CN205981539U - High temperature resistant type pressure sensor - Google Patents
High temperature resistant type pressure sensor Download PDFInfo
- Publication number
- CN205981539U CN205981539U CN201620881761.7U CN201620881761U CN205981539U CN 205981539 U CN205981539 U CN 205981539U CN 201620881761 U CN201620881761 U CN 201620881761U CN 205981539 U CN205981539 U CN 205981539U
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- China
- Prior art keywords
- high temperature
- temperature resistant
- chip
- resistant type
- type pressure
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model belongs to the automatic control field, concretely relates to high temperature resistant type pressure sensor. A high temperature resistant type pressure sensor, includes base, pin, chip, ceramic pad piece, clamping ring, diaphragm, air duct and gilding kovar, is equipped with air duct and gilding kovar on the base, and the chip glues the middle part of locating the base, is equipped with the ceramic pad piece and welds as filling member, clamping ring and base around the chip, and the diaphragm passes through the clamping ring to be fixed with mutual extrusion of base, and the base is equipped with oil filling hole, pins and this oil filling hole grafting. The utility model discloses a high temperature resistant type pressure sensor has following beneficial effect: 1, simple structure, 2, operating temperature is up to 150 DEG C, very big degree ground has improved the application temperature scope of sensor, has satisfied the high temperature resistant requirement of exchanging the sensilla in some high temperature places.
Description
Technical field
This utility model belongs to automation field and in particular to a kind of high temperature resistant type pressure transducer.
Background technology
Pressure transmitter be widely used in various industry automatic control environment, be related to water conservancy and hydropower, railway traffic, intelligent building,
Produce numerous industries such as automatic control, Aero-Space, military project, petrochemical industry, oil well, electric power, ship, lathe, pipeline.
There is the intrinsic problem forbidden by signal after temperature change due to core component silicon chip in diffusion silicon pressure sensor,
Because conventional rustless steel isolation membrane pressure sensor is using conventional silicone oil, simultaneously in -10～+80 degrees Celsius of Regular temperature ranges
Measure, limit the application of sensor, it is desirable to be able to measure -50～+150 degrees Celsius in emphasis application scenario
The pressure of scope, this patent mainly measures silicon chip and silicone oil, pedestal etc. zero using the semiconductor pressure that can bear this high temperature
Part and auxiliary material, carry out test calibration in this temperature range, thus produce can resistant to elevated temperatures pressure transducer, than
The measurement ranges such as strain pressure transducer, sputtered thin film pressure transducer expand more than 100 kPas to from more than 1 MPa range
Range, expands the application of sensor.
At present, the equal non-refractory of existing pressure transmitter, when pressure transducer works below 85 DEG C, properties are joined
Number all meets the requirements, stable performance, but when operating temperature is more than 85 DEG C, the performance of pressure sensing line and sealing will not
Stable, or even cause sensor degradation.
Utility model content
Utility model purpose：The problem that this utility model is directed to above-mentioned prior art presence makes improvement, and that is, this practicality is new
Type discloses a kind of high temperature resistant type pressure transducer.
Technical scheme：A kind of high temperature resistant type pressure transducer, including pedestal, pin, chip, ceramic gasket, pressure ring, film
Piece, airway and gold-plated kovar,
Described pedestal is provided with described airway and described gold-plated kovar,
Described chip glues located at the middle part of pedestal, is formed around described ceramic gasket as filling member in described chip,
Described pressure ring mutually extrudes fixation with described pedestal welding, described diaphragm by described pressure ring and described pedestal,
Described pedestal is provided with oil-filled hole, described pin and this oil-filled hole grafting.
Further, described chip is MEMS pressure sensor chip.
Further, described pedestal is provided with described airway and described gold-plated kovar by way of sintering.
Beneficial effect：Disclosed in this utility model, a kind of high temperature resistant type pressure transducer has the advantages that：
1st, structure is simple；
2nd, up to 150 DEG C of operating temperature, dramatically improve the use temperature range of sensor, meet some high
Thermal field high temperature resistant requirement to sensor.
Brief description
Fig. 1 is a kind of structural representation of high temperature resistant type pressure transducer disclosed in this utility model；
Wherein：
1- pedestal 2- pin
3- chip 4- ceramic gasket
5- pressure ring 6- diaphragm
The gold-plated kovar of 7- airway 8-
Specific embodiment：
Below specific embodiment of the present utility model is described in detail.
As shown in figure 1, a kind of high temperature resistant type pressure transducer, including pedestal 1, pin 2, chip 3, ceramic gasket 4, pressure ring
5th, diaphragm 6, airway 7 and gold-plated kovar 8,
Pedestal 1 is provided with airway 7 and gold-plated kovar 8,
Chip 3 glues located at the middle part of pedestal 1, is formed around ceramic gasket 4 as filling member in chip 3,
Pressure ring 5 is welded with pedestal 1, and diaphragm 6 passes through pressure ring 5 and mutually extrudes fixation with pedestal 1,
Pedestal 1 is provided with oil-filled hole, pin 2 and this oil-filled hole grafting.
Further, chip 3 is MEMS pressure sensor chip.
Further, pedestal 1 is provided with airway 7 and gold-plated kovar 8 by way of sintering.
Above embodiment of the present utility model is elaborated.But this utility model is not limited to above-mentioned enforcement
Mode, in the ken that art those of ordinary skill possesses, can also be without departing from this utility model ancestor
Make a variety of changes on the premise of purport.
Claims (3)
1. a kind of high temperature resistant type pressure transducer is it is characterised in that include pedestal, pin, chip, ceramic gasket, pressure ring, film
Piece, airway and gold-plated kovar,
Described pedestal is provided with described airway and described gold-plated kovar,
Described chip glues located at the middle part of pedestal, is formed around described ceramic gasket as filling member in described chip,
Described pressure ring mutually extrudes fixation with described pedestal welding, described diaphragm by described pressure ring and described pedestal,
Described pedestal is provided with oil-filled hole, described pin and this oil-filled hole grafting.
2. a kind of high temperature resistant type pressure transducer according to claim 1 is it is characterised in that described chip is MEMS pressure
Sensor chip.
3. a kind of high temperature resistant type pressure transducer according to claim 1 is it is characterised in that pass through sintering on described pedestal
Mode be provided with described airway and described gold-plated kovar.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620881761.7U CN205981539U (en) | 2016-08-15 | 2016-08-15 | High temperature resistant type pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620881761.7U CN205981539U (en) | 2016-08-15 | 2016-08-15 | High temperature resistant type pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205981539U true CN205981539U (en) | 2017-02-22 |
Family
ID=59977832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620881761.7U Expired - Fee Related CN205981539U (en) | 2016-08-15 | 2016-08-15 | High temperature resistant type pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205981539U (en) |
-
2016
- 2016-08-15 CN CN201620881761.7U patent/CN205981539U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170222 Termination date: 20180815 |