CN202420706U - Noble-metal thermocouple for semiconductor diffusion furnace - Google Patents
Noble-metal thermocouple for semiconductor diffusion furnace Download PDFInfo
- Publication number
- CN202420706U CN202420706U CN2012200196028U CN201220019602U CN202420706U CN 202420706 U CN202420706 U CN 202420706U CN 2012200196028 U CN2012200196028 U CN 2012200196028U CN 201220019602 U CN201220019602 U CN 201220019602U CN 202420706 U CN202420706 U CN 202420706U
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- noble
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- metal thermocouple
- protection tube
- diffusion furnace
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Abstract
The utility model relates to the technical field of temperature measurement sensors, and in particular relates to a noble-metal thermocouple for a semiconductor diffusion furnace. The noble-metal thermocouple for the semiconductor diffusion furnace consists of a thermo wire, an insulating protection tube and a wiring box, wherein the thermo wire is arranged in the insulating protection tube, one end of the insulating protection tube is connected with the wiring box, a ceramic tube is used as the insulating protection tube and externally provided with a high temperature-resistant protection sleeve, a quartz sleeve is used as the high temperature-resistant protection sleeve, stainless steel joints are arranged at the ceramic tube, the quartz sleeve and the node at the tail end of the thermo wire, a filler is arranged at the stainless steel joint, and the ceramic tube is fixedly connected with the quartz sleeve. The noble-metal thermocouple for the semiconductor diffusion furnace not only has long service life, but also is high in temperature measurement accuracy, and plays a great role in accurately controlling the production technique, thus realizing promotion on yield, and improving the yield and quality.
Description
[technical field]
The utility model relates to the sensor for measuring temperature technical field, and specifically semiconductor diffuse kiln is used noble-metal thermocouple.
[background technology]
Noble-metal thermocouple is a kind of of sensor for measuring temperature, has high temperature resistant, specious, chemical property stable properties, is widely used in manufacturing industry, industries such as chemical industry.In semiconductor diffuse kiln equipment, technological temperature is very high, can reach 1300 degrees centigrade, needs to use noble-metal thermocouple as temperature element.Traditional used noble-metal thermocouple of semiconductor diffuse kiln equipment is referred to as the diffusion furnace thermopair; Generally only adopt alundum tube to do insulation, it is worked under condition of high temperature in the diffusion furnace cavity for a long time, owing in the stove reducibility gas is arranged; The at high temperature easy and thermo wires reaction of this reducibility gas; Make the thermo wires surface produce thin film, and then cause the thermo wires composition to change, and cause temperature measurement accuracy to descend.And when diffusion furnace equipment heated up cooling, this film fusing point was different with the thermo wires fusing point, caused the thermo wires surface to produce stress, caused thermo wires to become fragile, even fracture, greatly reduced the life-span of thermo wires.
[utility model content]
The purpose of the utility model is exactly will solve above-mentioned deficiency and provide that a kind of temperature measurement accuracy is high, the semiconductor diffuse kiln of long service life is used noble-metal thermocouple.
For realizing that above-mentioned purpose designs a kind of semiconductor diffuse kiln and uses noble-metal thermocouple; Comprise thermo wires, insulation protection tube and terminal box; Said thermo wires is arranged in the insulation protection tube, and an end of said insulation protection tube connects terminal box, and said insulation protection tube is a ceramic pipe; Said ceramic pipe is provided with high temperature resistant protective casing outward; Said high temperature resistant protective casing is a quartz socket tube, and the node place of said ceramic pipe, quartz socket tube and thermo wires tail end is provided with stainless joint, and said ceramic pipe is fixedly connected with quartz socket tube.
Said stainless joint place is provided with filling agent.
Said thermo wires is a platinum-rhodium wire.
The utility model is compared with prior art, and novel structure, simple is owing to be provided with quartz socket tube outside ceramic pipe; And set up stainless joint, and be provided with filling agent at the stainless joint place, thus guaranteed that ceramic pipe is connected with the tight of quartz socket tube; Avoided reducibility gas and thermo wires to react; Long service life not only, and make the temperature measurement accuracy of diffusion furnace thermopair be greatly improved, great role is played in the accurate control of production technology; Thereby realized the lifting of yields, improved output and quality.
[description of drawings]
Fig. 1 is the structural representation of the utility model;
Fig. 2 is the structural representation of ceramic pipe in the utility model;
Among the figure: 1, ceramic pipe 2, quartz socket tube 3, stainless joint 4, terminal box.
