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JP6809038B2 - Flat glass cleaning device - Google Patents

Flat glass cleaning device Download PDF

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Publication number
JP6809038B2
JP6809038B2 JP2016162193A JP2016162193A JP6809038B2 JP 6809038 B2 JP6809038 B2 JP 6809038B2 JP 2016162193 A JP2016162193 A JP 2016162193A JP 2016162193 A JP2016162193 A JP 2016162193A JP 6809038 B2 JP6809038 B2 JP 6809038B2
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Prior art keywords
cleaning
cleaning device
gears
flat glass
glass
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JP2018030058A (en
Inventor
隼人 奥
隼人 奥
浩市 北嶋
浩市 北嶋
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Nippon Electric Glass Co Ltd
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Nippon Electric Glass Co Ltd
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Priority to JP2016162193A priority Critical patent/JP6809038B2/en
Priority to PCT/JP2017/029093 priority patent/WO2018037934A1/en
Priority to CN201780051109.XA priority patent/CN109641242A/en
Priority to KR1020197007798A priority patent/KR102419069B1/en
Priority to TW106127892A priority patent/TWI810160B/en
Publication of JP2018030058A publication Critical patent/JP2018030058A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B1/00—Cleaning by methods involving the use of tools
    • B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
    • B08B1/32—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members
    • B08B1/36—Cleaning by methods involving the use of tools by movement of cleaning members over a surface using rotary cleaning members rotating about an axis orthogonal to the surface
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0075—Cleaning of glass
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H55/00—Elements with teeth or friction surfaces for conveying motion; Worms, pulleys or sheaves for gearing mechanisms
    • F16H55/02—Toothed members; Worms
    • F16H55/06—Use of materials; Use of treatments of toothed members or worms to affect their intrinsic material properties

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Electromagnetism (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Cleaning In General (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Surface Treatment Of Glass (AREA)
  • Glass Compositions (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)

Description

本発明は、板ガラス洗浄装置の技術に関する。 The present invention relates to a technique for a flat glass cleaning device.

一般的に、液晶ディスプレイ、有機ＥＬディスプレイなどのフラットパネルディスプレイ（ＦＰＤ）用のガラス基板を製造する際には、製造過程でガラス基板のガラス面（具体的には、ガラス面における電子機能素子等が形成される有効面）に付着した微小なガラス片や塵芥等の異物を取り除くための洗浄処理が行われる。これにより、ガラス基板のガラス面が清浄化され、後工程等においてガラス基板のガラス面上に電子機能素子等を精度良く形成することが可能となる。 Generally, when manufacturing a glass substrate for a flat panel display (FPD) such as a liquid crystal display or an organic EL display, the glass surface of the glass substrate (specifically, an electronic functional element on the glass surface, etc.) is manufactured during the manufacturing process. A cleaning process is performed to remove foreign substances such as minute glass pieces and dust adhering to the effective surface on which the glass is formed. As a result, the glass surface of the glass substrate is cleaned, and it becomes possible to accurately form an electronic functional element or the like on the glass surface of the glass substrate in a post-process or the like.

例えば、特許文献１には、ウエハ（例えば、ガラス基板）の表面及び裏面を洗浄するための基板処理装置が開示されている。 For example, Patent Document 1 discloses a substrate processing apparatus for cleaning the front surface and the back surface of a wafer (for example, a glass substrate).

特許文献１に開示される基板処理装置は、多数のウエハを純液中に浸漬する液中ローダと、裏面洗浄装置と、表面洗浄装置と、搬送装置とを備えている。裏面洗浄装置は、回転軸の上端に固定される円形ブラシを有し、液中ローダから取り出されたウエハに処理液を供給することにより、円形ブラシをウエハの裏面に当接させるとともに回転させて、ウエハの裏面を下方からブラシ洗浄する。表面洗浄装置は、裏面洗浄装置による洗浄後のウエハに化学処理のための薬液を供給することにより、ウエハの表面を上方からブラシ洗浄する。 The substrate processing apparatus disclosed in Patent Document 1 includes a submerged loader for immersing a large number of wafers in a pure liquid, a back surface cleaning device, a front surface cleaning device, and a transfer device. The back surface cleaning device has a circular brush fixed to the upper end of the rotating shaft, and by supplying the processing liquid to the wafer taken out from the submerged loader, the circular brush is brought into contact with the back surface of the wafer and rotated. , Brush the back surface of the wafer from below. The front surface cleaning device brush-cleans the surface of the wafer from above by supplying a chemical solution for chemical treatment to the wafer after cleaning by the back surface cleaning device.

