法に従って混合すれば良いが、スピロピ
ラン化合物は、他の成分と直接配合するのではなく、先
にエチレングリコールモノエチルエーテル、エチレング
リコールモノブチルエーテル、ジエチレングリコールモ
ノメチルエーテル、ジエチレングリコールモノエチルエ
ーテル、ジエチレングリコールジメチルエーテル、エチ
ルカルビトールアセテート及びブチルカルビトールアセ
テート等の溶剤に溶解してから用いるのが好ましい。To prepare the electrodeposition coating composition of the present invention,
The above components may be mixed according to a conventional method, but instead of directly blending the spiropyran compound with other components, first mix ethylene glycol monoethyl ether, ethylene glycol monobutyl ether, diethylene glycol monomethyl ether, diethylene glycol monoethyl ether, It is preferable to use it after dissolving it in a solvent such as diethylene glycol dimethyl ether, ethyl carbitol acetate, and butyl carbitol acetate.
【0025】かくして得た本発明にかかわる電着塗料組
成物を用いて、常法の電着操作によりフォトレジスト膜
を、例えば銅張積層板上に形成でき、常法の乾燥、露光
、現像、エッチング及び脱膜工程を経ることにより所望
のプリント配線板を得ることができる。Using the electrodeposition coating composition according to the present invention thus obtained, a photoresist film can be formed on, for example, a copper-clad laminate by a conventional electrodeposition process, followed by drying, exposure, development, and the like by conventional methods. A desired printed wiring board can be obtained through the etching and film removal steps.
【0026】[0026]
【実施例】以下、本発明を実施例及び比較例によって更
に具体的に説明する。
実施例1
メチルメタクリレート45部、イソブチルアクリレート
20部、ヒドロキシエチルメタクリレート15部、アク
リル酸20部、アゾビスイソブチロニトリル2部からな
る混合液を、窒素雰囲気下で温度80℃に保持したイソ
プロピルアルコール110部に5時間かけて滴下した。
その後1時間熟成し、更にアゾビスイソブチロニトリル
0.5部とイソプロピルアルコール10部を加えて2時
間熟成し、高酸価アクリル樹脂溶液を合成した。[Examples] The present invention will now be explained in more detail with reference to Examples and Comparative Examples. Example 1 A mixed solution consisting of 45 parts of methyl methacrylate, 20 parts of isobutyl acrylate, 15 parts of hydroxyethyl methacrylate, 20 parts of acrylic acid, and 2 parts of azobisisobutyronitrile was prepared using isopropyl alcohol, which was maintained at a temperature of 80°C under a nitrogen atmosphere. The solution was added dropwise to 110 parts over 5 hours. Thereafter, the mixture was aged for 1 hour, and 0.5 parts of azobisisobutyronitrile and 10 parts of isopropyl alcohol were added and aged for 2 hours to synthesize a high acid value acrylic resin solution.
【0027】この高酸価アクリル樹脂溶液に空気を吹き
込みながら、グリシジルメタクリレート20部、触媒と
してジメチルベンジルアミン0.7部、フェノチアジン
0.15部を加えて温度80℃で12時間反応させて高
酸価感光性樹脂溶液を得た。この高酸価感光性樹脂溶液
中の不揮発成分の重量は50%、酸価は74であり、高
酸価感光性樹脂の重量平均分子量は38000、不飽和
当量は1モル/Kgであった。While blowing air into this high acid value acrylic resin solution, 20 parts of glycidyl methacrylate, 0.7 parts of dimethylbenzylamine as a catalyst, and 0.15 parts of phenothiazine were added and reacted at a temperature of 80°C for 12 hours to form a high acid. A photosensitive resin solution was obtained. The weight of nonvolatile components in this high acid value photosensitive resin solution was 50%, the acid value was 74, the weight average molecular weight of the high acid value photosensitive resin was 38,000, and the unsaturated equivalent was 1 mol/Kg.
【0028】この高酸価アクリル樹脂溶液138部に、
トリメチロールプロパントリアクリレート33部、1,
3,3−トリメチル−6’−ニトロスピロ[2’H−1
’−ベンゾピラン−2,2’−インドリン]の5重量%
ブチルカルビトールアセテート溶液20部(1,3,3
−トリメチル−6’−ニトロスピロ[2’H−1’−ベ
ンゾピラン−2,2’−インドリン]の含有量は不揮発
成分の重量当り1%となる)及び光開始剤としてイルガ
キュアー907(チバガイギー製:α−アミノアセトフ
ェノン)5部を加えて充分混合し、次にトリエチルアミ
ン6部を加えて充分に中和し、不揮発成分の重量が10
%となるように脱イオン水を加えてネガ型アニオン電着
塗料(pH7.2)とした。塗料の色は薄い赤色であっ
た。To 138 parts of this high acid value acrylic resin solution,
Trimethylolpropane triacrylate 33 parts, 1,
3,3-trimethyl-6'-nitrospiro[2'H-1
5% by weight of '-benzopyran-2,2'-indoline]
20 parts of butyl carbitol acetate solution (1,3,3
The content of -trimethyl-6'-nitrospiro[2'H-1'-benzopyran-2,2'-indoline] is 1% based on the weight of non-volatile components) and as a photoinitiator Irgacure 907 (manufactured by Ciba Geigy: Add 5 parts of α-aminoacetophenone) and mix thoroughly, then add 6 parts of triethylamine to thoroughly neutralize, until the weight of non-volatile components is 10
% of deionized water to obtain a negative anionic electrodeposition paint (pH 7.2). The color of the paint was light red.
