JP5089032B2 - Method for controlling automatic matching unit for plasma processing apparatus - Google Patents

Description

The present invention relates to a method for controlling an automatic matching unit for matching between a plasma processing chamber (hereinafter also referred to as a load) and a microwave power source.

For example, as disclosed in Japanese Patent Application Laid-Open No. 2003-344465, a conventional method for controlling an automatic matching unit of a plasma processing apparatus using a slag tuner is a traveling wave based on detected values of a traveling wave and a reflected wave obtained by a directional coupler. 9 is used to calculate the input impedance of the automatic matching device from the relative amplitude value of the reflected wave (hereinafter also referred to as reflectance) and the relative phase, and then, using the control method shown in FIG. A control method for an automatic matching device that calculates impedance and calculates a new slag position setting value that can be matched and controls the slag was used.

Further, as disclosed in Japanese Patent No. 2779479, an automatic matching device using a stub matching device (E / H tuner) as shown in FIG. 10 is applied with the automatic matching device control method shown in FIG. Yes. In FIG. 10, 200 is an E / H tuner, 201 is a waveguide, 200 a is an E-plane stub connected in the electric field direction of the electromagnetic wave propagating to the waveguide 201, and 200 b is propagating to the waveguide 201. It is an H-plane stub connected in the magnetic field direction of electromagnetic waves. As shown in FIG. 11, in this control method, the reflectance is obtained from the incident power and the reflected power detected between the microwave power source and the load, and the two stub shafts are slid from the current position to sample the surrounding four points. Then, the control method of the automatic matching unit is used in which the slab is driven to the optimum position for obtaining the desired reflectance by creating a four-way movement rate table and this control is repeatedly controlled.
JP2003-344465 Patent No. 2779479

The problem of Japanese Patent Application Laid-Open No. 2003-344465, which is a conventional automatic control method, will be described with reference to FIG. FIG. 12 is a diagram showing the impedance at the input terminal of the automatic matching unit when the prior art is applied to a fluctuating load, and the center shows a state where matching is achieved. In the conventional control method, if the load is a fixed load, the slag is controlled by calculating the slag position that can be matched based on the current impedance and the information on the slag position, so the impedance as predicted by one matching operation. And consistency can be taken. However, there is a problem when the load fluctuates as in the plasma processing chamber. If the slag is moved by calculating the position of the slag to achieve matching, the load fluctuates during and after the slag movement, and the impedance after the movement is Deviations from the predicted values are not consistent. The prediction / movement is repeated again, but the impedance differs from the predicted value due to the load fluctuations each time. Eventually, control may be required many times to reach the matching state, or the worst matching state may not be reached.

In addition, the automatic control method disclosed in Japanese Patent No. 2779479 is effective for a load that fluctuates in terms of performing matching control while observing the state of the load. However, the controlled object is a stub of a stub tuner. There is a problem that it cannot be directly applied to the control of slag. In addition, the plasma has hysteresis, and load fluctuation occurs when sampling the surrounding four points from the current position, so the impedance at the current position after sampling may be different from that before sampling. In other words, with the conventional control, for example, if the plasma state changes dramatically when the third sample is acquired (plasma ignites, etc.), the reflectance at the first and second points is no longer reproducible. However, the use of these inappropriate sampling values may cause the matching control to fall into a loop state.

  In the above prior art, means for starting automatic alignment control is not specified, and generally automatic alignment control is started by using a control signal from the outside (for example, a microwave power source) as a trigger. When the power supplies are different, a control signal serving as a trigger cannot be obtained and automatic matching control cannot be performed, or another control signal output device needs to be provided.

