CN217202952U

CN217202952U - CVD and PECVD composite coating equipment

Info

Publication number: CN217202952U
Application number: CN202220326254.2U
Authority: CN
Inventors: 吴攀; 任泽明; 廖骁飞; 余长勇; 王号; 唐志奇; 杨帆; 杨进仕
Original assignee: Guangdong Suqun Industrial Co ltd
Current assignee: Guangdong Suqun Industrial Co ltd
Priority date: 2022-02-17
Filing date: 2022-02-17
Publication date: 2022-08-16
Anticipated expiration: 2032-02-17

Abstract

The utility model discloses a CVD and PECVD composite coating equipment, it includes the coating machine case, a plurality of evaporation boats, the electrode, air exhaust mechanism, evaporation chamber and pyrolysis chamber, the coating machine incasement is equipped with the coating film cavity, the electrode is installed in the coating film cavity, a plurality of evaporation boats are installed in the coating film cavity with longitudinal arrangement, air exhaust mechanism and coating film cavity intercommunication, air exhaust mechanism is arranged in outwards taking out the gas in the coating film cavity persistently, the evaporation chamber is linked together with the pyrolysis chamber, the pyrolysis chamber is linked together with the coating film cavity, the evaporation chamber heats the polymer coating material sublimation and gasification is gaseous coating material, the pyrolysis chamber is the free radical material with the gaseous coating material schizolysis that spreads into, the evaporation boat heats the evaporation material of input and obtains reaction gas, form plasma after the reaction gas is ionized by the electrode. The utility model discloses a compound coating equipment can plate out the rete of double-deck different materials on the product.

Description

CVD and PECVD composite coating equipment

Technical Field

The utility model relates to a coating equipment field especially relates to a CVD and compound coating equipment of PECVD.

Background

Chemical Vapor Deposition (CVD) is a process of generating solid deposits by chemical reaction of gaseous substances on the surface of a substrate, and is currently the most commonly used method for obtaining large-area thin films. CVD coating equipment is equipment for realizing chemical vapor deposition on the surface of a substrate. Plasma Enhanced Chemical Vapor Deposition (PECVD) is a process method of ionizing reaction gas containing film composition atoms into plasma by means of microwave or radio frequency and the like, and depositing a desired film on a substrate by reaction by utilizing the characteristic of strong chemical activity of the plasma. PECVD coating equipment is equipment for realizing plasma enhanced chemical deposition on the surface of a substrate. The existing CVD coating equipment and PECVD coating equipment are two independent equipment, and a single-layer material film can be coated on the surface of a substrate by using the CVD coating equipment or the PECVD coating equipment, so that a composite double-layer film cannot be coated according to production requirements.

Therefore, there is a need for a CVD and PECVD composite coating apparatus capable of coating a double layer of different materials on a product to overcome the above-mentioned drawbacks.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a can plate out the CVD and the compound coating equipment of the rete of double-deck different materials on the product and PECVD.

In order to realize the above-mentioned purpose, the utility model discloses a CVD and PECVD composite coating equipment includes the coating machine case, a plurality of evaporation boats, the electrode, air exhaust mechanism, evaporation chamber and pyrolysis chamber, the coating machine incasement is equipped with the coating film cavity, the electrode is installed in the coating film cavity, a plurality of evaporation boats are installed in the coating film cavity with longitudinal arrangement, air exhaust mechanism and coating film cavity intercommunication, air exhaust mechanism is arranged in outwards taking out the gas in the coating film cavity persistently, the evaporation chamber is linked together with the pyrolysis chamber, the pyrolysis chamber is linked together with the coating film cavity, the evaporation chamber heats the sublimation of polymer coating material and gasifies to gaseous coating material, the pyrolysis chamber is the pyrolysis of gaseous coating material that spreads into free radical material, the evaporation boat heats the evaporation material of input and obtains reaction gas, reaction gas is formed plasma after the ionization of electrode.

Preferably, the evaporation chamber and the cracking chamber are arranged at the top of the film coating machine box, and the cracking chamber is communicated with the top of the film coating chamber through a first pipeline.

