JP3065379B2 - 2-layer double-sided TAB tape - Google Patents
2-layer double-sided TAB tapeInfo
- Publication number
- JP3065379B2 JP3065379B2 JP13078891A JP13078891A JP3065379B2 JP 3065379 B2 JP3065379 B2 JP 3065379B2 JP 13078891 A JP13078891 A JP 13078891A JP 13078891 A JP13078891 A JP 13078891A JP 3065379 B2 JP3065379 B2 JP 3065379B2
- Authority
- JP
- Japan
- Prior art keywords
- sided
- layer
- double
- dianhydride
- mol
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/032—Organic insulating material consisting of one material
- H05K1/0346—Organic insulating material consisting of one material containing N
Landscapes
- Laminated Bodies (AREA)
- Wire Bonding (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、半導体素子実装用のT
AB(Tape Automated Bondin
g)テープの製造方法に関し、より詳細には2層両面T
ABテープの製造方法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a T
AB (Tape Automated Bondin)
g) Regarding the method of manufacturing the tape, more specifically, a two-layer double-sided T
The present invention relates to a method for producing an AB tape.
【0002】[0002]
【従来の技術】近年の半導体実装技術の進歩は著しい
が、特にTABは、極めて高密度に導体パターンが形成
できるために、多ピン化に容易に対応でき、またボンデ
ィングの際にはワイヤーを用いる事なく、リード全体を
一度に半導体素子と配線接続することが可能であるた
め、高密度実装技術が必要とされている現在、活発に開
発が進められている。中でも、下面にアース層を設けて
低インピーダンス化し、ノイズによる影響を少なくでき
る両面TABが高速IC用に検討され始めている。2. Description of the Related Art Although the progress of semiconductor mounting technology in recent years is remarkable, in particular, in TAB, since a conductor pattern can be formed at a very high density, it is possible to easily cope with the increase in the number of pins, and a wire is used for bonding. Since the entire lead can be connected to the semiconductor element at a time without any trouble, the development is being actively promoted at the present time when high-density mounting technology is required. Above all, double-sided TABs, which can be provided with a ground layer on the lower surface to reduce impedance and reduce the influence of noise, have been studied for high-speed ICs.
【0003】TABテープとしては、2層構造と3層構
造との2種類あるが、3層構造(以下、3層TABと略
す)は一般的に銅箔等の導体箔と耐熱性の樹脂フィルム
を接着剤で張り合わせたものであり、フィルムとして耐
熱性及び耐薬品性等の優れた特性を持つポリイミドを用
いても耐熱性に劣る接着剤層を持つため、その特性を充
分に生かすことが出来なかった。There are two types of TAB tapes, a two-layer structure and a three-layer structure. A three-layer structure (hereinafter abbreviated as three-layer TAB) is generally a conductor foil such as a copper foil and a heat-resistant resin film. It is possible to make full use of its properties because it has an adhesive layer with inferior heat resistance even if a polyimide film with excellent properties such as heat resistance and chemical resistance is used as a film. Did not.
【0004】一方、2層構造の両面TAB(以下、2層
両面TABと略す)は、ベースフィルムに接着剤層を持
たないためにTABとしての耐熱性に優れるが、その製
造法の困難さ故に実用に供されることが少なかった。す
なわち2層TABの製造法としてはポリイミド等の耐熱
フィルム上に、スパッタリング、蒸着、メッキ等の薄膜
形成技術を用いて導体層を設けた後、ベースフィルム及
び導体層にエッチング処理を施しデバイスホールやスプ
ロケットホールといった所定の開孔部、及び導体パター
ンを形成する方法で製造されているが、屈曲性の優れた
圧延箔や強度の優れたFe−Ni合金箔等を使用できな
いといった問題点や、ベースフィルム開孔部の形成にエ
ッチング法を用いて開孔部を設けなくてはならないため
に、3層TABの打ち抜き法と比較して生産性が著しく
低下してしまうといった問題点を有している。On the other hand, a double-sided double-sided TAB (hereinafter abbreviated as a double-sided double-sided TAB) has excellent heat resistance as a TAB because it has no adhesive layer on a base film, but is difficult due to the difficulty in its production method. It was rarely put to practical use. That is, as a method of manufacturing the two-layer TAB, a conductor layer is provided on a heat-resistant film such as polyimide by using a thin film forming technique such as sputtering, vapor deposition, and plating. Although it is manufactured by a method of forming a predetermined opening such as a sprocket hole, and a conductor pattern, a problem that a rolled foil having excellent flexibility or an Fe-Ni alloy foil having excellent strength cannot be used, Since it is necessary to provide an opening by using an etching method to form a film opening, there is a problem that productivity is significantly reduced as compared with a punching method of a three-layer TAB. .
