JP2013010330A - Heat plate for laminating device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a heat plate capable of keeping a temperature in a surface of a heat plate uniform in a laminating machining process, and to provide a laminating device using the heat plate.SOLUTION: The heat plate for a laminating device is the heat plate for the laminating device which is provided with an upper chamber and a lower chamber which are separated through a pressing member, wherein a workpiece 10 is loaded on the heat plate 20 arranged in the lower chamber; the workpiece 10 is heated through the heat plate 20 so as to vacuumize the lower chamber, and the air is introduced into the upper chamber, the workpiece is clamped and laminated by the heat plate 20 and the pressing member; the heat plate 20 is internally provided with a plurality of heaters 203 or a plurality of groups of paired heaters 203 and heating pipes 204; and furthermore, temperature sensors 207 are further arranged on at least three positions along the direction of conveying the workpiece loaded on the heat plate 20. The temperature in the surface of the heat plate is controlled to be uniformly distributed.

Description

  The present invention relates to a hot plate for a laminating apparatus in which a workpiece such as a solar cell module is disposed on a hot plate, and the workpiece heated by the hot plate is sandwiched between a hot plate and a pressing member for lamination. is there.

  Conventionally, when manufacturing a solar cell module, a laminating apparatus has been used (see Patent Document 1). The laminating apparatus has an upper case having a diaphragm that is expandable downward, and a lower case having a hot plate. When laminating a solar cell module, first, the solar cell module on which the constituent members are superimposed is transported to a space formed by the upper case and the lower case. Next, the laminating apparatus evacuates the space formed by the upper case and the lower case, arranges the solar cell module on the hot plate, and then heats the constituent members, and then converts the atmospheric pressure inside the upper case. Is introduced. By doing in this way, a solar cell module is pinched by a diaphragm and a hot plate, is laminated, and each constituent member of the solar cell module is bonded by a molten filler.

JP 2008-47766 A

  Here, in the conventional laminating apparatus, the technique of Patent Document 1 is proposed in order to make the temperature in the hot plate surface uniform. In the laminating apparatus described in Patent Document 1, a plurality of heaters and temperature sensors are provided in the hot plate. In order to make the temperature in the hot plate uniform, the heater is divided into a plurality of locations. It is necessary to provide and control a plurality of temperature sensors at the same time, and the structure of the hot plate becomes complicated. In addition, an embodiment in which a heat pipe is provided on the lower surface of the hot plate in order to make the workpiece heated uniformly has been proposed. Since the heat pipe is provided on the lower surface of the hot plate, the heat transport efficiency with respect to the heater in the hot plate is poor and the effect of the heat pipe is not sufficiently exhibited. Furthermore, since the heat pipe is provided on the lower surface of the hot plate, an extra space is required for mounting the hot plate.

  The present invention has been made in view of the above-described problems, and makes the temperature of the hot plate during the laminating process uniform, thereby making the temperature in the workpiece uniform, Another object of the present invention is to provide a laminating apparatus using the hot plate.

In order to achieve the above object, a hot plate for a laminating apparatus according to a first aspect of the present invention has an upper chamber and a lower chamber partitioned by a pressing member, and a workpiece on the hot plate provided in the lower chamber. And laminating the workpiece heated by the hot plate with the lower chamber in a vacuum and introducing air into the upper chamber and sandwiching the laminate with the hot plate and the pressing member. The hot plate is provided in the hot plate with a plurality of pairs of heaters or heaters and heat pipes, and the hot plate is arranged in the conveying direction of the workpiece placed on the hot plate. Three or more temperature sensors are provided, and the temperature distribution in the hot plate surface is made uniform.
According to the first invention, a heat pipe is provided in the hot plate, and three or more temperature sensors for temperature control of the hot plate are provided as described above. Can be made uniform, and the temperature in the workpiece can be made uniform. In addition, the number and arrangement of temperature sensors provided to make the temperature of the hot plate uniform are simplified, and the temperature control method becomes much easier.