Preferably, the evaporation chamber is communicated with the cracking chamber through a second pipeline, and a first electromagnetic valve is installed on the second pipeline.

Preferably, the coating machine case is further provided with an evaporation cavity, the evaporation cavity and the coating cavity are arranged in a spaced mode, an air outlet is formed in the evaporation cavity, the evaporation cavity is communicated with the coating cavity through the air outlet, and the evaporation boat is arranged in the evaporation cavity.

Preferably, the coating machine case is recessed inwards to form an evaporation cavity, and a partition board is installed in the coating cavity and separates the coating cavity from the evaporation cavity.

Preferably, the CVD and PECVD compliant coating apparatus of the present invention further comprises a blowing device disposed in the evaporation chamber, the blowing device being adapted to blow off inert gas so that the reaction gas obtained by evaporation is mixed with the inert gas and flows out of the gas outlet.

Preferably, the blowing device comprises a blowing pipe, the blowing pipe is arranged in the evaporation cavity, and a plurality of blowing holes are formed in the blowing pipe.

Preferably, the utility model discloses a CVD and PECVD accord with coating film equipment and still include revolution and rotation drive arrangement and coating film carrier, and revolution and rotation drive arrangement installs in the coating film cavity, and the coating film carrier is detachably and installs in revolution and rotation drive arrangement, and revolution and rotation drive arrangement orders about the coating film carrier and carries out revolution and rotation.

Preferably, the air pumping mechanism comprises a first pumping pipeline, a second pumping pipeline, a cold trap device, a roots pump and a rotary vane pump, wherein the first end of the first pumping pipeline is communicated with the bottom of the coating chamber, the second end of the first pumping pipeline is communicated with the input end of the roots pump, the first end of the second pumping pipeline is communicated with the lateral part of the coating chamber, the second end of the second pumping pipeline is communicated with the input end of the roots pump, the output end of the roots pump is communicated with the input end of the rotary vane pump, and the cold trap device is installed on the first pumping pipeline.

Preferably, the air pumping mechanism further comprises an oil mist filter, the oil mist filter is mounted at the output end of the rotary vane pump, the output end of the oil mist filter is communicated with a tail gas filtering device, the first pumping pipeline is provided with a second battery valve, and the second pumping pipeline is provided with a third electromagnetic valve.

Compared with the prior art, the evaporation chamber is communicated with the cracking chamber, the cracking chamber is communicated with the coating cavity, the evaporation chamber heats and sublimates the high polymer coating material to gasify the high polymer coating material into a gaseous coating material, the cracking chamber cracks the introduced gaseous coating material into free radical materials, and the CVD coating is carried out after the free radicals are attached to a product placed in the coating cavity. The evaporation boat heats the input evaporation material to obtain reaction gas, the reaction gas is ionized by the electrode to form plasma, and the plasma is attached to a product placed in the coating chamber and then subjected to PECVD coating. Therefore, the composite coating equipment of the utility model can carry out CVD coating and PECVD coating on the product in the same equipment. In practical application, two film layers can be sequentially plated on a product in the same equipment, so that the surface of the product has better performance.

Drawings

FIG. 1 is a perspective view of the CVD and PECVD composite coating apparatus when the side door structure is opened.

FIG. 2 is a perspective view of the CVD and PECVD composite coating apparatus shown in FIG. 1 after hiding the coating carrier.

FIG. 3 is a perspective view of the CVD and PECVD composite coating apparatus shown in FIG. 2 with the partition plate further hidden.

FIG. 4 is a perspective view of the CVD and PECVD composite coating apparatus shown in FIG. 1 at another angle.

FIG. 5 is a perspective view of the CVD and PECVD composite coating apparatus shown in FIG. 1 at yet another angle.

FIG. 6 is a side view of a CVD and PECVD composite coating apparatus.

Fig. 7 is a sectional view taken along the line a-a in fig. 6.

FIG. 8 is a top view of a CVD and PECVD composite coating apparatus.

Fig. 9 is a sectional view taken along the line B-B in fig. 8.

Detailed Description

In order to explain technical contents and structural features of the present invention in detail, the following description is made with reference to the embodiments and the accompanying drawings.