【0005】[0005]
【発明が解決しようとする課題】本発明の目的とすると
ころは、接着剤層のない2層両面TABの本来持ってい
る耐熱性、耐アルカリ性、耐溶剤性、電気特性を低下さ
せることなく、生産性に優れ、カールの無い、銅箔とフ
ィルムとの密着性の良好な2層両面TABテープの製造
法を提供するものである。An object of the present invention is to provide a two-layer double-sided TAB having no adhesive layer without lowering the inherent heat resistance, alkali resistance, solvent resistance, and electrical properties. An object of the present invention is to provide a method for producing a two-layer double-sided TAB tape which is excellent in productivity and has no curl and has good adhesion between a copper foil and a film.
【0006】[0006]
【課題を解決するための手段】本発明は、3,3’,
4,4’−ビフェニルテトラカルボン酸二無水物(以下
BPDAと略す)を必須成分とし、3,3’,4,4’
−ベンゾフェノンテトラカルボン酸二無水物及び/又は
ビス(3,4−ジカルボキシフェニル)エーテル二無水
物を0〜50mol%含む、酸二無水物成分と一般式
(I)SUMMARY OF THE INVENTION The present invention provides a method for producing a 3,3 ',
4,4'-biphenyltetracarboxylic dianhydride (hereinafter abbreviated as BPDA) as an essential component, and 3,3 ', 4,4'
An acid dianhydride component containing 0 to 50 mol% of benzophenonetetracarboxylic dianhydride and / or bis (3,4-dicarboxyphenyl) ether dianhydride and a compound represented by the general formula (I):
【0007】[0007]
【化2】 Embedded image
【0008】で表される芳香族ジアミンの1種またはそ
れ以上と1,3−ビス−3−(アミノフェノキシ)ベン
ゼンとの比が70:30〜90:10である芳香族ジア
ミンからなるポリイミドを中間層に持つことを特徴とす
る2層両面TABテープに係るものである。A polyimide comprising an aromatic diamine having a ratio of one or more aromatic diamines represented by the following formula to 1,3-bis-3- (aminophenoxy) benzene of 70:30 to 90:10 is used. The present invention relates to a two-layer double-sided TAB tape having an intermediate layer.
【0009】本発明において2層両面TABテープは、
このポリイミドの前駆体(以下ポリアミック酸という)
溶液のワニスを用い、導体箔上に塗布・乾燥してイミド
化させ、2層の基板とした後、所定の開孔部を設け、導
体箔にポリイミドフィルム面を合わせて圧着し、導体箔
に所要のパターンを形成することによって得られる。In the present invention, the two-layer double-sided TAB tape is
Precursor of this polyimide (hereinafter referred to as polyamic acid)
Using a varnish of a solution, apply and dry on a conductive foil to imidize it and form a two-layer substrate. It is obtained by forming a required pattern.