In order to achieve the above object, a method for controlling an automatic matching unit for a plasma processing apparatus according to claim 1 is provided. A plasma which uses a reflectance detected between the microwave power source and the plasma processing chamber, and further moves at least two slags disposed in the slag tuner to perform automatic alignment control the control method of automatic matching processing unit for, when the automatic alignment control, perform the measurement step of measuring the reflectance at the current positions of the plurality of slag, when the reflectivity is less than desired values, the Exit automatic alignment control, when the reflectance is not less than the desired value, the first moving step Before moving the plurality of slugs Improvement in the reflectivity improved determination step to determine whether there is a certain amount or more of reduced against the reflectance, and the reflectance improving determination at the moving position in contact have the run the measurement step currently located If there is, the current position before the movement stored as the best reflectivity by the present time and the reflectance at the current position are stored at the movement position after the movement and the reflection measured at the movement position. If it is determined that the reflectance update step for updating the reflectance is not improved in the first control step and the reflectance improvement determining step in which the reflectance is not more than a desired value, the plurality of slags are executing the measurement step to return to the current position before moving, when the reflectance is less than the desired value terminates the automatic matching control, if not below the desired value The deviation from the reflectance measured at the current position before the movement is obtained, and when the deviation is a predetermined amount or more, the reflectance update step is executed, and then the first control step is performed. When the deviation is not greater than or equal to a predetermined amount, the second control step of shifting to the first control step is repeatedly executed without executing the reflectance update step .

In order to achieve the above object, a method for controlling an automatic matching unit for a plasma processing apparatus according to claim 2 is provided in the automatic matching unit for a plasma processing apparatus according to claim 1. start the pre SL automatic matching control detection value of the traveling wave power output from the directional coupler as a trigger that the value added to the control unit provided in the automatic matching box for said plasma processing apparatus is equal to or greater than a predetermined value It is characterized by doing.

In order to achieve the above object, a method for controlling an automatic matching unit for a plasma processing apparatus according to claim 3 is the method for controlling an automatic matching unit for a plasma processing apparatus according to claim 1 or 2 , wherein the first slag, the second slag, The third slag and the fourth slag are arranged in that order as the at least two or more slags from the input side on the microwave power source side in the slag tuner toward the output side on the plasma processing chamber side, The first slag and the second slag are arranged in a state of being connected to each other, and the third slag and the fourth slag are arranged in a state of being connected to each other, and the first slag and the second slag are arranged. 4 slag is installed on the input reference point installed on the input unit side in the slag tuner and on the output unit side in the slag tuner. It was moved within the slag tuner with the origin,
In the automatic alignment control, the distance between the slag, which is a distance from one end of the second slag on the output part side to the one end on the input part side of the third slag, and the middle point between the origin and the distance between the slags using the two operating parameters consisting of a distance, the plurality of the first one four mobile steps Ru one is base rather moved to increase or decrease of said two operating parameters slag from the current position It is characterized by being executed as a moving step .
According to a fourth aspect of the present invention, there is provided the method for controlling an automatic matching unit for a plasma processing apparatus according to the first or second aspect, wherein the first slag and the second slag are the at least two. As the two or more slags, the slag tuner is arranged in that order from the microwave power source side input unit side to the plasma processing chamber side output unit side, the first slag and the second slag, In the automatic alignment control, the first reference point installed on the input unit side of the slag tuner and the origin set on the output unit side of the slag tuner move in the slag tuner. The distance between the slag, which is the distance from one end of the slag on the output part side to the one end of the second slag on the input part side, and the origin Four movements that use two operational parameters consisting of the distance to the midpoint of the distance between the slags and move the plurality of slags from the current position to increase or decrease one of the two operational parameters A step is executed as the first movement step.

As described above, according to the first aspect of the invention, the slag is determined whether there is a reduction in a certain amount or more in reflectance by moving the, re move the slag to be in the position before the movement, the position before movement by comparing before and after the re-moving reflectance at, it is possible to automatically aligned to the varying loads which there may not be self-aligned with the predictive control, and significantly the load and ignition of the plasma Even if it changes, automatic alignment control can be automatically performed without falling into a loop state.

According to the second aspect of the present invention, the detected value of the traveling wave power output from the directional coupler inside the automatic matching device is added to the control unit of the automatic matching device, and the value becomes a predetermined value or more as a trigger. by starting the automatic matching control of slug tuner, it is possible to start the automatic alignment control without matching start signal from the outside.

According to the invention described in claim 3, it is possible to perform automatic alignment only by a maximum of four movement steps.