As shown in fig. 1 to 5, the CVD and PECVD composite coating apparatus 100 of the present invention comprises a coating machine case 10, a plurality of evaporation boats 20, an electrode 30, an air-extracting mechanism 40, an evaporation chamber 50 and a cracking chamber 60. The coating machine case 10 is internally provided with a coating chamber 11, the electrode 30 is arranged in the coating chamber 11, the evaporation boats 20 are longitudinally arranged in the coating chamber 11, the air exhaust mechanism 40 is communicated with the coating chamber 11, and the air exhaust mechanism 40 is used for continuously exhausting the gas in the coating chamber 11 outwards. The evaporation chamber 50 is communicated with the cracking chamber 60, the cracking chamber 60 is communicated with the coating chamber 11, the high polymer coating material is heated and sublimated by the evaporation chamber 50 to be gasified into a gaseous coating material, the introduced gaseous coating material is cracked into free radical material by the cracking chamber 60, and the CVD coating is carried out after the free radical is attached to a product placed in the coating chamber 11. The evaporation boat 20 heats the input evaporation material to obtain a reaction gas, the reaction gas is ionized by the electrode 30 to form a plasma, and the plasma is attached to a product placed in the coating chamber 11 to perform PECVD coating. Therefore, the composite coating equipment 100 of the utility model can be used for carrying out CVD coating and PECVD coating on products in the same equipment. In practical application, two film layers can be sequentially plated on a product in the same equipment, so that the surface of the product has better performance. For example, a polymer film layer can be coated on the surface of a product by CVD, and then a hydrophobic film layer can be coated on the surface of the product by PECVD, so that the surface of the product has certain waterproof and hydrophobic properties.

It should be noted that, during the CVD coating, the evaporation boat 20 and the electrode 30 are in the closed state, and during the PECVD coating, the evaporation chamber 50 and the cracking chamber 60 are in the closed state, that is, only one of the CVD coating and the PECVD coating can be performed. Preferably, the utility model discloses be equipped with 5 evaporation boat 20, every evaporation boat 20 all communicates a peristaltic pump (not shown in the figure), and a peristaltic pump intercommunication loading has evaporation material's raw material bottle, carries evaporation boat 20 through the evaporation material of peristaltic pump in with raw material bottle. The electrode 30 is a radio frequency electrode, but is not limited thereto. The 5 evaporation boats 20 are arranged in the coating chamber 11 at equal intervals in the longitudinal direction, the distribution of the reaction gas in the longitudinal direction is basically uniform, the consistency of the film thickness among different layers can be ensured, and the uniformity of the coated product is better.

As shown in fig. 1 to 5, the evaporation chamber 50 and the pyrolysis chamber 60 are installed on the top of the coating machine box 10, the pyrolysis chamber 60 is communicated with the top of the coating chamber 11 through a first pipe 70, and the dissociated free-base materials are settled from the top of the coating chamber 11 and are coated more uniformly. The evaporation chamber 50 and the cracking chamber 60 are conventional devices, and the structure of the two devices is well known to those skilled in the art, so that the detailed description thereof is omitted. Preferably, the evaporation chamber 50 is in communication with the cracking chamber 60 through a second conduit 80, and the second conduit 80 is provided with a first solenoid valve 81. The first solenoid valve 81 functions to open or close the CVD function module.