【0029】この電着塗料を用いて、プリント配線板用
の銅張積層板(40×150×1.6mm)を陽極とし
て、塗料温度25℃、電流密度60mA/dm2に電流
値を設定し、3分間通電することにより電着塗装を行っ
た。Using this electrodeposition paint, a copper clad laminate for printed wiring boards (40 x 150 x 1.6 mm) was used as an anode, the paint temperature was set at 25°C, and the current value was set at a current density of 60 mA/dm2. Electrodeposition coating was performed by applying electricity for 3 minutes.
【0030】電着後、塗膜の析出した銅張積層板を水洗
し、エアーナイフで風乾した後、温度100℃で5分間
加熱乾燥して、厚みが17μmの粘着性の無い平滑なフ
ォトレジスト膜を得た。After electrodeposition, the copper-clad laminate with the deposited coating was washed with water, air-dried with an air knife, and then heated and dried at 100°C for 5 minutes to form a smooth photoresist with a thickness of 17 μm without stickiness. A membrane was obtained.
【0031】次にこのフォトレジスト膜上に配線パター
ンフィルムを真空装置によって密着させ、3KWの超高
圧水銀灯を用いて、照射線量100mJ/cm2で露光
を行った。Next, a wiring pattern film was adhered onto this photoresist film using a vacuum device, and exposure was performed using a 3 KW ultra-high pressure mercury lamp at an irradiation dose of 100 mJ/cm 2 .
【0032】露光後パターンフィルムを除去したところ
、露光部は濃く鮮明な赤紫色に発色したのに対し、未露
光部は露光前と同じくほぼ無色のままで、充分に配線パ
ターンが識別できるものであった。When the pattern film was removed after exposure, the exposed area developed a deep and clear reddish-purple color, while the unexposed area remained almost colorless, as before exposure, and the wiring pattern could be clearly identified. there were.
【0033】続いて1%炭酸ナトリウム水溶液で現像し
た後、塩化第2鉄水溶液でエッチングを行い、更に10
%水酸化ナトリウム水溶液で残存レジスト膜を除去し、
所望の配線パターンを有するプリント配線板を得た。Subsequently, after development with a 1% sodium carbonate aqueous solution, etching was performed with a ferric chloride aqueous solution, and further 10%
% sodium hydroxide aqueous solution to remove the remaining resist film.
A printed wiring board having a desired wiring pattern was obtained.
【0034】また、照射線量を50mJ/cm2に下げ
て露光を行い、50mJ/cm2でも充分な発色を示し
た。[0034] Further, exposure was carried out with the irradiation dose lowered to 50 mJ/cm2, and sufficient color development was obtained even at 50 mJ/cm2.
【0035】ここで用いた電着塗料は室温で保存してお
き、1週間後、2週間後及び1カ月後に同様の電着操作
を行い、電着塗料の発色の有無や露光部の発色性を評価
した。どの時点においても電着塗料は初期の色と変わら
ず、また露光部の発色性に関しても初期と変わりない高
いコントラストを示して非常に良好であった。現像以降
の工程も問題なく実施することができた。The electrodeposition paint used here was stored at room temperature, and after one week, two weeks, and one month, the same electrodeposition operation was carried out to determine whether or not the electrodeposition paint developed color and the color development of the exposed area. was evaluated. At any point in time, the color of the electrodeposition paint did not change from the initial color, and the color development of the exposed area was very good, showing the same high contrast as the initial color. The steps after development were also able to be carried out without any problems.
【0036】実施例2
実施例1で用いた1,3,3−トリメチル−6’−ニト
ロスピロ[2’H−1’−ベンゾピラン−2,2’−イ
ンドリン]の代わりに1,3,3−トリメチル−8’−
メトキシスピロ[2’H−1’−ベンゾピラン−2,2
’−インドリン]を用いて、実施例1と同様の評価を行
った。結果は下記表1に示す。Example 2 1,3,3-trimethyl-6'-nitrospiro [2'H-1'-benzopyran-2,2'-indoline] used in Example 1 was replaced with 1,3,3- Trimethyl-8'-
Methoxyspiro[2'H-1'-benzopyran-2,2
'-indoline], the same evaluation as in Example 1 was performed. The results are shown in Table 1 below.