  The best mode for carrying out the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a configuration diagram of a main part of a plasma processing apparatus using a microwave. In FIG. 1, 1 is a microwave power source that outputs microwave power, 2 is an automatic matching device (automatic matching device for plasma processing apparatus) 3 that is performing automatic matching control, and 3 is a microwave power reflected in the direction of the microwave power source 1. 3 includes a directional coupler 4, a slag tuner 5, a detection unit 7, and a control unit 8, and matches the plasma processing chamber 6 (hereinafter also referred to as a load) and the microwave power source 1. An automatic matching unit 4 is a microwave traveling in the direction of the slag tuner 5 from the microwave power source 1 (hereinafter also referred to as a traveling wave) and a microwave reflecting in the direction of the microwave power source 1 from the slag tuner 5 (hereinafter referred to as traveling wave). A directional coupler for detecting the power of the reflected wave), and 5 is a slag that controls two or more slags provided therein and performs an automatic matching operation in the automatic matching unit 3. A tuner 6 is a plasma processing chamber for plasma-etching an object to be processed by, for example, plasma generated by microwaves input from the microwave power source 1 through the automatic matching unit 3, and 7 is a directional coupling. Reference numeral 8 denotes a detection unit that detects the detected values of the traveling wave and reflected wave of the detector 4, and reference numeral 8 denotes a control unit that receives the output of the detection unit 7 and controls the slag tuner 5.

First, when the microwave power output from the microwave power source 1 is input to the directional coupler 4 via the isolator 2, the directional coupler 4 outputs the detected value of the traveling wave to the detection unit 7, and the detection unit 7 detects the detected value and outputs it to the control unit 8. The control unit 8 determines that the traveling wave is equal to or greater than a certain value, and sends a matching operation start signal to the slag tuner 5. Thereafter, the detection value of the traveling wave and the reflected wave output from the directional coupler 4 is detected by the detection unit 7, and the control unit 8 refers to the detection value of the detection unit 7 and is a value obtained by dividing the reflected wave by the traveling wave. Control is performed so that the reflectance is less than a desired value. During this control operation, a high-level reflected wave is applied in the direction of the microwave power source 1 from the input terminal (the connection portion on the microwave power source 1 side) of the automatic matching device 3, so that the microwave power source 1 is connected by connecting the isolator 2. The destruction by the reflected wave is prevented.

FIG. 2 is a cross-sectional view of the slag tuner 5. The slag tuner 5 includes a coaxial line inner conductor 9, a coaxial line outer conductor 10, a frame 11, a first slug 16, a second slug 17, a third slug 18, and a fourth slug 19, and further includes a first slug 16 and a second slug 16. The first connection fitting 20 for connecting the slag 17, the third slag 18, and the second connection fitting 21 for connecting the fourth slag 19 are provided as a basic configuration. The dimensions of the coaxial line inner conductor 9 and the coaxial line outer conductor 10 are determined so that the characteristic impedance of the transmission line is approximately 50Ω, and the first slug 16 to the fourth slug 19 are such that the characteristic impedance of the transmission line is smaller than at least 50Ω. The dimensions and the dielectric constant of the dielectric member are determined. The slag tuner 5 has a coaxial input / output section of an input section 12 to which the configuration on the microwave power source 1 side is connected and an output section 13 to which the load 6 is connected. From the input / output section, at least the slag tuner 5 The reference points of the first slag 16 and the fourth slag 19 are determined by the input reference point 14 and the output reference point 15 (also referred to as the origin) installed on the inner side, respectively. The control parameters of the slag tuner 5 are a distance between slags (hereinafter also referred to as a distance D) that is a distance from one end on the output side of the second slag 17 to one end on the input side of the third slag 18, and a distance D from the origin 15. A distance to the middle point (hereinafter also referred to as a distance S). For example, the first connection fitting 20 and the second connection fitting 21 are input by a combination of a stepping motor (not shown), a pulley (not shown), and a wire (not shown). The position of the distance S and the distance D is controlled by moving to the part 12 side or the output part 13 side.

Next, a method of using the slag tuner 5 will be described with reference to FIGS. FIG. 3 is a graph showing the relationship between the distance D when the slag tuner 5 is matched and the reflection coefficient (amplitude) of the load 6. FIG. 4 is a graph showing the distance S when the slag tuner 5 is matched and the reflection coefficient of the load 6. It is a graph which shows the relationship with (phase).
3 and 4 show the microwave power source 1 connected to the input unit 12 side of the slag tuner 5 with respect to the impedance Zl as seen from the origin 15 to the load 6 in FIG. 2 (the output impedance is about 50Ω). This is an example in the case of matching. The definition of the electrical length (δS / λ ₀ ) shown in FIG. 4 is expressed by the following formula (1).
_{(ΔS / λ 0) = S-} (λ g / 2 + λ 0/4 + Dmax / 2) ·· (1)
Here, λ _g is an effective wavelength of the first slag 16 to the fourth slag 19 and λ ₀ is a spatial wavelength. Dmax is the maximum settable distance slag distance D, is calculated as approximately λ _0/2.

