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JP2672404B2 - Semiconductor laser device and driving method thereof - Google Patents

Semiconductor laser device and driving method thereof

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Publication number
JP2672404B2
JP2672404B2 JP1200991A JP1200991A JP2672404B2 JP 2672404 B2 JP2672404 B2 JP 2672404B2 JP 1200991 A JP1200991 A JP 1200991A JP 1200991 A JP1200991 A JP 1200991A JP 2672404 B2 JP2672404 B2 JP 2672404B2
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JP
Japan
Prior art keywords
laser device
semiconductor laser
region
regions
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1200991A
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Japanese (ja)
Other versions
JPH04246878A (en
Inventor
浩 竹川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
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Filing date
Publication date
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Priority to JP1200991A priority Critical patent/JP2672404B2/en
Publication of JPH04246878A publication Critical patent/JPH04246878A/en
Application granted granted Critical
Publication of JP2672404B2 publication Critical patent/JP2672404B2/en
Anticipated expiration legal-status Critical
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  • Element Separation (AREA)
  • Semiconductor Lasers (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】この発明は、レーザ・ビーム・プ
リンタや光ピックアップ等に用いられる半導体レーザ素
子およびその駆動方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor laser device used in a laser beam printer, an optical pickup, etc. and a driving method thereof.

【0002】[0002]

【従来の技術】一般に、半導体レーザ素子はレーザ発光
層を含む半導体層を半導体基板上に積層して構成されて
おり、図3に示すように、発光領域の温度Tc(この例で
はTc=0℃,25℃,50℃の場合を示す)に応じて順電
流I−光出力Po特性がシフトする(同時に、図中に矢印
で示すレーザ発振のしきい値電流Ithもシフトす
る。)。通電時間の経過に伴って発光領域の温度Tcは上
昇することから、定電流で駆動した場合は、図4に示す
ように、通電時間の経過とともに光出力Poが低下す
る。この現象はドループと呼ばれ、半導体レーザ素子を
用いるレーザ・ビーム・プリンタの印字品質を低下させ
たり、光ピックアップのS/N比を低下させたりする原
因となる。
2. Description of the Related Art Generally, a semiconductor laser device is constructed by laminating a semiconductor layer including a laser emission layer on a semiconductor substrate, and as shown in FIG. 3, the temperature Tc of the emission region (Tc = 0 in this example). The forward current I-optical output Po characteristic shifts in accordance with the temperatures of 25 ° C., 25 ° C., and 50 ° C. (at the same time, the threshold current Ith of laser oscillation indicated by the arrow in the figure also shifts). Since the temperature Tc of the light emitting region rises with the passage of the energization time, when driven with a constant current, the light output Po decreases with the passage of the energization time, as shown in FIG. This phenomenon is called droop, and it causes the print quality of a laser beam printer using a semiconductor laser device to deteriorate and the S / N ratio of an optical pickup to decrease.

【0003】このドループを抑えるために、従来は、半
導体レーザ素子を構成する半導体層の作製パラメータを
変化させて、順電流I−光出力Po特性の傾きηを小さ
くしたりしている。また、半導体レーザ素子を駆動する
際に、素子を発光させない期間(非発光期間)中もしきい
値電流Ithを越えないバイアス電流を流しておくことに
より、実際に素子を発光させる期間(発光期間)中に発光
領域の温度Tcがあまり変化しないようにする方法も知
られている。
In order to suppress this droop, conventionally, the fabrication parameter of the semiconductor layer constituting the semiconductor laser device is changed to reduce the slope η of the forward current I-optical output Po characteristic. Further, when the semiconductor laser device is driven, a bias current that does not exceed the threshold current Ith is supplied during a period in which the device does not emit light (non-emission period) so that the device actually emits light (emission period). There is also known a method in which the temperature Tc of the light emitting region does not change so much.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、ドルー
プを抑えるために半導体層の作製パラメータを変化させ
る場合、ドループを抑制する効果が小さい上に、素子の
作製が難しく、また素子特性を損なうという問題がある
(最悪の場合、素子の寿命を短くしてしまうこともあ
る。)。また、非発光期間中もしきい値電流Ithを越え
ないバイアス電流を流しておく方法の場合、バイアス電
流をIth以下でかつ温度上昇に有効な値に設定するのが
難しいという問題がある。バイアス電流をIthよりも極
端に小さい値に設定したときは、非発光期間中に素子の
発光領域を温度上昇させる効果が得られず、一方、バイ
アス電流をIthぎりぎりの値に設定したときは、非発光
期間中であってもIthの低下によって素子が発光してし
まうからである。なお、Ithの温度変化に応じてバイア
ス電流を変化させることは、駆動回路が複雑になるため
さらに困難である。
However, when the manufacturing parameters of the semiconductor layer are changed in order to suppress the droop, the effect of suppressing the droop is small, and it is difficult to manufacture the device and the device characteristics are impaired. is there
(In the worst case, it may shorten the life of the device.). Further, in the case of the method of supplying the bias current that does not exceed the threshold current Ith even during the non-light emitting period, there is a problem that it is difficult to set the bias current to a value equal to or less than Ith and effective for increasing the temperature. When the bias current is set to a value extremely smaller than Ith, the effect of raising the temperature of the light emitting region of the element is not obtained during the non-light emitting period. On the other hand, when the bias current is set to a value close to Ith, This is because the element emits light due to the decrease in Ith even during the non-light emitting period. It is more difficult to change the bias current according to the temperature change of Ith because the driving circuit becomes complicated.

