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JP2005217452A - Semiconductor device and its manufacturing method - Google Patents

Semiconductor device and its manufacturing method Download PDF

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Publication number
JP2005217452A
JP2005217452A JP2005125254A JP2005125254A JP2005217452A JP 2005217452 A JP2005217452 A JP 2005217452A JP 2005125254 A JP2005125254 A JP 2005125254A JP 2005125254 A JP2005125254 A JP 2005125254A JP 2005217452 A JP2005217452 A JP 2005217452A
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electrode terminal
semiconductor element
semiconductor device
exposed
die pad
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JP4303699B2 (en
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Kenichi Ito
健一 伊東
Noboru Takeuchi
登 竹内
Shigetoyo Kawakami
滋豊 川上
Toshiyuki Fukuda
敏行 福田
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93—Batch processes
    • H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144—Gold (Au) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491—Disposition
    • H01L2224/4912—Layout
    • H01L2224/49171—Fan-out arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732—Location after the connecting process
    • H01L2224/73251—Location after the connecting process on different surfaces
    • H01L2224/73265—Layer and wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/91—Methods for connecting semiconductor or solid state bodies including different methods provided for in two or more of groups H01L2224/80 - H01L2224/90
    • H01L2224/92—Specific sequence of method steps
    • H01L2224/922—Connecting different surfaces of the semiconductor or solid-state body with connectors of different types
    • H01L2224/9222—Sequential connecting processes
    • H01L2224/92242—Sequential connecting processes the first connecting process involving a layer connector
    • H01L2224/92247—Sequential connecting processes the first connecting process involving a layer connector the second connecting process involving a wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/35—Mechanical effects
    • H01L2924/351—Thermal stress

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a small/thin semiconductor device excellent in reliability, of which the size is reduced while maintaining a functionality in a structure for easing external force which is applied on an electrode terminal and deterring peeling of the electrode terminal and a resin sealant. <P>SOLUTION: A semiconductor device 2, a die pad 1 in which the semiconductor device is loaded, a plurality of electrode terminals 5 having a connection part electrically connected to the semiconductor device, and ends of the electrode terminals 5 arranged at corners are separated into a plurality of places. The separated ends are exposed from two different sides of the periphery side surface of a resin sealant. A plurality of recesses which are circular in plane shape are arranged corresponding to ends of the separated electrode terminals 5. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明は、面実装用の樹脂封止型半導体装置およびその製造方法に関するものである。   The present invention relates to a resin-encapsulated semiconductor device for surface mounting and a method for manufacturing the same.

近年、電子機器の小型化、高密度化に対応するために、半導体装置の小型、薄型化が進んでいる。小型、薄型の樹脂封止型半導体装置として、実質的に片面封止されたＱＦＮ（Quad Flat Non―leaded Package）やＳＯＮ（Small Outline Non―leaded Package）と称される半導体装置が開発されている。また、その製造方法としては、組立コストを低減するため、複数の半導体装置を一括して樹脂封止し、ダイシング加工によって個々の半導体装置に分割する工法が主流になりつつある。   In recent years, in order to cope with the downsizing and high density of electronic devices, semiconductor devices have been made smaller and thinner. Semiconductor devices called QFN (Quad Flat Non-leaded Package) or SON (Small Outline Non-leaded Package), which are substantially sealed on one side, have been developed as small and thin resin-encapsulated semiconductor devices. . As a manufacturing method thereof, in order to reduce assembling costs, a method in which a plurality of semiconductor devices are collectively sealed with resin and divided into individual semiconductor devices by dicing is becoming mainstream.

以下、そのような従来例として、特許文献１に開示されている半導体装置について、図１５（ａ）〜（ｃ）を参照して説明する。図１５（ａ）は、従来のＱＦＮ型（ＳＯＮ型）の樹脂封止型半導体装置の概略的な構成を示す平面図、図１５（ｂ）はその断面図、図１５（ｃ）はその背面図である。この半導体装置では、サポートリード１６によって支持されたダイパッド１に接着剤３が塗布され、その上に半導体素子２が固着されている。ダイパッド１の周辺には複数の電極端子５が配置され、電極端子５の上面と半導体素子２とは金属細線４により、それぞれ電気的に接続されている。   Hereinafter, as such a conventional example, a semiconductor device disclosed in Patent Document 1 will be described with reference to FIGS. 15A is a plan view showing a schematic configuration of a conventional QFN type (SON type) resin-encapsulated semiconductor device, FIG. 15B is a cross-sectional view thereof, and FIG. 15C is a rear view thereof. FIG. In this semiconductor device, the adhesive 3 is applied to the die pad 1 supported by the support leads 16, and the semiconductor element 2 is fixed thereon. A plurality of electrode terminals 5 are arranged around the die pad 1, and the upper surface of the electrode terminals 5 and the semiconductor element 2 are electrically connected to each other by a thin metal wire 4.

ダイパッド１、半導体素子２、接着剤３、金属細線４及び電極端子５は、封止樹脂体７で封止されている。ダイパッド１は、サポートリード１６が曲げ加工されていることにより、封止樹脂体７に埋没している。封止樹脂体７は４辺形の平板状に形成され、電極端子５の半導体素子２との接続面の裏面である下面が、封止樹脂体７の底面より露出している。さらに電極端子５における封止樹脂体７の外周側の端面が、封止樹脂体７底面に露出した下面と連続的に、封止樹脂体７の側面に露出している。電極端子５上の上部には溝６が形成されている。溝６は、リードフレーム（図示せず）から個々の半導体装置を分割する際に発生する応力や、基板実装前後に発生する応力による電極端子５と封止樹脂体７との剥離を抑止し、それにより金属細線４の断線を防止するために形成される。   The die pad 1, the semiconductor element 2, the adhesive 3, the fine metal wires 4, and the electrode terminals 5 are sealed with a sealing resin body 7. The die pad 1 is buried in the sealing resin body 7 because the support lead 16 is bent. The sealing resin body 7 is formed in a quadrangular flat plate shape, and the lower surface that is the back surface of the connection surface of the electrode terminal 5 to the semiconductor element 2 is exposed from the bottom surface of the sealing resin body 7. Further, the outer peripheral end surface of the sealing resin body 7 in the electrode terminal 5 is exposed to the side surface of the sealing resin body 7 continuously with the lower surface exposed on the bottom surface of the sealing resin body 7. A groove 6 is formed in the upper part on the electrode terminal 5. The groove 6 suppresses peeling between the electrode terminal 5 and the sealing resin body 7 due to stress generated when individual semiconductor devices are divided from a lead frame (not shown) or stress generated before and after mounting the substrate. Thereby, the metal fine wire 4 is formed to prevent disconnection.

また、組立コストを低減するため、複数の半導体装置を一括して樹脂封止しダイシング加工によって個々の半導体装置に分割する工法を用いた従来例について、図１６（ａ）〜（ｃ）を参照して説明する。この装置は、従来のＱＦＮ型（ＳＯＮ型）の樹脂封止型半導体装置であり、図１６（ａ）は平面図、図１６（ｂ）は断面図、図１６（ｃ）は背面図である。説明を簡略化するため、上記の従来例と共通の要素については、同一の参照番号を付して説明する。この半導体装置においては、サポートリード９は、その裏面がハーフエッチングされていることにより封止樹脂体７に埋没している。電極端子５における封止樹脂体７の外周側の端面は、封止樹脂体７底面に露出した下面とは不連続的に、封止樹脂体７の側面に露出している。すなわち図１６（ｂ）に示されるように、封止樹脂体７の底面側と外側端面の境界に位置する電極端子５の角が切除されて、不連続な露出状態が形成されている。図１６（ｃ）に示すように、半導体装置の薄型化や高放熱化を目的として、ダイパッド１の半導体素子２搭載面の裏面が封止樹脂７より露出されている場合もある。   Further, in order to reduce the assembly cost, a conventional example using a method in which a plurality of semiconductor devices are collectively sealed with resin and divided into individual semiconductor devices by dicing is described with reference to FIGS. To explain. This device is a conventional QFN type (SON type) resin-encapsulated semiconductor device. FIG. 16A is a plan view, FIG. 16B is a sectional view, and FIG. 16C is a rear view. . In order to simplify the description, elements common to the above-described conventional example will be described with the same reference numerals. In this semiconductor device, the support lead 9 is buried in the sealing resin body 7 because the back surface thereof is half-etched. The end surface of the outer periphery side of the sealing resin body 7 in the electrode terminal 5 is exposed to the side surface of the sealing resin body 7 discontinuously with the lower surface exposed to the bottom surface of the sealing resin body 7. That is, as shown in FIG. 16B, the corners of the electrode terminals 5 located at the boundary between the bottom surface side and the outer end surface of the sealing resin body 7 are cut away to form a discontinuous exposed state. As shown in FIG. 16C, the back surface of the die pad 1 on which the semiconductor element 2 is mounted may be exposed from the sealing resin 7 for the purpose of reducing the thickness of the semiconductor device and increasing heat dissipation.

