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DE69011918D1 - Kodiereinrichtung. - Google Patents

Kodiereinrichtung.

Info

Publication number
DE69011918D1
DE69011918D1 DE69011918T DE69011918T DE69011918D1 DE 69011918 D1 DE69011918 D1 DE 69011918D1 DE 69011918 T DE69011918 T DE 69011918T DE 69011918 T DE69011918 T DE 69011918T DE 69011918 D1 DE69011918 D1 DE 69011918D1
Authority
DE
Germany
Prior art keywords
coding device
coding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69011918T
Other languages
English (en)
Other versions
DE69011918T2 (de
DE69011918T3 (de
Inventor
Tetsuharu Nishimura
Koh Ishizuka
Satoshi Ishii
Masaaki Tsukiji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=26418165&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE69011918(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from JP7705889A external-priority patent/JPH02254316A/ja
Priority claimed from JP15416889A external-priority patent/JP2603338B2/ja
Application filed by Canon Inc filed Critical Canon Inc
Publication of DE69011918D1 publication Critical patent/DE69011918D1/de
Publication of DE69011918T2 publication Critical patent/DE69011918T2/de
Application granted granted Critical
Publication of DE69011918T3 publication Critical patent/DE69011918T3/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
DE69011918T 1989-03-28 1990-03-27 Kodiereinrichtung. Expired - Fee Related DE69011918T3 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP77058/89 1989-03-28
JP7705889A JPH02254316A (ja) 1989-03-28 1989-03-28 変位測定装置
JP15416889A JP2603338B2 (ja) 1989-06-16 1989-06-16 変位測定装置
JP154168/89 1989-06-16

Publications (3)

Publication Number Publication Date
DE69011918D1 true DE69011918D1 (de) 1994-10-06
DE69011918T2 DE69011918T2 (de) 1995-01-05
DE69011918T3 DE69011918T3 (de) 2004-07-22

Family

ID=26418165

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69011918T Expired - Fee Related DE69011918T3 (de) 1989-03-28 1990-03-27 Kodiereinrichtung.

Country Status (3)