また、従来から、上記円形ブラシのような洗浄部材を複数有し、該洗浄部材を回転させながら板ガラスのガラス面に押し当てて、板ガラスのガラス面に付着した異物を取り除く板ガラス洗浄装置が用いられている。このような板ガラス洗浄装置では、複数の洗浄部材を回転させるために洗浄部材の各回転軸にギア（例えば、平歯車）を設けて、隣接するギア同士を噛み合わせて、そのうちの一つの駆動用のギアを駆動手段により回転させることで複数のギアを同時に回転させて複数の洗浄部材を回転させることができる。 Further, conventionally, a plate glass cleaning device having a plurality of cleaning members such as the circular brush and pressing the cleaning member against the glass surface of the plate glass while rotating the cleaning member to remove foreign matter adhering to the glass surface of the plate glass has been used. ing. In such a flat glass cleaning device, gears (for example, spur gears) are provided on each rotating shaft of the cleaning member in order to rotate a plurality of cleaning members, and adjacent gears are meshed with each other to drive one of them. By rotating the gears by the driving means, it is possible to rotate a plurality of gears at the same time and rotate a plurality of cleaning members.

特開平７−７４１３３号公報Japanese Unexamined Patent Publication No. 7-74133

しかしながら、上述の板ガラス洗浄装置が有する複数のギアを噛み合わせた機構では、隣接するギア同士が同一の材質で構成された場合、摩擦抵抗が大きくなるため、ギア同士の磨耗により発塵し、板ガラスのガラス面を汚染する原因となる。そのため、このような板ガラス洗浄装置においては、ギア同士の磨耗による発塵を抑制する構成が望まれていた。 However, in the mechanism in which the plurality of gears of the above-mentioned flat glass cleaning device are meshed with each other, if the adjacent gears are made of the same material, the frictional resistance becomes large, so that dust is generated due to the wear of the gears and the flat glass. It causes the glass surface of the. Therefore, in such a flat glass cleaning device, a configuration for suppressing dust generation due to wear between gears has been desired.

本発明は、以上に示した現状の問題点を鑑みてなされたものであり、ギア同士の磨耗による発塵の抑制が図られた板ガラス洗浄装置を提供することを課題とする。 The present invention has been made in view of the current problems described above, and an object of the present invention is to provide a flat glass cleaning device in which dust generation due to wear between gears is suppressed.

本発明の解決しようとする課題は以上の如くであり、次にこの課題を解決するための手段を説明する。 The problem to be solved by the present invention is as described above, and next, the means for solving this problem will be described.

即ち、本発明に係る板ガラス洗浄装置は、板ガラスのガラス面を洗浄する板ガラス洗浄装置であって、複数の洗浄部材と、前記複数の洗浄部材の各々を支持する回転軸と、前記回転軸に設けられるギアと、前記回転軸の少なくとも１つを駆動する回転駆動手段と、を備え、前記ギアは、隣接するギア同士で互いに噛合し、かつ材質が異なることを特徴とする。 That is, the plate glass cleaning device according to the present invention is a plate glass cleaning device that cleans the glass surface of the plate glass, and is provided on the plurality of cleaning members, a rotating shaft that supports each of the plurality of cleaning members, and the rotating shaft. The gears are provided with a rotary driving means for driving at least one of the rotating shafts, and the gears are characterized in that adjacent gears mesh with each other and are made of different materials.

このような板ガラス洗浄装置によれば、隣接するギア同士で材質が異なることにより、ギアを同一の材質で構成した場合よりも摩擦抵抗が小さくなり、ギア同士の磨耗による発塵を抑制することができる。 According to such a flat glass cleaning device, since the materials of adjacent gears are different, the frictional resistance becomes smaller than when the gears are made of the same material, and dust generation due to wear of the gears can be suppressed. it can.

また、本発明に係る板ガラス洗浄装置において、前記隣接するギア同士は、一方のギアが金属製であり、他方のギアが樹脂製であることが好ましい。 Further, in the plate glass cleaning device according to the present invention, it is preferable that one of the adjacent gears is made of metal and the other gear is made of resin.

このような板ガラス洗浄装置によれば、金属製のギア同士を噛み合わせて構成した場合に発生する金属粉が発生し難くなる。
これにより、金属粉による板ガラスのガラス面への汚染を防止することができる。
さらに、金属製のギアを使用しているため、樹脂製のギア同士を噛み合わせて構成した場合より、ギアの耐久性が向上し、ギアの交換頻度が抑えられ、装置のメンテナンスに手間がかからない。 According to such a flat glass cleaning device, metal powder generated when metal gears are meshed with each other is less likely to be generated.
This makes it possible to prevent the metal powder from contaminating the glass surface of the flat glass.
Furthermore, because metal gears are used, the durability of the gears is improved, the frequency of gear replacement is reduced, and maintenance of the device is less troublesome than when resin gears are meshed with each other. ..