As shown in fig. 1 to 9, an evaporation chamber 12 is further disposed in the coating machine box 10. The evaporation cavity 12 and the coating cavity 11 are arranged in a separated manner, an airflow outlet 13 is arranged in the evaporation cavity 12, the evaporation cavity 12 is communicated with the coating cavity 11 through the airflow outlet 13, and the evaporation boat 20 is arranged in the evaporation cavity 12. The evaporation cavity 12 can intensively accumulate the reaction gas obtained by evaporation, so that the reaction gas can intensively flow out through the airflow outlet 13, and the ionization is convenient. Further, the coating machine case 10 is recessed inwards to form an evaporation cavity 12, and the evaporation cavity 12 provides a space for accommodating the evaporation boat 20, so as to avoid affecting coating. Install a baffle 14 in the coating chamber 11, baffle 14 separates coating chamber 11 and evaporation chamber 12 mutually, receives stopping of baffle 14, and reactant gas can not directly overflow to coating chamber 11, and because the temperature when evaporation boat 20 heats is higher, produces "burst" phenomenon easily moreover, because the temperature is high in the evaporation process promptly, evaporating material can sputter little micelle (nongaseous), and little micelle can not directly sputter coating chamber 11 by stopping of baffle 14, avoids sputtering on the product. Preferably, three sides of the partition board 14 far away from the electrode 30 are connected to the wall of the coating chamber 11, and the side of the partition board 14 near the electrode 30 deviates from the wall of the coating chamber 11 and encloses the gas outlet 13 with the wall of the coating chamber 11.

As shown in fig. 6 to 9, the composite coating apparatus 100 of the present invention further includes a blowing device 90. The blowing device 90 is provided in the evaporation chamber 12, and the blowing device 90 is adapted to blow out an inert gas so that the reaction gas obtained by evaporation flows out of the gas outlet 13 together with the inert gas. After the blowing device 90 blows out the inert gas, the reaction gas is conveniently led out of the gas outlet 13, and accumulation is avoided. And the inert gas is ionized by the electrode 30 to generate inert plasma, a plasma environment is provided, weak groups, adsorption molecules and the like are bombarded and combined by the inert plasma, and the plasma energy provided by the inert plasma is utilized to repair dangling bonds, so that the uniformity, the stability and the compactness of the film are enhanced. For example, the inert gas may be argon (Ar), helium (He), xenon (Xe), neon (Ne), or hydrogen (H) ₂ ) Nitrogen (N) ₂ ) Or any combination thereof.

In particular, the blowing device 90 comprises a blowing tube 91. The blowing pipe 91 is arranged in the evaporation cavity 12, and a plurality of blowing holes 911 are formed in the blowing pipe 91. Further, the blowing pipe 91 extends in the longitudinal direction, and the blowing pipe 91 is provided on the side of the evaporation boat 20. The number of the blowing holes 911 is 7, and the blowing holes 911 are arranged at equal intervals on the blowing pipe 91, but is not limited thereto. So that the air flow is more uniformly discharged. Preferably, the blowing device 90 is further adapted to blow out different gases (substances), specifically, one end of the blowing tube 91 extends out of the coating machine case 10, and the extended end of the blowing tube 91 is divided into 3 paths, wherein one path is used for abutting against the inert gas bottle, the other path is used for abutting against the oxygen bottle, the remaining path is used for abutting against the storage bottle 92 storing the volatile reaction gas, when the evaporation boat 20 is not used to generate the reaction gas, the volatile reaction gas can be discharged through the storage bottle 92, and the reaction gases with different characteristics can be input according to different requirements, so as to plate out films with different characteristics on the product.

As shown in fig. 1 to 8, the composite coating apparatus 100 of the present invention further includes a rotation and revolution driving device 01 and a coating carrier 02. The revolution and rotation driving device 01 is arranged in the coating cavity 11, the coating carrier 02 is detachably arranged on the revolution and rotation driving device 01, and the revolution and rotation driving device 01 drives the coating carrier 02 to revolve and rotate. The revolution and rotation driving device 01 and the coating carrier 02 may be of conventional structures, and since the structures of the revolution and rotation driving device 01 and the coating carrier 02 are well known to those skilled in the art, they will not be described herein again. The coating carrier 02 is detachably mounted on the revolution and rotation driving device 01 so as to facilitate the loading and unloading of products. The revolution and rotation driving device 01 drives the coating carrier 02 to revolve and rotate, and the plasma deposits a film on the surface of the product, so that the consistency of the film thickness of the inner product and the film thickness of the outer product in the same layer is ensured.

In the utility model discloses in, the product that will process is electronic product, like cell-phone, flat board, earphone etc. but not only be limited to above structural style. It should be noted that the filming cabinet 10 is provided with a side-opening door structure 15. The coating cavity 11 can be opened by opening the side door structure 15, the coating carrier 02 can be conveniently put in or taken out for loading or unloading, and the coating cavity 11 is closed by closing the side door structure 15 for coating processing.