【0037】実施例3
実施例1で用いた1,3,3−トリメチル−6’−ニト
ロスピロ[2’H−1’−ベンゾピラン−2,2’−イ
ンドリン]の代わりに1,3,3−トリメチル−6’−
ニトロ−8’−n−ドコサノイルオキシメチルスピロ[
2’H−1’−ベンゾピラン−2,2’−インドリン]
を用いて、実施例1と同様の評価を行った。結果は下記
表1に示す。Example 3 In place of 1,3,3-trimethyl-6'-nitrospiro[2'H-1'-benzopyran-2,2'-indoline] used in Example 1, 1,3,3- Trimethyl-6'-
Nitro-8'-n-docosanoyloxymethyl spiro [
2'H-1'-benzopyran-2,2'-indoline]
The same evaluation as in Example 1 was performed using the following. The results are shown in Table 1 below.
【0038】比較例1
実施例1で用いた1,3,3−トリメチル−6’−ニト
ロスピロ[2’H−1’−ベンゾピラン−2,2’−イ
ンドリン]の代わりにロイコクリスタルバイオレットを
用いて、実施例1と同様の評価を行った。その結果、電
着塗料を調製した直後に電着塗装して得られたフォトレ
ジスト膜は、露光後、露光部は青紫色に発色し、ほぼ無
色の未露光部とは充分に識別できるものであった。Comparative Example 1 Leuco crystal violet was used in place of 1,3,3-trimethyl-6'-nitrospiro[2'H-1'-benzopyran-2,2'-indoline] used in Example 1. , the same evaluation as in Example 1 was performed. As a result, in the photoresist film obtained by electrodeposition coating immediately after preparing the electrodeposition paint, the exposed areas developed a bluish-purple color after exposure, and were sufficiently distinguishable from the almost colorless unexposed areas. there were.
【0039】しかし、ここで用いた電着塗料は室温で暗
所に保存中、徐々に青く発色し始め、電着塗料を調製し
てから1週間後には露光部と未露光部の識別能が高いフ
ォトレジスト膜を得ることがもはや困難な状態となった
。これらの結果も下記表1に示す。However, while the electrodeposition paint used here was stored in a dark place at room temperature, it gradually began to develop a blue color, and one week after preparing the electrodeposition paint, it became impossible to distinguish between exposed and unexposed areas. It has become difficult to obtain high photoresist films. These results are also shown in Table 1 below.
【0040】[0040]
【表1】[Table 1]
【0041】[0041]
【発明の効果】本発明の電着塗料組成物は、長期間安定
に貯蔵することができ、かつ電着塗料を調製した後長期
間にわたりコントラストの高いフォトレジスト膜を形成
することができるものである。従って、本発明の組成物
は、露光の有無を確認したり、二重露光を防止する効果
を長期間保持できるため、電着塗料の使用期間を大幅に
延ばすことができ、実用上多大な利点を有するものであ
る。[Effects of the Invention] The electrodeposition coating composition of the present invention can be stored stably for a long period of time, and can form a photoresist film with high contrast for a long period of time after preparing the electrodeposition coating composition. be. Therefore, the composition of the present invention can retain the effect of confirming the presence or absence of exposure and preventing double exposure for a long period of time, and therefore can significantly extend the period of use of electrodeposition paints, which has great practical advantages. It has the following.
Claims (1)
ン化合物を含むことを特徴とするフォトレジスト膜形成
用電着塗料組成物。1. An electrodeposition coating composition for forming a photoresist film, comprising a spiropyran compound having photochromic properties.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12663391A JPH04329543A (en) | 1991-04-30 | 1991-04-30 | Composition of electrodeposition coating material for forming photoresist film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12663391A JPH04329543A (en) | 1991-04-30 | 1991-04-30 | Composition of electrodeposition coating material for forming photoresist film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04329543A true JPH04329543A (en) | 1992-11-18 |
Family
ID=14940027
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12663391A Pending JPH04329543A (en) | 1991-04-30 | 1991-04-30 | Composition of electrodeposition coating material for forming photoresist film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04329543A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994015260A1 (en) * | 1992-12-25 | 1994-07-07 | Hoechst Japan Limited | Pattern forming material |
WO2002071466A1 (en) * | 2001-03-07 | 2002-09-12 | Atotech Deutschland Gmbh | Metal pattern formation |
KR100890791B1 (en) * | 2001-05-17 | 2009-03-31 | 도쿄 오카 고교 가부시키가이샤 | A material for forming a protective film |
-
1991
- 1991-04-30 JP JP12663391A patent/JPH04329543A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1994015260A1 (en) * | 1992-12-25 | 1994-07-07 | Hoechst Japan Limited | Pattern forming material |
WO2002071466A1 (en) * | 2001-03-07 | 2002-09-12 | Atotech Deutschland Gmbh | Metal pattern formation |
KR100890791B1 (en) * | 2001-05-17 | 2009-03-31 | 도쿄 오카 고교 가부시키가이샤 | A material for forming a protective film |
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