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CN1668929A - A device for electrically connecting a test component to a testing machine to test electronic circuits on the test component - Google Patents

A device for electrically connecting a test component to a testing machine to test electronic circuits on the test component Download PDF

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Publication number
CN1668929A
CN1668929A CNA038166755A CN03816675A CN1668929A CN 1668929 A CN1668929 A CN 1668929A CN A038166755 A CNA038166755 A CN A038166755A CN 03816675 A CN03816675 A CN 03816675A CN 1668929 A CN1668929 A CN 1668929A
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China
Prior art keywords
contactor
card extender
electric
test
assembly
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Granted
Application number
CNA038166755A
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Chinese (zh)
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CN100523826C (en
Inventor
D·P·,Ⅱ里士满
J·约万诺维奇
F·O·乌厄
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Aehr Test Systems Inc
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Aehr Test Systems Inc
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Priority claimed from US10/197,104 external-priority patent/US6867608B2/en
Priority claimed from US10/197,133 external-priority patent/US6853209B1/en
Application filed by Aehr Test Systems Inc filed Critical Aehr Test Systems Inc
Publication of CN1668929A publication Critical patent/CN1668929A/en
Application granted granted Critical
Publication of CN100523826C publication Critical patent/CN100523826C/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • G01R1/07307Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card
    • G01R1/07364Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch
    • G01R1/07378Multiple probes with individual probe elements, e.g. needles, cantilever beams or bump contacts, fixed in relation to each other, e.g. bed of nails fixture or probe card with provisions for altering position, number or connection of probe tips; Adapting to differences in pitch using an intermediate adapter, e.g. space transformers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • G01R1/073Multiple probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2886Features relating to contacting the IC under test, e.g. probe heads; chucks
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851Testing of integrated circuits [IC]
    • G01R31/2855Environmental, reliability or burn-in testing
    • G01R31/286External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863Contacting devices, e.g. sockets, burn-in boards or mounting fixtures

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

In one embodiment, the invention provides a test assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component. The assembly comprises a contactor assembly to interconnect with the test component, a probe assembly to mechanically support the contactor assembly and electrically connect the contactor assembly to the testing machine, and a clamping mechanism comprising a first clamping member and a second clamping member, the clamping members being urged together to exert a clamping force to deform contactor bumps of an electrical connection between the probe assembly and the contactor assembly.

Description

一种将测试部件电连接到测试机以对测试部件上的电子线路进行测试的装置A device for electrically connecting a test component to a testing machine to test electronic circuits on the test component

技术领域technical field

本发明涉及测试设备。特别地,本发明涉及用于测试包含集成电路的电子线路的测试设备。The present invention relates to testing equipment. In particular, the invention relates to testing equipment for testing electronic circuits including integrated circuits.

背景技术Background technique

当电子器件例如计算机处理器和存储器制造完成时,电子器件要经受预烧和电子测试以在出货之前识别并清除有缺陷器件。术语“预烧”涉及在预定温度或温度曲线下对集成电路的操作,典型地为在高温炉中的高温下。某些工作电子偏差电平和/或信号在电子器件处于高温下时被提供给电子器件。高温的使用加强了预烧期间器件经受的压力,从而那些在向用户提供服务之后不久就会出故障的临界器件可以在预烧期间出现故障,并且因此可以不被出货。When electronic devices such as computer processors and memories are manufactured, the electronic devices are subjected to burn-in and electronic testing to identify and eliminate defective devices prior to shipment. The term "burn-in" relates to the operation of an integrated circuit at a predetermined temperature or temperature profile, typically at elevated temperatures in a high-temperature furnace. Certain operating electronic bias levels and/or signals are provided to the electronic device while the electronic device is at an elevated temperature. The use of high temperatures intensifies the stress experienced by devices during burn-in, so that critical devices that would fail shortly after being serviced to customers may fail during burn-in and therefore may not be shipped.

用于电子线路的预烧测试的测试设备一般包括连接装置,用于将待测试的电子线路例如晶片或测试底板上的集成电路电连接到测试探测电路。Test equipment for burn-in testing of electronic circuits generally includes connection means for electrically connecting an electronic circuit to be tested, such as an integrated circuit on a wafer or a test chassis, to a test probe circuit.

发明内容Contents of the invention

在一个实施例中,本发明提供了一种测试装置,用于将测试部件电连接到测试机以对测试部件上的电子线路进行测试。所述装置包括与测试部件互相连接的接触器组件,机械支撑所述接触器组件并且将所述接触器组件电连接到测试机的探测组件,以及包含第一夹钳构件和第二夹钳构件的夹钳机件,所述夹钳构件强压到一起以施加夹钳力,从而使得探测组件和接触器组件之间电连接的导电块变形。In one embodiment, the present invention provides a testing device for electrically connecting a testing component to a testing machine to test electronic circuits on the testing component. The apparatus includes a contactor assembly interconnected with a test component, a probing assembly that mechanically supports the contactor assembly and electrically connects the contactor assembly to a testing machine, and includes a first jaw member and a second jaw member A clamping mechanism, the clamping members are forced together to apply a clamping force, thereby deforming the conductive block electrically connected between the probe assembly and the contactor assembly.