これらＱＦＮ型（ＳＯＮ型）の半導体装置は、樹脂封止体７の底面から電極端子５を露出させるよう片面封止することで小型、薄型化を可能としている。
特開平１１−７４４４０号公報 These QFN type (SON type) semiconductor devices can be reduced in size and thickness by sealing one side so that the electrode terminal 5 is exposed from the bottom surface of the resin sealing body 7.
JP-A-11-74440

しかしながら、従来の半導体装置の構造では、電極端子５の溝６をエッチングによって形成すると、その溝幅がリードフレームの厚みに相当する程度まで広がる。従って、電極端子５はその溝幅を確保するための長さが必要で、電極端子５を短くすることに限界があり、半導体装置の更なる小型化は困難である。   However, in the structure of the conventional semiconductor device, when the groove 6 of the electrode terminal 5 is formed by etching, the groove width expands to an extent corresponding to the thickness of the lead frame. Accordingly, the electrode terminal 5 needs to have a length for securing the groove width, and there is a limit to shortening the electrode terminal 5, and it is difficult to further reduce the size of the semiconductor device.

さらに、組立コストを低減するため、複数の半導体装置を一括して樹脂封止しダイシング加工によって個々の半導体装置に分割する工法を用いた場合、ダイシング加工により電極端子５に金属バリが発生する。これが基板実装上の不具合となるため、図１６（ｂ）および（ｃ）に示したように、電極端子５の角を切除し、電極端子５の下面から端面にかけて不連続的に露出する構造として、封止樹脂体７底面の外周に電極端子５の角を露出させないことが必要である。この場合、電極端子５の外周部をハーフエッチングして樹脂封止体７に埋没させる部分を設ける必要があり、電極端子５を短くすることは更に困難となる。   Furthermore, in order to reduce assembly costs, when using a method in which a plurality of semiconductor devices are collectively sealed with resin and divided into individual semiconductor devices by dicing, metal burrs are generated in the electrode terminals 5 by dicing. Since this becomes a problem in board mounting, as shown in FIGS. 16 (b) and 16 (c), the corners of the electrode terminal 5 are cut off and the structure is exposed discontinuously from the lower surface to the end surface of the electrode terminal 5. It is necessary not to expose the corners of the electrode terminal 5 on the outer periphery of the bottom surface of the sealing resin body 7. In this case, it is necessary to provide a portion where the outer peripheral portion of the electrode terminal 5 is half-etched and buried in the resin sealing body 7, and it becomes more difficult to shorten the electrode terminal 5.

本発明は、従来の上記問題点を解決するもので、電極端子と封止樹脂体とが剥離することによる金属細線の断線を抑止でき、かつ電極端子を短くすることで更なる小型化が可能な半導体装置及びその製造方法を提供することを目的とする。   The present invention solves the above-mentioned conventional problems, and can suppress the disconnection of the fine metal wire due to the separation of the electrode terminal and the sealing resin body, and further shortening the electrode terminal can reduce the size. An object of the present invention is to provide a semiconductor device and a manufacturing method thereof.

本発明の第１の構成の半導体装置は、半導体素子と、前記半導体素子が搭載されたダイパッドと、前記半導体素子と電気的に接続された接続部を有し、前記ダイパッドと独立して配置された複数の電極端子と、前記電極端子の前記接続部を有する面の裏面が外部端子面として露出するように、前記半導体素子と前記ダイパッドと前記電極端子とを封止する樹脂封止体とを備え、角に配置された前記電極端子の端部が、複数箇所に分離し、分離された前記端部が前記樹脂封止体の外周側面の異なる２辺から露出し、分離された前記電極端子の端部に対応して、平面形状が円形の複数の窪みが配置されていることを特徴とする。   A semiconductor device according to a first configuration of the present invention includes a semiconductor element, a die pad on which the semiconductor element is mounted, and a connection portion electrically connected to the semiconductor element, and is disposed independently of the die pad. A plurality of electrode terminals, and a resin sealing body that seals the semiconductor element, the die pad, and the electrode terminals so that a back surface of the surface having the connection portion of the electrode terminals is exposed as an external terminal surface. The electrode terminals arranged at the corners are separated into a plurality of locations, and the separated end portions are exposed from two different sides of the outer peripheral side surface of the resin sealing body and separated. A plurality of depressions having a circular planar shape are arranged corresponding to the end portions of the first and second ends.

本発明の第２の構成の半導体装置は、半導体素子と、前記半導体素子が搭載されたダイパッドと、前記半導体素子と電気的に接続された接続部を有し、前記ダイパッドと独立して配置された複数の電極端子と、前記電極端子の前記接続部を有する面の裏面が外部端子面として露出するように、前記半導体素子と前記ダイパッドと前記電極端子とを封止する樹脂封止体とを備え、角に配置された前記電極端子の端部が、複数箇所に分離し、前記樹脂封止体の外周側面の異なる２辺から露出し、前記端部と前記接続部との間に、平面形状が円形で、隣接した部分で互いに一部が重なるように配置されて繋がった窪みを配置したことを特徴とする。   A semiconductor device according to a second configuration of the present invention includes a semiconductor element, a die pad on which the semiconductor element is mounted, and a connection portion electrically connected to the semiconductor element, and is disposed independently of the die pad. A plurality of electrode terminals, and a resin sealing body that seals the semiconductor element, the die pad, and the electrode terminals so that a back surface of the surface having the connection portion of the electrode terminals is exposed as an external terminal surface. Provided, and the end portions of the electrode terminals arranged at the corners are separated into a plurality of locations, exposed from different two sides of the outer peripheral side surface of the resin sealing body, and between the end portion and the connection portion, a plane It is characterized in that the shape is circular, and recesses that are connected so as to partially overlap each other at adjacent portions are arranged.

本発明の半導体装置の製造方法は、半導体素子と、前記半導体素子が搭載されたダイパッドと、前記半導体素子と電気的に接続された接続部を有し、前記ダイパッドと独立して配置された複数の電極端子と、前記電極端子の前記接続部を有する面の裏面が外部端子面として露出するように、前記半導体素子と前記ダイパッドと前記電極端子とを封止する樹脂封止体とを備え、角に配置された前記電極端子の端部が複数箇所に分離し、分離された前記端部が前記樹脂封止体の外周側面の異なる２辺から露出した半導体装置の製造方法である。   According to another aspect of the present invention, there is provided a semiconductor device manufacturing method including a semiconductor element, a die pad on which the semiconductor element is mounted, and a connection portion electrically connected to the semiconductor element. And a resin sealing body that seals the semiconductor element, the die pad, and the electrode terminal so that the back surface of the surface having the connection portion of the electrode terminal is exposed as an external terminal surface, In the method of manufacturing a semiconductor device, the end portions of the electrode terminals arranged at corners are separated into a plurality of locations, and the separated end portions are exposed from two different sides of the outer peripheral side surface of the resin sealing body.

本発明の第１の製造方法は、前記電極端子を形成する工程が、前記角に配置された電極端子の表面の前記各端部に対応した位置に各々円形の開口パターンを有するレジストパターンを形成する工程と、前記開口パターンにエッチング液を滞留させ、前記電極端子表面をエッチングし、前記電極端子表面に平面形状が円形の窪みを形成する工程とを備えたことを特徴とする。   In the first manufacturing method of the present invention, the step of forming the electrode terminal forms a resist pattern having a circular opening pattern at a position corresponding to each end of the surface of the electrode terminal disposed at the corner. And a step of etching the electrode terminal surface to form an indentation having a circular planar shape on the surface of the electrode terminal.

本発明の第２の製造方法は、前記電極端子を形成する工程が、前記角に配置された電極端子の表面の前記各端部と前記接続部の間の位置に、複数の円形の開口を各円形の外周が互いに接する程度に近接させて配置した開口パターンを有するレジストパターンを形成する工程と、前記開口パターンにエッチング液を滞留させ、前記電極端子表面をエッチングし、前記電極端子表面に複数の円形が、隣接した部分で互いに一部が重なるように配置されて繋がった窪みを形成する工程とを備えたことを特徴とする。   In the second manufacturing method of the present invention, in the step of forming the electrode terminal, a plurality of circular openings are formed at positions between the end portions and the connection portion on the surface of the electrode terminal arranged at the corner. A step of forming a resist pattern having an opening pattern arranged so that the outer circumferences of the respective circles are in contact with each other; and an etching solution is retained in the opening pattern to etch the surface of the electrode terminal; And a step of forming depressions that are arranged so as to partially overlap each other at adjacent portions.

上記の半導体装置の構成によれば、電極端子に加わる外力を緩和して電極端子と封止樹脂体との剥離を抑止するための構造として、電極端子の接続部を有する面に平面形状が円形の窪みを形成することにより、リードフレームに形成される窪み自体の平面形状のサイズを、リードフレーム厚の半分程度まで小さくすることが容易になる。何故ならば、エッチングによるリードフレーム形成に際して、円形の窪みにエッチング液が滞留するためエッチング速度が低く、円形の窪みの平面サイズが広がらないからである。これにより、電極端子と封止樹脂体との剥離を抑止する機能を十分に維持し、かつ電極端子を短くすることが可能となる。   According to the configuration of the semiconductor device described above, the planar shape is circular on the surface having the connection portion of the electrode terminal as a structure for relaxing the external force applied to the electrode terminal and suppressing the peeling between the electrode terminal and the sealing resin body. By forming this recess, the size of the planar shape of the recess formed in the lead frame can be easily reduced to about half the thickness of the lead frame. This is because when the lead frame is formed by etching, the etching solution stays in the circular depression, so that the etching rate is low and the planar size of the circular depression does not increase. As a result, it is possible to sufficiently maintain the function of suppressing the peeling between the electrode terminal and the sealing resin body and to shorten the electrode terminal.