Further, the amplitude Γl of the reflection coefficient of the load 6 and the phase amount φ of the reflection coefficient of the load 6 shown in FIG. 4 are obtained by applying the expressions (2), (3), and (4) from the impedance Zl, This is a value calculated as in (6).
Zl / Z0 = r + jx (2)
u = (r ² + x ² −1) / ((r + 1) ² + x ² ) (3)
v = 2x / ((r + 1) ² + x ² ) (4)
Γl = (u ² + v ² ) ^1/2 (5)
φ = tan ⁻¹ (v / u) (6)
Here, Z0 is a characteristic impedance, and j is an imaginary unit.

Further, when the electrical length (D / λ ₀ ) is changed, the phase amount φ of the reflection coefficient is not substantially changed. Similarly, when the electrical length (δS / λ ₀ ) is changed, the reflection coefficient amplitude Γl is substantially changed. Because there is no, the notation by the figure is omitted.

In order to deepen the understanding, the distance D and the distance S when the matching is obtained from FIGS. 3 and 4 are calculated by taking the case where the impedance Zl is 100Ω + j0Ω as an example. First, when impedance Zl = 100Ω + j0Ω is substituted into equation (2) and characteristic impedance Z0 = 50Ω and u and v are calculated from equations (3) and (4), u = 0.33 and v = 0. Next, when the reflection coefficient Γl and the phase φ are calculated from the equations (5) and (6), Γl = 0.33 and φ = 0 °, and D / λ ₀ = 0.47 from FIG. 3, and δS / λ ₀ from FIG. = 0.12, and the distance D and the distance S are calculated by obtaining the wavelength λ ₀ from the oscillation frequency of the microwave power source 1.

Here, the data for creating the characteristic diagrams shown in FIGS. 3 and 4 can be acquired in advance experimentally or theoretically (for example, by a circuit simulator).

As shown in FIGS. 3 and 4, by controlling the distance S and distance D of the slag tuner 5, the reflection coefficient amplitude Γl of the load 6 and the phase amount φ of the reflection coefficient can be matched with the load 6. Can be controlled almost independently, adjusting the direction in which the vectors are orthogonal (or inverted) by performing the four controls of increasing the distance D, decreasing the distance D, increasing the distance S, and decreasing the distance S. In other words, the reflectance can be improved in at least one direction by controlling the four directions.

FIG. 5 is a flowchart of the automatic alignment control of the present invention. 100 is a microwave ON determination that determines whether the traveling wave is a certain value or more and starts an automatic matching operation, and 101 is a microwave ON that determines whether the reflectance is less than a desired value (for example, 4% or less). If the reflectivity is already less than the desired value at this time, the control step is shifted to the alignment end step 107 to end the automatic alignment operation.

By performing such control, it is possible to detect the input of the microwave power to the slag tuner 5 using the detected value of the traveling wave from the directional coupler 4, and to eliminate the matching start signal from the outside. Automatic alignment control can be started.

Reference numeral 102 denotes a step that shifts when the reflectance is not less than or equal to the desired value in the reflectance desired value determination 101, for example, a first movement step that moves the slag in a direction that increases the distance S by a certain amount.

Reference numeral 103 denotes a determination routine for determining a control step to be performed next after the slag is moved, and reference numeral 103a denotes a first routine for measuring the reflectance after the slag is moved and determining whether the reflectance is below a desired value. If it is 2 reflectance desired value determination and it is below the desired value, the process proceeds to the alignment end step 107. 103b is the second reflectance desired value determination 103a, and when the reflectance after the slag moves is not less than the desired value, the reflectance is improved by a certain value or more with respect to the reflectance before the slag movement (for example, 0.4% or more). If the improvement is improved, the current position memorized as the best reflectivity up to the present time and the reflectivity of the current position are reflected to the position after the movement and the reflection. Update to rate and return control step to same moving step.

