JP2010118313A

JP2010118313A - X-ray source

Info

Publication number: JP2010118313A
Application number: JP2008292475A
Authority: JP
Inventors: Michihiro Ito; 通浩伊藤; Shoji Atsumi; 昌司渥美; Takatoshi Yoshiyama; 貴俊吉山
Original assignee: Hamamatsu Photonics KK
Current assignee: Hamamatsu Photonics KK
Priority date: 2008-11-14
Filing date: 2008-11-14
Publication date: 2010-05-27
Anticipated expiration: 2028-11-14
Also published as: JP5478873B2

Abstract

<P>PROBLEM TO BE SOLVED: To provide an X-ray source in which displacement of the focus of the X-rays is reduced. <P>SOLUTION: The support member 60 of the X-ray source 1 supports a load of an X-ray tube support part 6 by being fixed to the X-ray tube support part 6 in a state that an X-ray emitting window 27h is exposed on one end side of the X-ray tube support part 6, and is separated from the X-ray tube support part 6 on the other end side of the X-ray tube support part 6. With this structure, when the X-ray tube support part 6 is thermally expanded, the X-ray tube support part 6 is extended from the one end side to the other end side of the tube support part 6 with the fixed side of the support member 60 as a reference, and this extension margin can be escaped to a clearance S between the support member 60 and the X-ray tube support part 6. Thereby, the displacement amount of the focus of the X-rays can be made as small as possible. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

本発明は、特に、マイクロフォーカスＸ線源として利用されるＸ線源に関するものである。 The present invention particularly relates to an X-ray source used as a microfocus X-ray source.

従来、このような分野の技術として、特開２００７−３２３８９８号公報がある。この公報に記載されたＸ線管装置（Ｘ線源）は、陰極及び陽極を真空気密にするための外囲器を有するＸ線管を備え、この外囲器には、Ｘ線を出射するためのＸ線出射窓が設けられている。さらに、Ｘ線管装置は、Ｘ線管を保持する絶縁油と、陰極及び陽極に電力を供給する高電圧導入部と、絶縁油や高電圧導入部を収容する管容器と、管容器内でＸ線管を支持するための支持部とを備えている。そして、棒状の陽極を外囲器に固定させることで、Ｘ線発生時に陽極が熱膨張して陽極が長手方向に伸びた場合でも、外囲器の熱膨張による伸びによって、ターゲット上における電子の焦点（Ｘ線の焦点）の変位量を抑制させることができる。 Conventionally, there is JP, 2007-323898, A as a technique of such a field. An X-ray tube apparatus (X-ray source) described in this publication includes an X-ray tube having an envelope for making a cathode and an anode vacuum-tight, and emits X-rays to the envelope. An X-ray exit window is provided. Further, the X-ray tube device includes an insulating oil for holding the X-ray tube, a high voltage introduction unit for supplying power to the cathode and the anode, a tube container for housing the insulation oil and the high voltage introduction unit, and a tube container. And a support part for supporting the X-ray tube. And by fixing the rod-shaped anode to the envelope, even when the anode is thermally expanded at the time of X-ray generation and the anode is elongated in the longitudinal direction, the expansion of the envelope due to the thermal expansion causes the electrons on the target to expand. The amount of displacement of the focal point (X-ray focal point) can be suppressed.

特開２００７−３２３８９８号公報JP 2007-323898 A 特許第３９３０７７０号公報Japanese Patent No. 3930770 特開昭５９-１６２５４号公報JP 59-16254 特開平６-５３８１号公報JP-A-6-5381

前述した従来のＸ線源では、Ｘ線管の構成部材に起因する熱膨張によるＸ線の焦点の変位を低減させることはできる。一方で、Ｘ線管で発生した熱は、Ｘ線管を固定する管容器にも伝わるため、管容器も熱膨張する。それにより、Ｘ線管そのものの位置が変位し、それに伴ってＸ線源におけるＸ線の焦点も変位してしまう。このように、Ｘ線源におけるＸ線の焦点の変位においては、管容器の熱膨張の影響は無視することができない。従来のＸ線源では、管容器の熱膨張については何ら考慮されておらず、管容器の熱膨張に伴うＸ線の焦点の変位に対する対策は不十分であると言える。従って、Ｘ線源におけるＸ線の焦点の変位を低減し難いといった課題があった。 In the conventional X-ray source described above, it is possible to reduce the displacement of the focal point of the X-ray due to thermal expansion caused by the constituent members of the X-ray tube. On the other hand, since the heat generated in the X-ray tube is also transmitted to the tube container for fixing the X-ray tube, the tube container is also thermally expanded. As a result, the position of the X-ray tube itself is displaced, and accordingly, the focal point of the X-ray in the X-ray source is also displaced. As described above, in the displacement of the focal point of the X-ray in the X-ray source, the influence of the thermal expansion of the tube container cannot be ignored. In the conventional X-ray source, no consideration is given to the thermal expansion of the tube container, and it can be said that measures against the displacement of the focal point of the X-ray accompanying the thermal expansion of the tube container are insufficient. Accordingly, there is a problem that it is difficult to reduce the displacement of the focal point of the X-ray in the X-ray source.

本発明は、Ｘ線の焦点の変位を低減したＸ線源を提供することを目的とする。 An object of this invention is to provide the X-ray source which reduced the displacement of the focus of X-ray | X_line.

本発明は、ターゲットに入射した電子により発生したＸ線を外部に出射させるＸ線出射窓を有するＸ線管を備えたＸ線源において、
Ｘ線管のＸ線出射窓を露出させた状態でＸ線管を保持するＸ線管保持部と、
Ｘ線管保持部の一端側においてＸ線出射窓を露出させた状態でＸ線管保持部に固定されてＸ線管保持部の荷重を支持すると共に、Ｘ線管保持部の他端側でＸ線管保持部から離間する支持部材と、を備えたことを特徴とする。 The present invention provides an X-ray source including an X-ray tube having an X-ray emission window for emitting X-rays generated by electrons incident on a target to the outside.
An X-ray tube holding unit for holding the X-ray tube in a state where the X-ray exit window of the X-ray tube is exposed;
The X-ray tube holding part is fixed to the X-ray tube holding part with the X-ray exit window exposed at one end side to support the load of the X-ray tube holding part, and at the other end side of the X-ray tube holding part. And a support member that is spaced apart from the X-ray tube holding part.

本発明のＸ線源の支持部材は、Ｘ線管保持部の一端側においてＸ線出射窓を露出させた状態でＸ線管保持部に固定されてＸ線管保持部の荷重を支持すると共に、Ｘ線管保持部の他端側でＸ線管保持部から離間させられている。このような構成により、Ｘ線管保持部が熱膨張した場合に、このＸ線管保持部は、支持部材の固定側を基準にして、Ｘ線管保持部の一端側から他端側に伸び、この伸び分を、支持部材とＸ線管保持部との間の隙間に逃がすことができる。従って、Ｘ線の焦点の変位量を可能な限り小さくすることができる。 The support member of the X-ray source of the present invention is fixed to the X-ray tube holding portion with the X-ray exit window exposed at one end side of the X-ray tube holding portion, and supports the load of the X-ray tube holding portion. The other end side of the X-ray tube holding part is separated from the X-ray tube holding part. With such a configuration, when the X-ray tube holding portion is thermally expanded, the X-ray tube holding portion extends from one end side of the X-ray tube holding portion to the other end side with respect to the fixed side of the support member. This elongation can be released to the gap between the support member and the X-ray tube holding part. Therefore, the amount of displacement of the focus of X-ray can be made as small as possible.