本発明の第１の構成の半導体装置において、前記電極端子の端部が２つに分離し、分離されたそれぞれの前記端部が前記樹脂封止体の外周側面の異なる２辺から露出し、平面形状が円形の２つの窪みが配置されている構成とすることができる。   In the semiconductor device of the first configuration of the present invention, the end portions of the electrode terminals are separated into two, and the separated end portions are exposed from two different sides of the outer peripheral side surface of the resin sealing body, It can be set as the structure by which two hollows with a circular planar shape are arrange | positioned.

前記各窪みは、前記電極端子が前記樹脂封止体の外周側面から露出する各端部と前記接続部との間に配置されていることが好ましい。   It is preferable that each said hollow is arrange | positioned between each edge part which the said electrode terminal exposes from the outer peripheral side surface of the said resin sealing body, and the said connection part.

本発明の第２の構成の半導体装置において、繋がった複数個の窪みの形状がＬ字型であることが好ましい。   In the semiconductor device having the second configuration according to the present invention, it is preferable that a plurality of connected recesses have an L shape.

以下、本発明の実施形態における半導体装置及びその製造方法について説明する。以下の各実施形態において、電極端子５はそれぞれ構成が異なるが、理解のし易さを考慮して、すべて同一の参照番号を付して説明する。   Hereinafter, a semiconductor device and a manufacturing method thereof according to embodiments of the present invention will be described. In each of the following embodiments, the electrode terminals 5 have different configurations, but are described with the same reference numerals in consideration of easy understanding.

（第１の実施形態）
図１（ａ）〜（ｃ）を参照して、第１の実施形態における半導体装置について説明する。図１（ａ）は、概略的な構成を示す平面図、図１（ｂ）はその断面図、図１（ｃ）はその背面図である。この半導体装置では、サポートリード９によって支持されたダイパッド１に接着剤３が塗布され、その上に半導体素子２が固着されている。ダイパッド１の周辺には複数の電極端子５が配置されている。電極端子５はその上面に、半導体素子２と金属細線４により電気的に接続された接続部を有する。 (First embodiment)
With reference to FIGS. 1A to 1C, the semiconductor device according to the first embodiment will be described. 1A is a plan view showing a schematic configuration, FIG. 1B is a sectional view thereof, and FIG. 1C is a rear view thereof. In this semiconductor device, the adhesive 3 is applied to the die pad 1 supported by the support leads 9, and the semiconductor element 2 is fixed thereon. A plurality of electrode terminals 5 are arranged around the die pad 1. The electrode terminal 5 has a connection part electrically connected to the semiconductor element 2 by the fine metal wire 4 on the upper surface thereof.

ダイパッド１、半導体素子２、接着剤３、金属細線４及び電極端子５は、封止樹脂体７で封止されている。封止樹脂体７は４辺形の平板状に形成され、電極端子５の半導体素子２と接続された面の裏面が、封止樹脂体７の底面より露出している。電極端子５における封止樹脂体７の外周部に位置する端面は、封止樹脂体７底面に露出した面とは不連続的に、封止樹脂体７の側面に露出している。すなわち図１（ｂ）に示されるように、封止樹脂体７の底面側と外側端面の境界に位置する電極端子５の角５ａが切除されて、不連続な露出状態が形成されている。サポートリード９は、図１（ｃ）から判るように、裏面にハーフエッチング加工が施されることにより封止樹脂体７に埋没している。   The die pad 1, the semiconductor element 2, the adhesive 3, the fine metal wires 4, and the electrode terminals 5 are sealed with a sealing resin body 7. The sealing resin body 7 is formed in a quadrangular flat plate shape, and the back surface of the surface connected to the semiconductor element 2 of the electrode terminal 5 is exposed from the bottom surface of the sealing resin body 7. The end surface of the electrode terminal 5 located on the outer peripheral portion of the sealing resin body 7 is exposed to the side surface of the sealing resin body 7 discontinuously with the surface exposed to the bottom surface of the sealing resin body 7. That is, as shown in FIG. 1B, the corners 5a of the electrode terminals 5 located at the boundary between the bottom surface side and the outer end surface of the sealing resin body 7 are cut away to form a discontinuous exposed state. As can be seen from FIG. 1C, the support lead 9 is buried in the sealing resin body 7 by being half-etched on the back surface.

電極端子５の金属細線４が接続された面には、平面形状が円形の窪み８が形成されている。窪み８は、金属細線４が接続された接続部と電極端子５が樹脂封止体７の外周側面から露出する端部との間及び、接続部と半導体素子２に面する側の端部との間の２ヶ所に配置されている。円形の窪み８は、リードフレーム（図示せず）から個々の半導体装置を分割する際に発生する応力や、基板実装時や実装後に発生する応力による電極端子５と封止樹脂体７との剥離を、窪み８で止めて、金属細線４の断線を抑止するように機能する。   A recess 8 having a circular planar shape is formed on the surface of the electrode terminal 5 to which the fine metal wire 4 is connected. The depression 8 is formed between the connection portion to which the fine metal wire 4 is connected and the end portion at which the electrode terminal 5 is exposed from the outer peripheral side surface of the resin sealing body 7 and the end portion on the side facing the connection portion and the semiconductor element 2. It is arranged in two places between. The circular recess 8 peels off the electrode terminal 5 and the sealing resin body 7 due to stress generated when individual semiconductor devices are divided from a lead frame (not shown) or stress generated during or after mounting the substrate. Is stopped by the depression 8 and functions to suppress the disconnection of the fine metal wire 4.

従来例の溝に代えて、剥離止めを円形の窪み８とすることで、窪み８自体の平面形状のサイズをリードフレーム厚の半分程度まで小さくすることができる。何故ならば、エッチングによるリードフレーム形成に際して、窪み８にエッチング液が滞留するためエッチング速度が低いので、窪みの平面形状が広がらないからである。これにより、電極端子５と封止樹脂体７との剥離を抑止して金属細線４の断線を抑止する構造を有するとともに、電極端子５を短くすることができ、半導体装置の更なる小型化が容易になる。   By replacing the groove of the conventional example with a circular depression 8, the size of the planar shape of the depression 8 itself can be reduced to about half the lead frame thickness. This is because when the lead frame is formed by etching, the etching solution stays in the recess 8 and the etching rate is low, so that the planar shape of the recess does not spread. Thereby, while having the structure which suppresses peeling with the electrode terminal 5 and the sealing resin body 7, and suppresses the disconnection of the metal fine wire 4, the electrode terminal 5 can be shortened, and further size reduction of a semiconductor device is achieved. It becomes easy.

図１（ｃ）に示すように、半導体装置の薄型化や高放熱化を目的として、ダイパッド１の半導体素子２搭載面の裏面が封止樹脂７から露出する構造としても良い。また、ダイパッド１を支えるサポートリード９を屈曲させて、樹脂封止体７の底面からダイパッド１が露出しないように埋没させても良い（図示せず）。   As shown in FIG. 1C, the back surface of the die pad 1 on which the semiconductor element 2 is mounted may be exposed from the sealing resin 7 for the purpose of reducing the thickness of the semiconductor device and increasing heat dissipation. Further, the support lead 9 supporting the die pad 1 may be bent and buried so that the die pad 1 is not exposed from the bottom surface of the resin sealing body 7 (not shown).

半導体素子２と電極端子５との電気的接続は、図１（ａ）、（ｂ）に示した金属細線４に代えて、図２（ａ）、（ｂ）に示すように、Ａｕや半田等を用いた金属バンプ４ａにより行うこともできる。また図２（ｂ）に示すように、電極端子５を、断面形状における端面が傾斜面５ｂまたは段差（図示せず）を有する形状にしてもよい。それにより、封止樹脂体７の底面から露出する面積よりも電気的に接続される面の面積の方が広くなり、電極端子５と封止樹脂体７との密着性を更に向上させることが出来る。   The electrical connection between the semiconductor element 2 and the electrode terminal 5 is made of Au or solder as shown in FIGS. 2 (a) and 2 (b) instead of the thin metal wires 4 shown in FIGS. 1 (a) and 1 (b). It can also be performed by the metal bump 4a using the above. Moreover, as shown in FIG.2 (b), you may make the electrode terminal 5 into the shape in which the end surface in a cross-sectional shape has the inclined surface 5b or a level | step difference (not shown). Thereby, the area of the electrically connected surface is larger than the area exposed from the bottom surface of the sealing resin body 7, and the adhesion between the electrode terminal 5 and the sealing resin body 7 can be further improved. I can do it.

図３に、図１（ａ）〜（ｃ）に示した半導体装置の製造に用いられるリードフレーム１０の平面図を示す。１１は外枠、１２は内枠である。   FIG. 3 is a plan view of a lead frame 10 used for manufacturing the semiconductor device shown in FIGS. 11 is an outer frame, and 12 is an inner frame.