附图说明Description of drawings

本发明以参考附图的示例方式进行描述,其中:The invention is described by way of example with reference to the accompanying drawings, in which:

图1是转接板(interposer)、电接触器和包含待测试电路的晶片的结构图;Fig. 1 is the block diagram of interposer (interposer), electric contactor and the chip that comprises circuit to be tested;

图2是根据本发明一个实施例的接触器组件的结构图;2 is a structural diagram of a contactor assembly according to an embodiment of the present invention;

图3是显示图2中接触器组件的形成阶段的结构图;FIG. 3 is a structural diagram showing stages of formation of the contactor assembly in FIG. 2;

图4是根据本发明一个实施例的连接到环形物的真空板的透视图;Figure 4 is a perspective view of a vacuum panel attached to an annulus according to one embodiment of the invention;

图5是图4中的真空板和环形物的顶部俯视图;Figure 5 is a top plan view of the vacuum panel and ring in Figure 4;

图6是图5中6-6的剖面;Fig. 6 is the section of 6-6 in Fig. 5;

图7是显示根据本发明一个实施例在此固定的环形物和转接板如何与接触器对齐的结构图;Fig. 7 is a structural view showing how the ring and adapter plate fixed here are aligned with the contactor according to one embodiment of the present invention;

图8是根据本发明一个实施例的对齐机的透视图;Figure 8 is a perspective view of an alignment machine according to one embodiment of the invention;

图9是图8中显示的其上安装了显微镜的对齐机的端视图;Figure 9 is an end view of the alignment machine shown in Figure 8 with the microscope mounted thereon;

图10是安装到探测板上的图8中的对齐机的透视图;Fig. 10 is a perspective view of the alignment machine of Fig. 8 mounted on a detection board;

图11是图10的端视图;Figure 11 is an end view of Figure 10;

图12A是显示根据本发明另一个实施例的将接触器组件电连接到探测板的柔性连接器的探测板的结构图;12A is a block diagram showing a probe board of a flexible connector electrically connecting a contactor assembly to a probe board according to another embodiment of the present invention;

图12B是显示根据本发明一个实施例的将接触器组件电连接到探测板的柔性连接器的探测板的结构图;12B is a block diagram showing a probe board of a flexible connector electrically connecting the contactor assembly to the probe board according to one embodiment of the present invention;

图13A是图12A中柔性连接器的侧视图;Figure 13A is a side view of the flexible connector in Figure 12A;

图13B是图12A中柔性连接器端部的顶部俯视图;Figure 13B is a top plan view of the end of the flexible connector in Figure 12A;

图14显示了根据本发明一个实施例的电接触器上的电接触元件的排列;Figure 14 shows the arrangement of electrical contact elements on an electrical contactor according to one embodiment of the present invention;

图15和16是显示图12中柔性电连接器和电接触器之间的电连接形成的不同阶段的结构图;15 and 16 are structural diagrams showing different stages of forming an electrical connection between the flexible electrical connector and the electrical contactor in FIG. 12;

图17是图12中不具有电连接器并显示接触器组件上基准标记的探测板的结构图;以及17 is a block diagram of the probe board of FIG. 12 without the electrical connector and showing fiducial marks on the contactor assembly; and

图18是根据本发明一个实施例的测试探测组件的结构图。FIG. 18 is a block diagram of a test probe assembly according to one embodiment of the present invention.

具体实施方式Detailed ways

附图中的图1显示了根据本发明一个实施例的转接板10和电接触器26,二者一起组成了接触器组件,用于测试例如晶片32上的电子线路。Figure 1 of the accompanying drawings shows an interposer 10 and electrical contacts 26 which together form a contactor assembly for testing electronic circuits on, for example, a wafer 32, in accordance with one embodiment of the present invention.

如同图1所示,转接板10包括具有第一侧面12和第二侧面14的底板。转接板10在第一侧面12上包括若干电端子16。转接板10还以互连弹簧元件18的形式包含弹性互连元件。每个互连弹簧元件18从侧面12上的电端子16延伸并终止于自由端。每个互连弹簧元件18的作用是使得与电接触器26上相应的电端子有良好的电接触。在其他实施例中,弹性互连元件包括弹簧针和软性(compliant)导电块。As shown in FIG. 1 , the adapter plate 10 includes a base plate having a first side 12 and a second side 14 . The adapter plate 10 includes a number of electrical terminals 16 on the first side 12 . The adapter plate 10 also contains elastic interconnection elements in the form of interconnection spring elements 18 . Each interconnecting spring element 18 extends from an electrical terminal 16 on side 12 and terminates in a free end. The function of each interconnecting spring element 18 is to make good electrical contact with a corresponding electrical terminal on the electrical contactor 26 . In other embodiments, the resilient interconnection elements include pogo pins and compliant conductive blocks.

转接板10在侧面14上的各个电端子16上还具有互连弹簧元件20。互连弹簧元件20与互连弹簧元件18类似,除了互连弹簧元件20是为了与晶片32上相应的电端子进行电接触。The adapter plate 10 also has interconnecting spring elements 20 on the respective electrical terminals 16 on the side 14 . Interconnect spring elements 20 are similar to interconnect spring elements 18 except that interconnect spring elements 20 are intended to make electrical contact with corresponding electrical terminals on die 32 .

转接板还包括侧面12和14上的机械对齐挡块22以防止互连弹簧元件18的超行程并且防止转接板接触晶片32的某些区域。The interposer also includes mechanical alignment stops 22 on the sides 12 and 14 to prevent overtravel of the interconnect spring elements 18 and to prevent the interposer from contacting certain areas of the wafer 32 .

电接触器26包括接触器底板,所述接触器底板包括侧面28。电接触器26还包括侧面28上的电端子30。The electrical contacts 26 include a contact backplane that includes sides 28 . The electrical contact 26 also includes electrical terminals 30 on the side 28 .

晶片32显示为包括侧面34,所述侧面34具有待测试的电子线路。晶片32具有侧面34上的电端子36,通过所述电端子36可以进行与所述电子线路的电连接。Wafer 32 is shown including side 34 having electronic circuitry to be tested. The wafer 32 has electrical terminals 36 on the side 34 , via which electrical connections to the electronic circuits can be made.