また、支持部材は、Ｘ線管保持部の他端側の面から離間して、他端側の面と対向して延在する第１の放熱部と、Ｘ線管保持部の一端側の面に固定された第２の放熱部と、一端が第１の放熱部に固定され、他端が第２の放熱部に固定された第３の放熱部と、からなり、Ｘ線管保持部は、第３の放熱部と離間すると好適である。
このような構成を採用すると、Ｘ線管保持部は、第１〜第３の放熱部で略コ字状に囲まれるとともに、熱膨張によるＸ線管保持部の第３の放熱部側への伸び分も、第３の放熱部とＸ線管保持部との隙間に逃がすことができる。このことは、第１の放熱部とＸ線管保持部との離間によるＸ線管保持部の伸びの適切な逃がしと相俟って、Ｘ線の焦点の変位の低減に効果的である。 Further, the support member is spaced apart from the other end surface of the X-ray tube holding portion and extends opposite to the other end surface, and one end side of the X-ray tube holding portion. An X-ray tube holding part, comprising: a second heat radiating part fixed to the surface; and a third heat radiating part having one end fixed to the first heat radiating part and the other end fixed to the second heat radiating part. Is preferably separated from the third heat radiating portion.
When such a configuration is adopted, the X-ray tube holding portion is surrounded by the first to third heat radiating portions in a substantially U-shape, and the X-ray tube holding portion due to thermal expansion toward the third heat radiating portion side. The elongation can also escape to the gap between the third heat radiating part and the X-ray tube holding part. This is effective in reducing the displacement of the focal point of the X-ray, coupled with an appropriate escape of the extension of the X-ray tube holding part due to the separation between the first heat radiation part and the X-ray tube holding part.

また、Ｘ線管保持部と第１の放熱部と第２の放熱部と第３の放熱部とは、熱的に連結されていると好適である。
このような構成を採用すると、支持部材全体でＸ線管保持部の熱を効率良く吸収でき、この熱を支持部材全体で外部に逃すことで、Ｘ線管の放熱効率を向上することができる。よって、Ｘ線の焦点の変位の低減に効果的である。 In addition, it is preferable that the X-ray tube holding portion, the first heat radiating portion, the second heat radiating portion, and the third heat radiating portion are thermally connected.
When such a configuration is adopted, the heat of the X-ray tube holding portion can be efficiently absorbed by the entire support member, and the heat dissipation efficiency of the X-ray tube can be improved by releasing this heat to the outside by the entire support member. . Therefore, it is effective in reducing the displacement of the focal point of X-rays.

また、第２の放熱部と第３の放熱部との間に熱伝導性グリスが充填されていると好適である。
このような構成によって、第２の放熱部から第３の放熱部への熱伝導性を高めることができ、第３の放熱部の放熱能を十分に利用することができ、Ｘ線管の放熱効率を向上することができる。よって、Ｘ線の焦点の変位の低減に効果的である。 In addition, it is preferable that thermally conductive grease is filled between the second heat radiating portion and the third heat radiating portion.
With such a configuration, the thermal conductivity from the second heat radiating portion to the third heat radiating portion can be increased, and the heat radiating ability of the third heat radiating portion can be fully utilized. Efficiency can be improved. Therefore, it is effective in reducing the displacement of the focal point of X-rays.

また、Ｘ線管は、Ｘ線管をＸ線管保持部に固定するためのフランジ部を備え、第２の放熱部は、フランジ部を介してＸ線管保持部の一端側に固定されていると好適である。
これは、フランジ部を、第２の放熱部とＸ線管保持部とで挟み込む構成になっているので、Ｘ線管で発生した熱を、フランジ部を介して第２の放熱部が直接吸収することで、Ｘ線管の放熱効率を向上することができる。 The X-ray tube includes a flange portion for fixing the X-ray tube to the X-ray tube holding portion, and the second heat radiating portion is fixed to one end side of the X-ray tube holding portion via the flange portion. It is preferable that
Since the flange portion is sandwiched between the second heat radiation portion and the X-ray tube holding portion, the heat generated by the X-ray tube is directly absorbed by the second heat radiation portion via the flange portion. By doing so, the heat dissipation efficiency of the X-ray tube can be improved.

また、第２の放熱部とフランジ部との間に熱伝導性グリスが充填されていると好適である。
このような構成によって、Ｘ線管のフランジ部から第２の放熱部への熱伝導性を高めることができる。従って、Ｘ線管の熱を第２の放熱部にさらに伝え易くし、Ｘ線管の放熱効率をさらに高めることができる。よって、Ｘ線の焦点の変位の低減に効果的である。 In addition, it is preferable that thermally conductive grease is filled between the second heat radiating portion and the flange portion.
With such a configuration, the thermal conductivity from the flange portion of the X-ray tube to the second heat radiating portion can be enhanced. Therefore, the heat of the X-ray tube can be further easily transferred to the second heat radiating portion, and the heat dissipation efficiency of the X-ray tube can be further increased. Therefore, it is effective in reducing the displacement of the focal point of X-rays.

また、第２の放熱部とＸ線管保持部との間に熱伝導性グリスが充填されていると好適である。
このような構成によって、Ｘ線管保持部から第２の放熱部への熱伝導性を高めることができる。従って、Ｘ線管保持部の熱を第２の放熱部に伝え易くし、Ｘ線管保持部自体の放熱効率を高めることができる。 In addition, it is preferable that thermally conductive grease is filled between the second heat radiating portion and the X-ray tube holding portion.
With such a configuration, the thermal conductivity from the X-ray tube holding part to the second heat radiating part can be enhanced. Therefore, the heat of the X-ray tube holding part can be easily transferred to the second heat radiating part, and the heat radiation efficiency of the X-ray tube holding part itself can be increased.

また、Ｘ線管は、Ｘ線出射窓が設けられると共に、棒状の陽極の端部に設けられたターゲットを収容するターゲット収容部と、ターゲットに向けて電子を出射する電子銃を収容する電子銃収容部と、がＸ線管保持部から露出し、第２の放熱部には、ターゲット収容部及び電子銃収容部を収容する開口部が設けられ、開口部を形成する壁面と、ターゲット収容部及び電子銃収容部との間にＸ線遮蔽部材が配置されていると好適である。
Ｘ線遮蔽部材の採用によって、Ｘ線出射窓以外から放出されるＸ線があった場合にも、それがＸ線源外部に漏洩することを抑制することができる。 In addition, the X-ray tube is provided with an X-ray emission window, a target accommodating portion that accommodates a target provided at an end of the rod-shaped anode, and an electron gun that accommodates an electron gun that emits electrons toward the target The housing portion is exposed from the X-ray tube holding portion, and the second heat radiating portion is provided with an opening for housing the target housing portion and the electron gun housing portion, and a wall surface that forms the opening portion, and the target housing portion Further, it is preferable that an X-ray shielding member is disposed between the electron gun housing portion and the electron gun housing portion.
By adopting the X-ray shielding member, even when there is X-rays emitted from other than the X-ray exit window, it can be prevented from leaking outside the X-ray source.

本発明によれば、Ｘ線の焦点の変位を低減させることができる。 According to the present invention, the displacement of the focal point of X-rays can be reduced.

以下、図面を参照しつつ本発明に係るＸ線源の好適な実施形態について詳細に説明する。 Hereinafter, preferred embodiments of an X-ray source according to the present invention will be described in detail with reference to the drawings.

図１及び図２に示すように、Ｘ線非破壊検査装置等に利用されるＸ線源１には、電子銃から出射させた電子をターゲットに衝突させた後に発生するＸ線をＸ線出射窓から外部に出射させる構造を備えたＸ線管２７が交換可能に取付けられている。 As shown in FIGS. 1 and 2, the X-ray source 1 used in an X-ray nondestructive inspection apparatus or the like emits X-rays generated after colliding electrons emitted from an electron gun with a target. An X-ray tube 27 having a structure for emitting light from the window to the outside is attached in a replaceable manner.

このＸ線源１の筐体３内には、Ｘ線を発生させるためのＸ線発生部５と、そのＸ線発生部５を電気的に制御するための制御部７とが収容されている。筐体３の内部空間は、Ｘ線発生部５を収容するためのＸ線発生部収容空間Ｒ１と、制御部７を収納するための制御部収容空間Ｒ２とに区画され、Ｘ線発生部収容空間Ｒ１と制御部収容空間Ｒ２との間には、筐体３の上部内壁面から下方に向けて延びる仕切壁１５が設けられている。 An X-ray generation unit 5 for generating X-rays and a control unit 7 for electrically controlling the X-ray generation unit 5 are accommodated in the housing 3 of the X-ray source 1. . The internal space of the housing 3 is partitioned into an X-ray generation unit accommodation space R1 for accommodating the X-ray generation unit 5 and a control unit accommodation space R2 for accommodating the control unit 7, and the X-ray generation unit accommodation A partition wall 15 extending downward from the upper inner wall surface of the housing 3 is provided between the space R1 and the control unit accommodation space R2.