As shown in fig. 1 to 6 and 8, the air-extracting mechanism 40 includes a first pumping line 41, a second pumping line 42, a cold trap device 43, a roots pump 44, and a vane pump 45. The first end of the first pumping pipeline 41 is communicated with the bottom of the coating chamber 11, the second end of the first pumping pipeline 41 is communicated with the input end of the roots pump 44, the first end of the second pumping pipeline 42 is communicated with the side part of the coating chamber 11, the second end of the second pumping pipeline 42 is communicated with the input end of the roots pump 44, the output end of the roots pump 44 is communicated with the input end of the rotary vane pump 45, and the cold trap device 43 is installed on the first pumping pipeline 41. The use of the roots pump 44 and the rotary vane pump 45 provides a greater suction force to draw air outwardly quickly and efficiently. After the CVD module is used for coating, the Roots pump 44 and the rotary vane pump 45 are started, the waste gas is pumped out through the first pumping pipeline 41, and free radicals in the waste gas are cooled and settled after passing through the cold trap device 43, so that direct discharge is avoided. After coating with the PECVD module, the roots pump 44 and the vane pump 45 are turned on and the exhaust gas is pumped through the second pumping line 42.

Further, the air extracting mechanism 40 further comprises an oil mist filter 46, the oil mist filter 46 is installed at the output end of the rotary vane pump 45, and the output end of the oil mist filter 46 is communicated with a tail gas filtering device (not shown). The oil mist filter 46 removes oil mist from the extracted exhaust gas, and the exhaust gas then flows through a tail gas filter to filter the exhaust gas, so that the discharged exhaust gas meets the environmental requirements. The first pumping pipeline 41 is provided with a second electromagnetic valve 03, and the second pumping pipeline 42 is provided with a third electromagnetic valve 04. After the CVD module is used for coating, the roots pump 44 and the vane pump 45 are turned on, and the third solenoid valve 04 is turned off, so that the exhaust gas is prevented from flowing into the coating chamber 11 through the second pumping pipe 42. After the PECVD module is used for coating, the roots pump 44 and the rotary vane pump 45 are started, and the second electromagnetic valve 03 is closed, so that waste gas is prevented from flowing into the coating chamber 11 through the first pumping pipeline 41.

The working process of the CVD and PECVD composite coating apparatus 100 of the present invention (taking the coating of a double layer film on a product as an example) is described as follows: the product is placed on the film coating carrier 02, after the side-opening door structure 15 is opened, the film coating carrier 02 is placed on the revolution and rotation driving device 01, and then the side-opening door structure 15 is closed. The first electromagnetic valve 81 is opened, the third electromagnetic valve 04 is closed, the roots pump 44 and the rotary vane pump 45 are opened, the high-molecular coating material is heated and sublimated by the evaporation chamber 50 to be gasified into a gaseous coating material, the introduced gaseous coating material is cracked into free-radical material by the cracking chamber 60, the CVD coating of the first layer is carried out after the free-radical material is attached to the product, and during the coating, the waste gas is pumped out through the first pumping pipeline 41. After coating, the first electromagnetic valve 81 is closed, a period of time is waited, and the second electromagnetic valve 03 is closed after the residual waste gas in the coating chamber 11 is pumped out.

Then, the second electromagnetic valve 04 is opened, the first electromagnetic valve 81 and the second electromagnetic valve 03 are kept closed, the roots pump 44 and the rotary vane pump 45 are kept open, the electrode 30 is electrified, the evaporation material is input into the evaporation boat 20 through the peristaltic pump, the evaporation boat 20 heats the evaporation material to obtain reaction gas, the injection pipe 91 is connected with the argon bottle, the argon flows out through the injection hole 911 and then is mixed with the reaction gas to flow out of the gas outlet 13, when the argon flows to the front of the electrode 30, the electrode 30 ionizes the reaction gas into plasma, the argon is ionized into argon plasma, the plasma is attached to the surface of the product, after a period of time, a film layer is formed on the surface of the product, and the PECVD film coating of the second layer is carried out. During coating, exhaust gas is pumped out through the second pumping duct 42. After the coating, the exhaust gas remaining in the coating chamber 11 is pumped out, and then the roots pump 44, the rotary vane pump 45 and the third electromagnetic valve 04 are closed.