また、本発明に係る板ガラス洗浄装置において、前記金属製のギアと前記樹脂製のギアが交互に噛み合うように複数配置されることが好ましい。 Further, in the plate glass cleaning device according to the present invention, it is preferable that a plurality of the metal gears and the resin gears are arranged so as to be alternately meshed with each other.

このような板ガラス洗浄装置によれば、複数のギアの少なくとも一つを回転駆動手段により駆動することで、複数のギアを駆動することができるため、複数の回転駆動手段を必要とせず、メンテナンスが容易となる。 According to such a flat glass cleaning device, a plurality of gears can be driven by driving at least one of the plurality of gears by the rotary drive means, so that the maintenance can be performed without the need for the plurality of rotary drive means. It will be easy.

本発明によれば、隣接するギア同士で材質が異なることにより、ギアを同一の材質で構成した場合よりも摩擦抵抗が小さくなり、ギア同士の磨耗による発塵を抑制することができる。 According to the present invention, since the materials of adjacent gears are different, the frictional resistance becomes smaller than when the gears are made of the same material, and dust generation due to wear of the gears can be suppressed.

本発明の一実施形態に係る板ガラス洗浄装置において、洗浄部材近傍の構成を示した概念斜視図。The conceptual perspective view which showed the structure in the vicinity of the cleaning member in the flat glass cleaning apparatus which concerns on one Embodiment of this invention. 板ガラス洗浄装置の洗浄部材を上方から見た平面図。Top view of the cleaning member of the flat glass cleaning device as viewed from above. 図２におけるＡ−Ａ線矢視断面図。FIG. 2 is a cross-sectional view taken along the line AA in FIG.

次に、本発明の一実施形態に係る板ガラス洗浄装置１０について、図１乃至図３を用いて説明する。
なお、以下の説明に関しては便宜上、図１、図３に示す上下方向を、それぞれ板ガラス洗浄装置１０の上下方向と規定して記述する。
また、図１、図２においては、矢印Ｆの方向を板ガラスＧの搬送方向と規定して記述する。
また、図１、図２においては、搬送方向に直交する方向を幅方向と規定して記述する。 Next, the flat glass cleaning device 10 according to the embodiment of the present invention will be described with reference to FIGS. 1 to 3.
Regarding the following description, for convenience, the vertical directions shown in FIGS. 1 and 3 are defined as the vertical directions of the plate glass cleaning device 10, respectively.
Further, in FIGS. 1 and 2, the direction of the arrow F is defined as the transport direction of the flat glass G.
Further, in FIGS. 1 and 2, the direction orthogonal to the transport direction is defined as the width direction.

図１に示すように、本実施形態に係る板ガラス洗浄装置１０（以下、単に洗浄装置１０という）は、回転駆動手段であるモータＭにより洗浄部材１１を回転駆動して板ガラスＧのガラス面の両面（表面及び裏面）を洗浄する装置である。
洗浄装置１０は、例えば、板ガラスＧの製造装置における搬送装置の搬送経路上に配置され、搬送装置により上流側から下流側（図２においては、図中左側から右側）に向けて水平状態で搬送される矩形状の板ガラスＧのガラス面の両面（表面及び裏面）を洗浄するための装置である。 As shown in FIG. 1, in the plate glass cleaning device 10 (hereinafter, simply referred to as a cleaning device 10) according to the present embodiment, the cleaning member 11 is rotationally driven by a motor M which is a rotation driving means to drive both sides of the glass surface of the plate glass G. It is a device for cleaning (front surface and back surface).
The cleaning device 10 is arranged, for example, on the transfer path of the transfer device in the plate glass G manufacturing device, and is horizontally conveyed by the transfer device from the upstream side to the downstream side (in FIG. 2, from the left side to the right side in the drawing). It is a device for cleaning both surfaces (front surface and back surface) of the glass surface of the rectangular plate glass G to be formed.

なお、洗浄装置１０の上流側には、板ガラスＧに対して切断加工や端面加工等の種々の加工を施す加工装置等（図示せず）が設けられている。 On the upstream side of the cleaning device 10, a processing device (not shown) for performing various processing such as cutting and end face processing on the flat glass G is provided.