（第２の実施形態）
図４（ａ）〜（ｃ）を参照して、第２の実施形態における半導体装置について説明する。図４（ａ）は概略的な構成を示す平面図、図４（ｂ）はその断面図、図４（ｃ）は背面図である。この半導体装置は、第１の実施形態の装置と同様の基本構成を有するので、主に第１の実施形態との相違点について説明する。第１の実施形態の装置では、電極端子５の平面形状が長方形であるのに対して、本実施形態の場合は異なる平面形状を有する。図４（ａ）あるいは図４（ｃ）に示すように、半導体素子２に面する側の電極端子５の端部では、平面形状が円弧に形成されている。これにより、電極端子５の半導体素子２に面する側に発生する応力集中を防ぐことができる。また、電極端子５の平面形状での面積が小さくなるので、第１の実施形態の場合よりも、電極端子５と樹脂封止体７との密着性を向上させることができ、より品質の高い半導体装置を提供することができる。 (Second Embodiment)
A semiconductor device according to the second embodiment will be described with reference to FIGS. 4A is a plan view showing a schematic configuration, FIG. 4B is a sectional view thereof, and FIG. 4C is a rear view. Since this semiconductor device has the same basic configuration as that of the device of the first embodiment, differences from the first embodiment will be mainly described. In the apparatus of the first embodiment, the planar shape of the electrode terminal 5 is rectangular, whereas the planar shape of the present embodiment is different. As shown in FIG. 4A or FIG. 4C, the planar shape is formed in an arc at the end of the electrode terminal 5 facing the semiconductor element 2. Thereby, the stress concentration which generate | occur | produces on the side which faces the semiconductor element 2 of the electrode terminal 5 can be prevented. Moreover, since the area in the planar shape of the electrode terminal 5 becomes small, the adhesiveness of the electrode terminal 5 and the resin sealing body 7 can be improved rather than the case of 1st Embodiment, and quality is higher. A semiconductor device can be provided.

電極端子５が樹脂封止体７の底面から露出する形状は、図４（ｃ）に示したような長円形に限らず、半導体素子２に面する側の端部のみが円弧で形成されていても良い。   The shape in which the electrode terminal 5 is exposed from the bottom surface of the resin sealing body 7 is not limited to the oval shape as shown in FIG. 4C, and only the end portion facing the semiconductor element 2 is formed in an arc shape. May be.

（第３の実施形態）
図５（ａ）〜（ｃ）を参照して、第３の実施形態における半導体装置について説明する。図５（ａ）は概略的な構成を示す平面図、図５（ｂ）はその断面図、図５（ｃ）は背面図である。この半導体装置は、第２の実施形態の装置と同様の基本構成を有するので、主に第２の実施形態との相違点について説明する。本実施形態では、円形の窪み８の個数が第２の実施形態とは異なる。 (Third embodiment)
With reference to FIGS. 5A to 5C, a semiconductor device according to the third embodiment will be described. 5A is a plan view showing a schematic configuration, FIG. 5B is a sectional view thereof, and FIG. 5C is a rear view. Since this semiconductor device has the same basic configuration as that of the device of the second embodiment, differences from the second embodiment will be mainly described. In the present embodiment, the number of circular depressions 8 is different from that in the second embodiment.

第２の実施形態では、金属細線４が接続された接続部と電極端子５が樹脂封止体７の外周側面から露出する端部との間及び、接続部と半導体素子２に面する側の端部との間の２ヶ所に、それぞれ１個づつ窪み８が配置されている。これに対して本実施形態では、前述の２ヶ所に各々２個の円形の窪み８が配置されている。各々２個の窪み８は、その横の部分で互いに繋がるように形成される。つまり、円形の一部が互いに重なっている。窪み８の繋がり部の幅は、窪み８の直径より小さい。これにより、第２の実施形態と比較して、電極端子５の幅が広い場合（０．３ｍｍ以上）でも、電極端子５と封止樹脂体７との剥離を抑止する効果を損なうことなく、半導体装置の小型化を容易にすることができる。   In the second embodiment, between the connecting portion to which the fine metal wire 4 is connected and the end portion where the electrode terminal 5 is exposed from the outer peripheral side surface of the resin sealing body 7 and on the side facing the connecting portion and the semiconductor element 2. One recess 8 is disposed at each of two locations between the ends. On the other hand, in the present embodiment, two circular recesses 8 are arranged at the two locations described above. Each of the two depressions 8 is formed so as to be connected to each other at a lateral portion thereof. In other words, the circular portions overlap each other. The width of the connecting portion of the depression 8 is smaller than the diameter of the depression 8. Thereby, compared with 2nd Embodiment, even when the width of the electrode terminal 5 is wide (0.3 mm or more), without impairing the effect which suppresses peeling with the electrode terminal 5 and the sealing resin body 7, The semiconductor device can be easily reduced in size.

（第４の実施形態）
図６（ａ）〜（ｃ）を参照して、第４の実施形態における半導体装置について説明する。図６（ａ）は概略的な構成を示す平面図、図６（ｂ）はその断面図、図６（ｃ）は背面図である。この半導体装置は、第１の実施形態の装置と同様の基本構成を有するので、主に第１の実施形態との相違点について説明する。本実施形態では、円形の窪み８が配置された位置が第１の実施形態とは異なる。 (Fourth embodiment)
With reference to FIGS. 6A to 6C, a semiconductor device according to the fourth embodiment will be described. 6A is a plan view showing a schematic configuration, FIG. 6B is a sectional view thereof, and FIG. 6C is a rear view. Since this semiconductor device has the same basic configuration as that of the device of the first embodiment, differences from the first embodiment will be mainly described. In the present embodiment, the position where the circular depression 8 is arranged is different from that of the first embodiment.

第１の実施形態では、金属細線４が接続された接続部と電極端子５が樹脂封止体７の外周側面から露出する端部との間及び、接続部と半導体素子２に面する側の端部との間の２ヶ所に、それぞれ窪み８が配置されている。これに対して本実施形態では、窪み８が配置される位置は、金属細線４が接続された接続部と電極端子５が樹脂封止体７の外周側面から露出する端部との間の１ヶ所のみである。   In the first embodiment, between the connection portion to which the fine metal wire 4 is connected and the end portion where the electrode terminal 5 is exposed from the outer peripheral side surface of the resin sealing body 7 and on the side facing the connection portion and the semiconductor element 2. Recesses 8 are respectively disposed at two positions between the end portions. On the other hand, in this embodiment, the position where the dent 8 is disposed is 1 between the connection portion to which the fine metal wire 4 is connected and the end portion at which the electrode terminal 5 is exposed from the outer peripheral side surface of the resin sealing body 7. There are only one place.

第１の実施形態において電極端子５上の接続部と半導体素子２に面する側の端部との間に形成された窪み８は、主に基板実装時や基板実装後に発生する応力を緩和するために機能する。この機能は、半導体素子２の周縁と電極端子５の半導体素子２に面する側の端部とが近接した配置の場合に、剛性の高い半導体素子２の周縁で熱応力による発生する応力集中を緩和するために効果的である。本実施形態の構成は、比較的小さな半導体素子２が搭載され、半導体素子２の周縁と電極端子５の半導体素子２に面する側の端部とが近接して配置されず、例えば２００μｍ以上の間隔が設けられる場合に好適である。そのような場合、電極端子５上の接続部と半導体素子２に面する側の端部との間には、円形の窪み８を配置する必要がないからである。その結果、本実施形態の場合、第１の実施形態の場合より更に電極端子５を短くでき、その分半導体装置の小型化が容易である。   In the first embodiment, the recess 8 formed between the connection portion on the electrode terminal 5 and the end portion facing the semiconductor element 2 relieves stress generated mainly during or after the substrate mounting. To work for. This function reduces the stress concentration caused by thermal stress at the periphery of the highly rigid semiconductor element 2 when the periphery of the semiconductor element 2 and the end of the electrode terminal 5 facing the semiconductor element 2 are close to each other. It is effective for mitigating. In the configuration of the present embodiment, a relatively small semiconductor element 2 is mounted, and the periphery of the semiconductor element 2 and the end of the electrode terminal 5 facing the semiconductor element 2 are not arranged close to each other. This is suitable when a space is provided. In such a case, it is not necessary to arrange the circular depression 8 between the connection part on the electrode terminal 5 and the end part facing the semiconductor element 2. As a result, in the case of this embodiment, the electrode terminal 5 can be further shortened compared to the case of the first embodiment, and the semiconductor device can be easily downsized accordingly.

（第５の実施形態）
図７（ａ）〜（ｃ）を参照して、第５の実施形態における半導体装置について説明する。図７（ａ）は概略的な構成を示す平面図、図７（ｂ）はその断面図、図７（ｃ）は背面図である。この半導体装置の電極端子５は、その形状が上述の実施形態の場合と比べて幅広であり、樹脂封止体７の外周側面に位置する端部が、２箇所に分離して露出している。円形の窪み８が配置された位置は、第４の実施形態の装置と同様、金属細線４が接続された接続部と電極端子５が樹脂封止体７の外周側面から露出する端部との間のみである。ただし、電極端子５の端部の２箇所の露出部分に対応して、各々１個の窪み８が配置されている。なおダイパッド１、半導体素子２、およびサポートリード９の形状も上述の実施形態の場合と相違するが、理解し易いように、同一の参照番号を付した。 (Fifth embodiment)
With reference to FIGS. 7A to 7C, a semiconductor device according to the fifth embodiment will be described. 7A is a plan view showing a schematic configuration, FIG. 7B is a sectional view thereof, and FIG. 7C is a rear view. The electrode terminal 5 of this semiconductor device is wider than in the case of the above-described embodiment, and the end located on the outer peripheral side surface of the resin sealing body 7 is separated and exposed in two places. . As with the apparatus of the fourth embodiment, the position where the circular recess 8 is disposed is between the connection portion to which the fine metal wire 4 is connected and the end portion at which the electrode terminal 5 is exposed from the outer peripheral side surface of the resin sealing body 7. Only between. However, one recess 8 is arranged corresponding to two exposed portions at the end of the electrode terminal 5. Although the shapes of the die pad 1, the semiconductor element 2, and the support lead 9 are different from those in the above-described embodiment, the same reference numerals are given for easy understanding.