[embodiment]
Further specify below below in conjunction with accompanying drawing the utility model being done:
Shown in accompanying drawing, the utility model comprises: thermo wires, insulation protection tube and terminal box 4, said thermo wires are platinum-rhodium wire; Said thermo wires is arranged in the insulation protection tube; One end of said insulation protection tube connects terminal box, and said insulation protection tube is a ceramic pipe 1, and said ceramic pipe is provided with high temperature resistant protective casing outward; Said high temperature resistant protective casing is a quartz socket tube 2; The node place of said ceramic pipe, quartz socket tube and thermo wires tail end is provided with stainless joint 3, and said stainless joint place is provided with filling agent, and said ceramic pipe is fixedly connected with quartz socket tube.
In the utility model; According to the deficiency that exists in traditional semiconductor diffuse kiln thermopair use; Mainly from avoiding this aspect of diffusion furnace thermopair contact reducibility gas to start with; The outside that can resistant to elevated temperatures quartz socket tube be set in ceramic pipe, and ceramic pipe is fixedly connected with quartz socket tube, stainless joint increased at the node place of ceramic pipe and thermopair thermo wires buttock line.But because ceramic pipe is not tight with being connected of quartz socket tube; Under hot environment, also have the slit and produce, reducibility gas still can get into; So make of industrial renovation agent at the stainless joint place and repair to fill, make diffusion furnace thermopair buttock line with the thermo wires of forward part in an airtight environment.So both increase hot buffering, guaranteed again that reducibility gas can't touch thermo wires, and avoided thermo wires and reducibility gas to react.
The utility model does not receive the restriction of above-mentioned embodiment; Other any do not deviate from change, the modification done under spirit and the principle of the utility model, substitutes, combination, simplify; All should be the substitute mode of equivalence, be included within the protection domain of the utility model.
Claims (3)
1. a semiconductor diffuse kiln is used noble-metal thermocouple, comprises thermo wires, insulation protection tube and terminal box, and said thermo wires is arranged in the insulation protection tube; One end of said insulation protection tube connects terminal box; It is characterized in that: said insulation protection tube is a ceramic pipe, and said ceramic pipe is provided with high temperature resistant protective casing outward, and said high temperature resistant protective casing is a quartz socket tube; The node place of said ceramic pipe, quartz socket tube and thermo wires tail end is provided with stainless joint, and said ceramic pipe is fixedly connected with quartz socket tube.
2. semiconductor diffuse kiln as claimed in claim 1 is used noble-metal thermocouple, it is characterized in that: said stainless joint place is provided with filling agent.
3. according to claim 1 or claim 2 semiconductor diffuse kiln is used noble-metal thermocouple, and it is characterized in that: said thermo wires is a platinum-rhodium wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200196028U CN202420706U (en) | 2012-01-17 | 2012-01-17 | Noble-metal thermocouple for semiconductor diffusion furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012200196028U CN202420706U (en) | 2012-01-17 | 2012-01-17 | Noble-metal thermocouple for semiconductor diffusion furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202420706U true CN202420706U (en) | 2012-09-05 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2012200196028U Expired - Fee Related CN202420706U (en) | 2012-01-17 | 2012-01-17 | Noble-metal thermocouple for semiconductor diffusion furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202420706U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103759848A (en) * | 2014-02-20 | 2014-04-30 | 北京七星华创电子股份有限公司 | Vertical oxidizing furnace temperature-measuring device used for semiconductor heat treatment |
| CN103759849A (en) * | 2014-01-07 | 2014-04-30 | 镇江市润九仪表有限公司 | Platinum rhodium thermocouple and preparation technology thereof |
| CN111044554A (en) * | 2019-12-27 | 2020-04-21 | 郑州机械研究所有限公司 | Method for testing molten iron cooling curve |
| CN115307759A (en) * | 2022-06-23 | 2022-11-08 | 中国计量科学研究院 | Sleeve type standard thermocouple for noble metal electrode protection |
-
2012
- 2012-01-17 CN CN2012200196028U patent/CN202420706U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103759849A (en) * | 2014-01-07 | 2014-04-30 | 镇江市润九仪表有限公司 | Platinum rhodium thermocouple and preparation technology thereof |
| CN103759849B (en) * | 2014-01-07 | 2017-02-08 | 镇江市润九仪表有限公司 | Platinum rhodium thermocouple and preparation technology thereof |
| CN103759848A (en) * | 2014-02-20 | 2014-04-30 | 北京七星华创电子股份有限公司 | Vertical oxidizing furnace temperature-measuring device used for semiconductor heat treatment |
| CN111044554A (en) * | 2019-12-27 | 2020-04-21 | 郑州机械研究所有限公司 | Method for testing molten iron cooling curve |
| CN115307759A (en) * | 2022-06-23 | 2022-11-08 | 中国计量科学研究院 | Sleeve type standard thermocouple for noble metal electrode protection |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120905 Termination date: 20150117 |
|
| EXPY | Termination of patent right or utility model |