洗浄装置１０は、上流側に設けられた各種加工工程を経ることによって板ガラスＧのガラス面の表面及び裏面に付着した微小なガラス粉や塵芥等の異物を取り除くための洗浄処理を実行するものである。洗浄装置１０は、板ガラスＧのガラス面の表面側及び裏面側にそれぞれ複数の洗浄部材１１・１１・・・を有している。
なお、例えば本実施形態においては、洗浄装置１０は、板ガラスＧのガラス面の表面側及び裏面側（本実施形態では、上面側及び下面側）を洗浄するために複数の洗浄部材１１・１１・・・が板ガラスＧを介して上下に対向配置されている。
また、本実施形態の洗浄装置１０では、板ガラスＧのガラス面の両面を洗浄する装置として構成しているが、特に限定するものでなく、板ガラスＧのガラス面の一方面（例えば、ガラス面における電子機能素子等が形成される有効面）のみを洗浄する装置として構成することもできる。
また、図１及び図２では、洗浄装置１０において、板ガラスＧの上面側に配置される複数の洗浄部材１１・１１の図示を省略し、板ガラスＧの下側面に配置される複数の洗浄部材１１・１１・・・のみを図示している。 The cleaning device 10 executes a cleaning process for removing foreign substances such as fine glass powder and dust adhering to the front surface and the back surface of the glass surface of the plate glass G through various processing steps provided on the upstream side. is there. The cleaning device 10 has a plurality of cleaning members 11 and 11, respectively, on the front surface side and the back surface side of the glass surface of the plate glass G.
For example, in the present embodiment, the cleaning device 10 has a plurality of cleaning members 11/11 in order to clean the front surface side and the back surface side (in the present embodiment, the upper surface side and the lower surface side) of the glass surface of the plate glass G. ... Are vertically opposed to each other via the plate glass G.
Further, the cleaning device 10 of the present embodiment is configured as a device for cleaning both sides of the glass surface of the plate glass G, but is not particularly limited, and is not particularly limited, and one surface of the glass surface of the plate glass G (for example, on the glass surface). It can also be configured as a device for cleaning only the effective surface on which the electronic functional element or the like is formed.
Further, in FIGS. 1 and 2, in the cleaning device 10, the plurality of cleaning members 11 and 11 arranged on the upper surface side of the plate glass G are omitted, and the plurality of cleaning members 11 arranged on the lower side surface of the plate glass G are omitted.・ Only 11 ... Is shown.

洗浄装置１０は、複数の洗浄部材１１・１１・・・と、複数の洗浄部材１１・１１・・・の各々を支持する回転軸１２・１２・・・と、回転軸１２・１２・・・の各々に設けられるギア（平歯車）１３・１３・・・と、回転軸１２・１２・・・を駆動する回転駆動手段であるモータＭと、を備える。図１では、モータＭが回転軸１２を直接回転させているが、モータＭの図示しない回転軸に図示しないギアを設け、モータＭのギアと洗浄部材１１の回転軸１２に設けられたギア１３と噛み合わせることで、モータＭがギア１３を回転させる形態でも良い。 The cleaning device 10 includes a plurality of cleaning members 11/11 ..., a rotating shaft 12/12 ... Supporting each of the plurality of cleaning members 11/11 ..., and a rotating shaft 12/12 ... Gears (spur gears) 13, 13 ... Provided in each of the above, and a motor M, which is a rotation driving means for driving the rotation shafts 12, 12, ... Are provided. In FIG. 1, the motor M directly rotates the rotating shaft 12, but a gear (not shown) is provided on the rotating shaft (not shown) of the motor M, and a gear 13 provided on the gear of the motor M and the rotating shaft 12 of the cleaning member 11. The motor M may rotate the gear 13 by engaging with the motor M.

洗浄部材１１は、ディスク形状の部材であり、板ガラスＧのガラス面に対して対向配置される洗浄パッド１４と、洗浄パッド１４を保持する洗浄ヘッド１５とを主に備えている。
また、洗浄部材１１は、平面視において搬送方向に対して直交する方向に並べて配置されている。 The cleaning member 11 is a disk-shaped member, and mainly includes a cleaning pad 14 arranged to face the glass surface of the plate glass G, and a cleaning head 15 for holding the cleaning pad 14.
Further, the cleaning members 11 are arranged side by side in a direction orthogonal to the transport direction in a plan view.

洗浄パッド１４は、硬質樹脂、軟質樹脂等の弾性体を使用することができ、例えばフェルト状の繊維成形体、スポンジ状の発泡樹脂成形体、あるいはスポンジ状の発泡ゴム成形体等で円形状に形成されている。本実施形態においては、洗浄パッド１４の材質は、ポリビニルアルコール（ＰＶＡ）である。 An elastic body such as a hard resin or a soft resin can be used for the cleaning pad 14, and the cleaning pad 14 is formed into a circular shape by, for example, a felt-like fiber molded body, a sponge-shaped foamed resin molded body, or a sponge-shaped foam rubber molded body. It is formed. In the present embodiment, the material of the cleaning pad 14 is polyvinyl alcohol (PVA).