この構造は、電極端子５の幅が広く（例えば０．４ｍｍ以上）、リードフレームにおいて電極端子５をその端部の一ヶ所で支持することが困難な場合、あるいはリードフレーム厚が薄く１ヶ所の支持では強度的に不足の場合に有利である。電極端子５を端部で確実に支持可能であるとともに、端部の露出面が２箇所に分断されることにより、連続している場合に比べて露出面積を減らし、外力の影響を軽減することができる。この効果は、円形の窪み８を設けることとは独立しているが、両者の効果を併せて得るためには上記の構造が適しており、電極端子５と封止樹脂体７との剥離を止める効果を十分に確保しながら、半導体装置の小型化を図ることができる。   In this structure, the electrode terminal 5 has a wide width (for example, 0.4 mm or more), and it is difficult to support the electrode terminal 5 at one end of the lead frame, or the lead frame has a small thickness. Support is advantageous when the strength is insufficient. The electrode terminal 5 can be reliably supported at the end portion, and the exposed surface of the end portion is divided into two parts, thereby reducing the exposed area and reducing the influence of external force compared to a continuous case. Can do. This effect is independent of the provision of the circular recess 8, but the above structure is suitable for obtaining both effects together, and the electrode terminal 5 and the sealing resin body 7 are peeled off. The semiconductor device can be miniaturized while sufficiently securing the effect of stopping.

電極端子５の端部が封止樹脂体７の外周側面から露出する箇所は、２箇所に限らず、電極端子５の形状に応じて複数箇所とすればよい。   The number of places where the end of the electrode terminal 5 is exposed from the outer peripheral side surface of the sealing resin body 7 is not limited to two, but may be a plurality of places depending on the shape of the electrode terminal 5.

（第６の実施形態）
図８（ａ）〜（ｃ）を参照して、第６の実施形態における半導体装置について説明する。図８（ａ）は概略的な構成を示す平面図、図８（ｂ）はその断面図、図８（ｃ）は背面図である。この半導体装置は、第５の実施形態の装置と同様の基本構成を有するが、円形の窪み８の配置状態が第５の実施形態とは異なる。 (Sixth embodiment)
With reference to FIGS. 8A to 8C, a semiconductor device according to the sixth embodiment will be described. FIG. 8A is a plan view showing a schematic configuration, FIG. 8B is a sectional view thereof, and FIG. 8C is a rear view. This semiconductor device has the same basic configuration as the device of the fifth embodiment, but the arrangement state of the circular depressions 8 is different from that of the fifth embodiment.

第５の実施形態では、電極端子５の端部が封止樹脂体７の外周側面から２箇所で露出し、その２箇所の露出端部に対応して各々１個の窪み８が配置されている。これに対して、本実施形態では、円形の窪み８が配置される位置は同様であるが、電極端子５が封止樹脂体７から露出する箇所の数に関係無く、電極端子５の横方向に複数個の窪み８が配置されている。複数個の円形の窪み８は、隣接した部分で互いに一部が重なるように配置されて繋がっている。図では直線状の輪郭を持った溝のように示されているが、実際には、複数個の円形の一部重なり合いにより形成されて波状の輪郭を有する溝である。   In 5th Embodiment, the edge part of the electrode terminal 5 is exposed at two places from the outer peripheral side surface of the sealing resin body 7, and one hollow 8 is arrange | positioned corresponding to the two exposed edge parts, respectively. Yes. On the other hand, in the present embodiment, the position where the circular recess 8 is arranged is the same, but the lateral direction of the electrode terminal 5 is independent of the number of locations where the electrode terminal 5 is exposed from the sealing resin body 7. A plurality of indentations 8 are arranged in the bottom. The plurality of circular recesses 8 are arranged and connected so that the adjacent portions overlap each other. Although it is shown as a groove having a linear contour in the figure, it is actually a groove having a wavy contour formed by overlapping a plurality of circular portions.

この構造によれば、電極端子５の上面は、窪み１８が複数個繋がった溝によって完全に２部分に分離されるので、第５の実施形態の場合に比べて、電極端子５と封止樹脂体７との剥離を止める効果が向上する。   According to this structure, the upper surface of the electrode terminal 5 is completely separated into two parts by a groove in which a plurality of recesses 18 are connected, so that the electrode terminal 5 and the sealing resin are compared with the case of the fifth embodiment. The effect which stops peeling with the body 7 improves.

図８（ａ）に示すように、角に配置された電極端子５における複数の端部部分が封止樹脂体７の異なる辺から露出する場合は、円形の窪み８が複数個繋がった溝を、Ｌ字型に形成してもよい。   As shown in FIG. 8A, when a plurality of end portions of the electrode terminals 5 arranged at the corners are exposed from different sides of the sealing resin body 7, grooves each having a plurality of circular depressions 8 are connected. It may be formed in an L shape.

次に、第５及び第６の実施形態における半導体装置の製造に用いられるリードフレームをエッチングにより形成する際の、電極端子部分の形成方法について、図９〜図１１を参照して説明する。図９は従来例の半導体装置の場合、図１０、図１１は各々、第５及び第６の実施形態の半導体装置の場合を示す。   Next, a method for forming the electrode terminal portion when forming the lead frame used for manufacturing the semiconductor device in the fifth and sixth embodiments by etching will be described with reference to FIGS. FIG. 9 shows the case of the conventional semiconductor device, and FIGS. 10 and 11 show the case of the semiconductor devices of the fifth and sixth embodiments, respectively.

図９（ａ）は、従来例における電極端子の部分の表面側レジストパターン１３を示す平面図である。図９（ｂ）は、電極端子５の概略的な構成を示す平面図である。図９（ｃ）〜（ｅ）は各々、エッチング前、エッチング中、エッチング後の状態を示す断面図である。図９における従来例については、本発明との比較をしやすいように、図１６に示した電極端子５の形状ではなく、第５、６の実施形態の電極端子５と同様の形状の場合を図示した。   FIG. 9A is a plan view showing the surface-side resist pattern 13 of the electrode terminal portion in the conventional example. FIG. 9B is a plan view showing a schematic configuration of the electrode terminal 5. FIGS. 9C to 9E are cross-sectional views showing states before, during, and after etching. For the conventional example in FIG. 9, in order to facilitate comparison with the present invention, the shape of the electrode terminal 5 is not the shape of the electrode terminal 5 shown in FIG. Illustrated.

図１０（ａ）は、第５の実施形態の場合の電極端子部分の表面側レジストパターン１３を示す平面図である。図１０（ｂ）は、電極端子５の概略的な構成を示す平面図である。図１０（ｃ）〜（ｅ）は各々、エッチング前、エッチング中、エッチング後の状態を示す断面図である。   FIG. 10A is a plan view showing the surface-side resist pattern 13 of the electrode terminal portion in the case of the fifth embodiment. FIG. 10B is a plan view showing a schematic configuration of the electrode terminal 5. FIGS. 10C to 10E are cross-sectional views showing states before, during, and after etching, respectively.

図１１（ａ）は、第５の実施形態の場合の電極端子部分の表面側レジストパターン１３を示す平面図である。図１１（ｂ）は、電極端子５の概略的な構成を示す平面図である。図１１（ｃ）〜（ｅ）は各々、エッチング前、エッチング中、エッチング後の状態を示す断面図である。   FIG. 11A is a plan view showing the surface-side resist pattern 13 of the electrode terminal portion in the case of the fifth embodiment. FIG. 11B is a plan view showing a schematic configuration of the electrode terminal 5. 11C to 11E are cross-sectional views showing states before, during, and after etching, respectively.

従来の半導体装置の電極端子５をエッチングにより形成するには、図９（ａ）に示すように横方向の溝を有する表面側レジストパターン１３および、裏面側のレジストパターン１４（平面図は図示せず）を、図９（ｃ）に示すように、リードフレームの電極端子５部の上下に配置する。次に図９（ｄ）に示すように、表裏側からエッチングを開始する。表面側レジストパターン１３の溝６を形成する部分は、一定の幅で形成されており、かつ電極端子５の幅方向に貫通しているので、この部分のエッチング液の流れは良好である。そのため、図９（ｅ）に示すように、溝６の幅は、表面側レジストパターン１３の溝部幅より拡大されて形成される。その結果、図９（ｂ）に示すように、溝６の幅はリードフレームの厚みに相当する程度の幅になる。   In order to form the electrode terminals 5 of the conventional semiconductor device by etching, as shown in FIG. 9A, a front side resist pattern 13 having lateral grooves and a back side resist pattern 14 (plan view is not shown). 9) is arranged above and below the electrode terminal 5 portion of the lead frame as shown in FIG. Next, as shown in FIG. 9D, etching is started from the front and back sides. The portion of the front-side resist pattern 13 where the groove 6 is formed is formed with a constant width and penetrates in the width direction of the electrode terminal 5, so that the flow of the etching solution in this portion is good. Therefore, as shown in FIG. 9 (e), the width of the groove 6 is formed larger than the groove width of the front-side resist pattern 13. As a result, as shown in FIG. 9B, the width of the groove 6 becomes a width corresponding to the thickness of the lead frame.