A hot plate for a laminating apparatus according to a second aspect of the present invention has an upper chamber and a lower chamber partitioned by a pressing member, and a workpiece is disposed on the hot plate provided in the lower chamber, and the hot plate A hot plate for a laminating apparatus for laminating the work piece heated by the step of laminating the lower chamber in a vacuum with the lower chamber introduced into the upper chamber and sandwiched between the hot plate and the pressing member. Has a structure in which an upper heat plate and a lower heat plate are laminated, and the upper heat plate is provided in the upper heat plate with a plurality of heaters or pairs of heaters and heat pipes, and the upper heat plate is Three or more temperature sensors are provided in the conveyance direction of the work piece placed on the upper heat plate, and the lower heat plate has a heater and a heat pipe provided on the upper heat plate in the lower heat plate, Is the heater alone or Plural sets provided as pairs of data and the heat pipe, characterized in that a uniform temperature distribution of the upper heat plate surface.
According to the second aspect of the invention, the hot plate has an upper and lower laminated structure, heat pipes are provided in the upper hot plate and the lower hot plate, and a temperature sensor for temperature control of the hot plate is provided in the upper hot plate. Since three or more places are provided as described above, the temperature in the hot plate surface can be made more uniform during the laminating process than in the case where the hot plate of the first invention is used. . As a result, the temperature in the workpiece can be made more uniform. In addition, the number and arrangement of temperature sensors provided to make the temperature of the hot plate uniform are simplified, and the temperature control method becomes much easier.

According to a third aspect of the present invention, there is provided a heating plate for a laminating apparatus according to the second aspect of the invention, wherein the lower heating plate according to claim 2 is further perpendicular to the conveying direction of the workpiece placed on the upper heating plate. Three or more temperature sensors are provided in each direction, and the temperature distribution in the upper heat plate surface is made uniform.
According to the third invention, since the heat plate is provided with temperature sensors for temperature control in the lower heat plate as compared with the second invention in three or more places as described above, the heat plate surface during the laminating process. Compared with the case where the hot plate of the second invention is used, the temperature can be made more uniform. As a result, the temperature in the workpiece can be made more uniform.

According to a fourth aspect of the present invention, there is provided a heat plate for a laminating apparatus according to any one of the first to third aspects, wherein the heat pipes and the heaters of each set of the heat plates are arranged linearly and in parallel. It is characterized by.
According to the fourth invention, the heater and the heat pipe in the hot plate are arranged in parallel in a straight line, so the structure is easy, and the temperature in the hot plate can be easily controlled uniformly. is there.

A laminating apparatus according to a fifth aspect of the invention is characterized by using the hot plate for the laminating apparatus according to any of the first to fourth aspects of the invention.
According to the laminating apparatus of the fifth invention, since any one of the hot plates of the first to fourth inventions is used, the temperature in the hot plate surface when laminating can be made uniform. Therefore, since the temperature when laminating the workpiece can be made uniform, bubbles do not remain in the workpiece after laminating, and the quality of the workpiece can be improved.

It is sectional drawing which shows the structure of the solar cell module as a to-be-processed object. It is a figure which shows the structure of the whole lamination apparatus. It is a sectional side view of the lamination part of a laminating apparatus. It is a sectional side view of the lamination part at the time of the lamination process of a laminating apparatus. It is a figure for demonstrating the structure of the hot platen of Example 1. FIG. It is a figure for demonstrating the detail of a structure of the hot platen of Example 2. FIG. It is a figure for demonstrating the detail of a structure of the hot platen of Example 2. FIG. It is a figure for demonstrating arrangement | positioning of the temperature sensor of the lower stage heat plate of Example 3. FIG. It is explanatory drawing of a sheath heater.

Hereinafter, the laminating apparatus according to this embodiment will be described with reference to the drawings.
Here, first, the workpiece 10 to be laminated by the laminating apparatus will be described.
FIG. 1 is a cross-sectional view showing a configuration of a solar cell module using a crystal cell as a workpiece 10. As shown in the figure, the solar cell module 10 has a matrix-like structure in which a string 15 and a plurality of strings 15 are connected in parallel between a transparent cover glass 11 and a back material 12 via fillers 13 and 14. It has a sandwiched configuration. A material such as polyethylene resin is used for the back material 12. Further, EVA (ethylene vinyl acetate) resin, PVB (polyvinyl butyral) resin, or the like is used for the fillers 13 and 14. The string 15 has a configuration in which solar cells 18 as crystal cells are connected between electrodes 16 and 17 via lead wires 19.