图2显示了根据本发明一个实施例的接触器组件40。所述组件40包括转接板10和以环形物42形式存在的固定组件。转接板被环形物42固定在相对于电接触器26的预定或者对齐位置。可以看到,在所述预定或者对齐位置,每个互连弹簧元件18对应于弹性力产生变形以与电接触器26的对应电端子30进行电接触。通过移动环形物42和其中容纳的转接板10直到对齐挡块22碰到电接触器26的侧面28而达到所述预定位置。在其他实施例中,当互连弹簧元件18(或者其他实施例中的弹簧针或软性导电块)施加足够压力时达到所述预定位置,以保持接触器26位于恰当位置。因此挡块22是可选的。转接板10和电接触器26之间的空间是每个被压缩的互连弹簧元件18的长度。FIG. 2 shows a contactor assembly 40 according to one embodiment of the invention. Said assembly 40 comprises an adapter plate 10 and a fastening assembly in the form of a ring 42 . The adapter plate is held in a predetermined or aligned position relative to the electrical contacts 26 by the ring 42 . It can be seen that, in said predetermined or aligned position, each interconnecting spring element 18 deforms in response to the elastic force to make electrical contact with a corresponding electrical terminal 30 of the electrical contactor 26 . The predetermined position is achieved by moving the ring 42 and the adapter plate 10 contained therein until the alignment stop 22 hits the side 28 of the electrical contact 26 . In other embodiments, the predetermined position is reached when sufficient pressure is applied by interconnecting spring element 18 (or pogo pins or soft conductive blocks in other embodiments) to hold contactor 26 in place. The stop 22 is therefore optional. The space between the adapter plate 10 and the electrical contacts 26 is the length of each compressed interconnecting spring element 18 .

环形物42形成凹陷表面44,该凹陷表面44限定了转接板10的底座。环形物42具有类似平边缘的表面46,该表面46承受电接触器26的侧面28。环形物42通过接合件43的形式固定到电接触器26,例如延伸通过螺栓孔48的螺栓(见图4)。所述孔48的尺寸可以容纳接合件43,某种程度上作用为使得转接板10上的基准标记和接触器26分别对齐。The ring 42 forms a recessed surface 44 that defines the seat of the adapter plate 10 . The ring 42 has a flat edge-like surface 46 which bears the side 28 of the electrical contact 26 . The ring 42 is secured to the electrical contact 26 by means of a joint 43, such as a bolt extending through a bolt hole 48 (see FIG. 4). The holes 48 are sized to accommodate the engagement members 43, in a way that acts to align the fiducial marks on the adapter plate 10 and the contacts 26, respectively.

图3显示了接触器组件40的形成中的第一阶段。参考图3,真空板50可松开地固定到环形物42相对于表面46的一侧以形成子部件51。真空板50可以通过联结器54和连接到联结器54的软管52而连接到泵(未显示)。使用时,泵在真空板50和转接板10之间的区域56形成真空。该真空将转接板10保持在凹陷表面44。如图4和5所示的,真空板50成形以提供接合件43的通道。FIG. 3 shows a first stage in the formation of the contactor assembly 40 . Referring to FIG. 3 , a vacuum panel 50 is releasably secured to the side of the ring 42 opposite the surface 46 to form a subassembly 51 . The vacuum panel 50 may be connected to a pump (not shown) by a coupler 54 and a hose 52 connected to the coupler 54 . In use, the pump creates a vacuum in the area 56 between the vacuum plate 50 and the adapter plate 10 . This vacuum holds the adapter plate 10 against the recessed surface 44 . As shown in FIGS. 4 and 5 , the vacuum panel 50 is shaped to provide access for the engagement member 43 .

图6显示了以图5中沿6-6获得的子部件51的剖视图,如图6所示,转接板10紧贴容纳于环形物42中。FIG. 6 shows a cross-sectional view of the subassembly 51 taken along line 6 - 6 in FIG. 5 . As shown in FIG. 6 , the adapter plate 10 is snugly received in the ring 42 .

图7显示了如何实现转接板10和电接触器26的对齐的结构图。转接板10容纳于环形物42中并且在x、y或θ方向上移动,从而转接板10的侧面12上的基准标记58与电接触器26的侧面28上的基准标记60对齐。一旦基准标记58与基准标记60对齐,环形物42与转接板10一起在Z方向上移位以便与接触器26接触。然后位于孔48中的螺栓43螺旋进入电接触器26中形成的互补的螺纹槽68。基准标记58、60使得电接触器26上的电端子30与互连弹簧元件18对齐,而不必留意互连弹簧元件18。每个互连弹簧元件在x-y平面内的位置或者从x-y平面的射角的偏差并不影响所述对齐过程。转接板10的侧面18上的机械挡块22可以在形成组件40时限制转接板10朝向电接触器26的移动,从而每个互连弹簧元件18处于所需压缩。FIG. 7 shows a structural diagram of how to achieve the alignment of the adapter board 10 and the electrical contactor 26 . The adapter plate 10 is received in the ring 42 and moved in the x, y, or theta direction so that the fiducial marks 58 on the side 12 of the adapter plate 10 align with the fiducial marks 60 on the side 28 of the electrical contact 26 . Once fiducial mark 58 is aligned with fiducial mark 60 , ring 42 is displaced in the Z direction along with adapter plate 10 to make contact with contactor 26 . The bolt 43 located in the hole 48 is then threaded into a complementary threaded groove 68 formed in the electrical contact 26 . The fiducial marks 58 , 60 allow the electrical terminals 30 on the electrical contactor 26 to align with the interconnecting spring elements 18 without paying attention to the interconnecting spring elements 18 . The position of each interconnected spring element in the x-y plane or the deviation of the firing angle from the x-y plane does not affect the alignment process. Mechanical stops 22 on sides 18 of adapter plate 10 may limit movement of adapter plate 10 toward electrical contacts 26 when forming assembly 40 so that each interconnecting spring element 18 is in the desired compression.

图8显示了根据本发明一个实施例的对齐机70的透视图,可以用于将环形物42和转接板10的结合体与电接触器26对齐。对齐机70包括基座72,其形状尺寸为可以置于探测板152上(见图10),所述探测板152在使用时可以容纳电接触器26(见图12A)。对齐机70还包括升起的平台或平板74,所述平台或平板74通过安装支架76而固定到基座72。平台74支撑托架78。托架78可以见图9,其中显示了对齐机70的侧视图。托架78通过包含角撑架88和水平弹簧90的安装装置而固定到平台74的下侧。角撑架88固定到平台74并且为弹簧90的一端提供支撑点,弹簧90的另一端固定到托架78的浮动板80,如同图9所示。FIG. 8 shows a perspective view of an alignment machine 70 that may be used to align the combined ring 42 and adapter plate 10 with the electrical contacts 26 in accordance with one embodiment of the present invention. The alignment machine 70 includes a base 72 that is dimensioned to rest on a probing board 152 (see FIG. 10 ) that, in use, accommodates the electrical contacts 26 (see FIG. 12A ). Alignment machine 70 also includes a raised platform or plate 74 secured to base 72 by mounting brackets 76 . Platform 74 supports carriage 78 . The bracket 78 can be seen in Figure 9, which shows a side view of the alignment machine 70. Bracket 78 is secured to the underside of platform 74 by mounting means comprising angle brackets 88 and horizontal springs 90 . Angle bracket 88 is secured to platform 74 and provides a point of support for one end of spring 90 , the other end of which is secured to floating plate 80 of bracket 78 , as shown in FIG. 9 .