第５の実施形態の場合は、図１０（ａ）に示す表面側レジストパターン１３に、電極端子５の露出端部を形成する部分１３ａ、１３ｂに対応させた、各々円形の窪み８を形成するための円形パターンを設ける。図１０（ｄ）に示すようにエッチングを行うと、円形パターンによるエッチング加工部が電極端子５の幅方向に対して非貫通であることにより、エッチング液が個々の円形内で滞留する。そのためエッチング速度が低く、図１０（ｅ）に示すように、円形の外周方向及び深さ方向へのエッチング量は、図９（ｅ）の従来例と比べると少ない。その結果、図１０（ｂ）に示すように、窪み８のサイズは小さく抑制される。   In the case of the fifth embodiment, circular recesses 8 corresponding to the portions 13a and 13b that form the exposed end portions of the electrode terminals 5 are formed in the surface-side resist pattern 13 shown in FIG. A circular pattern is provided. When etching is performed as shown in FIG. 10D, the etching solution stays in each circle because the etched portion of the circular pattern does not penetrate in the width direction of the electrode terminal 5. Therefore, the etching rate is low, and as shown in FIG. 10 (e), the etching amount in the circular outer circumferential direction and the depth direction is small as compared with the conventional example of FIG. 9 (e). As a result, as shown in FIG. 10B, the size of the recess 8 is suppressed to be small.

第６の実施形態の場合は、図１１（ａ）に示す表面側レジストパターン１３に、円形の窪み８が横方向に繋がった形状に対応させて円形パターンを設ける。円形パターンは、各円の外周が互いに接する程度に近接させて配置する。この場合も、エッチング液は各円形パターン内で滞留するので、図１１（ｅ）に示すように、円形の外周方向及び深さ方向へのエッチング量は少ない。その結果、図１１（ｂ）に示すように、窪み８が繋がった溝の幅は小さく抑制される。   In the case of the sixth embodiment, a circular pattern is provided on the surface-side resist pattern 13 shown in FIG. 11A so as to correspond to a shape in which circular recesses 8 are connected in the horizontal direction. The circular patterns are arranged close to each other so that the outer circumferences of the circles are in contact with each other. Also in this case, since the etching solution stays in each circular pattern, the etching amount in the circular outer circumferential direction and the depth direction is small as shown in FIG. As a result, as shown in FIG. 11B, the width of the groove to which the recess 8 is connected is suppressed to be small.

なお、この第６の実施形態と比較して、上述の第５の実施形態の場合の方が、エッチング液が各円形パターン内に滞留し易いので、エッチング量がより少ない。   In addition, compared with the sixth embodiment, the etching amount is smaller in the case of the above-described fifth embodiment because the etching liquid tends to stay in each circular pattern.

次に図１２（ａ）〜（ｃ）を参照して、本発明の半導体装置に用いるリードフレームを製造する工程を説明する。まず図１２（ａ）に示すように、リードフレーム１０の素材を容易する。リードフレーム素材としては、０．１〜０．２ｍｍ程度の厚みで、比較的熱伝導が良好で強度の高いＣｕ合金を使用する。熱伝導の良好な素材を使用することによって、ダイシング加工で発熱した熱を逃がし易く、また、強度の高い素材を用いることで、ダイシング加工時のブレードへの目詰まりを防止することができる。   Next, with reference to FIGS. 12A to 12C, a process for manufacturing a lead frame used in the semiconductor device of the present invention will be described. First, as shown in FIG. 12A, the material of the lead frame 10 is facilitated. As the lead frame material, a Cu alloy having a thickness of about 0.1 to 0.2 mm, a relatively good thermal conductivity, and a high strength is used. By using a material having good heat conduction, heat generated by dicing can be easily released, and by using a material having high strength, clogging of the blade during dicing can be prevented.

次に図１２（ｂ）に示すように、リードフレーム素材に対して、エッチング加工によりダイパッド１、電極端子５などを形成した後、リードフレーム１０全体にＰｄめっき（図示せず）を施す。ＰｄめっきはＮｉ、Ｐｄ、Ａｕの３層で構成し、最外層にＡｕフラッシュを施すことで、樹脂封止体との良好な密着性を得ることができる。エッチング加工の際に、電極端子５の表面に円形の窪み（図示せず）を形成する。   Next, as shown in FIG. 12B, after the die pad 1 and the electrode terminals 5 are formed on the lead frame material by etching, Pd plating (not shown) is applied to the entire lead frame 10. Pd plating is composed of three layers of Ni, Pd, and Au, and by applying Au flash to the outermost layer, good adhesion with the resin sealing body can be obtained. During the etching process, a circular depression (not shown) is formed on the surface of the electrode terminal 5.

次に、図１２（ｃ）に示すように、リードフレーム１０の裏面に熱可塑性などの接着剤と２層構造のポリイミドテープ１５を貼り付ける。このテープ１５は、樹脂封止する際に、電極端子５の裏面へ封止樹脂が洩れないようにするためのものである。以上のようにして、本発明の半導体装置に用いるリードフレームを完成することができる。   Next, as shown in FIG. 12C, an adhesive such as thermoplastic and a two-layered polyimide tape 15 are attached to the back surface of the lead frame 10. The tape 15 is for preventing the sealing resin from leaking to the back surface of the electrode terminal 5 when the resin is sealed. As described above, the lead frame used in the semiconductor device of the present invention can be completed.

図１２（ｂ）に示す工程で形成する円形の窪みの外形等の寸法について、図１３を参照して説明する。図１３は、電極端子５の一部を拡大して示した平面図である。窪み８の外形の直径ｄは、リードフレームの素材厚みが０．２ｍｍの場合、０．１ｍｍ程度に小さく成形することができる。したがって、それだけ電極端子５を短くすることが可能である。外側の窪み８の位置については、個々の半導体装置に分割する際のダイシング加工の位置ずれ等を考慮して、半導体装置の外縁からの距離Ｓ１を０．０５〜０．１ｍｍ程度とする。金属細線４を接続するための長さとしては、０．１〜０．２ｍｍ程度を確保する。その結果、窪み８を１箇所に配置する構造では、リードフレームの素材厚みが０．２ｍｍの場合、電極端子５の長さを０．２５〜０．４ｍｍにすることができる。   The dimensions of the circular depression formed in the step shown in FIG. 12B will be described with reference to FIG. FIG. 13 is an enlarged plan view showing a part of the electrode terminal 5. The outer diameter d of the recess 8 can be formed as small as about 0.1 mm when the material thickness of the lead frame is 0.2 mm. Therefore, the electrode terminal 5 can be shortened accordingly. With respect to the position of the outer depression 8, the distance S1 from the outer edge of the semiconductor device is set to about 0.05 to 0.1 mm in consideration of the positional deviation of the dicing process when dividing into individual semiconductor devices. As a length for connecting the metal thin wire 4, about 0.1-0.2mm is ensured. As a result, in the structure in which the depression 8 is disposed at one place, the length of the electrode terminal 5 can be set to 0.25 to 0.4 mm when the material thickness of the lead frame is 0.2 mm.

図１３のように、外側の窪み８に加えて半導体素子２に面した側にも設ける場合は、２箇所の窪み８の間隔Ｓ２は、金属細線４を接続することを考慮して、０．１〜０．２ｍｍとする。窪み８から電極端子５の半導体素子２に面した側の端部までの距離Ｓ３は、０．０５〜０．１ｍｍ程度とする。その結果、リードフレームの素材厚みが０．２ｍｍの場合、電極端子５の長さを０．３〜０．５ｍｍにすることができる。   As shown in FIG. 13, in the case where it is provided on the side facing the semiconductor element 2 in addition to the outer depression 8, the distance S <b> 2 between the two depressions 8 is 0. 1 to 0.2 mm. A distance S3 from the recess 8 to the end of the electrode terminal 5 facing the semiconductor element 2 is set to about 0.05 to 0.1 mm. As a result, when the material thickness of the lead frame is 0.2 mm, the length of the electrode terminal 5 can be 0.3 to 0.5 mm.

次に図１４（ａ）〜（ｆ）を参照して、上述のリードフレーム１０を用いて本発明の半導体装置を製造する工程を説明する。図１４（ａ）は接着剤を塗布する工程、図１４（ｂ）は半導体素子を搭載する工程、図１４（ｃ）は金属細線を接続する工程、図１４（ｄ）は樹脂封止する工程、図１４（ｅ）はリードフレーム裏面のテープを剥離する工程、図１４（ｆ）は半導体装置を個別に分割する工程を各々示す。   Next, with reference to FIGS. 14A to 14F, a process of manufacturing the semiconductor device of the present invention using the above-described lead frame 10 will be described. 14A is a step of applying an adhesive, FIG. 14B is a step of mounting a semiconductor element, FIG. 14C is a step of connecting a thin metal wire, and FIG. 14D is a step of resin sealing. 14E shows a step of peeling the tape on the back surface of the lead frame, and FIG. 14F shows a step of dividing the semiconductor device individually.