Country Link
US (1) US5021649A (de)
EP (1) EP0390092B2 (de)
DE (1) DE69011918T3 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2073409A1 (en) * 1991-10-15 1993-04-16 Paul F. Sullivan Light beam position detection and control apparatus employing diffraction patterns
JP3008641B2 (ja) * 1992-01-31 2000-02-14 キヤノン株式会社 変位検出装置
US5424829A (en) * 1992-09-02 1995-06-13 Mitutoyo Corporation Apparatus wherein diffracted light does not return to the source
GB2270379B (en) * 1992-09-02 1997-01-22 Mitutoyo Corp Lattice interference-type displacement detection equipment
KR0141445B1 (ko) * 1993-06-10 1998-07-01 모리시타 요이찌 변이의 측정방법 및 측정장치
DE9311472U1 (de) * 1993-07-31 1993-12-02 UCS-Industrieelektronik GmbH, 22880 Wedel Drehimpulsgeber mit Laserabtastung
DE59509940D1 (de) * 1995-04-13 2002-01-24 Heidenhain Gmbh Dr Johannes Ma stab und Verfahren zur Herstellung eines Ma stabes sowie Positionsmesseinrichtung
JP3937596B2 (ja) 1998-06-16 2007-06-27 キヤノン株式会社 変位情報測定装置
JP3325840B2 (ja) * 1998-10-19 2002-09-17 株式会社ミツトヨ 反射型ホログラムスケール及びこれを用いた光学式変位測定装置
DE10025461A1 (de) * 2000-05-23 2001-12-06 Mahr Gmbh Messeinrichtung nach dem Interferenzprinzip
JP2005003539A (ja) * 2003-06-12 2005-01-06 Sharp Corp 回転検出装置、及びそれを用いた入力機器
WO2005071363A1 (de) * 2004-01-26 2005-08-04 Hahn-Schickard- Gesellschaft Für Angewandte Forschune E.V. Drehgeber und verfahren zum betreiben eines drehgebers
US10591651B2 (en) * 2005-09-30 2020-03-17 Hiperscan Gmbh Micro-optical electromagnetic radiation diffraction grating and method for manufacture
US7839485B2 (en) 2006-01-19 2010-11-23 Nikon Corporation Movable body drive method, movable body drive system, pattern formation method, pattern forming apparatus, exposure method, exposure apparatus, and device manufacturing method
KR101333872B1 (ko) 2006-02-21 2013-11-27 가부시키가이샤 니콘 패턴 형성 장치 및 패턴 형성 방법, 이동체 구동 시스템 및 이동체 구동 방법, 노광 장치 및 노광 방법, 그리고 디바이스 제조 방법
WO2007097466A1 (ja) 2006-02-21 2007-08-30 Nikon Corporation 測定装置及び方法、処理装置及び方法、パターン形成装置及び方法、露光装置及び方法、並びにデバイス製造方法
EP3270226A1 (de) 2006-02-21 2018-01-17 Nikon Corporation Belichtungsvorrichtung, belichtungsverfahren und verfahren zur herstellung einer vorrichtung
US20080094592A1 (en) 2006-08-31 2008-04-24 Nikon Corporation Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
EP3279738A1 (de) 2006-08-31 2018-02-07 Nikon Corporation Antriebsverfahren für beweglichen körper und antriebssystem für beweglichen körper, mustererzeugungsverfahren und -vorrichtung, belichtungsverfahren und -vorrichtung sowie verfahren zur herstellung eines artikels
CN101405839B (zh) 2006-08-31 2014-12-24 株式会社尼康 移动体驱动系统及方法、图案形成装置及方法、曝光装置及方法、组件制造方法
EP2071614B1 (de) * 2006-09-01 2018-06-20 Nikon Corporation Belichtungsverfahren und vorrichtung
KR101881716B1 (ko) * 2006-09-01 2018-07-24 가부시키가이샤 니콘 이동체 구동 방법 및 이동체 구동 시스템, 패턴 형성 방법 및 장치, 노광 방법 및 장치, 디바이스 제조 방법, 그리고 캘리브레이션 방법
KR101360507B1 (ko) * 2006-09-29 2014-02-07 가부시키가이샤 니콘 이동체 시스템, 패턴 형성 장치, 노광 장치 및 노광 방법, 그리고 디바이스 제조 방법
JP4962773B2 (ja) * 2007-02-05 2012-06-27 株式会社ニコン エンコーダ
EP2075263A1 (de) * 2007-12-17 2009-07-01 Lanxess Inc. Hydrierung eines dien-basierten Polymer-Latexes
EP2072535A1 (de) * 2007-12-17 2009-06-24 Lanxess Inc. Hydrierung eines dien-basierten Polymer-Latexes
US11499848B2 (en) * 2016-03-31 2022-11-15 Pixart Imaging Inc. Marker product and related optical detection system
CN110389235B (zh) * 2018-04-18 2021-10-08 原相科技股份有限公司 标记产品及其相关光学侦测系统
CN111656283B (zh) * 2019-01-03 2021-09-14 京东方科技集团股份有限公司 模板制备方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4286871A (en) * 1980-08-11 1981-09-01 Keuffel & Esser Company Photogrammetric measuring system
JPS57157118A (en) * 1981-03-24 1982-09-28 Mitsutoyo Mfg Co Ltd Photoelectric type displacement detecting device
FR2504256A1 (fr) * 1981-04-16 1982-10-22 Euromask Procede et dispositif de mesure optique de deplacement et application aux photorepeteurs sur tranche
CA1141946A (en) * 1981-08-21 1983-03-01 National Research Council Of Canada Viewing and measuring apparatus
JPS59128519U (ja) * 1983-02-17 1984-08-29 株式会社東芝 位置検出装置
JPH0619280B2 (ja) * 1983-09-24 1994-03-16 名古屋大学長 光学式自動位置決め装置
US4656347A (en) * 1984-01-30 1987-04-07 Nippon Telegraph & Telephone Public Corporation Diffraction grating position adjuster using a grating and a reflector
NL8502679A (nl) * 1985-10-01 1987-05-04 Philips Nv Optisch omzetelement en verplaatsingsmeter voorzien van dit element.
JPS62132104A (ja) * 1985-12-04 1987-06-15 Futaba Corp 測長装置
DE3786497T2 (de) * 1986-07-18 1994-02-17 Nippon Electric Co Doppelbrechendes Beugungsgitter und optischer Kopf, in welchem ein linearpolarisierter Strahl auf dieses Gitter gelenkt wird.
US4705996A (en) * 1986-10-03 1987-11-10 Greyhawk Systems Apparatus for positioning a rotating element
EP0330150B1 (de) * 1988-02-22 1993-05-05 Victor Company Of Japan, Limited Detektorsystem mit einem optischen rotierenden Kodierer zur Feststellung der Verschiebung einer beweglichen Vorrichtung

Also Published As

Publication number Publication date
DE69011918T2 (de) 1995-01-05
EP0390092B1 (de) 1994-08-31
EP0390092A3 (de) 1991-03-06
US5021649A (en) 1991-06-04
DE69011918T3 (de) 2004-07-22
EP0390092A2 (de) 1990-10-03
EP0390092B2 (de) 2004-01-07

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Legal Events

Date Code Title Description
8363 Opposition against the patent
8366 Restricted maintained after opposition proceedings
8339 Ceased/non-payment of the annual fee