托架78进一步包括固定到垂直构件84的浮动板80的环形支撑物82,所述垂直构件84在环形支撑物安装板82和浮动板80之间延伸。The bracket 78 further includes an annular support 82 of the floating plate 80 secured to a vertical member 84 extending between the annular support mounting plate 82 and the floating plate 80 .

设置在平台74和浮动板80之间的滚柱轴承94允许浮动板80相对于平台74可滑动的放置。垂直弹簧95迫使浮动板80接触滚柱轴承94。可以理解,浮动板80对于平台74的弹簧安装设置可以允许浮动板80在x-y平面内移动。这样的x-y平面内的移动通过调整机件进行控制,所述调整机件在一个实施例中包括测微计96、98和100,每个测微计可以作用迫使其一端承受浮动板80的边缘,从而引起浮动板80的位移。例如,如同图9所示,测微计98的一端98.1可以在y方向移位以承载浮动板80的边缘,从而使得浮动板80在y方向上位移。因为环形支撑物82刚性地连接到浮动板80,浮动板80的位移也会使得环形支撑物82相应地位移。Roller bearings 94 disposed between platform 74 and floating plate 80 allow for slidable placement of floating plate 80 relative to platform 74 . Vertical springs 95 force floating plate 80 into contact with roller bearings 94 . It will be appreciated that the spring mounted arrangement of the floating plate 80 to the platform 74 may allow the floating plate 80 to move in the x-y plane. Such movement in the x-y plane is controlled by an adjustment mechanism which in one embodiment includes micrometers 96, 98 and 100, each of which acts to force one end thereof against the edge of the floating plate 80. , thereby causing the displacement of the floating plate 80 . For example, as shown in FIG. 9, one end 98.1 of the micrometer 98 may be displaced in the y-direction to bear the edge of the floating plate 80, thereby displacing the floating plate 80 in the y-direction. Since the annular support 82 is rigidly connected to the floating plate 80, displacement of the floating plate 80 will cause a corresponding displacement of the annular support 82 as well.

使用时,通过真空板50和泵(未显示)协助产生的吸力而固定在环形物42中的转接板10机械连接到托架78的环形支撑物82。随后,对齐机70如图10所示置于探测板152上。在该位置,环形物42和固定在环形物42中的转接板10直接位于固定在探测板152中的电连接器26的上方。In use, the adapter plate 10 , held in the ring 42 , is mechanically connected to the ring support 82 of the carriage 78 by suction assisted by a vacuum plate 50 and a pump (not shown). Subsequently, the aligner 70 is placed on the probe plate 152 as shown in FIG. 10 . In this position, the ring 42 and the adapter plate 10 fixed in the ring 42 are directly above the electrical connector 26 fixed in the probe board 152 .

图9中可以看到固定到平台74的包含显微镜102的放大系统,所述显微镜102包括视镜部件104和底座106。A magnification system comprising a microscope 102 including a mirror assembly 104 and a base 106 secured to platform 74 can be seen in FIG. 9 .

显微镜102分别放大转接板10和电连接器26上的基准标记58、60。然后测微计96、98和100可以工作以移动托架78,所述托架78随其承载环形物42和转接板10,从而转接板10可以位于电连接器26上方的预定或者对齐位置,其中转接板10和电接触器26上的基准标记58、60分别对齐。Microscope 102 magnifies fiducial marks 58 , 60 on interposer board 10 and electrical connector 26 , respectively. Micrometers 96 , 98 , and 100 can then be operated to move carriage 78 , which carries with it ring 42 and interposer plate 10 , so that interposer plate 10 can be positioned above electrical connector 26 in a predetermined or aligned position. position, where the fiducial marks 58, 60 on the adapter board 10 and the electrical contactor 26 are aligned, respectively.

对齐机70进一步包括测微计顶部108,所述测微计顶部108可以用于在z方向上移动托架78,使得转接板和环形物结合体在z方向上朝向电接触器26位移。使用时,z方向上的位移一直进行到对齐挡块22接触到电接触器26的侧面28,或者达到所需z方向位置。当该位置达到时,螺栓43旋入电接触器26中的槽68中,从而将环形物42以及其中固定的转接板10固定到电接触器26。The alignment machine 70 further includes a micrometer top 108 that can be used to move the carriage 78 in the z-direction such that the adapter plate and ring combination displaces in the z-direction toward the electrical contacts 26 . In use, displacement in the z-direction is performed until the alignment stop 22 contacts the side 28 of the electrical contact 26, or reaches a desired z-direction position. When this position is reached, the bolt 43 is screwed into the slot 68 in the electrical contactor 26 , thereby securing the ring 42 and the adapter plate 10 secured therein to the electrical contactor 26 .

一旦环形物42和转接板10固定到电接触器26,真空板50和对齐机70即被移去。探测板152包括外部接口组件164,所述外部接口组件164包括多个形为电针脚166的电连接器,如图12A所示。柔性连接器110将接触器组件40电连接到接口组件164,所述接口组件164随后通过针脚166电连接到测试机的预烧室(未显示)。Once the ring 42 and adapter plate 10 are secured to the electrical contacts 26, the vacuum plate 50 and alignment machine 70 are removed. Probe board 152 includes an external interface assembly 164 that includes a plurality of electrical connectors in the form of electrical pins 166, as shown in FIG. 12A. Flexible connector 110 electrically connects contactor assembly 40 to interface assembly 164 , which in turn electrically connects via pins 166 to a burn-in chamber (not shown) of the testing machine.

