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GB1248087A - Improvements relating to pressure gauges - Google Patents

Improvements relating to pressure gauges

Info

Publication number
GB1248087A
GB1248087A GB00732/69A GB1073269A GB1248087A GB 1248087 A GB1248087 A GB 1248087A GB 00732/69 A GB00732/69 A GB 00732/69A GB 1073269 A GB1073269 A GB 1073269A GB 1248087 A GB1248087 A GB 1248087A
Authority
GB
United Kingdom
Prior art keywords
resistors
pressure
enclosure
metal
region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB00732/69A
Inventor
William Thorp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ferranti International PLC
Original Assignee
Ferranti PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ferranti PLC filed Critical Ferranti PLC
Priority to GB00732/69A priority Critical patent/GB1248087A/en
Publication of GB1248087A publication Critical patent/GB1248087A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

1,248,087. Semiconductor devices. FERRANTI Ltd. 27 Feb., 1970 [28 Feb., 1969], No. 10732/69. Heading H1K. [Also in Division G1] A pressure gauge includes a transducer support 25 carrying a semi-conductor body 10 having a plurality of piezo-resistive strain sensing elements 13 formed therein, mounted in an enclosure 32, 22 containing a fluid at a predetermined pressure, a bore 28 extending through the enclosure part 22 to allow fluid whose pressure is to be measured to communicate with a cavity 26 defined by the support 25 and semi-conductor body 10 and thereby flex the sensing part of body 10. The transducer 10, Fig. 1, comprises superimposed P-type substrate 11 and N-type epitaxial layer 12 having formed in its central region 14 diffused P-type sensing resistive elements 13, P-type layer 11 being removed from region 14 to allow layer 12 to flex. Four resistors 13 are provided at the centre of 14 and two pairs os U-shaped resistors 13 at its periphery which resistors are connected by aluminium strips 17 to terminals 18. In operation two of the central resistors 13 and two of the U-shaped resistors are connected to form a Wheatstone Bridge the output from which varies in response to changes in pressure on region 14. Others of the resistors 13 may be employed as balancing or calibrating resistors, or pairs may be connected in series and used as temperature sensors together with thin film trimming resistors to provide a temperature independent output. The silicon support 25 is bonded to a metal tube 23 having a matching coefficient of expansion and which extends through header 22 forming part of the hermetically sealed enclosure. The pressure in the enclosure may be a vacuum or can be preselected by a valve connected to tube 33 communicating with metal can 32. Instead of mounting the pressure gauge to anchorage 42 by means of screwthreaded part 38 of header 22 the metal can 32 may be provided with a screw-threaded block to which is attached tube 33, Fig. 3 (not shown).
GB00732/69A 1969-02-28 1969-02-28 Improvements relating to pressure gauges Expired GB1248087A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB00732/69A GB1248087A (en) 1969-02-28 1969-02-28 Improvements relating to pressure gauges

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB00732/69A GB1248087A (en) 1969-02-28 1969-02-28 Improvements relating to pressure gauges

Publications (1)

Publication Number Publication Date
GB1248087A true GB1248087A (en) 1971-09-29

Family

ID=9973274

Family Applications (1)

Application Number Title Priority Date Filing Date
GB00732/69A Expired GB1248087A (en) 1969-02-28 1969-02-28 Improvements relating to pressure gauges

Country Status (1)

Country Link
GB (1) GB1248087A (en)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105285A (en) * 1974-01-25 1975-08-19
US4040297A (en) * 1974-12-02 1977-08-09 U.S. Philips Corporation Pressure transducer
US4085620A (en) * 1975-09-30 1978-04-25 Tokyo Shibaura Electric Co., Ltd. Pressure-electric transducers
FR2409500A1 (en) * 1977-11-18 1979-06-15 Philips Nv BOXED SEMICONDUCTOR TRANSDUCER
US4168630A (en) * 1976-11-24 1979-09-25 Tokyo Shibaura Electric Co., Ltd. Semiconductor pressure converter
FR2433176A1 (en) * 1978-08-10 1980-03-07 Nissan Motor PRESSURE SENSORS WITH SEMICONDUCTOR MEMBRANE
FR2446471A1 (en) * 1979-01-11 1980-08-08 Nissan Motor PRESSURE SENSOR
FR2448141A1 (en) * 1979-01-31 1980-08-29 Nissan Motor PRESSURE SENSOR
FR2448140A1 (en) * 1979-02-02 1980-08-29 Nissan Motor DIAPHRAGM PRESSURE SENSOR
FR2448139A1 (en) * 1979-02-02 1980-08-29 Nissan Motor PRESSURE SENSOR
EP0015836A1 (en) * 1979-03-09 1980-09-17 Thomson-Csf Surface acoustic wave pressure transducer
US4303903A (en) * 1978-09-22 1981-12-01 Hitachi, Ltd. Pressure sensitive apparatus
US4563697A (en) * 1982-02-25 1986-01-07 Fuji Electric Company, Ltd. Semiconductor pressure sensor
EP0949494A3 (en) * 1998-04-09 2000-05-03 Fujikoki Corporation Semiconductive pressure sensor
CN104006913A (en) * 2013-02-27 2014-08-27 霍尼韦尔国际公司 Integrated reference vacuum pressure sensor with atomic layer deposition coated input port
EP2816335A1 (en) * 2013-06-19 2014-12-24 Honeywell International Inc. Integrated soi pressure sensor having silicon stress isolation member
CN105742371A (en) * 2014-12-26 2016-07-06 长野计器株式会社 Sensor Module And Method For Producing Sensor Module