洗浄パッド１４における板ガラスＧとの対向面（接触面）には、径方向に放射状に形成された凹溝１４ａが円周方向に複数（本実施形態では６本）設けられている。
また、洗浄パッド１４には、その中心部及び中心部近傍に洗浄液を供給するための円形状の複数（本実施形態では３個）の供給口１４ｂが形成されている。 A plurality of concave grooves 14a formed radially in the radial direction (six in the present embodiment) are provided on the surface (contact surface) of the cleaning pad 14 facing the flat glass G in the circumferential direction.
Further, the cleaning pad 14 is formed with a plurality of circular (three in the present embodiment) supply ports 14b for supplying the cleaning liquid to the central portion and the vicinity of the central portion thereof.

そして、供給口１４ｂは、洗浄ヘッド１５が有する図示しない洗浄液供給孔に連通されており、洗浄処理の実行中には、洗浄液が、供給口１４ｂを介して供給されるようになっている。 The supply port 14b communicates with a cleaning liquid supply hole (not shown) included in the cleaning head 15, and the cleaning liquid is supplied through the supply port 14b during the execution of the cleaning process.

なお、洗浄ヘッド１５は、例えば、アルミニウム合金やステンレス鋼等の金属材料で円盤状に形成されている。 The cleaning head 15 is formed of a metal material such as an aluminum alloy or stainless steel in a disk shape.

回転軸１２は、先端に洗浄部材１１の洗浄ヘッド１５が固定される軸部材である。
複数の回転軸１２・１２・・・は、図３に示すように、互いの回転軸１２の軸方向が平行となるように、回転軸支持部１６に回転自在に支持されている。
なお、図３では、板ガラスＧの上面側の回転軸１２・１２を支持する回転軸支持部１６及び回転軸１２・１２のそれぞれに設けられるギア１３・１３の図示を省略している。 The rotating shaft 12 is a shaft member to which the cleaning head 15 of the cleaning member 11 is fixed to the tip.
As shown in FIG. 3, the plurality of rotating shafts 12, 12, ... Are rotatably supported by the rotating shaft support portion 16 so that the axial directions of the rotating shafts 12 are parallel to each other.
In FIG. 3, the rotation shaft support portions 16 that support the rotation shafts 12 and 12 on the upper surface side of the flat glass G and the gears 13 and 13 provided on the rotation shafts 12 and 12 are not shown.

ここで、回転軸支持部１６は、図示しない上下位置駆動手段により、複数の洗浄パッド１４を板ガラスＧの一方面に当接させる前進位置（当接位置）と、洗浄パッド１４を板ガラスＧから離間させる後退位置（離間位置）との間を往復動可能で、かつ回転可能に構成されている。 Here, the rotary shaft support portion 16 separates the cleaning pad 14 from the plate glass G and the forward position (contact position) where the plurality of cleaning pads 14 are brought into contact with one surface of the plate glass G by a vertical position driving means (not shown). It is configured so that it can reciprocate and rotate with and from the retracted position (separation position).

複数の回転軸１２・１２・・・のうちの一つには、モータＭが連結され、該モータＭを回転駆動させることで、回転軸１２を回転駆動させることができる。
複数の回転軸１２・１２・・・は、図１に示すように、モータＭに連結される回転軸である駆動軸１２ａと、モータＭに連結されていない回転軸である従動軸１２ｂ・１２ｂ・・・とにより構成されている。 A motor M is connected to one of the plurality of rotating shafts 12, 12, ..., And the rotating shaft 12 can be rotationally driven by driving the motor M to rotate.
As shown in FIG. 1, the plurality of rotating shafts 12 and 12b are a drive shaft 12a which is a rotating shaft connected to the motor M and a driven shaft 12b and 12b which are rotating shafts not connected to the motor M. ... and is composed of.

ギア１３は、隣接するギア同士で互いに噛合し、かつ材質が異なるものである。
また、ギア１３は、回転軸１２の軸方向中途部に設けられた平歯車である。
具体的には、ギア１３は、金属製のギア１３ａと、合成樹脂製のギア１３ｂとにより構成され、互いに噛み合うとともに交互に直列状に配置されている。
すなわち、複数のギア１３・１３・・・は、直列状に噛み合うギア列を構成し、板ガラスＧの搬送方向に対して直交するように配置されている。 The gears 13 are made of different materials and mesh with each other in adjacent gears.
The gear 13 is a spur gear provided in the middle of the rotating shaft 12 in the axial direction.
Specifically, the gear 13 is composed of a metal gear 13a and a synthetic resin gear 13b, which mesh with each other and are alternately arranged in series.
That is, the plurality of gears 13, 13 ... Form a gear train that meshes in series and are arranged so as to be orthogonal to the transport direction of the flat glass G.