柔性连接器110包括具有侧面112.1和112.2的柔性底板112,如图13A所示。进一步,柔性底板112具有第一端115和第二端116。柔性线导体114.1和114.2分别形成于侧面112.1和112.2上,如图13A和13B所示。每个柔性线导体114.1具有电连接到接口组件164的第一端和远离第一端的第二端。每个柔性线导体114.1在其第二端包括一个端子,所述端子包含两个导电块118.1,如图13B所示。同样地,每个柔性线导体114.2具有电连接到接口组件164的第一端和远离第一端的第二端,所述第二端经过贯通底板112的通道113而连接到侧面112.1上的包含两个导电块118.2的端子。可以理解,通过在底板112的每个侧面112.1和112.2上设置柔性线导体,使得底板112可以承载更多的线导体114.1和114.2。The flexible connector 110 includes a flexible backplane 112 having sides 112.1 and 112.2, as shown in Figure 13A. Further, the flexible base 112 has a first end 115 and a second end 116 . Flexible wire conductors 114.1 and 114.2 are formed on sides 112.1 and 112.2, respectively, as shown in Figures 13A and 13B. Each flex wire conductor 114.1 has a first end electrically connected to the interface assembly 164 and a second end remote from the first end. Each flexible wire conductor 114.1 includes at its second end a terminal comprising two conductive blocks 118.1, as shown in Figure 13B. Similarly, each flexible line conductor 114.2 has a first end electrically connected to the interface assembly 164 and a second end remote from the first end, the second end is connected to the side 112.1 through the channel 113 through the bottom plate 112. Terminals for two conductive blocks 118.2. It can be understood that by providing flexible wire conductors on each side 112.1 and 112.2 of the bottom board 112, the bottom board 112 can carry more wire conductors 114.1 and 114.2.

柔性连接器110足够柔软,从而可以向自身折叠而不损坏柔性底板112,并且典型地由聚酰亚胺材料制成。根据一些实施例,柔性底板112可以具有25.4微米或者49微米的厚度,然而在可以折叠到自身而不损坏柔性底板112的意义上,当厚度达到125微米时仍然是柔软的。The flexible connector 110 is flexible enough to be folded towards itself without damaging the flexible backplane 112, and is typically made of a polyimide material. According to some embodiments, the flexible base 112 may have a thickness of 25.4 microns or 49 microns, yet be flexible up to 125 microns in thickness in the sense that it can be folded onto itself without damaging the flexible base 112 .

典型地,块118.1、118.2用金形成,并且具有大约100微米的宽度和大约60微米的高度。由于金不会氧化并且能够承受150℃到350℃的温度,因此它是块118的优选材料。进一步,金在180℃到240℃的温度范围内保持其弹性。柔性连接器110包括层119,所述层119覆盖线导体114.1和114.2。层119由非导电柔性材料制成,如图15所示。Typically, blocks 118.1, 118.2 are formed of gold and have a width of about 100 microns and a height of about 60 microns. Gold is the preferred material for block 118 since it does not oxidize and can withstand temperatures from 150°C to 350°C. Further, gold maintains its elasticity in the temperature range of 180°C to 240°C. The flexible connector 110 comprises a layer 119 covering the wire conductors 114.1 and 114.2. Layer 119 is made of a non-conductive flexible material, as shown in FIG. 15 .

柔性连接器110电连接到接触器组件40的刚性完全不可弯曲的电接触器26。为了达到该目的,电连接器26具有多个电接触元件120,所述电接触元件120适合于电连接到柔性连接器110的导电块118.1和118.2。图14显示了电接触器26上的电接触元件120的布局。参考图14,可以看到电接触元件120大致为长方形并且设置在两个行125中。每个元件120具有平的接触表面120.1(见图15)。所述电接触元件120的接触表面120.1在相同平面内。在一个实施例中,每个电接触元件120具有125和500微米的横向尺寸以及30微米的高度。在该实施例中,电接触器元件120分布间距为100微米。电接触元件120典型地以金形成,金可以提供与导电块118.1和118.2之间相当鲁棒的连接。柔性连接器110和电接触器26之间的电连接具有很低的外形并且在一个实施例中仅有大约6毫米高。The flexible connector 110 is electrically connected to the rigid fully inflexible electrical contact 26 of the contact assembly 40 . To this end, the electrical connector 26 has a plurality of electrical contact elements 120 adapted to be electrically connected to the conductive blocks 118 . 1 and 118 . 2 of the flexible connector 110 . FIG. 14 shows the layout of the electrical contact elements 120 on the electrical contactor 26 . Referring to FIG. 14 , it can be seen that the electrical contact elements 120 are generally rectangular and are arranged in two rows 125 . Each element 120 has a flat contact surface 120.1 (see Fig. 15). The contact surfaces 120.1 of the electrical contact elements 120 are in the same plane. In one embodiment, each electrical contact element 120 has lateral dimensions of 125 and 500 microns and a height of 30 microns. In this embodiment, the electrical contact elements 120 are distributed at a pitch of 100 microns. The electrical contact elements 120 are typically formed in gold, which can provide a fairly robust connection to the conductive blocks 118.1 and 118.2. The electrical connections between the flexible connector 110 and the electrical contacts 26 have a very low profile and are only about 6 millimeters high in one embodiment.

图15显示了柔性连接器110和电接触元件120之间的电连接的形成阶段的结构图。FIG. 15 shows a structural view of the stages of formation of the electrical connection between the flexible connector 110 and the electrical contact element 120 .

