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GB1215910A - Improvements in or relating to scanning electron microscopes - Google Patents

Improvements in or relating to scanning electron microscopes

Info

Publication number
GB1215910A
GB1215910A GB6287669A GB6287669A GB1215910A GB 1215910 A GB1215910 A GB 1215910A GB 6287669 A GB6287669 A GB 6287669A GB 6287669 A GB6287669 A GB 6287669A GB 1215910 A GB1215910 A GB 1215910A
Authority
GB
United Kingdom
Prior art keywords
target
mesh
secondaries
screen
held
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB6287669A
Inventor
John Peter Wilfred Flemming
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STC PLC
Original Assignee
Standard Telephone and Cables PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Standard Telephone and Cables PLC filed Critical Standard Telephone and Cables PLC
Priority to GB6287669A priority Critical patent/GB1215910A/en
Publication of GB1215910A publication Critical patent/GB1215910A/en
Priority to NL7018473A priority patent/NL7018473A/xx
Priority to DE19702062610 priority patent/DE2062610A1/en
Priority to CH1885770A priority patent/CH521579A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/05—Electron or ion-optical arrangements for separating electrons or ions according to their energy or mass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/266—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy
    • H01J37/268—Measurement of magnetic or electric fields in the object; Lorentzmicroscopy with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1,215,910. Electron microscopes. STANDARD TELEPHONES & CABLES Ltd. 24 Dec., 1969, No. 62876/69. Addition to 1,194,355. Heading H1D. That embodiment of the parent Specification which employs a velocity analyser for secondary electrons emitted from the target is modified, by the provision close to the target of a screen which may be held at a sufficiently high potential to make the secondary electron trajectories substantially independent of potential gradients in the region of the target surface surrounding the point of impact of the primary beam, whereby targets which include biased semi-conductor integrated circuits may be examined. The screen may be in the form of a fine mesh spaced about 2 mm. from the target, and held at about 1 KV. with respect thereto to accelerate the secondaries away from the surface region; preferably a second similar mesh, at a potential near that of the target and spaced about 1 mm. behind the first mesh, is employed subsequently to decelerate the secondaries.
GB6287669A 1967-10-25 1969-12-24 Improvements in or relating to scanning electron microscopes Expired GB1215910A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
GB6287669A GB1215910A (en) 1969-12-24 1969-12-24 Improvements in or relating to scanning electron microscopes
NL7018473A NL7018473A (en) 1969-12-24 1970-12-18
DE19702062610 DE2062610A1 (en) 1969-12-24 1970-12-18 Scanning microscope
CH1885770A CH521579A (en) 1967-10-25 1970-12-21 Electron beam microprobe

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB6287669A GB1215910A (en) 1969-12-24 1969-12-24 Improvements in or relating to scanning electron microscopes

Publications (1)

Publication Number Publication Date
GB1215910A true GB1215910A (en) 1970-12-16

Family

ID=10488577

Family Applications (1)

Application Number Title Priority Date Filing Date
GB6287669A Expired GB1215910A (en) 1967-10-25 1969-12-24 Improvements in or relating to scanning electron microscopes

Country Status (3)

Country Link
DE (1) DE2062610A1 (en)
GB (1) GB1215910A (en)
NL (1) NL7018473A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5795056A (en) * 1980-12-05 1982-06-12 Hitachi Ltd Appearance inspecting process
DE3235698A1 (en) * 1982-09-27 1984-03-29 Siemens AG, 1000 Berlin und 8000 München DEVICE AND METHOD FOR DIRECTLY MEASURING SIGNAL PROCESSES AT MULTIPLE MEASURING POINTS WITH HIGH TIME RESOLUTION

Also Published As

Publication number Publication date
DE2062610A1 (en) 1971-07-01
NL7018473A (en) 1971-06-28

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