【0010】ポリアミック酸溶液を金属箔に流延塗布し
て2層基板を得るには、ロータリーコーター、ナイフコ
ーター、ドクターブレード、フローコーター等の公知の
塗布手段で50〜1000μの均一な厚さに流延塗布す
る方法がとられる。In order to obtain a two-layer substrate by casting a polyamic acid solution onto a metal foil, a known coating means such as a rotary coater, knife coater, doctor blade, flow coater or the like is used to obtain a uniform thickness of 50 to 1000 μm. A method of casting and coating is employed.
【0011】また加熱によるポリアミック酸溶液の溶媒
除去は、始めから強い加熱を行うと、粗面となったりひ
きつったりするので、加熱は低温から徐々に高くする様
にした方が好ましい。例えば、100℃から350℃ま
で0.5時間以上かけて連続的に加熱する。0.5時間
未満であると、膜厚にもよるが、脱溶媒が不充分であっ
たり、イミドの閉環が不十分で特性が発揮されないこと
がある。また例えば、100℃で30分、次いで150
℃で30分、200℃で30分、250℃で30分、3
00℃で30分、350℃で30分という具合に段階的
に昇温してもよい。加熱雰囲気も空気中でさしつかえな
い場合もあるが、金属箔として銅箔など酸化され易い金
属箔を用いる場合は減圧下ないしは不活性ガスを流しな
がら非酸化性状態下に行う方が好ましい。この様にして
形成されたポリイミド皮膜層は一般的に10〜200μ
である。In the removal of the solvent from the polyamic acid solution by heating, if strong heating is performed from the beginning, the surface becomes rough or tight. Therefore, it is preferable to gradually increase the heating from a low temperature. For example, heating is continuously performed from 100 ° C. to 350 ° C. over 0.5 hour or more. If the time is less than 0.5 hour, depending on the film thickness, the solvent may not be sufficiently removed, or the ring closure of the imide may be insufficient, and the characteristics may not be exhibited. Also, for example, at 100 ° C. for 30 minutes, then at 150 ° C.
30 minutes at 200 ° C, 30 minutes at 250 ° C, 3 minutes
The temperature may be increased stepwise, for example, at 00 ° C. for 30 minutes and at 350 ° C. for 30 minutes. In some cases, the heating atmosphere may be in the air, but when a metal foil that is easily oxidized such as a copper foil is used as the metal foil, it is preferable to perform the treatment under reduced pressure or in a non-oxidizing state while flowing an inert gas. The polyimide film layer thus formed is generally 10 to 200 μm.
It is.
【0012】2層基板に、開孔部を設ける方法としては
打ち抜き、切断等を用いることが出来る。2層基板と導
体箔とを圧着した後、導体箔上に所定のレジストパター
ンを形成し、エッチング処理を施す際には開孔部に所要
の穴埋め材を充填して開孔部からのエッチングを防止し
ておく必要がある。導体パターンを形成した後、導体箔
上に残留するレジスト及び穴埋め材を除去し、打ち抜き
加工によりスプロケットホールを形成する。[0012] As a method of providing an opening in the two-layer substrate, punching, cutting, or the like can be used. After crimping the two-layer substrate and the conductor foil, a predetermined resist pattern is formed on the conductor foil, and when performing an etching process, the opening portion is filled with a required filling material to perform etching from the opening portion. It must be prevented. After forming the conductor pattern, the resist and the filling material remaining on the conductor foil are removed, and a sprocket hole is formed by punching.
【0013】本発明において、2層基板と導体箔とを加
熱・圧着する条件としては、プレス形式の場合は300
〜500℃、5〜100kg/cm2、5〜30分、ロ
ール式ラミネータの場合は300〜500℃、1〜50
kg/cm、0.1〜10m/分の条件が適当であり、
特に温度としてはポリアミック酸フィルムの乾燥温度よ
り50〜100℃高い温度で実施することが望ましい。In the present invention, the condition for heating and pressing the two-layer substrate and the conductor foil is 300 in the case of the press type.
5 to 100 kg / cm 2 , 5 to 30 minutes, 300 to 500 ° C., 1 to 50 in case of a roll laminator
kg / cm, 0.1 to 10 m / min.