  Moreover, as the workpiece 10, not only the solar cell module described above but also a solar cell module generally called a thin film type can be targeted. In a typical structure example of this thin film solar cell module, a power generation element composed of a transparent electrode, a semiconductor, and a back electrode is deposited on a transparent cover glass in advance. In such a thin film solar cell module, the cover glass is disposed downward, and the power generation element on the cover glass is covered with a filler. Further, the back material is covered on the filler. The components of the thin film solar cell module are bonded by vacuum heating lamination in such a state. That is, the thin film solar cell module is merely changed to a power generation element on which the above-described solar cell module crystal cells are deposited. The basic sealing structure of the thin film solar cell module is the same as that of the solar cell module described above.

  FIG. 2 is a diagram illustrating an overall configuration of the laminating apparatus 100 according to the present embodiment. The laminating apparatus 100 includes an upper case 110, a lower case 120, and a conveyance belt 130 for conveying the workpiece 10. The conveyor belt 130 conveys the workpiece 10 between the upper case 110 and the lower case 120. The laminating apparatus 100 is provided with a carry-in conveyor 200 for conveying the workpiece 10 before laminating to the laminating apparatus 100. Further, the laminating apparatus 100 is provided with a carry-out conveyor 300 for carrying out the workpiece 10 after lamination from the laminating apparatus 100. The carry-in conveyor 200 and the carry-out conveyor 300 are connected in series. The workpiece 10 is transferred from the carry-in conveyor 200 to the conveyance belt 130 and from the conveyance belt 130 to the carry-out conveyor 300.

  The laminating apparatus 100 is provided with a lifting device (not shown) composed of a cylinder, a piston rod, and the like. The lifting device can lift and lower the upper case 110 with respect to the lower case 120 while maintaining the horizontal state. The elevating device lowers the upper case 110 so that the internal space between the upper case 110 and the lower case 120 can be sealed.

  Next, the configuration of the laminating unit 101 of the laminating apparatus 100 according to this embodiment will be described more specifically. FIG. 3 is a side sectional view of a laminating unit 101 that laminates the workpiece 10 in the laminating apparatus 100. FIG. 4 is a cross-sectional side view of the laminating unit 101 during laminating.

  The upper case 110 is formed with a space opened downward. In this space, a diaphragm 112 is provided so as to partition the space horizontally. The diaphragm 112 is formed of heat-resistant rubber such as silicone rubber. As will be described later, the diaphragm 112 functions as a pressing member that presses the workpiece 10 and performs lamination. A space (upper chamber 113) partitioned by a diaphragm 112 is formed in the upper case 110.

  An intake / exhaust port 114 communicating with the upper chamber 113 is provided on the upper surface of the upper case 110. In the upper chamber 113, the inside of the upper chamber 113 can be evacuated and the atmosphere can be introduced into the upper chamber 113 via the intake / exhaust port 114.

  In the lower case 120, a space (lower chamber 121) opened upward is formed. In this space, a hot plate 122 (panel-shaped heater) is provided. The hot plate 122 is supported by a support member erected on the bottom surface of the lower case 120 so as to maintain a horizontal state. In this case, the hot plate 122 is supported so that the surface thereof is substantially level with the opening surface of the lower chamber 121.

  An intake / exhaust port 123 communicating with the lower chamber 121 is provided on the lower surface of the lower case 120. In the lower chamber 121, the inside of the lower chamber 121 can be evacuated and the atmosphere can be introduced into the lower chamber 121 through the intake / exhaust port 123.

  A conveyor belt 130 is movably provided between the upper case 110 and the lower case 120 and above the heat plate 122. The conveyor belt 130 receives the workpiece 10 before lamination from the carry-in conveyor 200 of FIG. 2 and accurately conveys it to the central position of the laminating unit 101, that is, the central part of the hot plate 122. Moreover, the conveyance belt 130 delivers the workpiece 10 after lamination to the carry-out conveyor 300 in FIG.