図３に示すように、Ｘ線発生部５は、高電圧を発生させるための電源部１７と、この電源部１７から電力の供給を受けてＸ線を出射するＸ線管２７と、電源部１７から突出してＸ線管２７の一部を包囲するＸ線管包囲部である金属筒２９とを備えている。そして、電源部１７と金属筒２９との一体化によって、Ｘ線管２７の一端側の端面に設けられたＸ線出射窓２７ｈを露出させた状態でＸ線管２７を保持するためのＸ線管保持部６が構成される。 As shown in FIG. 3, the X-ray generation unit 5 includes a power supply unit 17 for generating a high voltage, an X-ray tube 27 that receives power supply from the power supply unit 17 and emits X-rays, and a power supply unit 17 and a metal tube 29 that is an X-ray tube surrounding portion that surrounds a part of the X-ray tube 27. An X-ray for holding the X-ray tube 27 in a state in which the X-ray emission window 27h provided on the end surface on one end side of the X-ray tube 27 is exposed by integrating the power supply unit 17 and the metal tube 29. A tube holding unit 6 is configured.

電源部１７は、高電圧を発生させ得る高圧トランス１９と、高圧トランス１９で発生した高電圧をＸ線管２７に供給する高圧供給回路２３と、高圧トランス１９と高圧供給回路２３とを連結する接続線２５ａと、高圧供給回路２３とＸ線管２７とを連結する接続線２５ｂとを備えている。 The power supply unit 17 connects the high voltage transformer 19 that can generate a high voltage, the high voltage supply circuit 23 that supplies the high voltage generated by the high voltage transformer 19 to the X-ray tube 27, and the high voltage transformer 19 and the high voltage supply circuit 23. A connection line 25a and a connection line 25b for connecting the high voltage supply circuit 23 and the X-ray tube 27 are provided.

高圧供給回路２３及び接続線２５ａ，２５ｂは、電気絶縁性材料（例えば、エポキシ樹脂）からなる絶縁ブロック２１中にモールドされている。高圧トランス１９は、絶縁ブロック２１の側面から制御部７側に向けて突出している。電源部１７のこのような構造によって、高電圧が印加され続ける高圧供給回路２３及び接続線２５ａ，２５ｂから発生する放電を抑制することができる。 The high voltage supply circuit 23 and the connection lines 25a and 25b are molded in an insulating block 21 made of an electrically insulating material (for example, epoxy resin). The high-voltage transformer 19 protrudes from the side surface of the insulating block 21 toward the control unit 7 side. With such a structure of the power supply unit 17, it is possible to suppress discharge generated from the high voltage supply circuit 23 and the connection lines 25a and 25b to which a high voltage is continuously applied.

このＸ線管２７は、反射型ターゲットタイプであり、端部にターゲット２７ｃが設けられた棒状の陽極２７ｂと、陽極２７ｂが固定されるバルブ部２７ａと、バルブ部２７ａの開放部を閉鎖すると共に、ターゲット２７ｃを包囲するターゲット収容部２７ｄと、ターゲット２７ｃに向けて電子線を出射するための電子銃２７ｋを収容する電子銃収容部２７ｅとを備えている。なお、給電のために、棒状陽極２７ｂの基端部は、高電圧印加部２７ｇとしてバルブ部２７ａから突出している。 The X-ray tube 27 is a reflection type target type, and closes a rod-shaped anode 27b provided with a target 27c at an end, a valve portion 27a to which the anode 27b is fixed, and an opening portion of the valve portion 27a. A target housing portion 27d that surrounds the target 27c, and an electron gun housing portion 27e that houses an electron gun 27k for emitting an electron beam toward the target 27c. For power feeding, the base end portion of the rod-shaped anode 27b protrudes from the valve portion 27a as a high voltage application portion 27g.

バルブ部２７ａとターゲット収容部２７ｄとはＸ線管２７の管軸Ｌと同軸に配置されており、管軸Ｌに対して電子銃２７ｋの電子銃収容部軸線Ｐは略直交し、この管軸Ｌ上にＸ線出射軸Ｒが存在する。つまり、Ｘ線管２７では管軸ＬとＸ線出射軸Ｒとが同軸となっている。また、このＸ線出射軸Ｒは、ターゲット収容部２７ｄの開口部に設けられたＸ線出射窓２７ｈに対して略直交して延在する。つまり、Ｘ線管２７は、管軸Ｌ（またはＸ線出射軸Ｒ）に沿って、一端側にＸ線出射窓２７ｈを、他端側に高電圧印加部２７ｇを有している。 The valve portion 27a and the target accommodating portion 27d are arranged coaxially with the tube axis L of the X-ray tube 27, and the electron gun accommodating portion axis P of the electron gun 27k is substantially orthogonal to the tube axis L. An X-ray emission axis R exists on L. That is, in the X-ray tube 27, the tube axis L and the X-ray emission axis R are coaxial. The X-ray emission axis R extends substantially orthogonal to the X-ray emission window 27h provided in the opening of the target accommodating portion 27d. That is, the X-ray tube 27 has an X-ray exit window 27h on one end side and a high voltage application portion 27g on the other end side along the tube axis L (or X-ray exit axis R).

バルブ部２７ａから突出する高電圧印加部２７ｇの下部は、陽極２７ｂへの給電のためにソケット３３に接触させられる。そして、このソケット３３は、電源部１７の接続線２５ｂを介して高圧供給回路２３に接続されている。このような構成により、Ｘ線管２７には、接続線２５ｂを介して高圧供給回路２３から高電圧が供給される。Ｘ線管２７が高電圧の供給を受けた状態で、電子銃２７ｋがターゲット２７ｃに向けて電子を出射すると、ターゲット２７ｃからＸ線が発生し、このＸ線が、ターゲット収容部２７ｄに設けられたＸ線出射窓２７ｈから出射される。 The lower part of the high voltage applying part 27g protruding from the valve part 27a is brought into contact with the socket 33 for supplying power to the anode 27b. The socket 33 is connected to the high voltage supply circuit 23 through the connection line 25 b of the power supply unit 17. With such a configuration, a high voltage is supplied to the X-ray tube 27 from the high voltage supply circuit 23 through the connection line 25b. When the electron gun 27k emits electrons toward the target 27c while the X-ray tube 27 is supplied with a high voltage, X-rays are generated from the target 27c, and the X-rays are provided in the target accommodating portion 27d. It is emitted from the X-ray emission window 27h.

なお、Ｘ線管２７は、その内部を真空にして封止された密封型である。例えばＸ線管２７には、図示しない排気管が設けられており、この排気管を介してバルブ部２７ａ、ターゲット収容部２７ｄ及び電子銃収容部２７ｅの内部が真空引きされた後、排気管を封止することによって、Ｘ線管２７は密封される。 The X-ray tube 27 is a hermetically sealed type whose inside is sealed in a vacuum. For example, the X-ray tube 27 is provided with an exhaust pipe (not shown), and after the inside of the valve portion 27a, the target storage portion 27d, and the electron gun storage portion 27e is evacuated, the exhaust pipe is connected to the X-ray tube 27. By sealing, the X-ray tube 27 is sealed.

Ｘ線管２７のバルブ部２７ａを包囲する金属筒２９は、電源部１７の上面から上方に突出し、Ｘ線管２７を包囲する円筒形に形成されている。金属筒２９は、Ｘ線管２７から発生する熱を効率よく放散させるために、放熱性に優れた金属（例えば、アルミニウム）からなると共に、外周面から突出する複数の冷却フィン２９ａを有している。冷却フィン２９ａは、金属筒２９の表面積を拡大するものであり、Ｘ線管２７から発生する熱を効率よく放散させることができる。 A metal tube 29 surrounding the valve portion 27 a of the X-ray tube 27 protrudes upward from the upper surface of the power supply unit 17 and is formed in a cylindrical shape surrounding the X-ray tube 27. The metal tube 29 is made of a metal (for example, aluminum) having excellent heat dissipation properties and has a plurality of cooling fins 29a protruding from the outer peripheral surface in order to efficiently dissipate heat generated from the X-ray tube 27. Yes. The cooling fin 29a expands the surface area of the metal tube 29, and can efficiently dissipate heat generated from the X-ray tube 27.