In particular, it is desirable that the temperature is higher by 50 to 100 ° C. than the drying temperature of the polyamic acid film.
【0014】本発明で用いるポリアミック酸溶液は、フ
ィルム形成能があり、金属箔との密着性が優れ、熱可塑
性があればよいが、次に示すようなポリアミック酸が最
も目的にかなっている。即ち、3,3’,4,4’−ビ
フェニルテトラカルボン酸二無水物(以下BPDAと略
す)を必須成分とし、3,3’,4,4’−ベンゾフェ
ノンテトラカルボン酸二無水物及び/又はビス(3,4
−ジカルボキシフェニル)エーテル二無水物を0〜50
mol%含む、酸二無水物成分と一般式(I)で表され
る芳香族ジアミンの1種またはそれ以上と1,3−ビス
−3−(アミノフェノキシ)ベンゼンとの比が70:3
0〜90:10である芳香族ジアミンからなるポリアミ
ック酸溶液を加熱硬化させて得られるポリイミドであ
る。The polyamic acid solution used in the present invention only has to have a film-forming ability, excellent adhesion to a metal foil, and thermoplasticity, but the following polyamic acid is most suitable. That is, 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride (hereinafter abbreviated as BPDA) is an essential component, and 3,3 ′, 4,4′-benzophenonetetracarboxylic dianhydride and / or Screw (3, 4
-Dicarboxyphenyl) ether dianhydride from 0 to 50
mol%, the ratio of the acid dianhydride component to one or more aromatic diamines represented by the general formula (I) and 1,3-bis-3- (aminophenoxy) benzene is 70: 3.
It is a polyimide obtained by heating and curing a polyamic acid solution comprising an aromatic diamine having a ratio of 0 to 90:10.
【0015】本発明で用いるテトラカルポン酸二無水物
は、3,3’,4,4’−ビフェニルテトラカルボン酸
二無水物、3,3’,4,4’−ベンゾフェノンテトラ
カルボン酸二無水物と、ビス(3,4−ジカルボキシフ
ェニル)エーテル二無水物であるが、この他の酸、例え
ば、ピロメリット酸二無水物、2,3,3’,4’−ビ
フェニルテトラカルボン酸二無水物、3,3’,4,
4’−P−テルフェニルテトラカルボン酸二無水物、
2,3,6,7−ナフタレンテトラカルボン酸二無水
物、3,3’,4,4’−P−テルフェニルテトラカル
ボン酸二無水物4、,4’−ヘキサフルオロイソプロピ
リデンビス(フタル酸無水物)等の酸無水物特性を損わ
ない範囲で併用することが出来る。The tetracarboxylic acid dianhydride used in the present invention includes 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride and 3,3', 4,4'-benzophenonetetracarboxylic dianhydride. , Bis (3,4-dicarboxyphenyl) ether dianhydride, but other acids such as pyromellitic dianhydride, 2,3,3 ', 4'-biphenyltetracarboxylic dianhydride , 3,3 ', 4,
4′-P-terphenyltetracarboxylic dianhydride,
2,3,6,7-naphthalenetetracarboxylic dianhydride, 3,3 ', 4,4'-P-terphenyltetracarboxylic dianhydride 4,4,4'-hexafluoroisopropylidenebis (phthalic acid (Anhydrides) can be used in combination as long as the acid anhydride properties are not impaired.
【0016】本発明で用いるジアミンは、P−フェニレ
ンジアミン等(1)式で表されるジアミン及び1,3−
ビス(3−アミノフェノキシ)ベンゼンであるが、この
他のアミン、例えば2,2−ビス[4−(4−アミノフ
ェノキシ)フェニル]プロパン、4,4’−ジアミノジ
フェニルエーテル、4,4’−ジアミノジフェニルメタ
ン、3,3’―ジメチルベンジジン、4,4’−ジアミ
ノ−P−テルフェニル、4,4’−ジアミノ−P−クォ
ーターフェニル、2,8−ジアミノジフェニレンオキサ
イドなどのジアミンも特性を損わない範囲で併用するこ
とができる。The diamine used in the present invention is a diamine represented by the formula (1) such as P-phenylenediamine and 1,3-diamine.