  A release sheet 140 is provided between the upper case 110 and the lower case 120 and above the conveyor belt 130. The release sheet 140 prevents the fillers 13 and 14 from adhering to the diaphragm 112 when the fillers 13 and 14 (see FIG. 1) of the workpiece 10 are melted.

  Next, the laminating process by the laminating apparatus 100 according to the present embodiment will be described more specifically. First, as shown in FIG. 3, the conveyance belt 130 conveys the workpiece 10 to the center position of the laminate unit 101. At this time, the workpiece 10 is held at a position spaced apart from the hot plate 122 by raising a holding pin (not shown) which is arranged in the lower chamber 121 and the hot plate 122 and can move up and down. May be.

  Next, the lifting device lowers the upper case 110. By lowering the upper case 110, the internal space between the upper case 110 and the lower case 120 is sealed as shown in FIG. That is, the upper chamber 113 and the lower chamber 121 can be kept sealed inside the upper case 110 and the lower case 120, respectively.

Next, the laminating apparatus 100 evacuates the upper chamber 113 through the intake / exhaust port 114 of the upper case 110. Similarly, the laminating apparatus 100 evacuates the lower chamber 121 through the intake / exhaust port 123 of the lower case 120 (vacuum process). Due to the evacuation of the lower chamber 121, the bubbles contained in the workpiece 10 are sent out of the workpiece 10. When the workpiece 10 is held at a position separated from the hot plate 122 by a holding pin (not shown) that can move up and down, the holding pin is lowered from substantially the second half of the vacuum process to move the workpiece 10. Is placed on the hot plate 122.
Since the workpiece 10 is heated by the hot plate 122 heated by the temperature control of a temperature control device described later, the fillers 13 and 14 included in the workpiece 10 are also heated.

  Next, the laminating apparatus 100 introduces air into the upper chamber 113 through the intake / exhaust port 114 of the upper case 110 while maintaining the vacuum state of the lower chamber 121. As a result, a pressure difference is generated between the upper chamber 113 and the lower chamber 121, so that the diaphragm 112 expands. Accordingly, the diaphragm 112 is pushed downward as shown in FIG. 4 (pressurizing step). The workpiece 10 is sandwiched between the diaphragm 112 extruded downward and the hot plate 122, and the constituent members are bonded to each other by the fillers 13 and 14 melted by heating. The laminating apparatus 100 according to this embodiment is a so-called all-crosslinking type laminating apparatus in which the fillers 13 and 14 are completely melted and the respective constituent members are bonded.

  At this time, although the fillers 13 and 14 may protrude from between the cover glass 11 and the back surface material 12, the protruding fillers 13 and 14 stick to the release sheet 140. By interposing the release sheet 140 in this way, the protruding fillers 13 and 14 are prevented from adhering to the diaphragm 112. Therefore, the release sheet 140 prevents the fillers 13 and 14 from adhering to the workpiece 10 to be laminated next from the diaphragm 112. Further, when the protruding fillers 13 and 14 adhere to the conveyor belt 130, the attached fillers 13 and 14 are removed by a cleaning mechanism (not shown).

  After the laminating process is thus completed, the laminating apparatus 100 introduces air into the lower chamber 121 through the intake / exhaust port 123 of the lower case 120. At this time, the lifting device raises the upper case 110. By raising the upper case 110, the conveyor belt 130 can be moved as shown in FIG. The conveyor belt 130 delivers the workpiece 10 after lamination to the carry-out conveyor 300.

  Next, the configuration of the hot plate 122 of the laminating apparatus 100 according to this embodiment will be described.

First, the hot plate for the laminating apparatus of Example 1 will be described. FIG. 5 is a diagram illustrating a configuration of the hot plate 122 according to the first embodiment. In FIG. 5, the hot plate 122 of the laminating apparatus 100 of the present invention shown in FIGS. 3 and 4 is the hot plate 20. 5 (a) is a plan view of the hot plate 20, FIG. 5 (b) is a front view of the hot plate 20, and FIG. 5 (c) is a CC arrow view of FIG. 5 (b). is there.
The hot plate 20 has a size that fits inside the lower case 120 and is larger than the solar cell module 10 indicated by a two-dot chain line in FIG. Here, the dimensions of the hot plate 20 of this embodiment are about 1500 mm in width Wh and about 1200 mm in depth Dh. The solar cell module 10 heated by the hot plate 20 has a depth d of about 1100 mm and a width w of about 1400 mm, and is rectangular in plan view. The size of the hot plate 20 is a reference example and is not limited to this dimension.