【0005】そこで、この発明の目的は、容易に作製お
よび駆動でき、素子特性を損なうことなく効果的にドル
ープを小さくすることができる半導体レーザ素子を提供
することにある。また、この発明の目的は、そのような
半導体レーザ素子の駆動方法を提供することにある。
Therefore, an object of the present invention is to provide a semiconductor laser device which can be easily manufactured and driven and which can effectively reduce droop without deteriorating the device characteristics. Another object of the present invention is to provide a method of driving such a semiconductor laser device.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するため
に、請求項1に記載の半導体レーザ素子は、基板上にレ
ーザ発光層を含む半導体層を積層し、この半導体層表面
から上記基板表面に至る溝によって上記半導体層を複数
の領域に区分して、上記各領域が互いに独立に通電され
るようにした半導体レーザ素子であって、上記複数の領
域のうちの特定領域は上記半導体層の作製パラメータに
応じたしきい値電流でレーザ発振する一方、上記複数の
領域のうち上記特定領域に対して上記溝を挟んで隣合う
近傍領域のレーザ発振のしきい値電流が上記特定領域の
上記しきい値電流よりも大きい値に設定されてなること
を特徴とする。
In order to achieve the above object, a semiconductor laser device according to a first aspect of the present invention is such that a semiconductor layer including a laser emitting layer is laminated on a substrate, and from the surface of the semiconductor layer to the surface of the substrate. A semiconductor laser device in which the semiconductor layer is divided into a plurality of regions by a groove reaching to each of the regions so that the respective regions are independently energized, and a specific region of the plurality of regions is a region of the semiconductor layer. While lasing at a threshold current according to a manufacturing parameter, the threshold current of laser oscillation in a neighboring region of the plurality of regions adjacent to the specific region sandwiching the groove is It is characterized by being set to a value larger than the threshold current.

【0007】請求項2に記載の半導体レーザ素子の駆動
方法は、請求項1に記載の半導体レーザ素子の駆動方法
であって、上記半導体レーザ素子の非発光期間において
は、前記近傍領域のみに該近傍領域のしきい値電流より
も低い電流を通電し、上記非発光期間に続く発光期間に
おいては、前記特定領域のみに該特定領域を発光させる
しきい値電流以上の駆動電流を通電することを特徴とす
る。
According to a second aspect of the present invention, there is provided a method of driving a semiconductor laser device, wherein the semiconductor laser device is driven by the semiconductor laser device according to the first aspect. A current lower than the threshold current of the neighboring region is applied, and a drive current equal to or higher than the threshold current for causing the specific region to emit light is applied only to the specific region in the light emitting period following the non-light emitting period. Characterize.