金属製のギア１３ａは、錆び難い金属を使用することが好ましく、ステンレスを使用することが好ましい。
合成樹脂性のギア１３ｂは、硬質樹脂であることが好ましく、例えば、ポリエーテルエーテルケトン樹脂（ＰＥＥＫ樹脂）や、ＭＣナイロン樹脂等を使用することができる。 For the metal gear 13a, it is preferable to use a metal that does not easily rust, and it is preferable to use stainless steel.
The synthetic resin gear 13b is preferably a hard resin, and for example, polyetheretherketone resin (PEEK resin), MC nylon resin, or the like can be used.

なお、本実施形態では、ギア１３として平歯車を用いているが、特に限定するものではない。
例えば、平歯車以外では、はすば歯車を用いて構成することもできる。 In the present embodiment, a spur gear is used as the gear 13, but the gear 13 is not particularly limited.
For example, other than spur gears, helical gears may be used.

本実施形態の洗浄装置１０では、図２に示すように、板ガラスＧの搬送方向との直交方向に沿って直列状に複数配置して構成される洗浄部材１１・１１・・・の列を板ガラスＧの搬送方向（水平方向）に沿って所定間隔で複数配置される。
具体的には、本実施形態の洗浄装置１０では、板ガラスＧの搬送方向（水平方向）に沿って上流側と下流側に２列配置されている。 In the cleaning device 10 of the present embodiment, as shown in FIG. 2, a row of cleaning members 11 and 11 ... Are arranged in series along a direction orthogonal to the transport direction of the plate glass G is arranged on the plate glass. A plurality of G are arranged at predetermined intervals along the transport direction (horizontal direction) of G.
Specifically, in the cleaning device 10 of the present embodiment, two rows are arranged on the upstream side and the downstream side along the transport direction (horizontal direction) of the flat glass G.

洗浄部材１１・１１・・・の配置態様は、板ガラスＧの一方面の洗浄領域内で洗浄されない部位が生じないように設定される。
本実施形態では、板ガラスＧの搬送方向（水平方向）で隣り合う各洗浄部材１１・１１・・・が板ガラスＧの幅方向の位置を相互に異ならせて（オフセットして）配置されている。 The arrangement mode of the cleaning members 11 and 11 ... Is set so that an uncleaned portion does not occur in the cleaning region on one surface of the flat glass G.
In the present embodiment, the cleaning members 11 and 11 ... Adjacent to each other in the transport direction (horizontal direction) of the plate glass G are arranged so that the positions of the plate glass G in the width direction are different from each other (offset).

すなわち、板ガラスＧの搬送方向において上流側と下流側で隣り合う洗浄部材１１・１１・・・の各列においては、各洗浄部材１１の板ガラスＧの幅方向の位置を相互に異ならせている。
これにより、板ガラスＧの一方面の洗浄領域内で洗浄されない部位が残ることを防ぐことができる。 That is, in each row of the cleaning members 11 and 11 ... Adjacent to each other on the upstream side and the downstream side in the transport direction of the plate glass G, the positions of the plate glass G of each cleaning member 11 in the width direction are different from each other.
This makes it possible to prevent uncleaned portions from remaining in the cleaning region on one surface of the flat glass G.

なお、洗浄部材１１・１１・・・の配置態様は板ガラスＧの洗浄面内で洗浄されない部位が生じない限りにおいて任意に設定することができる。 The arrangement mode of the cleaning members 11 and 11 ... Can be arbitrarily set as long as there is no uncleaned portion in the cleaning surface of the plate glass G.

次に、洗浄装置１０により板ガラスＧの一方面を洗浄する工程を説明する。 Next, a step of cleaning one surface of the plate glass G with the cleaning device 10 will be described.

先ず、搬送装置により板ガラスＧが洗浄装置１０に水平状態で搬入されると、洗浄装置１０のうち、最も上流側にある洗浄部材１１・１１・・・の列がモータＭの駆動により回転しながら前進位置（当接位置）に移動し、各洗浄部材１１の洗浄パッド１４が板ガラスＧの表面及び裏面（本実施形態では、上面及び下面）に各々当接されて洗浄処理が開始される。
この際、モータＭが回転駆動することにより、互いに噛み合う複数のギア１３・１３・・・（ギア１３ａ・１３ａ・・・およびギア１３ｂ・１３ｂ・・・）が連動し、回転駆動されことになる。 First, when the plate glass G is carried into the cleaning device 10 in a horizontal state by the transport device, the rows of the cleaning members 11 and 11 ... On the most upstream side of the cleaning device 10 rotate while being driven by the motor M. The cleaning pad 14 of each cleaning member 11 is brought into contact with the front surface and the back surface (upper surface and lower surface in the present embodiment) of the plate glass G, respectively, to start the cleaning process after moving to the advancing position (contact position).
At this time, by rotationally driving the motor M, a plurality of gears 13 and 13 ... (Gears 13a and 13a ... and gears 13b and 13b ...) that mesh with each other are interlocked and rotationally driven. ..