In FIG. 5, the hot plate body 201 has a placement surface SF on which a workpiece 10 can be placed and is formed in a panel shape from aluminum or an aluminum alloy. The material can also be an iron-based material such as stainless steel. A groove 208 is machined in the depth direction in the hot plate body 201 in order to embed the heater 203 and the heat pipe 204. A plurality of U-shaped heaters 203 are arranged in parallel in the accommodation groove 208. Here, a sheath heater SH can be used as the heater. As shown in FIG. 9, the sheath heater SH covers the entire circumference of the nichrome wire SH1 processed in a coil shape at the center, the insulating material SH2 such as magnesium oxide filled around the nichrome wire SH1, and the insulating material SH2. And a sheath SH3 (outer skin forming the outer periphery). The heater 203 is not U-shaped but may be a linear heater.
A heat pipe having a known configuration can be used. In the heat pipe, the working fluid is sealed in a state of saturated vapor pressure in the pipe, and if there is a temperature difference in the length direction of the heat pipe, a steam flow is generated from the high temperature portion to the low temperature portion. The hydraulic fluid takes heat of evaporation at the high temperature portion and gives heat of condensation at the low temperature portion.

  In this embodiment, a heat pipe 204 is embedded in a substantially central position of the U-shaped heater 203 in parallel with the heater. The structure of the buried portion will be described with reference to an enlarged view of portion A in FIG. The heater 203 and the heat pipe 204 are embedded and fixed in the accommodation groove 208 by fixing a back plate 206 having substantially the same dimensions as the hot plate main body 201 with bolts or the like via a cushion material 205. Thereby, the outer periphery of the heater and the outer periphery of the heat pipe are in close contact with the bottom surface of the groove. The heater 203 and the heat pipe 204 are used as one set of the heating unit 202, and a plurality of sets are arranged in the hot plate 20. The heating unit 202 is a region surrounded by a two-dot chain line in FIG. 5, and five sets 202A to 202E are provided as shown in FIG. 5C. The hot plate 20 can be provided with three or more temperature sensors 207 such as thermocouples. In the present embodiment, the temperature sensors 207A, 207B, and 207C are provided at the positions marked with x in FIG. That is, it is the both ends and center part of the conveyance direction of the workpiece installed in the hot platen 20. The temperature sensors at both ends are 207A and 207C, and the temperature sensor at the center is 207B. All the heaters 203 of each heating unit 202 surrounded by a two-dot chain line in the figure are connected to the temperature control device CL. Each heating unit 202 can be set to a uniform temperature by the action of a heat pipe. Moreover, the temperature of the entire hot plate can be uniformly controlled by inputting the measurement result of the temperature sensor 207 to the temperature control device CL and controlling the amount of heat generated by the heater of each heating unit. According to the hot plate of the present embodiment, the temperature variation in the hot plate surface in FIG. 5 can be controlled within ± 1.5 ° C. On the other hand, with a conventional hot plate that does not use a heat pipe, the temperature variation is within ± 4 ° C.

  In the present embodiment, the heating unit 202 is a pair of a heater and a heat pipe, but some heating units may be only the heater.

  In addition, such a function of making the temperature in the hot plate surface uniform is realized by cooperation of the heater 203, the heat pipe 204, the temperature sensor 207, and the temperature control device CL. Thereby, since the temperature in the solar cell module 10 which is a workpiece can be made uniform, the time for the filler to start melting can be made substantially the same. Therefore, even if the temperature of the hot plate is rapidly increased, the temperature can be controlled to be uniform, so that the tact time for manufacturing a high-quality solar cell module in which no bubbles are generated can be easily reduced.

  Furthermore, in order to make the temperature in the hot plate surface uniform in this way, the temperature sensor provided in the hot plate may be three or more, the number and arrangement thereof can be simplified, and as described in Patent Document 1 There is no need to provide a plurality of them at various positions. Therefore, the configuration of the temperature control device can be greatly simplified, and the laminating device can be provided at a low cost.