【0008】[0008]

【作用】請求項1の発明の半導体レーザ素子は次のよう
にして駆動される。まず、発光期間(素子を発光させる
期間)中に特定領域に通電すべき駆動電流の大きさを、
上記特定領域のしきい値電流と上記近傍領域のしきい値
電流(上記特定領域のしきい値電流よりも大きい値に設
定されている)との間の値に設定する。非発光期間(素子
を発光させない期間)中は、上記特定領域には通電せ
ず、上記近傍領域に対して上記駆動電流と同程度の大き
さのバイアス電流を流すようにする。このとき、上記特
定領域は、通電されていないので発光も発熱もしない。
一方、上記近傍領域は、上記バイアス電流の大きさがこ
の領域のしきい値電流よりも小さいので発光せず、上記
バイアス電流の大きに応じて発熱する。この結果、上記
特定領域は上記近傍領域の発熱を受けて、上記設定した
大きさの駆動電流が通電されている場合と同程度の温度
に上昇する。続いて、発光期間中は、上記特定領域には
上記設定した大きさの駆動電流を流し、上記近傍領域に
は通電しないようにする。このとき、上記特定領域は、
上記駆動電流の大きさに応じて発光(素子の発光出力と
なる)および発熱する。一方、上記近傍領域は、通電さ
れていないので発光も発熱もしない。この結果、上記特
定領域は、上記近傍領域からの熱を受けなくなり、上記
駆動電流によってのみ発熱する。ここで、この駆動電流
と上記非発光期間に上記近傍領域に流したバイアス電流
とは、既に述べたように同程度の大きさに設定されてい
る。したがって、上記特定領域(および近傍領域)の温度
は、非発光期間,発光期間を通して略一定に保たれる。
したがって、上記特定領域の順電流−光出力特性がほと
んどシフトしなくなり、効果的にドループが抑制され
る。
The semiconductor laser device according to the first aspect of the invention is driven as follows. First, the magnitude of the drive current that should be applied to the specific region during the light emission period (the period during which the element emits light) is
It is set to a value between the threshold current of the specific region and the threshold current of the neighboring region (set to a value larger than the threshold current of the specific region). During the non-light-emission period (the period in which the element does not emit light), the specific region is not energized, and the bias current having the same magnitude as the drive current is supplied to the neighboring region. At this time, since the specific region is not energized, neither light emission nor heat generation occurs.
On the other hand, the vicinity region does not emit light because the magnitude of the bias current is smaller than the threshold current of this region, and heat is generated according to the magnitude of the bias current. As a result, the specific region receives the heat of the neighboring region and rises to the same temperature as when the drive current of the set magnitude is supplied. Subsequently, during the light emission period, the drive current of the set magnitude is supplied to the specific region and the neighboring region is not energized. At this time, the specific area is
Light is emitted (becomes a light emission output of the element) and heat is generated according to the magnitude of the drive current. On the other hand, since the above-mentioned neighboring region is not energized, neither light emission nor heat generation occurs. As a result, the specific region does not receive heat from the neighboring region, and heat is generated only by the drive current. Here, the drive current and the bias current applied to the vicinity region during the non-light emission period are set to have substantially the same magnitude as described above. Therefore, the temperature of the specific region (and the neighboring region) is kept substantially constant throughout the non-light emitting period and the light emitting period.
Therefore, the forward current-light output characteristics of the specific region hardly shift, and droop is effectively suppressed.

【0009】また、上記特定領域および近傍領域の温度
が略一定に保たれることから、上記両領域のしきい値電
流がほとんどシフトしなくなる。したがって、上記バイ
アス電流の大きさは、上記両領域のしきい値電流の間
で、上記近傍領域が無用な発光をせず、かつ必要な発熱
量が得られる値(一定値)に容易に設定される。したがっ
て、この半導体レーザ素子は、簡単な駆動回路でもって
容易に駆動できる。
Further, since the temperatures in the specific region and the neighboring region are kept substantially constant, the threshold currents in both regions hardly shift. Therefore, the magnitude of the bias current can be easily set to a value (constant value) between the threshold currents of the both regions, in which the neighboring region does not emit unnecessary light and the necessary heat generation amount is obtained. To be done. Therefore, this semiconductor laser device can be easily driven by a simple driving circuit.