まず、図１４（ａ）に示すように、ダイパッド１の上にディスペンサ（図示せず）などを用いて接着剤３を塗布する。接着剤３は、一例として熱硬化性のエポキシ樹脂にＡｇ粉を混合させた銀ペーストからなる。次に、図１４（ｂ）に示すように、接着剤３を塗布したダイパッド１上にコレット（図示せず）などを用いて半導体素子２を搭載した後、ヒートステージ（図示せず）上で加熱し、接着剤３を硬化させる。一例として、半導体素子２は０．１〜０．２ｍｍ程度の厚のシリコン単結晶である。また、加熱条件は２００〜２５０℃、３０〜６０秒程度である。   First, as shown in FIG. 14A, the adhesive 3 is applied onto the die pad 1 using a dispenser (not shown) or the like. As an example, the adhesive 3 is made of a silver paste in which Ag powder is mixed with a thermosetting epoxy resin. Next, as shown in FIG. 14B, the semiconductor element 2 is mounted on the die pad 1 coated with the adhesive 3 using a collet (not shown) or the like, and then on a heat stage (not shown). The adhesive 3 is cured by heating. As an example, the semiconductor element 2 is a silicon single crystal having a thickness of about 0.1 to 0.2 mm. The heating conditions are 200 to 250 ° C. and about 30 to 60 seconds.

次に、図１４（ｃ）に示すように、ダイパッド１上に固着された半導体素子２のボンディングパッド（図示せず）と電極端子５とを金属細線４を用いて電気的に接続する。ワイヤーボンド装置のヒートステージ（図示せず）には、真空孔が開いており、リードフレーム裏面のテープ１５を吸引固定する。また、リードフレームのボンディングエリア外周部を押さえ治具（図示せず）により固定した状態で、ワイヤーボンディングを実施する。一例として、金属細線としては、直径２０〜２５μｍのＡｕワイヤーを用いる。   Next, as shown in FIG. 14C, a bonding pad (not shown) of the semiconductor element 2 fixed on the die pad 1 and the electrode terminal 5 are electrically connected using a metal thin wire 4. A vacuum hole is opened in a heat stage (not shown) of the wire bonding apparatus, and the tape 15 on the back surface of the lead frame is sucked and fixed. Further, wire bonding is performed in a state where the outer peripheral portion of the bonding area of the lead frame is fixed by a pressing jig (not shown). As an example, an Au wire having a diameter of 20 to 25 μm is used as the thin metal wire.

次に、図１４（ｄ）に示すように、シリンダにより型締めされる１８０℃程度に加熱した封止金型（図示せず）を搭載したトランスファー装置により、複数の半導体装置を一括して樹脂封止する。リードフレーム１０の裏面にはテープ１５が貼り付けられているので、樹脂封止の際、電極端子５の裏面に封止樹脂が洩れることはない。封止樹脂が硬化して樹脂封止体７が形成された後、型開きされると共にトランスファー装置より脱装される。そして、オモリなどで加圧しながら硬化炉などで樹脂封止体７の本硬化を実施する。一例として、加圧力は１ｇ／ｍｍ2程度である。 Next, as shown in FIG. 14 (d), a plurality of semiconductor devices are collectively resinated by a transfer device equipped with a sealing mold (not shown) heated to about 180 ° C. and clamped by a cylinder. Seal. Since the tape 15 is affixed to the back surface of the lead frame 10, the sealing resin does not leak to the back surface of the electrode terminal 5 during resin sealing. After the sealing resin is cured and the resin sealing body 7 is formed, the mold is opened and detached from the transfer device. Then, the resin sealing body 7 is fully cured in a curing furnace or the like while being pressurized with a weight or the like. As an example, the applied pressure is about 1 g / mm 2 .

次に、図１４（ｅ）に示すように、封止成型体に２００℃程度の熱を加えながらテープ１５を剥離する。テープ１５を剥離する場合、樹脂封止体７に対してできるだけ小さな角度で剥離を行うことで、剥離時の応力を抑制することができる。   Next, as shown in FIG. 14E, the tape 15 is peeled off while applying heat of about 200 ° C. to the sealed molded body. When peeling the tape 15, the stress at the time of peeling can be suppressed by peeling the resin sealing body 7 at an angle as small as possible.

次に、図１４（ｆ）に示すように、ダイシング装置（図示せず）により個々の半導体装置に分割する。封止成型体を、リングに貼り付けたＵＶシート（図示せず）上に貼り付け固定し、ブレードにより切断する。ブレードとしては、例えば電鋳製で０．２５〜０．３ｍｍ程度の厚みのものを用いる。   Next, as shown in FIG. 14F, the semiconductor device is divided into individual semiconductor devices by a dicing device (not shown). The sealing molded body is stuck and fixed on a UV sheet (not shown) attached to the ring, and cut with a blade. As the blade, for example, an electroformed one having a thickness of about 0.25 to 0.3 mm is used.

本発明の半導体装置によれば、電極端子の電気的接続面に円形の窪みを形成することで、電極端子と封止樹脂体の剥離止め構造のサイズを縮小することができる。それにより、高い信頼性を確保したまま、従来より更に小型化した薄型の半導体装置を提供することができる。   According to the semiconductor device of the present invention, the size of the peeling prevention structure between the electrode terminal and the sealing resin body can be reduced by forming the circular depression on the electrical connection surface of the electrode terminal. Accordingly, a thin semiconductor device that is further reduced in size can be provided while ensuring high reliability.

第１の実施形態における半導体装置の概略的な構成を示し、（ａ）は平面図、（ｂ）は断面図、（ｃ）は背面図1 shows a schematic configuration of a semiconductor device according to a first embodiment, where (a) is a plan view, (b) is a cross-sectional view, and (c) is a rear view. 図１の半導体装置の変形例を示し、（ａ）は平面図、（ｂ）は断面図1A and 1B show a modification of the semiconductor device of FIG. 1, in which FIG. 図１の半導体装置の製造に用いられるリードフレームの平面図FIG. 1 is a plan view of a lead frame used for manufacturing the semiconductor device of FIG. 第２の実施形態における半導体装置の概略的な構成を示し、（ａ）は平面図、（ｂ）は断面図、（ｃ）は背面図2 shows a schematic configuration of a semiconductor device according to a second embodiment, where (a) is a plan view, (b) is a cross-sectional view, and (c) is a rear view. FIG. 第３の実施形態における半導体装置の概略的な構成を示し、（ａ）は平面図、（ｂ）は断面図、（ｃ）は背面図The schematic structure of the semiconductor device in 3rd Embodiment is shown, (a) is a top view, (b) is sectional drawing, (c) is a rear view. 第４の実施形態における半導体装置の概略的な構成を示し、（ａ）は平面図、（ｂ）は断面図、（ｃ）は背面図The schematic structure of the semiconductor device in 4th Embodiment is shown, (a) is a top view, (b) is sectional drawing, (c) is a rear view. 第５の実施形態における半導体装置の概略的な構成を示し、（ａ）は平面図、（ｂ）は断面図、（ｃ）は背面図The schematic structure of the semiconductor device in 5th Embodiment is shown, (a) is a top view, (b) is sectional drawing, (c) is a rear view. 第６の実施形態における半導体装置の概略的な構成を示し、（ａ）は平面図、（ｂ）は断面図、（ｃ）は背面図The schematic structure of the semiconductor device in 6th Embodiment is shown, (a) is a top view, (b) is sectional drawing, (c) is a rear view. 従来例における半導体装置の製造に用いるリードフレームの製造方法を示し、（ａ）はエッチングのための表面側レジストパターンを示す平面図、（ｂ）は電極端子の概略的な構成を示す平面図、（ｃ）〜（ｅ）は各々、エッチング前、エッチング中、エッチング後の状態を示す断面図A manufacturing method of a lead frame used for manufacturing a semiconductor device in a conventional example is shown, (a) is a plan view showing a surface side resist pattern for etching, (b) is a plan view showing a schematic configuration of electrode terminals, (C)-(e) is sectional drawing which respectively shows the state before an etching, during an etching, and after an etching 第５の実施形態における半導体装置の製造に用いるリードフレームの製造方法を示し、（ａ）はエッチングのための表面側レジストパターンを示す平面図、（ｂ）は電極端子の概略的な構成を示す平面図、（ｃ）〜（ｅ）は各々、エッチング前、エッチング中、エッチング後の状態を示す断面図FIG. 6 shows a manufacturing method of a lead frame used for manufacturing a semiconductor device in a fifth embodiment, where (a) is a plan view showing a surface side resist pattern for etching, and (b) shows a schematic configuration of electrode terminals. Plan views (c) to (e) are cross-sectional views showing states before, during and after etching, respectively. 第６の実施形態における半導体装置の製造に用いるリードフレームの製造方法を示し、（ａ）はエッチングのための表面側レジストパターンを示す平面図、（ｂ）は電極端子の概略的な構成を示す平面図、（ｃ）〜（ｅ）は各々、エッチング前、エッチング中、エッチング後の状態を示す断面図8A and 8B show a manufacturing method of a lead frame used for manufacturing a semiconductor device according to a sixth embodiment, where FIG. 6A is a plan view showing a surface-side resist pattern for etching, and FIG. Plan views (c) to (e) are cross-sectional views showing states before, during and after etching, respectively. 本発明の半導体装置の製造に用いるリードフレームを製造する工程を説明する工程断面図Process sectional drawing explaining the process of manufacturing the lead frame used for manufacture of the semiconductor device of this invention 本発明の半導体装置における電極端子の一部を拡大して示した平面図The top view which expanded and showed a part of electrode terminal in the semiconductor device of this invention 本発明の半導体装置を製造する工程を説明する工程断面図Process sectional drawing explaining the process of manufacturing the semiconductor device of this invention 従来例の半導体装置の概略的な構成を示し、（ａ）は平面図、（ｂ）は断面図、（ｃ）は背面図1 shows a schematic configuration of a conventional semiconductor device, where (a) is a plan view, (b) is a cross-sectional view, and (c) is a rear view. 他の従来例の半導体装置の概略的な構成を示し、（ａ）は平面図、（ｂ）は断面図、（ｃ）は背面図The schematic structure of the semiconductor device of another prior art example is shown, (a) is a top view, (b) is sectional drawing, (c) is a rear view.