この金属筒２９の上端面には開口２９ｊが形成され、この開口２９ｊからＸ線管２７のバルブ部２７ａが挿入され、金属筒２９の内部空間には、液状の電気絶縁性物質である絶縁オイル３１が満たされている。そして、Ｘ線管２７のターゲット収容部２７ｄにはフランジ部２７ｆが設けられており、このフランジ部２７ｆは、金属筒２９の開口２９ｊ側に位置してＸ線出射軸Ｒに対して垂直に延在する、Ｘ線管保持部６の一端側（Ｘ線出射窓２７側）の面である取付け面２９ｂ（図７参照）に固定されている。 An opening 29j is formed in the upper end surface of the metal tube 29, and a valve portion 27a of the X-ray tube 27 is inserted through the opening 29j. Insulating oil that is a liquid electrical insulating material is inserted into the internal space of the metal tube 29. 31 is satisfied. The target accommodating portion 27d of the X-ray tube 27 is provided with a flange portion 27f. The flange portion 27f is located on the opening 29j side of the metal tube 29 and extends perpendicularly to the X-ray emission axis R. It is being fixed to the attachment surface 29b (refer FIG. 7) which is the surface of the existing one end side (X-ray emission window 27 side) of the X-ray tube holding | maintenance part 6. FIG.

金属筒２９の内部空間に満たした絶縁オイル３１にＸ線管２７のバルブ部２７ａを浸漬させた状態で、ネジ３２（図６参照）によってフランジ部２７ｆが取付け面２９ｂに固定されるので、絶縁オイル３１が漏れ出すことがなく、Ｘ線管２７から外部への放電が防止されている。 Since the flange portion 27f is fixed to the mounting surface 29b by the screw 32 (see FIG. 6) in a state where the valve portion 27a of the X-ray tube 27 is immersed in the insulating oil 31 filled in the internal space of the metal tube 29, the insulating portion 31 is insulated. Oil 31 does not leak out and discharge from the X-ray tube 27 to the outside is prevented.

続いて、制御部７について説明する。 Next, the control unit 7 will be described.

図１及び図４に示すように、制御部７は、制御部収容空間Ｒ２内に設けられ、第１回路基板３５、第２回路基板３７、及び駆動電源部３９を有している。この第１回路基板３５は、電源部１７で発生させ得る電圧を、高電圧（例えば１６０ｋＶ）から低電圧（例えば０Ｖ）までコントロールしている。更に、第１回路基板３５は、電子銃収容部２７ｅにおける電子の放出のタイミングや管電圧、管電流などのコントロールを行う。第２回路基板３７は、外部からの制御信号に基づいて第１回路基板３５の動作をコントロールする。 As shown in FIGS. 1 and 4, the control unit 7 is provided in the control unit accommodating space R <b> 2 and includes a first circuit board 35, a second circuit board 37, and a drive power supply unit 39. The first circuit board 35 controls the voltage that can be generated by the power supply unit 17 from a high voltage (for example, 160 kV) to a low voltage (for example, 0 V). Further, the first circuit board 35 controls the emission timing, tube voltage, tube current, etc. of the electron gun housing portion 27e. The second circuit board 37 controls the operation of the first circuit board 35 based on a control signal from the outside.

駆動電源部３９は、外部から供給される電力をＡＣ／ＤＣ変換（またはＤＣ／ＤＣ変換）するコンバータであり、第１回路基板３５及び第２回路基板３７に駆動電力を供給すると共に、Ｘ線発生部５の高圧トランス１９に高電圧を発生させるための電力を供給する。なお、第１回路基板３５と、第２回路基板３７と、駆動電源部３９と、Ｘ線発生部５とは、図示しない配線によって互いに電気的に接続されている。 The drive power supply unit 39 is a converter that performs AC / DC conversion (or DC / DC conversion) on electric power supplied from the outside, and supplies drive power to the first circuit board 35 and the second circuit board 37 and X-rays. Electric power for generating a high voltage is supplied to the high voltage transformer 19 of the generator 5. Note that the first circuit board 35, the second circuit board 37, the drive power supply unit 39, and the X-ray generation unit 5 are electrically connected to each other by wiring (not shown).

この制御部７にあっては、第１回路基板３５、第２回路基板３７及び駆動電源部３９を制御部収容空間Ｒ２内でコンパクトに収容するために、制御部７には、導熱性の金属（例えば、アルミニウム）からなる回路基板ホルダー４９が設けられ、この回路基板ホルダー４９は、第１回路基板３５、第２回路基板３７、及び駆動電源部３９を適切な位置で保持するために山形になっている。 In the control unit 7, in order to accommodate the first circuit board 35, the second circuit board 37, and the drive power supply unit 39 in the control unit accommodation space R2, the control unit 7 includes a heat conductive metal. A circuit board holder 49 made of (for example, aluminum) is provided, and the circuit board holder 49 has a mountain shape to hold the first circuit board 35, the second circuit board 37, and the drive power supply unit 39 at appropriate positions. It has become.

回路基板ホルダー４９は、導熱性の金属からなる第１プレート４５と、第１プレート４５にネジ止めされた第２のプレート４７とからなる。第１プレート４５は、筐体３の底板（第２の放熱部）６１に対して傾斜して立設させた第１平板部４６を有しており、第２プレート４７は、底板６１に対して略垂直に立設させた第２平板部４８を有している。この第１プレート４５と第２プレート４７とは、下端がネジ４９ａによってそれぞれ底板６１に固定されており、上端が重ねられた状態でネジ４９ｂによって連結されている。 The circuit board holder 49 includes a first plate 45 made of a heat conductive metal and a second plate 47 screwed to the first plate 45. The first plate 45 has a first flat plate portion 46 that is inclined and raised with respect to the bottom plate (second heat radiating portion) 61 of the housing 3, and the second plate 47 is formed with respect to the bottom plate 61. And a second flat plate portion 48 that is erected substantially vertically. The lower ends of the first plate 45 and the second plate 47 are fixed to the bottom plate 61 by screws 49a, and are connected by screws 49b with the upper ends overlapped.

また、第２プレート４７の下部は、筐体３の側壁３ｆに近づくようにＬ字状に屈曲しており、電源部１７の高圧トランス１９が第２プレート４７と第１プレート４５との間に位置するようになっている。 The lower portion of the second plate 47 is bent in an L shape so as to approach the side wall 3 f of the housing 3, and the high voltage transformer 19 of the power supply unit 17 is interposed between the second plate 47 and the first plate 45. It is supposed to be located.

このようなＸ線源１の運転中に、Ｘ線管２７が発熱すると、Ｘ線管２７及び金属筒２９が高温となってしまう。このＸ線管２７の発熱は、Ｘ線照射の出力が高いほど大きくなり、Ｘ線管２７が高温になると、他の部品に悪影響を及ぼすと共に、Ｘ線管２７の出力低下を招いてしまうので、Ｘ線管２７を効率よく冷却するために金属筒２９を効率よく冷却する必要がある。 If the X-ray tube 27 generates heat during the operation of the X-ray source 1, the X-ray tube 27 and the metal tube 29 become high temperature. The heat generated by the X-ray tube 27 increases as the output of the X-ray irradiation increases. If the temperature of the X-ray tube 27 becomes high, other parts are adversely affected and the output of the X-ray tube 27 is reduced. In order to cool the X-ray tube 27 efficiently, it is necessary to cool the metal tube 29 efficiently.

そこで、Ｘ線源１においては、図１に示すように、筐体３の底板６１に対し直交する方向に起立する側壁３ｂには冷却ファンユニット５５が固定され、筐体３内で冷却風を強制的に流動させることによって、金属筒２９の急速冷却を行っている。 Therefore, in the X-ray source 1, as shown in FIG. 1, a cooling fan unit 55 is fixed to the side wall 3 b that stands in a direction orthogonal to the bottom plate 61 of the housing 3, and cooling air is blown in the housing 3. The metal tube 29 is rapidly cooled by forcibly flowing.

図２及び図４に示すように、この筐体３の上壁３ｃは、底板６１に平行に延びると共に、Ｘ線出射窓２７ｈを露出させるための開口（照射部）３ｊが設けられている。また、筐体３では、上壁３ｃと側壁３ｂとを連結する壁が傾斜壁３ｄとして形成されている。同様に、側壁３ｂに対向する側壁３ｆと上壁３ｃとを連結する壁も傾斜壁３ｅになっている。 As shown in FIGS. 2 and 4, the upper wall 3c of the housing 3 extends in parallel with the bottom plate 61, and is provided with an opening (irradiation unit) 3j for exposing the X-ray exit window 27h. Moreover, in the housing | casing 3, the wall which connects the upper wall 3c and the side wall 3b is formed as the inclined wall 3d. Similarly, the wall connecting the side wall 3f facing the side wall 3b and the upper wall 3c is also an inclined wall 3e.