【0010】また、この半導体レーザ素子を構成する半
導体層は標準的な作製パラメータで形成されれば良く、
上記半導体層を複数の領域区分する溝はエッチングによ
って容易に形成される。さらに、上記近傍領域のしきい
値電流は、この領域に過電流を通電することによって、
上記特定領域のしきい値電流よりも大きい値に容易に設
定(劣化)される。したがって、この半導体レーザ素子は
容易に作製される。また、上記半導体層は標準的な作製
パラメータで形成されるので、作製された素子の特性が
損なわれることもない。
Further, the semiconductor layer constituting this semiconductor laser device may be formed with standard manufacturing parameters,
Grooves that divide the semiconductor layer into a plurality of regions are easily formed by etching. Furthermore, the threshold current in the above-mentioned vicinity region is set by applying an overcurrent to this region,
It is easily set (deteriorated) to a value larger than the threshold current of the specific region. Therefore, this semiconductor laser device is easily manufactured. Further, since the semiconductor layer is formed with standard manufacturing parameters, the characteristics of the manufactured device are not impaired.

【0011】請求項2の半導体レーザ素子の駆動方法に
よれば、簡単な駆動回路でもって上述のように請求項1
の半導体レーザ素子を駆動でき、効果的にドループを抑
制することができる。
According to the method of driving the semiconductor laser device of claim 2, as described above, a simple driving circuit is used.
The semiconductor laser device can be driven, and droop can be effectively suppressed.

【0012】[0012]

【実施例】以下、この発明の半導体レーザ素子およびそ
の駆動方法を図示の実施例により詳細に説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The semiconductor laser device and its driving method of the present invention will be described in detail below with reference to the embodiments shown in the drawings.

【0013】図1に示すように、この半導体レーザ素子
は、n型GaAs基板21上に、半導体層としてp型GaAs
層20,n型GaAs層19,p型Ga1-xAlxAs層(レーザ発
光層)18,p型Ga1-yAlyAs層17,p型Ga1-yAlyAs
層17,p型Ga1-xAlxAs層16,n型GaAs層15を順
に積層し、上記半導体層をn型GaAs層15表面から基
板21表面に至る溝4,5によって複数の領域2,1,3
に区分した構造となっている。各領域2,1,3は、電極
14,22によって互いに独立に通電されるようになっ
ている。7,6,8は各領域2,1,3の通電経路を狭窄す
るストライプ状(図1に示す素子断面に垂直に延びてい
る)の溝を示しており、各領域2,1,3のレーザ発光層
18内で上記溝7,6,8近傍の箇所12,11,13がそ
れぞれレーザ発振(発光)または発熱を行う。中央の領域
(特定領域)1は上記半導体層の作製パラメータに応じた
しきい値電流Ith1でレーザ発振する一方、両側の領域
(近傍領域)2,3は過電流を通電されてレーザ発振のし
きい値電流が領域1のしきい値電流Ith1よりも大きい
値Ith2に設定されている。
As shown in FIG. 1, this semiconductor laser device comprises a p-type GaAs as a semiconductor layer on an n-type GaAs substrate 21.
Layer 20, n-type GaAs layer 19, p-type Ga 1- x AlxAs layer (laser emission layer) 18, p-type Ga 1- yAlyAs layer 17, p-type Ga 1- yAlyAs
A layer 17, a p-type GaAs 1- xAlxAs layer 16, and an n-type GaAs layer 15 are sequentially laminated, and the semiconductor layer is formed into a plurality of regions 2, 1, by grooves 4, 5 extending from the surface of the n-type GaAs layer 15 to the surface of the substrate 21. Three
The structure is divided into. The regions 2, 1, 3 are energized independently of each other by the electrodes 14, 22. Reference numerals 7, 6, and 8 denote stripe-shaped grooves (extending perpendicularly to the element cross section shown in FIG. 1) that narrow the current-carrying paths of the regions 2, 1, and 3, and In the laser emitting layer 18, the portions 12, 11, and 13 near the grooves 7, 6, and 8 respectively perform laser oscillation (light emission) or heat generation. Central area
(Specific region) 1 oscillates with a threshold current Ith1 according to the manufacturing parameters of the semiconductor layer, while regions on both sides
(Neighboring regions) 2 and 3 are set to a value Ith2, which is larger than the threshold current Ith1 in the region 1 because the threshold current for laser oscillation is supplied with overcurrent.

【0014】この発明の半導体レーザ素子は次のように
して駆動される。
The semiconductor laser device of the present invention is driven as follows.