続いて図１において、洗浄部材１１による洗浄処理の実行中、各洗浄部材１１に設けられた供給口１４ｂから板ガラスＧの上面及び下面に対して洗浄液が連続的に供給・吐出される。
すなわち、洗浄部材１１（洗浄パッド１４）と板ガラスＧとの間に所定量の洗浄液が介在した状態で板ガラスＧの上面及び下面の洗浄処理が実行される。 Subsequently, in FIG. 1, during the execution of the cleaning process by the cleaning member 11, the cleaning liquid is continuously supplied and discharged from the supply port 14b provided on each cleaning member 11 to the upper surface and the lower surface of the plate glass G.
That is, the cleaning treatment of the upper surface and the lower surface of the plate glass G is executed with a predetermined amount of cleaning liquid interposed between the cleaning member 11 (cleaning pad 14) and the plate glass G.

その後、板ガラスＧが下流側に徐々に搬送されるのに伴って、各洗浄パッド１４の供給口１４ｂから洗浄液が供給されつつ、洗浄部材１１・１１・・・の次列（図２において右側の列）が回転しながら順次後退位置（離間位置）から前進位置（当接位置）に移動し、板ガラスＧの上面及び下面の洗浄処理が実行される。 After that, as the flat glass G is gradually transported to the downstream side, the cleaning liquid is supplied from the supply port 14b of each cleaning pad 14, and the next row of the cleaning members 11 and 11 ... (on the right side in FIG. 2). The row) sequentially moves from the retracted position (separated position) to the forward position (contact position) while rotating, and the cleaning process of the upper surface and the lower surface of the flat glass G is executed.

以上のように構成された洗浄装置１０では、モータＭによる回転駆動力が、直列状のギア１３・１３・・・の列を介して、各々のギア１３・１３・・・に対応する複数の回転軸１２・１２・・・に伝達され、これによってこれらの回転軸１２・１２・・・が回転駆動される。
これにより、各回転軸１２の先端に設けた洗浄部材１１が回転する。 In the cleaning device 10 configured as described above, the rotational driving force of the motor M corresponds to a plurality of gears 13, 13 ... Through a row of gears 13, 13 ... In series. It is transmitted to the rotating shafts 12 and 12, thereby driving the rotating shafts 12 and 12 and so on.
As a result, the cleaning member 11 provided at the tip of each rotating shaft 12 rotates.

このように洗浄装置１０が動作することによって、噛み合うギア間で摩擦が生じるが、本実施形態のように金属製のギア１３ａと合成樹脂製のギア１３ｂを交互に噛み合わせて構成した場合では、金属製のギア同士を噛み合わせて構成した場合に比べて摩擦抵抗が低減されるため、歯の部分が擦れることによる磨耗が減少し、金属粉等の発塵が抑制される。 By operating the cleaning device 10 in this way, friction is generated between the meshing gears. However, in the case where the metal gear 13a and the synthetic resin gear 13b are alternately meshed as in the present embodiment, the gears 13a are alternately meshed with each other. Since the frictional resistance is reduced as compared with the case where the metal gears are meshed with each other, the wear caused by the rubbing of the tooth portion is reduced, and the generation of metal powder and the like is suppressed.

また、本実施形態における洗浄装置１０において、ギア１３は、隣接するギア１３・１３同士で互いに噛合し、かつ材質が異なるものである。
このように構成することで、全てのギア１３・１３・・・を同一の材質で構成した場合よりも摩擦抵抗が小さくなり、ギア同士の磨耗による発塵を抑えることができる。 Further, in the cleaning device 10 of the present embodiment, the gears 13 are made of different materials and mesh with each other in the adjacent gears 13 and 13.
With this configuration, the frictional resistance becomes smaller than when all the gears 13, 13 ... Are made of the same material, and dust generation due to wear between the gears can be suppressed.