基本上,为了形成柔性连接器110和电接触器26之间的电连接,使用夹钳将柔性电连接器110的第二端116夹钳到电接触器26上。所述夹钳包括以加工硬化金属制成的加长条122形式出现的第一夹钳构件,以及由电接触器26决定的第二夹钳构件。金属条122的热胀系数与电接触器26的热胀系数匹配。在一个实施例中,金属条122的热胀系数在电接触器26的热胀系数的0.5ppm/℃内。Basically, to form an electrical connection between the flexible connector 110 and the electrical contact 26 , the second end 116 of the flexible electrical connector 110 is clamped to the electrical contact 26 using a clamp. The clamp comprises a first clamping member in the form of an elongated bar 122 made of work-hardened metal, and a second clamping member determined by an electrical contact 26 . The coefficient of thermal expansion of the metal strip 122 matches that of the electrical contact 26 . In one embodiment, the coefficient of thermal expansion of the metal strip 122 is within 0.5 ppm/° C. of the coefficient of thermal expansion of the electrical contact 26 .

加长金属条122、柔性连接器110以及电接触器26具有轴向延伸孔,以在其中容纳固定螺栓124。螺母126与螺栓124上的螺纹匹配,并且迫使导电块118.1和118.2接触到电接触器元件120上图16所示的位置。固定螺栓124施加的夹钳力使得导电块118.1和118.2挤压电接触器元件120,从而使得导电块118.1和118.2产生弹性和塑性形变。这保证了导电块118.1和118.2与电接触器元件120之间良好的电接触。The elongated metal strip 122, the flexible connector 110 and the electrical contact 26 have axially extending holes to receive the securing bolts 124 therein. Nut 126 mates with the threads on bolt 124 and forces conductive blocks 118 . 1 and 118 . 2 into contact on electrical contact element 120 in the position shown in FIG. 16 . The clamping force exerted by the fixing bolt 124 causes the conductive blocks 118.1 and 118.2 to compress the electrical contact element 120, thereby causing elastic and plastic deformation of the conductive blocks 118.1 and 118.2. This ensures good electrical contact between the conductive blocks 118 . 1 and 118 . 2 and the electrical contactor element 120 .

因为固定螺栓124、金属条122以及导电块118.1和118.2可能具有不同的热胀系数,并且由于预烧测试期间达到的高温,固定螺栓124可能会在预烧测试期间变长。这导致了固定螺栓124的顶部124.1和金属条122之间的间隙。Because the fixing bolt 124, the metal strip 122 and the conductive blocks 118.1 and 118.2 may have different coefficients of thermal expansion, and due to the high temperatures reached during the burn-in test, the fixing bolt 124 may become longer during the burn-in test. This results in a gap between the top 124 . 1 of the fixing bolt 124 and the metal strip 122 .

可以理解,这样的间隙会减除固定螺栓124施加到柔性连接器110上的夹钳力。为了补偿所述间隙产生的趋势,可以在加长金属条122和柔性连接器110中间插入或者夹入弹性材料制成的膨胀构件128,如图16所示。所述膨胀构件128在固定螺栓124旋紧时产生的夹钳力作用下被压缩,并且在固定螺栓124变长时可以释放或者膨胀。因此,膨胀构件128占据了顶部124.1和金属条122之间的任何间隙,从而保持了固定螺栓124的夹钳力。所述膨胀构件由能够承受预烧室内高温的材料制成。进一步,由于导电块118.1和118.2的高度可能变化,膨胀构件128使得柔性底板112有差异的变形以补偿导电块118.1和118.2高度的变化。It will be appreciated that such a gap will reduce the clamping force exerted by the set bolt 124 on the flexible connector 110 . In order to compensate for the tendency of the gap, an expansion member 128 made of elastic material may be inserted or sandwiched between the elongated metal strip 122 and the flexible connector 110 , as shown in FIG. 16 . The expansion member 128 is compressed under the clamping force generated when the fixing bolt 124 is tightened, and can be released or expanded when the fixing bolt 124 becomes longer. Thus, the expansion member 128 occupies any gap between the top 124.1 and the metal strip 122, thereby maintaining the clamping force of the fixing bolt 124. The expansion member is made of materials capable of withstanding the high temperature in the pre-firing chamber. Further, since the heights of the conductive blocks 118.1 and 118.2 may vary, the expansion member 128 causes differential deformation of the flexible base 112 to compensate for the change in height of the conductive blocks 118.1 and 118.2.

图12A显示了柔性连接器的另一个实施例110A。除了其每端具有类似于块118.1和118.2的导电块,柔性连接器110A与柔性连接器110类似。柔性连接器110A的一端如同上面所述夹钳到电接触器26,并且柔性连接器110A的相对端以类似方式夹钳到连接器121,所述连接器121传送电信号到外部接口164或从外部接口传送电信号。Figure 12A shows another embodiment 110A of a flexible connector. Flexible connector 110A is similar to flexible connector 110 except that it has conductive blocks at each end similar to blocks 118.1 and 118.2. One end of the flexible connector 110A clamps to the electrical contacts 26 as described above, and the opposite end of the flexible connector 110A clamps in a similar manner to the connector 121, which carries electrical signals to or from the external interface 164. The external interface transmits electrical signals.

接触器26包括基准标记130(如同图17所示)以在夹钳之前帮助对齐导电块118和电接触器元件120。基准标记130通过柔性连接器110是可见的。柔性连接器110具有互补的基准标记132(如同图13B所示),所述基准标记132可以与接触器26上的基准标记130对齐以确保导电块118与接触器元件120对齐。The contactor 26 includes fiducial marks 130 (as shown in FIG. 17 ) to aid in aligning the conductive block 118 and the electrical contact element 120 prior to clamping. Fiducial markers 130 are visible through flexible connector 110 . The flexible connector 110 has complementary fiducial marks 132 (as shown in FIG. 13B ) that can be aligned with the fiducial marks 130 on the contacts 26 to ensure that the conductive blocks 118 are aligned with the contact elements 120 .

图18显示了根据本发明一个实施例的测试探测组件150的部件。测试探测组件150包括探测板152和夹板154,二者一起限定了其间的空间,该空间用于容纳接触器组件,例如图2中所示的接触器组件40。Figure 18 shows components of a test probe assembly 150 according to one embodiment of the invention. The test probe assembly 150 includes a probe plate 152 and a clamping plate 154 that together define a space therebetween for receiving a contactor assembly, such as the contactor assembly 40 shown in FIG. 2 .