【0015】まず、発光期間(素子を発光させる期間)中
に領域1に通電すべき駆動電流Iopの大きさを、上記領
域1のしきい値電流Ith1と領域2,3のしきい値電流
Ith2との間の値に設定する。
First, the magnitude of the drive current Iop to be applied to the region 1 during the light emission period (the period in which the device emits light) is determined by the threshold current Ith1 of the region 1 and the threshold current Ith2 of the regions 2 and 3. Set to a value between and.

【0016】図2に示すように、非発光期間(素子を発
光させない期間)中は上記領域1には通電せず、上記領
域2,3に対して上記駆動電流Iopと同程度の大きさの
バイアス電流Ibを流す。このとき、領域1は、通電さ
れていないので発光も発熱もしない。一方、領域2,3
は、上記バイアス電流Ibの大きさがこの領域のしきい
値電流Ith2よりも小さいので発光せず、上記バイアス
電流Ibの大きさに応じて発熱する。この結果、上記領
域1は上記領域2,3の発熱を受けて、上記設定した大
きさの駆動電流Iopが通電されている場合と同程度の温
度に上昇する。
As shown in FIG. 2, the region 1 is not energized during the non-light-emission period (the period in which the device does not emit light), and the regions 2 and 3 have the same magnitude as the drive current Iop. Bias current Ib is passed. At this time, since the region 1 is not energized, neither light emission nor heat generation occurs. On the other hand, areas 2, 3
Does not emit light because the magnitude of the bias current Ib is smaller than the threshold current Ith2 in this region, and heat is generated according to the magnitude of the bias current Ib. As a result, the area 1 receives the heat of the areas 2 and 3 and rises to the same temperature as when the drive current Iop of the set magnitude is supplied.

【0017】続いて、発光期間中は、図2に示すよう
に、上記領域1には上記設定した大きさの駆動電流Iop
を流し、上記領域2,3には通電しないようにする。こ
のとき、領域1は、上記駆動電流の大きさに応じて発光
(素子の発光出力となる)および発熱する。一方、領域
2,3は、通電されていないので発光も発熱もしない。
この結果、領域1は、領域2,3から熱を受けなくな
り、上記駆動電流Iopによってのみ発熱する。ここで、
この駆動電流Iopと上記非発光期間に領域2,3に流し
たバイアス電流とは、既に述べたように同程度の大きさ
に設定されている。したがって、上記領域1(および領
域2,3)の温度は、非発光期間,発光期間を通して略一
定に保たれる。したがって、上記領域1の順電流−光出
力特性をほとんどシフトさせないようにでき、効果的に
ドループを抑制することができる。
Subsequently, during the light emission period, as shown in FIG. 2, the drive current Iop having the set magnitude is set in the region 1 as described above.
To prevent current from being applied to the areas 2 and 3. At this time, the area 1 emits light according to the magnitude of the drive current.
(It becomes the light emission output of the element) and heat is generated. On the other hand, since the regions 2 and 3 are not energized, neither light emission nor heat generation occurs.
As a result, the area 1 does not receive heat from the areas 2 and 3, and heat is generated only by the drive current Iop. here,
The drive current Iop and the bias currents applied to the regions 2 and 3 in the non-light emitting period are set to the same magnitude as described above. Therefore, the temperature of the region 1 (and the regions 2 and 3) is kept substantially constant throughout the non-light emitting period and the light emitting period. Therefore, the forward current-optical output characteristics of the region 1 can be hardly shifted, and droop can be effectively suppressed.

【0018】また、上記領域1および領域2,3の温度
が略一定に保たれることから、上記各領域1,2,3のし
きい値電流Ith1,Ith2もほとんどシフトしなくな
る。したがって、上記バイアス電流Ibの大きさは、し
きい値電流Ith1,Ith2の間で、上記領域2,3が無用
な発光をせず、かつ必要な発熱量が得られる値(一定値)
に容易に設定することができる。したがって、この半導
体レーザ素子は、簡単な駆動回路でもって容易に駆動す
ることができる。
Further, since the temperatures of the regions 1 and 2 and 3 are kept substantially constant, the threshold currents Ith1 and Ith2 of the regions 1, 2 and 3 hardly shift. Therefore, the magnitude of the bias current Ib is a value (constant value) such that the regions 2 and 3 do not emit light unnecessarily and the required amount of heat generation is obtained between the threshold currents Ith1 and Ith2.
Can be set easily. Therefore, this semiconductor laser device can be easily driven by a simple driving circuit.