Bis (3-aminophenoxy) benzene, but other amines such as 2,2-bis [4- (4-aminophenoxy) phenyl] propane, 4,4′-diaminodiphenyl ether, 4,4′-diamino Diamines such as diphenylmethane, 3,3'-dimethylbenzidine, 4,4'-diamino-P-terphenyl, 4,4'-diamino-P-quarterphenyl and 2,8-diaminodiphenylene oxide also impair the properties. It can be used together in a range that does not exist.
【0017】テトラカルボン酸二無水物成分とジアミン
成分との反応は酸成分/アミン成分(モル比)0.90
〜1.00で行うのが好ましく、0.90より低いと重
合度が上がらず硬化後の皮膜特性が悪い。1.00より
大きいと、硬化時にガスを発生し、平滑な皮膜を得るこ
とが出来ない。The reaction between the tetracarboxylic dianhydride component and the diamine component is carried out with an acid component / amine component (molar ratio) of 0.90.
It is preferably carried out at 1.01.00, and when it is lower than 0.90, the degree of polymerization does not increase and the film properties after curing are poor. If it is larger than 1.00, gas is generated at the time of curing, and a smooth film cannot be obtained.
【0018】反応は通常、テトラカルボン酸二無水物ま
たはジアミン類と反応しない有機極性溶媒中で行われ
る。この有機極性溶媒は、反応系に対して不活性であ
り、かつ生成物に対して溶媒であること以外に、反応成
分の少なくとも一方、好ましくは両者に対して良溶媒で
なければならない。この種の溶媒として代表的なもの
は、N,N−ジメチルホルムアミド、N,N−ジメチル
アセトアミド、ジメチルスルホン、ジメチルスルホキシ
ド、N−メチル−2−ピロリドン等があり、これらの溶
媒は単独または組み合わせて使用される。この他にも溶
媒として組み合わせて用いられるものとしてベンゼン、
ジオキサン、キシレン、トルエン、シクロヘキサン等の
非極性溶媒が、原料の分散媒、反応調節剤あるいは生成
物からの揮散調節剤、皮膜平滑剤等として使用される。The reaction is usually carried out in an organic polar solvent which does not react with tetracarboxylic dianhydrides or diamines. In addition to being inert to the reaction system and being a solvent for the product, the organic polar solvent must be a good solvent for at least one of the reaction components, preferably both. Typical examples of this type of solvent include N, N-dimethylformamide, N, N-dimethylacetamide, dimethyl sulfone, dimethyl sulfoxide, N-methyl-2-pyrrolidone, and the like. These solvents may be used alone or in combination. used. In addition, benzene, which is used in combination as a solvent,
Non-polar solvents such as dioxane, xylene, toluene, cyclohexane and the like are used as a dispersion medium of a raw material, a reaction regulator or a volatilization regulator from a product, a film smoothing agent and the like.
【0019】反応は一般的に無水の条件下で行うことが
好ましい。これはテトラカルボン酸二無水物が水により
開環し、不活性化し、反応を停止させる恐れがあるため
である。このため仕込原料中の水分も溶媒中の水分も除
去する必要がある。しかし一方、反応の進行を調節し、
樹脂重合度をコントロールするためにあえて水を添加す
ることも行われる。また反応は不活性ガス雰囲気中で行
われることが好ましい。これはジアミン類の酸化を防止
するためである。不活性ガスとしては一般的に乾燥窒素
ガスが使用される。The reaction is generally preferably carried out under anhydrous conditions. This is because the tetracarboxylic dianhydride may be ring-opened by water, inactivated, and stop the reaction. Therefore, it is necessary to remove both the water in the raw materials and the water in the solvent. But on the other hand, it regulates the progress of the reaction,
Water is also added to control the degree of polymerization of the resin. The reaction is preferably performed in an inert gas atmosphere. This is to prevent oxidation of diamines. Dry nitrogen gas is generally used as the inert gas.