符号の説明Explanation of symbols

１ ダイパッド
２ 半導体素子
３ 接着剤
４ 金属細線
５ 電極端子
６ 溝
７ 樹脂封止体
８ 窪み
９、１６ サポートリード
１０ リードフレーム
１１ 外枠
１２ 内枠
１３ 電極端子部の表面側レジストパターン
１３ａ、１３ｂ 露出端部を形成する部分
１４ 電極端子部の裏面側レジストパターン
１５ テープ DESCRIPTION OF SYMBOLS 1 Die pad 2 Semiconductor element 3 Adhesive 4 Metal fine wire 5 Electrode terminal 6 Groove 7 Resin sealing body 8 Depression 9, 16 Support lead 10 Lead frame 11 Outer frame 12 Inner frame 13 Surface side resist pattern 13a, 13b of electrode terminal part exposed Part 14 for forming the end part Resist pattern 15 on the back side of the electrode terminal part Tape

Claims (7)

半導体素子と、前記半導体素子が搭載されたダイパッドと、前記半導体素子と電気的に接続された接続部を有し、前記ダイパッドと独立して配置された複数の電極端子と、前記電極端子の前記接続部を有する面の裏面が外部端子面として露出するように、前記半導体素子と前記ダイパッドと前記電極端子とを封止する樹脂封止体とを備えた半導体装置であって、
角に配置された前記電極端子の端部が、複数箇所に分離し、分離された前記端部が前記樹脂封止体の外周側面の異なる２辺から露出し、分離された前記電極端子の端部に対応して、平面形状が円形の複数の窪みが配置されていることを特徴とする半導体装置。 A semiconductor element; a die pad on which the semiconductor element is mounted; a plurality of electrode terminals that are electrically connected to the semiconductor element; and disposed independently of the die pad; and the electrode terminal A semiconductor device including a resin sealing body that seals the semiconductor element, the die pad, and the electrode terminal such that a back surface of a surface having a connection portion is exposed as an external terminal surface,
The ends of the electrode terminals arranged at the corners are separated into a plurality of locations, and the separated ends are exposed from two different sides of the outer peripheral side surface of the resin sealing body, and the separated ends of the electrode terminals A plurality of recesses having a circular planar shape are arranged corresponding to the portions. 前記電極端子の端部が２つに分離し、分離されたそれぞれの前記端部が前記樹脂封止体の外周側面の異なる２辺から露出し、平面形状が円形の２つの窪みが配置されている請求項１に記載の半導体装置。   The electrode terminal ends are separated into two parts, the separated end parts are exposed from two different sides of the outer peripheral side surface of the resin sealing body, and two recesses having a circular planar shape are arranged. The semiconductor device according to claim 1. 前記各窪みは、前記電極端子が前記樹脂封止体の外周側面から露出する各端部と前記接続部との間に配置された請求項１に記載の半導体装置。   2. The semiconductor device according to claim 1, wherein each of the recesses is disposed between each end portion where the electrode terminal is exposed from an outer peripheral side surface of the resin sealing body and the connection portion. 半導体素子と、前記半導体素子が搭載されたダイパッドと、前記半導体素子と電気的に接続された接続部を有し、前記ダイパッドと独立して配置された複数の電極端子と、前記電極端子の前記接続部を有する面の裏面が外部端子面として露出するように、前記半導体素子と前記ダイパッドと前記電極端子とを封止する樹脂封止体とを備えた半導体装置であって、
角に配置された前記電極端子の端部が、複数箇所に分離し、前記樹脂封止体の外周側面の異なる２辺から露出し、前記端部と前記接続部との間に、平面形状が円形で、隣接した部分で互いに一部が重なるように配置されて繋がった窪みを配置したことを特徴とする半導体装置。 A semiconductor element; a die pad on which the semiconductor element is mounted; a plurality of electrode terminals that are electrically connected to the semiconductor element; and disposed independently of the die pad; and the electrode terminal A semiconductor device including a resin sealing body that seals the semiconductor element, the die pad, and the electrode terminal such that a back surface of a surface having a connection portion is exposed as an external terminal surface,
The end portions of the electrode terminals arranged at the corners are separated into a plurality of locations, exposed from two different sides of the outer peripheral side surface of the resin sealing body, and a planar shape is formed between the end portions and the connection portions. A semiconductor device, characterized in that it is circular and has recesses that are connected so as to partially overlap each other at adjacent portions. 繋がった複数個の窪みの形状がＬ字型である請求項４に記載の半導体装置。   The semiconductor device according to claim 4, wherein a shape of the plurality of connected depressions is L-shaped. 半導体素子と、前記半導体素子が搭載されたダイパッドと、前記半導体素子と電気的に接続された接続部を有し、前記ダイパッドと独立して配置された複数の電極端子と、前記電極端子の前記接続部を有する面の裏面が外部端子面として露出するように、前記半導体素子と前記ダイパッドと前記電極端子とを封止する樹脂封止体とを備え、角に配置された前記電極端子の端部が複数箇所に分離し、分離された前記端部が前記樹脂封止体の外周側面の異なる２辺から露出した半導体装置の製造方法であって、
前記電極端子を形成する工程が、
前記角に配置された電極端子の表面の前記各端部に対応した位置に各々円形の開口パターンを有するレジストパターンを形成する工程と、
前記開口パターンにエッチング液を滞留させ、前記電極端子表面をエッチングし、前記電極端子表面に平面形状が円形の窪みを形成する工程とを備えたことを特徴とする半導体装置の製造方法。 A semiconductor element; a die pad on which the semiconductor element is mounted; a plurality of electrode terminals that are electrically connected to the semiconductor element; and disposed independently of the die pad; and the electrode terminal An end of the electrode terminal disposed at a corner, provided with a resin sealing body that seals the semiconductor element, the die pad, and the electrode terminal so that the back surface of the surface having the connection portion is exposed as an external terminal surface Part is separated into a plurality of locations, and the separated end is exposed from two different sides of the outer peripheral side surface of the resin sealing body,
Forming the electrode terminal comprises:
Forming a resist pattern having a circular opening pattern at a position corresponding to each end of the surface of the electrode terminal disposed at the corner;
And a step of etching the electrode terminal surface to form a recess having a circular planar shape on the surface of the electrode terminal. 半導体素子と、前記半導体素子が搭載されたダイパッドと、前記半導体素子と電気的に接続された接続部を有し、前記ダイパッドと独立して配置された複数の電極端子と、前記電極端子の前記接続部を有する面の裏面が外部端子面として露出するように、前記半導体素子と前記ダイパッドと前記電極端子とを封止する樹脂封止体とを備え、角に配置された前記電極端子の端部が複数箇所に分離し、分離された前記端部が前記樹脂封止体の外周側面の異なる２辺から露出した半導体装置の製造方法であって、
前記電極端子を形成する工程が、
前記角に配置された電極端子の表面の前記各端部と前記接続部の間の位置に、複数の円形の開口を各円形の外周が互いに接する程度に近接させて配置した開口パターンを有するレジストパターンを形成する工程と、
前記開口パターンにエッチング液を滞留させ、前記電極端子表面をエッチングし、前記電極端子表面に複数の円形が、隣接した部分で互いに一部が重なるように配置されて繋がった窪みを形成する工程とを備えたことを特徴とする半導体装置の製造方法。 A semiconductor element; a die pad on which the semiconductor element is mounted; a plurality of electrode terminals that are electrically connected to the semiconductor element; and disposed independently of the die pad; and the electrode terminal An end of the electrode terminal disposed at a corner, provided with a resin sealing body that seals the semiconductor element, the die pad, and the electrode terminal so that the back surface of the surface having the connection portion is exposed as an external terminal surface A part is separated into a plurality of locations, and the separated end is exposed from two different sides of the outer peripheral side surface of the resin sealing body,
Forming the electrode terminal comprises:
A resist having an opening pattern in which a plurality of circular openings are arranged close to each other so that the outer peripheries of the respective circles are in contact with each other at positions between the end portions and the connection portions on the surface of the electrode terminals arranged at the corners. Forming a pattern;
Etching solution in the opening pattern, etching the electrode terminal surface, and forming a recess in which a plurality of circles are arranged on the electrode terminal surface so as to partially overlap each other at adjacent portions; A method for manufacturing a semiconductor device, comprising:
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