【0019】また、この半導体レーザ素子を構成する半
導体層20,19,18,17,16および15は標準的な
作製パラメータで形成すれば良く、上記半導体層を区分
する溝4,5はエッチングによって容易に形成できる。
さらに、上記領域2,3のしきい値電流Ith2は、この
領域2,3に過電流を通電することによって、上記領域
1のしきい値電流Ith1よりも大きい値に変化(劣化)さ
せ、容易に設定することができる。したがって、この半
導体レーザ素子は容易に作製することができる。また、
上記半導体層20,19,18,17,16および15は標
準的な作製パラメータで形成できるので、作製した素子
の特性が損なわれるのを防止することができる。
Further, the semiconductor layers 20, 19, 18, 17, 16 and 15 constituting this semiconductor laser device may be formed by standard fabrication parameters, and the grooves 4 and 5 for partitioning the semiconductor layer are etched. It can be easily formed.
Further, the threshold current Ith2 of the regions 2 and 3 is changed (deteriorated) to a value larger than the threshold current Ith1 of the region 1 by passing an overcurrent to the regions 2 and 3, and thus it is easy to perform. Can be set to. Therefore, this semiconductor laser device can be easily manufactured. Also,
Since the semiconductor layers 20, 19, 18, 17, 16 and 15 can be formed with standard manufacturing parameters, it is possible to prevent the characteristics of the manufactured device from being impaired.

【0020】[0020]

【発明の効果】以上より明らかなように、請求項1の半
導体レーザ素子は、基板上にレーザ発光層を含む半導体
層を積層し、この半導体層表面から上記基板表面に至る
溝によって上記半導体層を複数の領域に区分して、上記
各領域が互いに独立に通電されるようにした半導体レー
ザ素子であって、上記複数の領域のうちの特定領域は上
記半導体層の作製パラメータに応じたしきい値電流でレ
ーザ発振する一方、上記複数の領域のうち上記特定領域
に対して上記溝を挟んで隣合う近傍領域のレーザ発振の
しきい値電流が上記特定領域の上記しきい値電流よりも
大きい値に設定されてなるので、容易に作製および駆動
でき、素子特性を損なうことなく効果的にドループを小
さくすることができる。したがって、この半導体レーザ
素子を用いるレーザ・ビーム・プリンタの印字品質,光
ピックアップのS/N比を大きく改善することができ
る。
As is apparent from the above, the semiconductor laser device according to the first aspect has a structure in which a semiconductor layer including a laser emitting layer is laminated on a substrate and the semiconductor layer is formed by a groove extending from the surface of the semiconductor layer to the surface of the substrate. Is a semiconductor laser device in which each of the regions is energized independently of each other, and a specific region of the plurality of regions is a threshold according to a manufacturing parameter of the semiconductor layer. While lasing with a value current, a threshold current of laser oscillation in a neighboring region adjacent to the specific region of the plurality of regions with the groove interposed therebetween is larger than the threshold current of the specific region. Since it is set to a value, it can be easily manufactured and driven, and droop can be effectively reduced without impairing device characteristics. Therefore, the printing quality of the laser beam printer using this semiconductor laser device and the S / N ratio of the optical pickup can be greatly improved.

【0021】請求項2の半導体レーザ素子の駆動方法
は、上記半導体レーザ素子の非発光期間においては、前
記近傍領域のみに該近傍領域のしきい値電流よりも低い
電流を通電し、上記非発光期間に続く発光期間において
は、前記特定領域のみに該特定領域を発光させるしきい
値電流以上の駆動電流を通電するので、簡単な駆動回路
でもって請求項1の半導体レーザ素子を駆動でき、効果
的にドループを抑制することができる。
According to a second aspect of the present invention, there is provided a method of driving a semiconductor laser device, wherein during the non-light emitting period of the semiconductor laser device, a current lower than a threshold current of the near region is applied only to the near region to cause the non-light emitting. In the light emitting period following the period, a driving current equal to or higher than a threshold current for causing the specific region to emit light is applied only to the specific region, so that the semiconductor laser device according to claim 1 can be driven by a simple driving circuit. Droop can be effectively suppressed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 この発明の一実施例の半導体レーザ素子の構
造を示す断面図である。
FIG. 1 is a sectional view showing the structure of a semiconductor laser device according to an embodiment of the present invention.