【0020】導体層として用いることのできる材料とし
ては、銅、アルミニウム、ニッケル等の単体の金属箔に
加えFe−Ni合金、Fe−Cr−Al合金等の金属箔
が挙げられる。Examples of the material that can be used for the conductor layer include metal foils such as Fe—Ni alloy and Fe—Cr—Al alloy in addition to simple metal foils such as copper, aluminum and nickel.
【0021】[0021]
【作用】本発明は、導体箔上に特定のポリアミック酸溶
液を塗布・乾燥して得られた2層基板に孔加工を行い、
さらに、導体箔と加熱・圧着し、導体配線を形成する工
程をとることにより、容易にかつ安価に、生産性・収率
よく2層両面TABテープを得ることができる。According to the present invention, a hole is formed in a two-layer substrate obtained by applying and drying a specific polyamic acid solution on a conductive foil,
Furthermore, by performing a step of forming a conductor wiring by applying heat and pressure to the conductor foil, a two-layer double-sided TAB tape can be obtained easily and inexpensively with high productivity and yield.
【0022】[0022]
【実施例】(実施例1)温度計、攪拌装置、環流コンデ
ンサーおよび乾燥窒素ガス吹き込み口を備えた4つ口セ
パラブルフラスコにAPB0.01mol、1,4−ジ
メチル−2,5−ジアミノベンゼン0.06mol、p
−フェニレンジアミン0.03molをとり、これに無
水のN−メチル−2−ピロリドン90重量%とトルエン
10重量%の混合溶剤を、全仕込原料中の固形分割合が
20重量%になるだけの量を加えて溶解した。乾燥窒素
ガスは反応の準備段階より生成物取り出しまでの全工程
にわたり流しておいた。次いで精製したBPDA0.0
7mol、BTDA0.03molを攪拌しながら少量
ずつ添加するが、発熱反応であるため、外部水槽に約1
5℃の冷水を循環させてこれを冷却した。添加後、内部
温度を20℃に設定し、5時間攪拌し反応を終了してポ
リアミック酸溶液を得た。EXAMPLES Example 1 A 4-neck separable flask equipped with a thermometer, a stirrer, a reflux condenser and a dry nitrogen gas injection port was charged with 0.01 mol of APB and 1,4-dimethyl-2,5-diaminobenzene in a 4-neck separable flask. 0.06 mol, p
-Take 0.03 mol of phenylenediamine, add a mixed solvent of 90% by weight of anhydrous N-methyl-2-pyrrolidone and 10% by weight of toluene, in such an amount that the solid content ratio in all the raw materials becomes 20% by weight. Was added and dissolved. Dry nitrogen gas was allowed to flow throughout the entire process from the preparation of the reaction to the removal of the product. Then purified BPDA 0.0
7 mol and 0.03 mol of BTDA are added little by little with stirring. However, since it is an exothermic reaction, about 1 mol is added to the external water tank.
This was cooled by circulating cold water at 5 ° C. After the addition, the internal temperature was set at 20 ° C., and the mixture was stirred for 5 hours to complete the reaction, thereby obtaining a polyamic acid solution.