また、本実施形態における洗浄装置１０では、隣接するギア１３・１３同士は、一方のギア１３が金属製のギア１３ａであり、他方のギア１３が合成樹脂製のギア１３ｂである。
一般的に、金属製のギア１３ａ・１３ａ同士を噛み合わせて構成した場合、ギア１３ａ・１３ａ同士の磨耗により発塵（金属粉が発生）するおそれがあるが、このようにしたことで、金属製のギア同士を噛み合わせて構成した場合に発生する金属粉が発生し難くなる。
これにより、金属粉による板ガラスＧのガラス面への汚染を防止することができる。
さらに、金属製のギア１３ａを使用しているため、合成樹脂製のギア１３ｂ・１３ｂ同士を噛み合わせて構成した場合より、ギア１３の耐久性が向上し、各ギア１３の交換頻度が抑えられ、装置のメンテナンスに手間がかからない。 Further, in the cleaning device 10 of the present embodiment, one of the adjacent gears 13 and 13 is a metal gear 13a, and the other gear 13 is a synthetic resin gear 13b.
Generally, when metal gears 13a and 13a are meshed with each other, dust may be generated (metal powder is generated) due to wear of the gears 13a and 13a. However, by doing so, metal It is less likely that metal powder will be generated when the gears are made by meshing with each other.
Thereby, it is possible to prevent the plate glass G from being contaminated by the metal powder on the glass surface.
Further, since the metal gear 13a is used, the durability of the gear 13 is improved and the replacement frequency of each gear 13 is suppressed as compared with the case where the synthetic resin gears 13b and 13b are meshed with each other. , No hassle in equipment maintenance.

また、本実施形態における洗浄装置１０では、金属製のギア１３ａと合成樹脂製のギア１３ｂが交互に噛み合うように複数配置されている。
これにより、複数のギア１３・１３・・・の少なくとも一つをモータＭにより駆動することで、複数のギア１３・１３・・・（ギア１３ａ・１３ａ・・・およびギア１３ｂ・１３ｂ・・・）を駆動することができるため、複数の回転駆動手段を必要とせず、装置構成が簡略化でき、メンテナンスが容易となる。 Further, in the cleaning device 10 of the present embodiment, a plurality of metal gears 13a and synthetic resin gears 13b are arranged so as to alternately mesh with each other.
As a result, by driving at least one of the plurality of gears 13 and 13 ... By the motor M, the plurality of gears 13 and 13 ... (Gears 13a and 13a ... and gears 13b and 13b ... ) Can be driven, so that a plurality of rotary driving means are not required, the device configuration can be simplified, and maintenance becomes easy.

１０ 板ガラス洗浄装置
１１ 洗浄部材
１２ 回転軸
１３ ギア
１３ａ 金属製のギア
１３ｂ 樹脂製のギア
Ｇ 板ガラス
Ｍ モータ（回転駆動手段） 10 Plate glass cleaning device 11 Cleaning member 12 Rotating shaft 13 Gear 13a Metal gear 13b Resin gear G Plate glass M motor (rotation drive means)

Claims (3)

板ガラスのガラス面を洗浄する板ガラス洗浄装置であって、
直列状に配置された複数の洗浄部材と、
前記複数の洗浄部材の各々を支持する回転軸と、
前記回転軸の各々に設けられる平歯車と、
前記回転軸の少なくとも１つを駆動する回転駆動手段と、を備え、
前記平歯車は、金属製の平歯車と樹脂製の平歯車とが交互に噛み合うように複数かつ直列状に配置されたギア列を構成する、
ことを特徴とする板ガラス洗浄装置。 A flat glass cleaning device that cleans the glass surface of flat glass.
With multiple cleaning members arranged in series ,
A rotating shaft that supports each of the plurality of cleaning members,
Spur gears provided on each of the rotating shafts and
A rotary drive means for driving at least one of the rotary shafts is provided.
The spur gear constitutes a plurality of gear trains arranged in series so that metal spur gears and resin spur gears mesh with each other alternately.
A flat glass cleaning device characterized by this. 前記ギア列は、前記板ガラスの搬送方向に直交する方向に配置されている、The gear train is arranged in a direction orthogonal to the transport direction of the flat glass.
ことを特徴とする、請求項１に記載の板ガラス洗浄装置。The flat glass cleaning device according to claim 1, wherein the flat glass cleaning device is characterized. 前記ギア列は、前記板ガラスの搬送方向に沿って複数配置され、隣り合うギア列の洗浄部材の位置を前記直交する方向において相互に異なるように構成する、A plurality of the gear rows are arranged along the transport direction of the plate glass, and the positions of the cleaning members of the adjacent gear rows are configured to be different from each other in the orthogonal directions.
ことを特徴とする、請求項２に記載の板ガラス洗浄装置。The flat glass cleaning device according to claim 2, wherein the flat glass cleaning device is characterized.
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CN204996798U (en) * 2015-09-22 2016-01-27 日本电气硝子株式会社 Washing pad of glass board

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WO2018037934A1 (en) 2018-03-01
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