図１に示すように、冷却ファンユニット５５は前述のように筐体３の側壁３ｂに設けられており、側壁３ｂに垂直な軸線を中心として回転する冷却ファン５５ａを有している。冷却ファン５５ａの駆動により、筐体３の外部から内部へ向けて空気をＸ線発生部収容空間Ｒ１内に流入させる。冷却ファン５５ａは、冷却風が直接Ｘ線発生部５に当たるようにＸ線発生部５の近傍に配置されている。 As shown in FIG. 1, the cooling fan unit 55 is provided on the side wall 3b of the housing 3 as described above, and has the cooling fan 55a that rotates about an axis perpendicular to the side wall 3b. By driving the cooling fan 55a, air flows into the X-ray generation unit accommodating space R1 from the outside to the inside of the housing 3. The cooling fan 55 a is disposed in the vicinity of the X-ray generator 5 so that the cooling air directly hits the X-ray generator 5.

この冷却ファン５５ａにより筐体３の内部に取り込まれた空気は、冷却風としてＸ線発生部収容空間Ｒ１で流動し、冷却フィン２９ａをもった金属筒２９にムラなく当たりながら、金属筒２９の周囲を通過しつつ、側壁３ｆに沿って流れていくことになる。そして、金属筒２９の周囲を通過する冷却風は、冷却フィン２９ａにより案内されて円滑に水平方向に流動しながら、十分な接触面積をもって金属筒２９に接触し、金属筒２９から効率よく熱を除去していく。その結果として、金属筒２９が効率よく冷却され、金属筒２９に包囲されたＸ線管２７を効率よく冷却することができる。そして、金属筒２９はムラなく冷却風に接触し、冷却されるので、Ｘ線管２７の温度ムラによる出力変動や出力低下を抑制することができる。金属筒２９から熱を受け取って温度が上昇した冷却風は、傾斜壁３ｅに設けられた排気口３ｋを通じて外部に排出される。 The air taken into the housing 3 by the cooling fan 55a flows in the X-ray generation unit accommodating space R1 as cooling air, and hits the metal tube 29 having the cooling fins 29a evenly, while the metal tube 29 It will flow along the side wall 3f while passing around. Then, the cooling air passing around the metal tube 29 is guided by the cooling fins 29a and smoothly flows in the horizontal direction, and contacts the metal tube 29 with a sufficient contact area, and efficiently heats from the metal tube 29. Remove it. As a result, the metal tube 29 is efficiently cooled, and the X-ray tube 27 surrounded by the metal tube 29 can be efficiently cooled. And since the metal cylinder 29 contacts the cooling air without any unevenness and is cooled, it is possible to suppress output fluctuation and output decrease due to temperature unevenness of the X-ray tube 27. The cooling air that has received heat from the metal tube 29 and has increased in temperature is discharged to the outside through the exhaust port 3k provided in the inclined wall 3e.

また、駆動電源部３９は、ＡＣ／ＤＣ変換（またはＤＣ／ＤＣ変換）を行う際に大量の熱を発生するので、効率的に冷却することが必要である。そこで、筐体３における仕切壁１５は、Ｘ線発生部収容空間Ｒ１と制御部収容空間Ｒ２とを完全に仕切らずに、仕切壁１５の下方には、Ｘ線発生部収容空間Ｒ１と制御部収容空間Ｒ２とを連通する通風口５９が設けられている。 Further, the drive power supply unit 39 generates a large amount of heat when performing AC / DC conversion (or DC / DC conversion), and thus needs to be efficiently cooled. Therefore, the partition wall 15 in the housing 3 does not completely partition the X-ray generation unit accommodation space R1 and the control unit accommodation space R2, but below the partition wall 15, the X-ray generation unit accommodation space R1 and the control unit. A ventilation port 59 is provided for communicating with the accommodation space R2.

このように、金属筒２９と制御部７との間が仕切壁１５によって仕切られているため、金属筒２９の冷却後に高温となった冷却風が、制御部収容空間Ｒ２へ直接流入することを抑制できる。また、金属筒２９から発せられる放射熱が仕切壁１５によって遮断され、制御部７に直接伝播されることが抑制できる。その結果、制御部７の温度上昇を抑制することができ、制御部７の各回路基板３５，３７の動作を安定させることができる。それと同時に、下側に位置する通風口５９によってＸ線発生部収容空間Ｒ１と制御部収容空間Ｒ２とが連通されていることから、下側に位置する冷却ファン５５ａによって発生する冷却風の一部が通風口５９を通じて制御部収容空間Ｒ２に流入し易く、この冷却風によって制御部７を冷却することもできる。 Thus, since the partition between the metal cylinder 29 and the control unit 7 is partitioned by the partition wall 15, the cooling air that has become high temperature after the cooling of the metal cylinder 29 flows directly into the control unit accommodating space R2. Can be suppressed. Further, it is possible to suppress the radiant heat generated from the metal cylinder 29 from being blocked by the partition wall 15 and directly transmitted to the control unit 7. As a result, the temperature rise of the control unit 7 can be suppressed, and the operations of the circuit boards 35 and 37 of the control unit 7 can be stabilized. At the same time, since the X-ray generation unit accommodation space R1 and the control unit accommodation space R2 are communicated with each other by the ventilation port 59 located on the lower side, a part of the cooling air generated by the cooling fan 55a located on the lower side. Can easily flow into the control unit accommodating space R2 through the ventilation port 59, and the control unit 7 can be cooled by the cooling air.

図２及び図５に示すように、Ｘ線源１のＸ線管保持部６は、宙づりの状態でＸ線発生部収容空間Ｒ１内に収容されている。これを達成するために、Ｘ線源１には、支持部材６０が採用されている。 As shown in FIGS. 2 and 5, the X-ray tube holder 6 of the X-ray source 1 is housed in the X-ray generator housing space R1 in a suspended state. In order to achieve this, a support member 60 is employed in the X-ray source 1.

図８で示すように、Ｘ線管保持部６に熱膨張が生じた場合、電源部１７がネジ等によって底板６１に固定されていると、Ｘ線出射軸Ｒ方向（底板６１に垂直な方向）へのＸ線管保持部６の熱膨張は、底板６１に対してＸ線管２７を離間する方向に作用する。つまり、Ｘ線出射軸Ｒ上においてＸ線管２７は、上方すなわちＸ線照射対象物側に大きく変位し、その結果、Ｘ線の焦点も同様に変位する。これにより、Ｘ線の焦点とＸ線照射対象物との位置関係が変化してしまい、安定したＸ線透過像を得ることが困難になる。このことは、長時間にわたって照射する場合や、位置判定に用いる場合、ＣＴに用いる場合に特に問題となる。 As shown in FIG. 8, when thermal expansion occurs in the X-ray tube holding unit 6, if the power supply unit 17 is fixed to the bottom plate 61 with screws or the like, the X-ray emission axis R direction (direction perpendicular to the bottom plate 61). The thermal expansion of the X-ray tube holding part 6 to) acts in a direction in which the X-ray tube 27 is separated from the bottom plate 61. That is, on the X-ray emission axis R, the X-ray tube 27 is greatly displaced upward, that is, toward the X-ray irradiation object, and as a result, the X-ray focal point is similarly displaced. As a result, the positional relationship between the X-ray focal point and the X-ray irradiation target changes, and it becomes difficult to obtain a stable X-ray transmission image. This is a particular problem when irradiating for a long time, when used for position determination, or when used for CT.

そこで、図３及び図５に示すように、Ｘ線出射窓２７ｈから出射されるＸ線のＸ線出射軸Ｒの延在方向において、支持部材６０は、Ｘ線管保持部６の一端側においてＸ線出射窓２７ｈを露出させた状態でＸ線管保持部６に固定されてＸ線管保持部６の荷重を支持すると共に、Ｘ線管保持部６の他端側でＸ線管保持部６から離間させられている。 Therefore, as shown in FIGS. 3 and 5, in the extending direction of the X-ray emission axis R of the X-rays emitted from the X-ray emission window 27 h, the support member 60 is located at one end side of the X-ray tube holding unit 6. The X-ray tube holding portion 6 is fixed to the X-ray tube holding portion 6 with the X-ray exit window 27h exposed to support the load of the X-ray tube holding portion 6, and the X-ray tube holding portion on the other end side of the X-ray tube holding portion 6 6 apart.