【0023】圧延銅箔上に、このポリアミック酸溶液を
スピンナーでイミド化後の厚みが50μmになるように
塗布し、110℃、15分さらに250℃、20分乾燥
を行い、2層基板を得た。金型を用いて孔加工(デバイ
スホール)を行い、市販の圧延銅箔粗化面上にポリイミ
ドフィルム面を重ね合わせ、400℃、40kg/cm
2、15分加熱・圧着を行い、デバイスホールを持つ両
面2層基板を得た。This polyamic acid solution is applied on a rolled copper foil with a spinner so as to have a thickness of 50 μm after imidization, and dried at 110 ° C. for 15 minutes and further at 250 ° C. for 20 minutes to obtain a two-layer substrate. Was. Drilling (device hole) using a mold, superimposing a polyimide film surface on the roughened surface of a commercially available rolled copper foil, 400 ° C., 40 kg / cm
2. Heating / compression bonding was performed for 15 minutes to obtain a double-sided two-layer substrate having device holes.
【0024】得られた両面2層基板を用い、導体箔上に
所定のレジストパターン及び穴埋め材を施し、エッチン
グ処理を施すことにより導体パターンを形成した後、導
体箔上に残留するレジスト及び穴埋め材を除去し、打ち
抜き加工によりスプロケットホールを設けることにより
優れた2層両面TABテープを得た。Using the obtained double-sided two-layer substrate, a predetermined resist pattern and a hole-filling material are applied on the conductor foil, and the conductor pattern is formed by performing an etching process. Was removed and sprocket holes were formed by punching to obtain an excellent two-layer double-sided TAB tape.
【0025】(実施例2)実施例1と同様のデバイスホ
ールのあいた2層基板を用い、粗化面上にポリイミドフ
ィルム面を重ね合わせ、ロール式のラミネータを用い
て、90℃、15Kg/cm2、0.2m/分で、加熱
・圧着を行い、デバイスホールを持つ両面2層基板とし
た。この両面2層基板を使用する以外は実施例1と同様
にして、良好な2層両面TABテープを得た。Example 2 Using a two-layer substrate having device holes similar to that of Example 1, a polyimide film surface was superposed on a roughened surface, and a roll type laminator was used at 90 ° C. and 15 kg / cm. 2. Heating / compression bonding was performed at 0.2 m / min to obtain a double-sided two-layer substrate having device holes. A good two-layer double-sided TAB tape was obtained in the same manner as in Example 1 except that this double-sided two-layer substrate was used.
【0026】(実施例3)実施例1と同様な装置及び方
法で、PPD0.02mol、APB0.05mol、
1,4−ジメチル−2,5−ジアミノベンゼン0.03
mol、BPDA0.08mol、ODPA0.01m
ol、BTDA0.01molからなるポリアミック酸
溶液を得た。その後は実施例1と同様の方法で良好な両
面2層TABテープを得た。(Example 3) Using the same apparatus and method as in Example 1, PPD 0.02 mol, APB 0.05 mol,
1,4-dimethyl-2,5-diaminobenzene 0.03
mol, BPDA 0.08 mol, ODPA 0.01 m
ol and BTDA 0.01 mol were obtained. Thereafter, a good double-sided two-layer TAB tape was obtained in the same manner as in Example 1.
【0027】(比較例1)実施例1と同様な装置及び方
法で、P−フェニレンジアミン0.1mol、BPDA
0.1molからなるポリアミック酸溶液を得た。その
後は実施例1と同様の方法で両面2層基板の作製を試み
たが、銅箔と熱圧着しても全く接着しなかった。Comparative Example 1 Using the same apparatus and method as in Example 1, 0.1 mol of P-phenylenediamine, BPDA
A polyamic acid solution consisting of 0.1 mol was obtained. After that, an attempt was made to produce a double-sided two-layer substrate in the same manner as in Example 1, but no adhesion was observed even when thermocompression-bonded to a copper foil.
【0028】(比較例2)実施例1と同様な装置及び方
法で、4,4’−ジアミノジフェニルエーテル0.1m
olとピロメリット酸二無水物0.1molからなるポ
リアミック酸溶液を得た。その後は実施例1と同様の方
法で両面2層基板の作製を試みたが、銅箔と熱圧着して
も全く接着しなかった。(Comparative Example 2) Using the same apparatus and method as in Example 1, 0.1 m of 4,4'-diaminodiphenyl ether was used.
ol and 0.1 mol of pyromellitic dianhydride were obtained as a polyamic acid solution. After that, an attempt was made to produce a double-sided two-layer substrate in the same manner as in Example 1, but no adhesion was observed even when thermocompression-bonded to a copper foil.
