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JP5862616B2 - 光配向用偏光光照射装置及び光配向用偏光光照射方法 - Google Patents

光配向用偏光光照射装置及び光配向用偏光光照射方法 Download PDF

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Publication number
JP5862616B2
JP5862616B2 JP2013148597A JP2013148597A JP5862616B2 JP 5862616 B2 JP5862616 B2 JP 5862616B2 JP 2013148597 A JP2013148597 A JP 2013148597A JP 2013148597 A JP2013148597 A JP 2013148597A JP 5862616 B2 JP5862616 B2 JP 5862616B2
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Prior art keywords
workpiece
alignment
analyzer
work
polarized light
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JP2013148597A
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Japanese (ja)
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JP2015022068A (ja
Inventor
淳治 木村
淳治 木村
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Ushio Denki KK
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Ushio Denki KK
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Priority to JP2013148597A priority Critical patent/JP5862616B2/ja
Priority to TW103119730A priority patent/TWI537547B/zh
Priority to KR1020140089816A priority patent/KR101646834B1/ko
Priority to CN201410341209.4A priority patent/CN104296874B/zh
Publication of JP2015022068A publication Critical patent/JP2015022068A/ja
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1337Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20Exposure; Apparatus therefor
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Polarising Elements (AREA)
JP2013148597A 2013-07-17 2013-07-17 光配向用偏光光照射装置及び光配向用偏光光照射方法 Active JP5862616B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2013148597A JP5862616B2 (ja) 2013-07-17 2013-07-17 光配向用偏光光照射装置及び光配向用偏光光照射方法
TW103119730A TWI537547B (zh) 2013-07-17 2014-06-06 Polarized light irradiation device for light orientation and polarized light irradiation method for light orientation
KR1020140089816A KR101646834B1 (ko) 2013-07-17 2014-07-16 광배향용 편광광 조사 장치 및 광배향용 편광광 조사 방법
CN201410341209.4A CN104296874B (zh) 2013-07-17 2014-07-17 光取向用偏振光照射装置以及光取向用偏振光照射方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013148597A JP5862616B2 (ja) 2013-07-17 2013-07-17 光配向用偏光光照射装置及び光配向用偏光光照射方法

Publications (2)

Publication Number Publication Date
JP2015022068A JP2015022068A (ja) 2015-02-02
JP5862616B2 true JP5862616B2 (ja) 2016-02-16

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JP2013148597A Active JP5862616B2 (ja) 2013-07-17 2013-07-17 光配向用偏光光照射装置及び光配向用偏光光照射方法

Country Status (4)

Country Link
JP (1) JP5862616B2 (ko)
KR (1) KR101646834B1 (ko)
CN (1) CN104296874B (ko)
TW (1) TWI537547B (ko)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160231176A1 (en) * 2015-02-05 2016-08-11 Polarization Solutions, Llc Light irradiation device having polarization measuring mechanism
JP6240654B2 (ja) * 2015-05-06 2017-11-29 ウィア・コーポレーション 光配向装置
JP6492994B2 (ja) * 2015-06-12 2019-04-03 東芝ライテック株式会社 光配向用偏光光照射装置
JP6597149B2 (ja) * 2015-10-08 2019-10-30 ウシオ電機株式会社 光照射装置
JP6607003B2 (ja) * 2015-11-30 2019-11-20 ウシオ電機株式会社 光照射装置および光照射方法
JP6613949B2 (ja) * 2016-02-16 2019-12-04 ウシオ電機株式会社 偏光素子ユニットおよび偏光光照射装置
JP2017215353A (ja) * 2016-05-30 2017-12-07 ウシオ電機株式会社 偏光光照射装置及び光配向装置
CN107561785B (zh) * 2016-06-30 2020-10-27 上海微电子装备(集团)股份有限公司 一种光学配向装置及其配向方法
CN107561784B (zh) * 2016-06-30 2021-08-20 上海微电子装备(集团)股份有限公司 一种光配向控制方法及光配向设备
CN106019721A (zh) * 2016-07-27 2016-10-12 京东方科技集团股份有限公司 光配向膜制作过程中偏光板的调节方法及装置
CN109100890B (zh) * 2017-06-20 2021-04-16 上海微电子装备(集团)股份有限公司 一种光配向设备及其运动和旋转方法
DE102018205984A1 (de) * 2018-04-19 2019-10-24 Robert Bosch Gmbh Vorrichtung und Verfahren zum Bestimmen einer Position von mindestens einem Objekt
JP7137449B2 (ja) * 2018-11-30 2022-09-14 ミネベアミツミ株式会社 アブソリュートエンコーダ
US11156755B2 (en) * 2019-03-28 2021-10-26 Facebook Technologies, Llc Aligning a polarization device using a spatially variant polarization element

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5089700A (en) 1990-01-30 1992-02-18 Amdata, Inc. Apparatus for infrared imaging inspections
CN1226811A (zh) * 1997-03-28 1999-08-25 精工爱普生株式会社 触觉检测器,触觉报告器,信息输入器,触觉复现器,触觉传输系统,脉博诊断器,脉博诊断训练器以及脉博诊断信息传输器
US7239389B2 (en) * 2004-07-29 2007-07-03 Applied Materials, Israel, Ltd. Determination of irradiation parameters for inspection of a surface
JP4603387B2 (ja) 2005-02-22 2010-12-22 大日本印刷株式会社 液晶表示装置用光学素子の製造装置
JP4610368B2 (ja) 2005-02-22 2011-01-12 大日本印刷株式会社 液晶表示装置用光学素子の製造装置
JP2007127567A (ja) 2005-11-07 2007-05-24 Ushio Inc 偏光方向測定装置
JP5051874B2 (ja) * 2006-01-11 2012-10-17 日東電工株式会社 積層フィルムの製造方法、積層フィルムの欠陥検出方法、積層フィルムの欠陥検出装置
JP4968165B2 (ja) 2008-04-24 2012-07-04 ウシオ電機株式会社 光配向用偏光光照射装置
CN103765303B (zh) * 2012-04-19 2016-06-29 信越工程株式会社 光定向照射装置
JP6201310B2 (ja) * 2012-12-14 2017-09-27 東芝ライテック株式会社 偏光光照射装置

Also Published As

Publication number Publication date
TW201510494A (zh) 2015-03-16
JP2015022068A (ja) 2015-02-02
CN104296874A (zh) 2015-01-21
TWI537547B (zh) 2016-06-11
KR101646834B1 (ko) 2016-08-08
KR20150009935A (ko) 2015-01-27
CN104296874B (zh) 2016-10-26

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