Reference numeral 103c denotes a current position re-moving step for returning to the current position before the movement when it is determined that the improvement has not been made in the reflectance improvement determination 103b. Next, 103d re-measures the reflectance at the current position after the current position re-moving step. The third reflectance desired value determination is made to determine whether the value is less than or equal to the desired value. 103e is a third reflectance desired value determination 103d, and when the slag is moved again to the current position, when the reflectance is not less than the desired value, the reflectance and the reflectance measured at the current position before the slag movement (same set position) The current position reflectance deviation determination is performed to determine whether the difference is greater than or equal to a predetermined amount (eg, increase or decrease of 0.4% or more), and 103f is a current position reflectance deviation determination 103e. This is a reflectance update step for updating the reflectance of the current position currently stored at the time described above to the reflectance when re-moving. After the update, the determination routine 103 is terminated and the process proceeds to the next moving step. If the deviation is not greater than or equal to the predetermined amount in the current position reflectance deviation determination 103e, the process proceeds to the next movement step as it is.

The current position reflectivity deviation determination 103e and the reflectivity update step 103f are control steps that take into account that the impedance of the load 6 is not reproducible due to the plasma hysteresis when the load 6 fluctuates due to plasma ignition, extinction or fluctuation. It is. In this control step, if the deviation of the reflectance at the same setting position of the slag tuner is greater than or equal to a predetermined value, it is determined that the load 6 has greatly fluctuated, and the information on the best reflectance position before the load fluctuation that has lost reproducibility is reset. By setting the current position as the new best reflectance position, automatic matching corresponding to the load 6 that varies sequentially is possible without causing the automatic matching control to fall into a loop state.

  Next, 104 is a step that moves when the reflectivity does not fall below the desired value in the determination routine 103 after the first moving step 102. For example, the second step is to move the slag in a direction that decreases the distance S by a certain amount. It is a moving step. The determination routine 103 is applied after the second movement step 104 as in the first movement step 102. Next, 105 is a step that shifts when the reflectivity does not fall below the desired value in the determination routine 103 after the second moving step 104. For example, a third step of moving the slag in a direction that increases the distance D by a certain amount. It is a moving step. Similarly, 106 is a fourth movement step in which the slag is moved in the direction of decreasing the distance D by a certain amount, for example.

  When the reflectivity does not fall below the desired value in the determination routine 103 after the fourth moving step 106, the process returns to the first reflectivity desired value determination 101 again, and the control is repeated to further improve the reflectivity.

  In this way, each time the slag position is moved, automatic alignment control that repeatedly measures and improves the reflectivity is repeated, so that the state of alignment can be achieved with a small number of times of control with respect to the changing load. Since the amount of control at one time is small, the fluctuation of the load can be reduced and the ignited plasma is difficult to disappear.

As mentioned above, although embodiment of this invention was described in detail, this invention is not limited to such embodiment. For example, FIG. 6 is a flowchart obtained by adding the first additional function to a part of the automatic alignment control flowchart of the present invention. As shown in FIG. 6, the processing of the microwave ON determination 100 and the first reflectance desired value determination 101 is performed. A process (hereinafter referred to as a schedule mode) for sequentially controlling the slag tuner 5 according to the distance S and distance D of the slag tuner 5 and the wait time may be inserted between the slag tuner 5.

  In FIG. 6, reference numeral 108 denotes a schedule mode ON determination for determining whether or not the use of the schedule mode is selected before the automatic alignment operation of the present invention is started, and 109 is a preset, for example, ignition of plasma. This is a first setting position moving step for performing control to set the distance S and distance D of the slag tuner 5 which is the optimum alignment position, and 110 moves the slag of the slag tuner 5 to the first setting position moving step 109 For example, the first weight waits for the control until plasma is generated in the load 6 after being generated. Reference numeral 111 denotes a second setting position moving step that is set in advance, for example, performs control for setting the distance S and distance D of the slag tuner 5 that is the optimum alignment position after plasma ignition, and 112 is the second setting position. After the slag of the slag tuner 5 is moved to the position moving step 111, for example, the second weight waits for control until the plasma of the load 6 is stabilized. After the second weight 112, the first reflectance desired value determination 101 is performed. If the reflectance is equal to or smaller than the desired value, the control step is shifted to the alignment end step 107, and the automatic alignment ends.