このような構成により、Ｘ線管保持部６が熱膨張した場合に、このＸ線管保持部６は、支持部材６０の固定面側を基準にしてＸ線出射軸Ｒの延在方向に伸び、この伸び分を、支持部材６０とＸ線管保持部６との間の隙間Ｓに逃がしている。従って、Ｘ線出射軸Ｒ上におけるＸ線の焦点の変位を可能な限り小さくすることができる。このことは、Ｘ線の出力が高くなればなるほど効果的である。 With such a configuration, when the X-ray tube holding portion 6 is thermally expanded, the X-ray tube holding portion 6 extends in the extending direction of the X-ray emission axis R with reference to the fixed surface side of the support member 60. The elongation is released to the gap S between the support member 60 and the X-ray tube holding unit 6. Therefore, the displacement of the X-ray focal point on the X-ray emission axis R can be made as small as possible. This is more effective as the X-ray output becomes higher.

一方、Ｘ線管保持部６の熱膨張は、Ｘ線管保持部６のＸ線出射軸Ｒと垂直に交わる方向にも生じる。この場合も、Ｘ線管保持部６の側面を囲む側板６３や筐体３がＸ線管保持部６の側面と離間して隙間Ｓ’を有することで、熱膨張による伸び分を隙間Ｓ’に逃がしている。従って、同様に、Ｘ線出射軸Ｒと垂直に交わる方向におけるＸ線の焦点の変位を可能な限り小さくすることができる。 On the other hand, thermal expansion of the X-ray tube holding unit 6 also occurs in a direction perpendicular to the X-ray emission axis R of the X-ray tube holding unit 6. Also in this case, the side plate 63 and the casing 3 surrounding the side surface of the X-ray tube holding unit 6 are spaced apart from the side surface of the X-ray tube holding unit 6 so as to have a gap S ′. To escape. Therefore, similarly, the displacement of the focal point of the X-ray in the direction perpendicular to the X-ray emission axis R can be made as small as possible.

熱伝導性の高い材質（例えばアルミニウム）からなる支持部材６０は、Ｘ線出射軸Ｒに対して垂直に延在する電源部１７の底面をなす平面部１７ａから離間して、平面部１７ａと対向して延在する第１の放熱部（底板）６１と、金属筒（Ｘ線管包囲部）２９の取付け面２９ｂ（図７参照）に固定された第２の放熱部６２と、Ｘ線出射軸Ｒに対して平行に延在すると共に、一端がネジによって第１の放熱部６１に固定され、他端がネジによって第２の放熱部６２に固定された第３の放熱部（側板）６３と、からなる。いずれの放熱部も、筐体３を構成する板材よりも肉厚となっており、強度と熱容量に優れた部材を用いている。そして、金属筒２９と第１の放熱部６１と第２の放熱部６２と第３の放熱部６３とは、熱的に連結されている。 The support member 60 made of a material having high thermal conductivity (for example, aluminum) is spaced apart from the flat surface portion 17a that forms the bottom surface of the power supply portion 17 extending perpendicularly to the X-ray emission axis R, and faces the flat surface portion 17a. A first heat dissipating part (bottom plate) 61, a second heat dissipating part 62 fixed to a mounting surface 29b (see FIG. 7) of the metal tube (X-ray tube surrounding part) 29, and an X-ray emission A third heat radiating portion (side plate) 63 that extends in parallel to the axis R, has one end fixed to the first heat radiating portion 61 with a screw and the other end fixed to the second heat radiating portion 62 with a screw. And consist of Each of the heat radiating portions is thicker than the plate material constituting the housing 3 and uses a member having excellent strength and heat capacity. The metal tube 29, the first heat radiating portion 61, the second heat radiating portion 62, and the third heat radiating portion 63 are thermally connected.

このように、Ｘ線管保持部６は、第１〜第３の放熱部６１〜６３で略コ字状に囲まれ、これによって支持部材６０の熱容量が大きくなり、支持部材６０の放熱効率を上げることができる。このことは、第１の放熱部６１と電源部１７の平面部１７ａとの隙間ＳによるＸ線管保持部６の伸びの適切な逃がしと相俟って、Ｘ線の焦点の変位の低減に効果的である。さらに、支持部材６０は、その表面積も大きくなるため、冷却ファン５５ａで極めて効率的に冷却することができるので、Ｘ線管２７の冷却効率を向上することができる。さらに、第１及び第３の放熱部６１，６３は、Ｘ線源１の外部雰囲気に露出させているので放熱効果が高い。 As described above, the X-ray tube holding portion 6 is surrounded by the first to third heat radiating portions 61 to 63 in a substantially U-shape, thereby increasing the heat capacity of the support member 60 and increasing the heat dissipation efficiency of the support member 60. Can be raised. This is combined with an appropriate escape of the extension of the X-ray tube holding part 6 due to the gap S between the first heat radiating part 61 and the flat part 17a of the power supply part 17, and thus the displacement of the X-ray focal point is reduced. It is effective. Furthermore, since the support member 60 also has a large surface area, it can be cooled very efficiently by the cooling fan 55a, so that the cooling efficiency of the X-ray tube 27 can be improved. Furthermore, since the first and third heat radiating portions 61 and 63 are exposed to the atmosphere outside the X-ray source 1, the heat radiating effect is high.

第１の放熱部６１は、平板状に延在し、電源部１７の平面部１７ａから隙間Ｓだけ離間し、この隙間Ｓは、Ｘ線管保持部６の材質を考慮して約０．５ミリ程度が好適であり、Ｘ線管保持部６の熱膨張量を吸収するのに十分なものである。 The first heat radiating portion 61 extends in a flat plate shape, and is separated from the flat portion 17 a of the power source portion 17 by a gap S. The gap S is about 0.5 considering the material of the X-ray tube holding portion 6. About millimeters are suitable and are sufficient to absorb the amount of thermal expansion of the X-ray tube holder 6.

図５〜図７に示すように、第２の放熱部６２は、第１の放熱部６１及び第３の放熱部６３と比較して肉厚なヒートシンクを構成し、ネジ３２ａによって金属筒２９の取付け面２９ｂに固定されている。具体的には、第２の放熱部６２と金属筒２９とでフランジ部２７ｆを挟み込んだ状態で、第２の放熱部６２に設けられてネジ３２ａを挿通させる第１の貫通孔と、フランジ部２７ｆに設けられてネジ３２ａを挿通させる第２の貫通孔とを位置合わせし、その後、ネジ３２ａによって両者を金属筒２９の取付け面２９ｂに固定している。 As shown in FIG. 5 to FIG. 7, the second heat radiating portion 62 constitutes a heat sink that is thicker than the first heat radiating portion 61 and the third heat radiating portion 63, and the screw 32 a of the metal tube 29. It is fixed to the mounting surface 29b. Specifically, in a state where the flange portion 27f is sandwiched between the second heat radiating portion 62 and the metal tube 29, a first through hole provided in the second heat radiating portion 62 and through which the screw 32a is inserted, and the flange portion The second through hole provided in 27f and through which the screw 32a is inserted is aligned, and then both are fixed to the mounting surface 29b of the metal tube 29 by the screw 32a.

このように、フランジ部２７ｆを、第２の放熱部６２と金属筒２９の取付け面２９ｂとで挟み込んで、フランジ部２７ｆと第２の放熱部６２とを、ネジ３２ａによって強固に圧着させるようにしているので、Ｘ線管２７で発生した熱は、フランジ部２７ｆを介して第２の放熱部６２で直接吸収される。よって、Ｘ線管２７の放熱効率を高めることができる。つまり、フランジ部２７ｆは、Ｘ線管２７を金属筒２９の取付け面２９ｂに固定するための固定部材としてだけではなく、Ｘ線管２７で発生した熱を第２の放熱部６２に伝達するための伝熱部材としても利用される。なお、熱伝達を確実にするために、フランジ部２７ｆと第２の放熱部６２との間に熱伝導性グリス６７を充填させた後に、ネジ３２ａによってフランジ部２７ｆと第２の放熱部６２との密着が図られる（図７参照）。 In this manner, the flange portion 27f is sandwiched between the second heat radiating portion 62 and the mounting surface 29b of the metal tube 29, and the flange portion 27f and the second heat radiating portion 62 are firmly pressed by the screws 32a. Therefore, the heat generated in the X-ray tube 27 is directly absorbed by the second heat radiating portion 62 via the flange portion 27f. Therefore, the heat dissipation efficiency of the X-ray tube 27 can be increased. That is, the flange portion 27 f not only serves as a fixing member for fixing the X-ray tube 27 to the mounting surface 29 b of the metal tube 29, but also transmits heat generated by the X-ray tube 27 to the second heat radiating portion 62. It is also used as a heat transfer member. In order to ensure heat transfer, after the heat conductive grease 67 is filled between the flange portion 27f and the second heat radiating portion 62, the flange portion 27f and the second heat radiating portion 62 are (See FIG. 7).