【0029】[0029]
【発明の効果】本発明によれば、特定のポリアミック酸
を用いることにより生産性の優れた打ち抜き加工により
デバイスホールを設けた耐熱性、耐薬品性等に優れたカ
ールの無い、銅箔とフィルムとの密着性の良好な2層T
ABを得ることができ、さらに蒸着法等では使用するこ
との出来なかった圧延箔を用いた両面2層TABも作製
することが可能となった。本発明は、連続シートを用い
た連続工程にも容易に適用できるなど、工業的な両面2
層TABの製造方法として好適なものである。According to the present invention, there is provided a curl-free copper foil and film having excellent heat resistance, chemical resistance and the like provided with device holes by punching with excellent productivity by using a specific polyamic acid. Two-layer T with good adhesion to
AB could be obtained, and a double-sided two-layer TAB using a rolled foil that could not be used by a vapor deposition method or the like could be produced. The present invention can be easily applied to a continuous process using a continuous sheet.
This is suitable as a method for manufacturing the layer TAB.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平4−294557(JP,A) 特開 平4−234191(JP,A) (58)調査した分野(Int.Cl.7,DB名) B32B 27/34 H01L 21/60 311 B05D 1/00 - 7/26 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-4-294557 (JP, A) JP-A-4-234191 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) B32B 27/34 H01L 21/60 311 B05D 1/00-7/26
Claims (1)
ルボン酸二無水物(以下BPDAと略す)を必須成分と
し、3,3’,4,4’−ベンゾフェノンテトラカルボ
ン酸二無水物(以下BTDAと略す)及び/又はビス
(3,4−ジカルボキシフェニル)エーテル二無水物
(以下ODPAと略す)を0〜50mol%含む、酸二
無水物成分と一般式(I) 【化1】 で表される芳香族ジアミンの1種またはそれ以上と1,
3−ビス−3−(アミノフェノキシ)ベンゼン(以下A
PBと略す)との比が70:30〜90:10である芳
香族ジアミンからなるポリイミドを中間層に持つことを
特徴とする2層両面TABテープ。An essential component of 3,3 ', 4,4'-biphenyltetracarboxylic dianhydride (hereinafter abbreviated as BPDA), comprising 3,3', 4,4'-benzophenonetetracarboxylic dianhydride (Hereinafter abbreviated as BTDA) and / or bis (3,4-dicarboxyphenyl) ether dianhydride (hereinafter abbreviated as ODPA) in an amount of from 0 to 50 mol%, and an acid dianhydride component and a compound represented by the general formula (I): ] One or more aromatic diamines represented by
3-bis-3- (aminophenoxy) benzene (hereinafter referred to as A
A double-sided double-sided TAB tape, characterized in that the intermediate layer has a polyimide composed of an aromatic diamine having a ratio of 70:30 to 90:10 (abbreviated as PB).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13078891A JP3065379B2 (en) | 1991-03-22 | 1991-03-22 | 2-layer double-sided TAB tape |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13078891A JP3065379B2 (en) | 1991-03-22 | 1991-03-22 | 2-layer double-sided TAB tape |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04294139A JPH04294139A (en) | 1992-10-19 |
JP3065379B2 true JP3065379B2 (en) | 2000-07-17 |
Family
ID=15042703
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13078891A Expired - Lifetime JP3065379B2 (en) | 1991-03-22 | 1991-03-22 | 2-layer double-sided TAB tape |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3065379B2 (en) |
-
1991
- 1991-03-22 JP JP13078891A patent/JP3065379B2/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH04294139A (en) | 1992-10-19 |
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