  Next, the hot plate for the laminating apparatus of Example 2 will be described. The hot plate 80 of the present embodiment is configured as shown in FIG. 6 (a) is a plan view of the hot plate 80, FIG. 6 (b) is a front view of the hot plate 80, and FIG. 6 (c) is a view taken in the direction of arrow F in FIG. 6 (a). 7 (d) is a view taken along the line CC in FIG. 6 (b), and FIG. 7 (e) is a view taken along the line EE in FIG. 6 (b). The heat plate of the present embodiment has a structure in which an upper heat plate and a lower heat plate are laminated. The upper heat plate 81 is a heat plate in the form of the first embodiment. As shown in the enlarged view of part A of FIG. 6B, the heater 813 and the heat pipe 814 are provided in the housing groove 818 with a cushioning material 815, and the lower surface 819 of the heat plate body 811 is replaced with the back plate 206 of the first embodiment. The lower heat plate 82 is fixedly embedded in the upper heat plate 81 by bolting or the like. The lower heat plate 82 is provided with a plurality of pairs of heaters 823 and heat pipes 824 in a direction perpendicular to the heaters 813 and heat pipes 814 provided in the upper heat plate 81.

  The heating part in Example 2 is as shown in FIG. 7 (d) and FIG. 7 (e). In the upper heating plate 81, five sets of 812A, 812B, 812C, 812D, and 812E serve as heating portions. In the lower heat plate 82, three sets of 822A, 822B, and 822C are heating units. Each heating unit is provided with a temperature sensor as shown in FIG. In the upper heating plate 81, three pieces of 817A, 817B, and 817C are provided. This is the same as in the first embodiment. The lower heat plate 82 is not provided with a temperature sensor.

  Further, in the present embodiment, the heating unit 822 is a pair of a heater and a heat pipe, but a part of the heating unit may be a heater alone.

As shown in the enlarged view of part B of FIG. 6C, the lower heat plate 82 has a heater 823 and a heat pipe 824 embedded in the upper surface 829 of the lower heat plate where the heat plate main body 821 contacts the lower surface 819 of the upper heat plate. An accommodation groove 828 is provided. A heater 823 and a heat pipe 824 are embedded in the housing groove 828 and fixed with the upper heat plate 81 and bolts or the like. When the upper and lower heat plates are fixed, it is preferable that the gap formed in the housing groove is filled with a cushioning material 825 having good thermal conductivity.
The heaters 813 and 823 of the heating units 812 and 822 surrounded by a two-dot chain line in the figure are all connected to the temperature control device CL. Each heating unit 822 can be set to a uniform temperature by the action of the heat pipe. In addition, the measurement result of the temperature sensor 817 provided on the upper heat plate 812 is input to the temperature control device CL, and the amount of heat generated by the heater of each heating unit can be controlled to uniformly control the temperature in the heat plate surface. . According to the hot plate of the present embodiment, the temperature in the hot plate surface in FIG. 6 can be more uniformly controlled than the hot plate of the first embodiment.

  In the second embodiment, the temperature sensor is not provided in the lower heat plate 82. However, in this embodiment, the temperature sensor may be provided in the lower heat plate as shown in FIG. In this embodiment, the temperature sensor is provided in a direction perpendicular to the first and second embodiments of the lower heating plate 82 (direction perpendicular to the workpiece). The rest is the same as in Example 2. In FIG. 8, temperature sensors 827A, 827B, 827C, and 827D are provided. The temperature sensors 827A and 827D are both ends of the hot plate in a direction perpendicular to the workpiece, and the temperature sensors 827B and 827C are the central portion of the hot plate. The measurement results of these temperature sensors 827 are input to the temperature controller CL, and the temperature in the hot plate surface can be uniformly controlled by controlling the amount of heat generated by the heater of each heating unit. According to the hot plate of the present embodiment, the temperature in the hot plate surface can be controlled more uniformly than the hot plates of the first and second embodiments.