夹板154具有基架156以支持晶片32。探测盘152包括活塞158,在使用时,所述活塞158可以借助液压液体在缸体160内位移,所述液压液体通过可松开地连接在缸体160上的软管162引入缸体160中。活塞158与接触器组件40的电接触器26连接。The clamping plate 154 has a base frame 156 to support the wafer 32 . The probe disc 152 includes a piston 158 which, in use, is displaceable within a cylinder 160 by means of hydraulic fluid introduced into the cylinder 160 through a hose 162 releasably connected to the cylinder 160 . Piston 158 is connected to electrical contactor 26 of contactor assembly 40 .

使用时,空气通过软管162被引入到室160内以迫使活塞158在z方向移动,从而使接触器组件40朝向夹板154位移直到转接板10的侧面14上的机械对齐挡块22接触到晶片32的侧面34。环形物42和夹板154之间的形式为O形环163的可弹性形变构件的作用是限制或控制通过活塞158的移动使接触器组件40产生多大的位移。因此,活塞158的移动并不需要精确控制。进一步,O形环163提供环形物42和夹板154之间的密封。O形环163通过在环形物42朝向夹板154位移时为环形物42加上衬垫而允许环形物42的表面46不在相同z平面的偏差。在一个实施例中,O形环163可以以弹簧代替,弹簧可以提供活塞158移动的反作用力。一旦转接板10的侧面14上的机械挡块22接触到晶片32的侧面34,互连弹簧元件被压缩以达到转接板10的互连弹簧元件20和晶片32的电端子36之间的良好的电接触。随后,软管162被移去。探测组件152还包括固定机件,用于可松动地将夹板154固定到探测板152。所述固定机件没有显示在图12中,但是包括任何适合的夹钳装置,例如美国专利No.6,340,895中的运动联结器,作为参考而将其结合于此。然后测试探测组件150被插入到测试预烧室中,其中电连接针脚166容纳于互补的电插槽中。In use, air is introduced into the chamber 160 through the hose 162 to force the piston 158 to move in the z direction, thereby displacing the contactor assembly 40 toward the clamping plate 154 until the mechanical alignment stop 22 on the side 14 of the adapter plate 10 contacts side 34 of wafer 32 . The function of the elastically deformable member in the form of an O-ring 163 between the ring 42 and the jaw 154 is to limit or control how much the contactor assembly 40 is displaced by movement of the piston 158 . Therefore, the movement of the piston 158 does not need to be precisely controlled. Further, O-ring 163 provides a seal between ring 42 and splint 154 . The O-ring 163 allows the surface 46 of the ring 42 to not deviate from the same z-plane by cushioning the ring 42 as it displaces toward the splint 154 . In one embodiment, the O-ring 163 can be replaced by a spring, which can provide a reaction force against the movement of the piston 158 . Once the mechanical stop 22 on the side 14 of the interposer board 10 touches the side 34 of the die 32, the interconnection spring elements are compressed to achieve contact between the interconnection spring elements 20 of the interposer board 10 and the electrical terminals 36 of the die 32. good electrical contact. Subsequently, the hose 162 is removed. The probing assembly 152 also includes a securing mechanism for releasably securing the splint 154 to the probing plate 152 . The stationary mechanism is not shown in Figure 12, but includes any suitable clamping means, such as the kinematic coupler of US Patent No. 6,340,895, which is incorporated herein by reference. The test probe assembly 150 is then inserted into the test burner with the electrical connection pins 166 received in complementary electrical sockets.

尽管本发明参考特定示例实施例进行了描述,然而显然可对这些实施例进行各种修改和改动而不背离权利要求书中提出的本发明的广泛的实质。因此,本说明书和附图应被认为是示例意义而非限制意义。Although the invention has been described with reference to particular example embodiments, it will be evident that various modifications and changes may be made to these embodiments without departing from the broader spirit of the invention as set forth in the claims. Accordingly, the specification and drawings are to be regarded in an illustrative rather than a restrictive sense.

Claims (62)