By performing such control, it is possible to perform high-speed and stable matching with plasma processing in which the structure, gas type, gas flow rate, microwave power, and the like in the plasma processing chamber 6 are the same each time.

  Further, for example, FIG. 7 is a flowchart in which the second additional function is added to a part of the automatic alignment control flowchart of the present invention. As shown in FIG. 7, the VSWR of the load 6 is very high and the reflectance is less than a desired value. If not, move and measure all the movable range of the slag tuner 5 and control the slag tuner 5 to the optimum setting value based on the data (hereinafter referred to as all scan mode). Also good.

  In FIG. 7, reference numeral 113 indicates whether or not the reflectance has been improved at least once in each determination routine 103 of the first movement step 102, the second movement step 104, the third movement step 105, and the fourth movement step 105. The control step shifts to the reflectance desired value determination 101, and if not, the all-scan mode ON determination shifts to the movable range all-point moving step 114. 114 moves to all the movable ranges of the slag tuner 5 and measures the reflectance each time to determine whether there is an improvement in the reflectance. If there is, the reflectance and the best reflectance position are updated. The movable range all-point moving step that repeats the control of moving to the position, and 115 is an optimum value moving step for performing control to set the slag tuner 5 at the best reflectance position obtained in the movable range all-point moving step 114. 116 is an optimum matching end step that shifts after the control of the optimum value moving step 115 and stops the control of the slag tuner 5.

By performing such control, even when the VSWR of the load 6 is very high and the reflectance cannot be reduced to a desired value or less, it is possible to automatically match the optimum reflectance that can be set by the slag tuner 5 and to converge the matching control. be able to.

Moreover, although the case where four slags were used for the structure of the slag tuner 5 was demonstrated in embodiment of the said invention, what is necessary is just the slag tuner 5 which has at least 2 or more slag. For example, as shown in FIG. 8, two slags may be used. By reducing the characteristic impedance of the first slag 16 and the second slag 17 when the VSWR of the load 6 is low or using four slags, The same effects as those of the embodiment of the invention described above are obtained.

In the embodiment of the invention, the case where the automatic matching device 3 includes the directional coupler 4, the slag tuner 5, the detection unit 7, and the control unit 8 has been described. By providing the unit 7 and the control unit 8 outside the automatic aligner 3, the same effects as those of the embodiment of the present invention can be obtained. When the unit 7 and the controller 8 are provided outside, the automatic aligner main body can be reduced in size and weight. Also occurs.

In the embodiment of the invention, the case where the detection value of the traveling wave is obtained from the directional coupler 4 has been described. However, the directional coupler (not shown) provided between the microwave power source 1 and the isolator 2 or By obtaining the detection value of the traveling wave from the directional coupler provided in the microwave power source 1, the same effects as those of the embodiment of the invention described above can be obtained.

It is a principal part block diagram of the plasma processing apparatus of this invention. It is sectional drawing of a slag tuner. It is a graph which shows the relationship between the distance D between slags when a slag tuner matches, and the reflection coefficient (amplitude) of a load. It is a graph which shows the relationship between the distance S from the origin when the slag tuner matched and the middle point of the distance between slags, and the reflection coefficient (phase) of a load. It is a flowchart of the automatic alignment control of this invention. It is the flowchart which added the 1st additional function to a part of flowchart of the automatic alignment control of this invention. It is the flowchart which added the 2nd additional function to a part of flowchart of the automatic alignment control of this invention. It is sectional drawing of a 2 slag type slag tuner. It is an example of the automatic alignment control of 1st prior art. It is a perspective view of the tuner of the 2nd prior art. It is an example of the automatic matching control of 2nd prior art. It is the figure which showed the impedance in the automatic matching device input terminal when applying with respect to the load which fluctuates 1st prior art.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Microwave power supply 2 Isolator 3 Automatic matching device 4 Directional coupler 5 Slag tuner 6 Plasma processing chamber (load)
7 Detection unit 8 Control unit 9 Coaxial line inner conductor 10 Coaxial line outer conductor 11 Frame 12 Input unit 13 Output unit 14 Input reference point 15 Output reference point (origin)
16 1st slag 17 2nd slag 18 3rd slag 19 4th slag 20 1st connection metal fitting 21 2nd connection metal fitting D Distance between slags S Distance from origin to the middle point of distance between slags δS Distance difference 100 Microwave ON judgment 101 First reflectance desired value determination 102 First movement step 103 Determination routine 103a Second reflectance desired value determination 103b Reflectivity improvement determination 103c Current position movement re-moving step 103d Third reflectance desired value determination 103e Current position reflectance deviation Determination 103f Reflectivity update step 104 Second movement step 105 Third movement step 106 Fourth movement step 107 Alignment end step 108 Schedule mode ON determination 109 First set position movement step 110 First weight 111 Second set position movement step 112 Second 2 weight 113 all scan mode ON determination 114 Movable range all-point moving step 115 Optimal value moving step 116 Optimal alignment end step 200 E / H tuner 200a E-plane stub 200b H-plane stub 201 Waveguide