Although the case where the sheath heater SH of FIG. 9 is used as the heater embedded in the hot plate 20 and the hot plate 80 of the first to third embodiments has been described, it is not limited to this case. For example, although not shown, a heat pipe or the like can be used. The heat pipe is composed of a hollow tube member and a heat transfer medium such as heated oil flowing in the tube member. Such a heat pipe may be configured to be embedded in the hot plate 20 and the hot plate 80 of the first to third embodiments. The temperature of the heat plate 20 and the heat plate 80 can also be controlled by connecting the heat pipe to the temperature control device CL and adjusting the temperature of the heat transfer medium flowing in the pipe member.
Further, not only the heated heat transfer medium but also the cooled heat transfer medium is used for the heat pipe, and the temperature control device CL adjusts the temperature of the heat transfer medium flowing in the pipe member, so that the heat plate 20 Therefore, the temperature of the hot plate 80 can be controlled.

  The hot plate of the present invention can be applied to a type of laminating apparatus that holds the workpiece 10 at a position separated from the hot plate by a holding pin or the like until substantially the first half of the vacuum process. However, the present invention can be applied to a laminating apparatus in which the conveyor belt 130 is placed on the hot plate 122 from the beginning.

  Thus, it is useful to use the hot plate of Examples 1 to 4 for the laminating apparatus 100 as follows.

  Since the heat plate for the laminating apparatus of the present invention is provided with the heat pipe in the heat plate as described above, and further provided with three or more temperature sensors in the conveying direction of the workpiece in the heat plate. The temperature in the hot plate surface can be made uniform. Therefore, it is possible to provide a high-quality solar cell module 10 that does not generate bubbles inside.

10 Workpiece (solar cell module)
DESCRIPTION OF SYMBOLS 11 Cover glass 13, 14 Filler 100 Laminating apparatus 101 Laminating part 110 Upper case 112 Diaphragm 113 Upper chamber 120 Lower case 121 Lower chamber 122 Hot plate 20, 80 Hot plate 201 Hot plate main body 202 Heating part 203 Heater 204 Heat pipe 205 Cushion Material 206 Back plate 207 Temperature sensor 208 Housing groove 209 Mounting surface (lower surface)
CL Temperature control device SH Sheath heater SF Mounting surface

Claims (5)

An upper chamber and a lower chamber, which are partitioned by a pressing member, are arranged on a hot plate provided in the lower chamber, and the workpiece heated by the hot plate is placed in the lower chamber. A hot plate for a laminating apparatus for laminating by vacuuming and introducing air into the upper chamber and sandwiching between the hot plate and the pressing member,
The hot plate is provided in the hot plate with a plurality of heaters or pairs of heaters and heat pipes,
Furthermore, the hot plate is provided with three or more temperature sensors in the conveyance direction of the workpiece placed on the hot plate,
A hot plate for a laminating apparatus, characterized in that the temperature distribution in the hot plate surface is made uniform. An upper chamber and a lower chamber, which are partitioned by a pressing member, are arranged on a hot plate provided in the lower chamber, and the workpiece heated by the hot plate is placed in the lower chamber. A hot plate for a laminating apparatus for laminating by vacuuming and introducing air into the upper chamber and sandwiching between the hot plate and the pressing member,
The hot plate has a structure in which an upper hot plate and a lower hot plate are laminated,
The upper heat plate is
In the upper heat plate, a plurality of heaters or a pair of heaters and heat pipes are provided,
Furthermore, the upper stage heat plate is provided with three or more temperature sensors in the conveying direction of the workpiece placed on the upper stage heat plate,
The lower heat plate is
In the lower heat plate, the heater and heat pipe provided in the upper heat plate in a direction perpendicular to the heater alone or a plurality of pairs of heaters and heat pipes are provided as a pair,
A heating plate for a laminating apparatus, characterized in that the temperature distribution in the surface of the upper heating plate is made uniform. In the lower heat plate according to claim 2,
Furthermore, three or more temperature sensors are provided in a direction perpendicular to the conveying direction of the workpiece placed on the upper heat plate,
A heating plate for a laminating apparatus, characterized in that the temperature distribution in the upper heating plate surface is made uniform.   The heat plate for a laminating apparatus according to any one of claims 1 to 3, wherein the heat pipes and heaters of each set of the heat plates are arranged linearly and in parallel.   A laminator using the hot plate for a laminator according to any one of claims 1 to 4.

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