また、ネジ３２によって、フランジ部２７ｆは取付け面２９ｂに固定されて、これによって、Ｘ線管２７は金属筒２９に固定される。さらに、第２の放熱部６２には、フランジ部２７ｆを取付け面２９ｂに固定するためのネジ３２の頭部を避けるように、スリット部６２ａが形成されている。このスリット部６２ａにより、第２の放熱部６２の表面積拡大による放熱効果を高めつつ、ネジ３２の頭部の潰れを防止することができる。 Further, the flange portion 27 f is fixed to the attachment surface 29 b by the screw 32, whereby the X-ray tube 27 is fixed to the metal tube 29. Furthermore, the slit part 62a is formed in the 2nd thermal radiation part 62 so that the head of the screw | thread 32 for fixing the flange part 27f to the attachment surface 29b may be avoided. The slit portion 62 a can prevent the head of the screw 32 from being crushed while enhancing the heat dissipation effect due to the surface area expansion of the second heat dissipation portion 62.

図５に示すように、互いにネジ止めされた第２の放熱部６２と第３の放熱部６３との間には、熱伝導性グリス６６が充填され、この熱伝導性グリス６６によって第２の放熱部６２と第３の放熱部６３とを効率よく熱的に連結させている。このような構成により、第２の放熱部６２から第３の放熱部６３への熱伝導性を高めることができ、第３の放熱部６３の放熱能を十分に利用することができる。特に、第２の放熱部６２がブロック状のヒートシンクであるので、第３の放熱部６３との接合部分の面積が大きくなり、極めて有効な手段と言える。 As shown in FIG. 5, between the second heat radiating portion 62 and the third heat radiating portion 63 screwed to each other, the heat conductive grease 66 is filled, and the heat conductive grease 66 causes the second heat radiating portion 66 to be filled with the second heat radiating portion 66. The heat radiating part 62 and the third heat radiating part 63 are efficiently and thermally connected. With such a configuration, the thermal conductivity from the second heat radiating portion 62 to the third heat radiating portion 63 can be enhanced, and the heat radiating ability of the third heat radiating portion 63 can be fully utilized. In particular, since the second heat dissipating part 62 is a block heat sink, the area of the joint part with the third heat dissipating part 63 is increased, which can be said to be an extremely effective means.

図７に示すように、第２の放熱部６２とフランジ部２７ｆとの間に熱伝導性グリス６７が充填されている。これにより、第２の放熱部６２とフランジ部２７ｆとを効率よく熱的に連結させ、Ｘ線管２７のフランジ部２７ｆから第２の放熱部６２への熱伝導性を高めることができる。従って、Ｘ線管２７の熱を第２の放熱部６２に伝え易くし、Ｘ線管２７の放熱効率を高めることができる。 As shown in FIG. 7, between the 2nd thermal radiation part 62 and the flange part 27f, the heat conductive grease 67 is filled. Thereby, the 2nd thermal radiation part 62 and the flange part 27f can be thermally connected efficiently, and the thermal conductivity from the flange part 27f of the X-ray tube 27 to the 2nd thermal radiation part 62 can be improved. Therefore, the heat of the X-ray tube 27 can be easily transferred to the second heat radiating portion 62, and the heat dissipation efficiency of the X-ray tube 27 can be increased.

さらに、第２の放熱部６２とＸ線管包囲部の取付け面との間にも熱伝導性グリス６８が充填されている。これにより、金属筒２９と第２の放熱部６２とをも効率よく熱的に連結させ、金属筒２９から第２の放熱部６２への熱伝導性を高めることができる。従って、金属筒２９の熱を第２の放熱部６２に伝え易くし、金属筒２９自体の放熱効率を高めることができる。その結果として、Ｘ線管２７の放熱効率も高めることができる。 Further, the heat conductive grease 68 is also filled between the second heat radiating portion 62 and the mounting surface of the X-ray tube surrounding portion. Thereby, the metal cylinder 29 and the 2nd heat radiating part 62 can also be thermally connected efficiently, and the thermal conductivity from the metal cylinder 29 to the 2nd heat radiating part 62 can be improved. Therefore, the heat of the metal cylinder 29 can be easily transmitted to the second heat radiating portion 62, and the heat dissipation efficiency of the metal cylinder 29 itself can be increased. As a result, the heat radiation efficiency of the X-ray tube 27 can be increased.

図６及び図７に示すように、第２の放熱部６２には、ターゲット収容部２７ｄ及び電子銃収容部２７ｅを収容する開口部６９が設けられ、開口部６９を形成する壁面と、ターゲット収容部２７ｄ及び電子銃収容部２７ｅとの間に、鉛からなるＸ線遮蔽部材７０が配置されている。そして、このＸ線遮蔽部材７０は、ネジ７１によってターゲット収容部２７ｄに固定されている。Ｘ線遮蔽部材７０の採用によって、Ｘ線出射窓２７ｈ以外の部位、例えばターゲット収容部２７ｄ及び電子銃収容部２７ｅから放出される意図しないＸ線があった場合にも、それがＸ線遮蔽部材７０で遮蔽されることで、Ｘ線源１の外部への意図しないＸ線の漏洩を抑制することができる。 As shown in FIGS. 6 and 7, the second heat dissipating part 62 is provided with an opening 69 for accommodating the target accommodating part 27d and the electron gun accommodating part 27e, a wall surface forming the opening 69, and the target accommodating An X-ray shielding member 70 made of lead is disposed between the portion 27d and the electron gun housing portion 27e. The X-ray shielding member 70 is fixed to the target accommodating portion 27d with a screw 71. By adopting the X-ray shielding member 70, even if there is an unintended X-ray emitted from a portion other than the X-ray exit window 27h, for example, the target accommodating portion 27d and the electron gun accommodating portion 27e, this is the X-ray shielding member. By being shielded by 70, unintended leakage of X-rays to the outside of the X-ray source 1 can be suppressed.

また、Ｘ線出射窓２７ｈは、第２の放熱部６２から僅かに突出させている。この突出量は、筐体３の上壁３ｃの厚み分に相当する。Ｘ線出射窓２７ｈが上壁３ｃから引っ込んだ位置にあると、Ｘ線照射対象物にＸ線出射窓２７ｈに近接させることができなくなる。また、Ｘ線出射窓２７ｈが上壁３ｃから突出させ過ぎると、Ｘ線出射窓２７ｈの破損の虞が高くなる。従って、Ｘ線出射窓２７ｈは、筐体３の上壁３ｃの表面と面一になるのが好ましい。 Further, the X-ray exit window 27 h is slightly protruded from the second heat radiating portion 62. This protruding amount corresponds to the thickness of the upper wall 3c of the housing 3. If the X-ray exit window 27h is in a position retracted from the upper wall 3c, the X-ray irradiation object cannot be brought close to the X-ray exit window 27h. Further, if the X-ray exit window 27h is protruded too much from the upper wall 3c, the risk of damage to the X-ray exit window 27h increases. Therefore, the X-ray exit window 27h is preferably flush with the surface of the upper wall 3c of the housing 3.

本発明は、前述した実施形態に限定されないことは言うまでもない。 It goes without saying that the present invention is not limited to the embodiment described above.

例えば、図９に示すように、Ｘ線源８０において、Ｘ線管８１のフランジ部８１ａは、Ｘ線管保持部８２の金属筒（Ｘ線管包囲部）８２Ａの取付け面８２ａにネジによって固定され、第２の放熱部８３は、フランジ部８１ａを介して取付け面８２ａにネジによって固定されている。 For example, as shown in FIG. 9, in the X-ray source 80, the flange portion 81a of the X-ray tube 81 is fixed to the mounting surface 82a of the metal tube (X-ray tube surrounding portion) 82A of the X-ray tube holding portion 82 with screws. The second heat radiating portion 83 is fixed to the mounting surface 82a with screws via the flange portion 81a.