Claims (4)

An automatic matching unit for a plasma processing apparatus, which is installed between a microwave power source of a plasma processing apparatus and a plasma processing chamber and includes a slag tuner , using a reflectance detected between the microwave power source and the plasma processing chamber In addition, in the control method of the automatic aligner for the plasma processing apparatus for performing automatic alignment control by moving at least two or more slags arranged in the slag tuner ,
During the automatic alignment control, perform the measurement step of measuring the reflectance at the current positions of the plurality of slag, when the reflectivity is less than desired values, terminates the automatic matching control,
Wherein when the reflectance is not less than the desired value, the first moving step Before moving the plurality of slag, reduction of more than a certain amount against the reflectance executing the measurement step to have you to its moving position at the current position reflectivity improved determination step to determine whether there is, and the case where there is improvement in the reflectivity improved determination, the current position and the previous moving said reflectance to date is stored as the best A first control step of repeating the reflectance update step of updating the reflectance at the current position to the moved position after the movement and the reflectance measured at the moved position until the reflectance falls below a desired value; ,
If it is determined in the reflectivity improvement determination step that there is no improvement, the plurality of slags are returned to the current position before the movement and the measurement step is executed. When the reflectivity is less than the desired value, the automatic alignment is performed. When the control is finished and the difference is not equal to or less than the desired value, a deviation from the reflectance measured at the current position before the movement is obtained. And the second control step of shifting to the first control step without repeating the reflectance update step when the deviation is not greater than or equal to a predetermined amount. A method for controlling an automatic matching unit for a plasma processing apparatus. The detected value of the traveling wave power output from the directional coupler provided in the plasma processing apparatus automatic matching unit is added to the control unit provided in the plasma processing apparatus automatic matching unit, and the value becomes a certain value or more. the method of claim 1, wherein the plasma processing apparatus for the automatic matching box, characterized in that to start the pre-Symbol automatic matching control as a trigger. The first slag, the second slag, the third slag, and the fourth slag are provided as the at least two or more slags from the input side on the microwave power source side to the output side on the plasma processing chamber side in the slag tuner. Placed in that order
The first slag and the second slag are arranged in a state of being connected to each other, and the third slag and the fourth slag are arranged in a state of being connected to each other,
The first slag and the fourth slag pass through the slag tuner between an input reference point installed on the input unit side of the slag tuner and an origin installed on the output unit side of the slag tuner. Move and
In the automatic alignment control, the distance between the slag, which is a distance from one end of the second slag on the output part side to the one end on the input part side of the third slag, and the middle point between the origin and the distance between the slags using the two operating parameters consisting of a distance, the plurality of the first one four mobile steps Ru one is base rather moved to increase or decrease of said two operating parameters slag from the current position the method of claim 1 or 2, wherein the plasma processing apparatus for the automatic matching box and executes the moving step. The first slag and the second slag are arranged in that order as the at least two or more slags from the input side on the microwave power source side in the slag tuner toward the output side on the plasma processing chamber side,
The first slag and the second slag pass through the slag tuner between an input reference point installed on the input unit side of the slag tuner and an origin set on the output unit side of the slag tuner. Move and
In the automatic alignment control, a distance between slag, which is a distance from one end on the output part side of the first slag to one end on the input part side of the second slag, and a middle point between the origin and the distance between the slags. The four movement steps of moving the plurality of slugs from the current position to increase or decrease one of the two operation parameters are used as the first movement step. 3. The method of controlling an automatic matching unit for a plasma processing apparatus according to claim 1, wherein the control method is executed.

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