The above disclosure is only a preferred embodiment of the present invention, and the scope of the claims of the present invention should not be limited thereby, and all the equivalent changes made in the claims of the present invention are intended to be covered by the present invention.

Claims

1. A CVD and PECVD composite coating equipment is characterized in that: the device comprises a coating machine case, a plurality of evaporation boats, electrodes, an air exhaust mechanism, an evaporation chamber and a cracking chamber, wherein a coating cavity is arranged in the coating machine case, the electrodes are arranged in the coating cavity, the evaporation boats are longitudinally arranged and are arranged in the coating cavity, the air exhaust mechanism is communicated with the coating cavity, the air exhaust mechanism is used for continuously exhausting gas in the coating cavity outwards, the evaporation chamber is communicated with the cracking chamber, the cracking chamber is communicated with the coating cavity, the evaporation chamber heats and sublimates a high polymer coating material to gasify the high polymer coating material into a gaseous coating material, the cracking chamber cracks the introduced gaseous coating material into a free base material, the evaporation boats heat the input evaporation material to obtain reaction gas, and the reaction gas is ionized by the electrodes to form plasma.

2. The CVD and PECVD composite coating device of claim 1, wherein the evaporation chamber and the cracking chamber are arranged at the top of the coating cabinet, and the cracking chamber is communicated with the top of the coating chamber through a first pipeline.

3. The CVD and PECVD composite coating device of claim 1, wherein the evaporation chamber is communicated with the cracking chamber through a second pipeline, and a first electromagnetic valve is arranged on the second pipeline.

4. The CVD and PECVD composite coating device of claim 1, wherein the coating machine case is further provided with an evaporation chamber, the evaporation chamber is arranged to be separated from the coating chamber, an air outlet is arranged in the evaporation chamber, the evaporation chamber is communicated with the coating chamber through the air outlet, and the evaporation boat is arranged in the evaporation chamber.

5. The CVD and PECVD composite coating device of claim 4, wherein the coating machine case is recessed inwards to form the evaporation cavity, and a partition plate is arranged in the coating cavity and separates the coating cavity from the evaporation cavity.

6. The CVD and PECVD composite coating apparatus of claim 4, further comprising a blowing device disposed in the evaporation chamber, wherein the blowing device is adapted to blow an inert gas so that the reaction gas obtained by evaporation is mixed with the inert gas and flows out of the gas flow outlet.

7. The CVD and PECVD composite coating device according to claim 6, wherein the blowing device comprises a blowing tube, the blowing tube is arranged in the evaporation cavity, and a plurality of blowing holes are formed on the blowing tube.

8. The CVD and PECVD composite coating device of claim 1, further comprising a revolution and rotation driving device and a coating carrier, wherein the revolution and rotation driving device is installed in the coating chamber, the coating carrier is detachably installed on the revolution and rotation driving device, and the revolution and rotation driving device drives the coating carrier to revolve and rotate.

9. The CVD and PECVD composite coating apparatus of claim 1, wherein the pumping mechanism comprises a first pumping line, a second pumping line, a cold trap device, a roots pump and a vane pump, a first end of the first pumping line communicates with the bottom of the coating chamber, a second end of the first pumping line communicates with an input end of the roots pump, a first end of the second pumping line communicates with a side of the coating chamber, a second end of the second pumping line communicates with an input end of the roots pump, an output end of the roots pump communicates with an input end of the vane pump, and the cold trap device is mounted to the first pumping line.

10. The CVD and PECVD composite coating device according to claim 9, wherein the air pumping mechanism further comprises an oil mist filter, the oil mist filter is installed at the output end of the rotary vane pump, the output end of the oil mist filter is communicated with a tail gas filtering device, the first pumping pipeline is provided with a second electromagnetic valve, and the second pumping pipeline is provided with a third electromagnetic valve.