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50105285A (en) * 1974-01-25 1975-08-19
US4040297A (en) * 1974-12-02 1977-08-09 U.S. Philips Corporation Pressure transducer
US4085620A (en) * 1975-09-30 1978-04-25 Tokyo Shibaura Electric Co., Ltd. Pressure-electric transducers
US4168630A (en) * 1976-11-24 1979-09-25 Tokyo Shibaura Electric Co., Ltd. Semiconductor pressure converter
FR2409500A1 (en) * 1977-11-18 1979-06-15 Philips Nv BOXED SEMICONDUCTOR TRANSDUCER
FR2433176A1 (en) * 1978-08-10 1980-03-07 Nissan Motor PRESSURE SENSORS WITH SEMICONDUCTOR MEMBRANE
US4314225A (en) 1978-08-10 1982-02-02 Nissan Motor Company, Ltd. Pressure sensor having semiconductor diaphragm
US4303903A (en) * 1978-09-22 1981-12-01 Hitachi, Ltd. Pressure sensitive apparatus
FR2446471A1 (en) * 1979-01-11 1980-08-08 Nissan Motor PRESSURE SENSOR
FR2448141A1 (en) * 1979-01-31 1980-08-29 Nissan Motor PRESSURE SENSOR
US4287501A (en) 1979-01-31 1981-09-01 Nissan Motor Company, Limited Pressure sensor
US4276533A (en) * 1979-02-02 1981-06-30 Nissan Motor Company, Limited Pressure sensor
FR2448139A1 (en) * 1979-02-02 1980-08-29 Nissan Motor PRESSURE SENSOR
US4314226A (en) 1979-02-02 1982-02-02 Nissan Motor Company, Limited Pressure sensor
FR2448140A1 (en) * 1979-02-02 1980-08-29 Nissan Motor DIAPHRAGM PRESSURE SENSOR
FR2451026A1 (en) * 1979-03-09 1980-10-03 Thomson Csf SURFACE ELASTIC WAVE PRESSURE SENSOR
EP0015836A1 (en) * 1979-03-09 1980-09-17 Thomson-Csf Surface acoustic wave pressure transducer
US4563697A (en) * 1982-02-25 1986-01-07 Fuji Electric Company, Ltd. Semiconductor pressure sensor
EP0949494A3 (en) * 1998-04-09 2000-05-03 Fujikoki Corporation Semiconductive pressure sensor
US6176137B1 (en) 1998-04-09 2001-01-23 Fujikoki Corporation Pressure sensor
CN104006913A (en) * 2013-02-27 2014-08-27 霍尼韦尔国际公司 Integrated reference vacuum pressure sensor with atomic layer deposition coated input port
CN104006913B (en) * 2013-02-27 2018-04-13 霍尼韦尔国际公司 Integrated reference vacuum pressure sensor with the input port coated with atomic layer deposition
EP2816335A1 (en) * 2013-06-19 2014-12-24 Honeywell International Inc. Integrated soi pressure sensor having silicon stress isolation member
JP2015007626A (en) * 2013-06-19 2015-01-15 ハネウェル・インターナショナル・インコーポレーテッド Integrated soi pressure sensor having silicon stress isolation member
US10151647B2 (en) 2013-06-19 2018-12-11 Honeywell International Inc. Integrated SOI pressure sensor having silicon stress isolation member
CN105742371A (en) * 2014-12-26 2016-07-06 长野计器株式会社 Sensor Module And Method For Producing Sensor Module
CN105742371B (en) * 2014-12-26 2021-05-25 长野计器株式会社 Sensor module and method of manufacturing the same

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