Ｘ線管保持部８２の電源部８２Ｂと第１の放熱部８４との間には隙間が設けられ、第１の放熱部８４は、ボックス形状をなして、内部に回路基板が収容されている。第３の放熱部８５の一端は第２の放熱部８３の端部にネジによって固定され、第３の放熱部８５の他端は、第１の放熱部８４の端部にネジによって固定されている。そして、第３の放熱部８５は、平行な２枚を一組として第２の放熱部８３及びＸ線発生部８６の荷重を支えている。第２及び第３の放熱部８３，８５は、外部に露出し、放熱効果が高められている。なお、第１〜第３の放熱部８３〜８５を外部に露出させてもよい。 A gap is provided between the power supply unit 82B of the X-ray tube holding unit 82 and the first heat radiating unit 84, and the first heat radiating unit 84 has a box shape and accommodates a circuit board therein. . One end of the third heat radiating portion 85 is fixed to the end portion of the second heat radiating portion 83 with a screw, and the other end of the third heat radiating portion 85 is fixed to the end portion of the first heat radiating portion 84 with a screw. Yes. And the 3rd thermal radiation part 85 supports the load of the 2nd thermal radiation part 83 and the X-ray generation part 86 by making two parallel sheets into one set. The second and third heat radiation portions 83 and 85 are exposed to the outside, and the heat radiation effect is enhanced. In addition, you may expose the 1st-3rd thermal radiation parts 83-85 outside.

第２の放熱部８３には、Ｘ線出射窓８１ｂを露出させるための円形の開口８３ａが設けられ、開口８３ａの壁面とターゲット収容部８１ｃとの間には隙間が殆ど存在しない。なお、符号９０は、冷却ファンユニットである。 The second heat radiation part 83 is provided with a circular opening 83a for exposing the X-ray emission window 81b, and there is almost no gap between the wall surface of the opening 83a and the target accommodating part 81c. Reference numeral 90 denotes a cooling fan unit.

Ｘ線管２７は反射型ターゲットタイプであるが、透過型ターゲットタイプでも良い。この場合、ターゲットはＸ線出射窓の裏面に設けられるためにターゲット自体の熱膨張によるＸ線の焦点移動が殆どなく、Ｘ線管保持部の熱膨張を低減することでのＸ線の焦点の変位の低減の効果が高い。 The X-ray tube 27 is a reflective target type, but may be a transmissive target type. In this case, since the target is provided on the back surface of the X-ray exit window, there is almost no movement of the X-ray focal point due to thermal expansion of the target itself, and the X-ray focal point is reduced by reducing the thermal expansion of the X-ray tube holder. The effect of reducing displacement is high.

Ｘ線管２７はその管軸とＸ線出射軸Ｒとが略一致するようにＸ線出射窓２７ｈを設けていたが、管軸とＸ線出射軸Ｒとが交わるようにＸ線出射窓２７ｈを設けても良い。この場合も同様に、Ｘ線管保持部の熱膨張を低減することで、Ｘ線の焦点の変位の低減することができる。 The X-ray tube 27 is provided with the X-ray emission window 27h so that the tube axis and the X-ray emission axis R substantially coincide with each other. However, the X-ray emission window 27h so that the tube axis and the X-ray emission axis R intersect with each other. May be provided. In this case as well, the displacement of the focal point of the X-ray can be reduced by reducing the thermal expansion of the X-ray tube holding part.

本発明に係るＸ線源の一実施形態を示す斜視図である。1 is a perspective view showing an embodiment of an X-ray source according to the present invention. 図１に示されたＸ線源の正面図である。It is a front view of the X-ray source shown by FIG. 図１に示されたＸ線管発生部の断面図である。It is sectional drawing of the X-ray tube generation | occurrence | production part shown by FIG. 図１に示された制御部の断面図である。It is sectional drawing of the control part shown by FIG. Ｘ線管保持部と支持部材を示す正面図である。It is a front view which shows an X-ray tube holding | maintenance part and a supporting member. 支持部材の第２の放熱部を示す平面図である。It is a top view which shows the 2nd thermal radiation part of a supporting member. 図３の要部拡大断面図である。It is a principal part expanded sectional view of FIG. Ｘ線発生部の膨張状態を示す断面図である。It is sectional drawing which shows the expansion | swelling state of a X-ray generation part. 本発明に係るＸ線源の他の実施形態を示す斜視図である。It is a perspective view which shows other embodiment of the X-ray source which concerns on this invention.

Explanation of symbols

１，８０…Ｘ線源、５…Ｘ線発生部、６，８２…Ｘ線管保持部、１７，８２Ｂ…電源部、１７ａ…平面部、２７…Ｘ線管、２７ｂ…陽極、２７ｃ…ターゲット、２７ｄ…ターゲット収容部、２７ｅ…電子銃収容部、２７ｆ，８１ａ…フランジ部、２７ｈ，８１ｂ…Ｘ線出射窓、２９，８２Ａ…Ｘ線管包囲部、２９ｂ，８２ａ…取付け面、６０…支持部材、６１，８４…第１の放熱部、６２，８３…第２の放熱部、６３，８５…第３の放熱部、６６，６７，６８…熱伝導性グリス、６９…開口部、７０…Ｘ線遮蔽部材、Ｒ…Ｘ線出射軸、Ｓ…隙間。 DESCRIPTION OF SYMBOLS 1,80 ... X-ray source, 5 ... X-ray generation part, 6,82 ... X-ray tube holding part, 17, 82B ... Power supply part, 17a ... Plane part, 27 ... X-ray tube, 27b ... Anode, 27c ... Target , 27d: target housing portion, 27e: electron gun housing portion, 27f, 81a ... flange portion, 27h, 81b ... X-ray emission window, 29, 82A ... X-ray tube surrounding portion, 29b, 82a ... mounting surface, 60 ... support Member, 61, 84 ... 1st heat radiating part, 62, 83 ... 2nd heat radiating part, 63, 85 ... 3rd heat radiating part, 66, 67, 68 ... thermally conductive grease, 69 ... opening part, 70 ... X-ray shielding member, R ... X-ray emission axis, S ... gap.

Claims

In an X-ray source including an X-ray tube having an X-ray exit window for emitting X-rays generated by electrons incident on a target to the outside,
An X-ray tube holding unit for holding the X-ray tube in a state where the X-ray emission window of the X-ray tube is exposed;
The X-ray tube holding part is fixed to the X-ray tube holding part with the X-ray exit window exposed at one end side of the X-ray tube holding part to support the load of the X-ray tube holding part, and the X-ray tube holding part And a support member that is spaced apart from the X-ray tube holding portion on the other end side of the X-ray source.

The support member is
A first heat dissipating part extending away from the other end side surface of the X-ray tube holding unit and facing the other end side surface;
A second heat dissipating part fixed to the one end side surface of the X-ray tube holding part;
One end is fixed to the first heat radiating portion, and the other end is fixed to the second heat radiating portion, and a third heat radiating portion,
The X-ray source according to claim 1, wherein the X-ray tube holding unit is separated from the third heat radiating unit.

3. The X-ray source according to claim 2, wherein the X-ray tube holding part, the first heat radiating part, the second heat radiating part, and the third heat radiating part are thermally connected. .

The X-ray source according to claim 3, wherein thermally conductive grease is filled between the second heat radiating portion and the third heat radiating portion.

The X-ray tube includes a flange portion for fixing the X-ray tube to the X-ray tube holding portion,
The X-ray source according to any one of claims 2 to 4, wherein the second heat radiating part is fixed to one end side of the X-ray tube holding part via the flange part.

The X-ray source according to claim 5, wherein thermally conductive grease is filled between the second heat radiation portion and the flange portion.

The X-ray source according to any one of claims 3 to 5, wherein thermally conductive grease is filled between the second heat radiating portion and the X-ray tube holding portion.

The X-ray tube is
The X-ray emission window is provided, and a target storage unit that stores the target provided at an end of a rod-shaped anode,
An electron gun housing portion that houses an electron gun that emits electrons toward the target, and is exposed from the X-ray tube holding portion;
The second heat radiating part is provided with an opening for accommodating the target accommodating part and the electron gun accommodating part,
The X-ray shielding member is arrange | positioned between the wall surface which forms the said opening part, the said target accommodating part, and the said electron gun accommodating part, The Claim 1 characterized by the above-mentioned. X-ray source.