【図2】 上記半導体レーザ素子の駆動方法を説明する
図である。
FIG. 2 is a diagram illustrating a method for driving the semiconductor laser device.

【図3】 半導体レーザ素子の一般的な順電流−光出力
特性を示す図である。
FIG. 3 is a diagram showing a general forward current-optical output characteristic of a semiconductor laser device.

【図4】 従来の半導体レーザ素子のドループを説明す
る図である。
FIG. 4 is a diagram illustrating a droop of a conventional semiconductor laser device.

【符号の説明】[Explanation of symbols]

1 特定領域 2,3 近傍領域 4,5 溝 6,7,8 ストライプ状の溝 11,12,13 発光または発熱する箇所 14,22 電極 15 n型GaAs層 16 p型Ga1-xAlxAs層 17 p型Ga1-yAlyAs層 18 p型Ga1-xAlxAs層 19 n型GaAs層 20 p型GaAs層 21 n型GaAs基板1 Specific region 2, 3 Neighboring region 4, 5 Groove 6, 7, 8 Striped groove 11, 12, 13 Light or heat generating location 14,22 Electrode 15 n-type GaAs layer 16 p-type Ga 1- xAlxAs layer 17 p Type Ga 1- yAlyAs layer 18 p type Ga 1- xAlxAs layer 19 n type GaAs layer 20 p type GaAs layer 21 n type GaAs substrate

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 基板上にレーザ発光層を含む半導体層を
積層し、この半導体層表面から上記基板表面に至る溝に
よって上記半導体層を複数の領域に区分して、上記各領
域が互いに独立に通電されるようにした半導体レーザ素
子であって、 上記複数の領域のうちの特定領域は上記半導体層の作製
パラメータに応じたしきい値電流でレーザ発振する一
方、上記複数の領域のうち上記特定領域に対して上記溝
を挟んで隣合う近傍領域のレーザ発振のしきい値電流が
上記特定領域の上記しきい値電流よりも大きい値に設定
されてなることを特徴とする半導体レーザ素子。
1. A semiconductor layer including a laser emitting layer is laminated on a substrate, and the semiconductor layer is divided into a plurality of regions by a groove extending from the surface of the semiconductor layer to the surface of the substrate, and the regions are independently of each other. A semiconductor laser device that is made to be energized, wherein a specific region of the plurality of regions oscillates with a threshold current according to a manufacturing parameter of the semiconductor layer, while the specific region of the plurality of regions is A semiconductor laser device, wherein a threshold current for laser oscillation in a neighboring region adjacent to the region with the groove interposed therebetween is set to a value larger than the threshold current in the specific region.
【請求項2】 請求項1に記載の半導体レーザ素子の駆
動方法であって、 上記半導体レーザ素子の非発光期間においては、前記近
傍領域のみに該近傍領域のしきい値電流よりも低い電流
を通電し、上記非発光期間に続く発光期間においては、
前記特定領域のみに該特定領域を発光させるしきい値電
流以上の駆動電流を通電することを特徴とする半導体レ
ーザ素子の駆動方法。
2. The method for driving a semiconductor laser device according to claim 1, wherein in the non-light emitting period of the semiconductor laser device, a current lower than a threshold current of the neighboring region is applied only to the neighboring region. In the light emission period following the non-light emission period after energization,
A method of driving a semiconductor laser device, wherein a drive current equal to or more than a threshold current for causing the specific region to emit light is applied only to the specific region.
JP1200991A 1991-02-01 1991-02-01 Semiconductor laser device and driving method thereof Expired - Fee Related JP2672404B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1200991A JP2672404B2 (en) 1991-02-01 1991-02-01 Semiconductor laser device and driving method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1200991A JP2672404B2 (en) 1991-02-01 1991-02-01 Semiconductor laser device and driving method thereof

Publications (2)

Publication Number Publication Date
JPH04246878A JPH04246878A (en) 1992-09-02
JP2672404B2 true JP2672404B2 (en) 1997-11-05

Family

ID=11793591

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Status (1)

Country Link
JP (1) JP2672404B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19540682A1 (en) * 1995-11-01 1997-05-07 Herberts Gmbh Coating agent for the production of coatings reflecting heat rays

Also Published As

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