1. one kind is used for test component is electrically connected to test machine with the device to the testing electrical circuits on the test component, and described device comprises:
Contactor assembly comprises a plurality of first conductors; A plurality of the first terminals, each described the first terminal are connected to corresponding described first conductor; A plurality of resilient interconnection elements, each described resilient interconnection elements are connected to corresponding described first conductor, and have the end that electrically contacts described test component; And the supporting component that is used to support described contactor assembly;
Be positioned at the external interface assembly on the described supporting component, comprise that electric connector is used for being electrically connected with described test machine;
Flexible plate;
Be positioned on the described flexible plate and be electrically connected to flexibility second conductor of described external interface assembly;
A plurality of second terminals that are electrically connected to described flexible second conductor on the described flexible plate;
The a plurality of conducting blocks that are provided with between described first and second terminals; And
The clip that comprises first and second clamp members is used to force described first and second terminals adjacent to each other and make described conducting block produce deformation.
2. device according to claim 1, wherein each described the first terminal comprises the terminal bodies with straight surface of contact.
3. device according to claim 2, wherein said first clamp members comprises the elongated bars that extends beyond a conducting block.
4. device according to claim 3, wherein said bonding jumper are the work hardening metals that hardened steel is made.
5. device according to claim 3, wherein said second clamp members comprises the set bolt that is used for described bonding jumper is pushed to the surface of contact of described each terminal bodies.
6. device according to claim 5, it further comprises the expansion member in the described clip, wherein said expanding material is resilient material and is in the compression, and with the parallel direction of described set bolt the reducing of the clamp power that causes owing to described set bolt is elongated with compensation of expanding.
7. device according to claim 1, wherein said conducting block is made of gold.
8. device according to claim 1, wherein said conducting block have 60 microns height and 100 microns width.
9. device according to claim 8, wherein said expansion member comprises silicon rubber.
10. device according to claim 4, the maintenance assembly that electrically contacts that wherein said contactor assembly comprises card extender, electric contactor and keeps described card extender and electric contactor, wherein said a plurality of first conductor and the first terminal are positioned on the described electric contactor, described a plurality of interconnection spring element is positioned on the described card extender, and wherein said electric contactor and flexible plate comprise that reference mark on it is to help described first and second terminals of alignment.
11. device according to claim 10, the coefficient of thermal expansion of wherein said bonding jumper mate in 0.5ppm/ ℃ of the coefficient of thermal expansion of described contactor base plate.
12. device according to claim 10, wherein said electric contactor and described card extender have complementary reference mark to help the electric contacts on described resilient interconnection elements of alignment and the described electric contactor.
13. device according to claim 1, wherein said resilient interconnection elements comprises spring.
14. one kind is used for test component is electrically connected to test machine with the proving installation to the testing electrical circuits on the test component, described proving installation comprises:
Contactor assembly, comprise first electric conductor, be connected to a plurality of the first terminals of first end of described first electric conductor, be connected to a plurality of second terminals of second end of described first electric conductor, and the resilient interconnection elements that described the first terminal is electrically connected to described test component;
Probe assembly comprises the board component that supports described contactor assembly, and the interface module on the described board component, and described interface module comprises a plurality of external electric connectors that are used to be electrically connected to described test machine; Have first end that is connected to described interface module and with the flexible plate of the first end second opposed end, fexible conductor on the described flexible plate, described fexible conductor has the stem that is connected to described interface module and in the end at the second end place of described flexible plate, described end comprises a plurality of the 3rd terminals that align with described second terminal;
A plurality of electric contactor pieces between the described second and the 3rd terminal; And
The clamp parts that comprise first clamp members and second clamp members, described clamp members are suppressed together and to apply clamp power the described second and the 3rd terminal are moved together, thereby make contactor piece therebetween produce deformation.
15. proving installation according to claim 14, wherein said resilient interconnection elements comprises spring.
16. proving installation according to claim 14, wherein said first clamp members comprises that bonding jumper and described second clamp members comprise the surface in contact of each second terminal, and described clamp parts comprise that further set bolt and complementary nuts are to push described bonding jumper to described the 3rd terminal.
17. proving installation according to claim 15, wherein said clamp parts further comprise the expansion member between described set bolt top and described nut, described expansion member is made by the resilient material that is in the compression, and expands with compensation reducing owing to the elongated clamp power that causes of described set bolt along described set bolt axis.
18. proving installation according to claim 17, wherein said contactor assembly comprises electric contactor, described a plurality of first electric conductor, a plurality of the first terminal and a plurality of second terminal position thereon, described electric contactor and flexible plate have complementary reference mark to help alignment the described second and the 3rd terminal.
19. proving installation according to claim 18, wherein said conducting block are linked to described the 3rd terminal.
20. one kind is used for test component is connected to test machine with the unit to the testing electrical circuits on the test component, described unit comprises:
Supporting component is used to support contactor assembly to electrically contact with described test component;
External interface assembly on the described supporting component comprises a plurality of electric connectors that are used to be electrically connected to described test machine;
Flexible plate, have first end that is electrically connected to described interface module and with the described first end second opposed end;
Fexible conductor on the described flexible plate, described fexible conductor has the stem that is electrically connected to described interface module and in the end at the second end place of described flexible plate, described end comprises a plurality of terminals and a plurality of conducting block, each described conducting block is connected to a corresponding described terminal, and wherein said end can be connected to described contactor assembly and transmit electric signal between described contactor assembly and described test machine.
21. unit according to claim 20, wherein two conducting blocks are connected to each terminal by the lead-in wire connected mode.
22. unit according to claim 21, wherein said conducting block is made of gold.
23. unit according to claim 22, wherein said conducting block have 100 microns width and 60 microns height.
24. one kind is used for the electrical testing parts are electrically connected to the contactor assembly of test machine so that test component is tested, described contactor assembly comprises:
Test structure;
A plurality of electric terminals on the described test structure;
A plurality of resilient interconnection elements, each described resilient interconnection elements have first end that is connected to electric terminal and relative with first end free end that electrically contacts with described test component;
On the described test structure away from a plurality of electric contacts of described electric terminal; And
Each electric terminal is bridged to the electric pathway of a corresponding electric contacts, wherein said each electric contacts has the main body that limits flat surface, thereby the support to the coupling contactor elements is provided when described coupling contactor elements produces deformation under the effect of clamp power.
25. contactor assembly according to claim 14, wherein said resilient interconnection elements comprises spring.
26. contactor assembly according to claim 24, wherein said test structure comprise a plurality of holes that wherein form, to cooperate the described coupling contactor elements of clamp with clamp members.
27. contactor assembly according to claim 26, wherein said test structure comprise that further reference mark is to help described electric contacts of alignment and described coupling contactor elements.
28. a contactor assembly that uses when testing electronic circuit, described contactor assembly comprises:
Electric contactor comprises a plurality of electric terminals on contactor base plate and the described contactor base plate;
Card extender, comprise card extender base plate with first and second sides, a plurality of first and second resilient interconnection elements of extending respectively from first and second sides of described card extender base plate, wherein said card extender is positioned at the precalculated position with respect to described electric contactor, the electric terminal of each first resilient interconnection elements and described electric contactor electrically contacts in this precalculated position, and described card extender base plate moves with respect to described contactor base plate so that described first resilient interconnection elements produces elastic deformation; And
Keep assembly, have first that is fixed to described electric contactor and the second portion that contacts with described card extender, thereby described card extender is remained on precalculated position with respect to described electric contactor.
29. contactor assembly according to claim 28, wherein said maintenance assembly comprises annulation, and described annulation has the ring-shaped depression that holds described card extender therein, and the similar edge surface that is fixed to described electric contactor.
30. contactor assembly according to claim 28, wherein said first and second resilient interconnection elements comprise spring.
31. contactor assembly according to claim 28, wherein said precalculated position is corresponding to the reference mark positions aligning that makes on described each contactor base plate and the card extender base plate.
32. a test probes assembly that is used to test electronic circuit, described test probes assembly comprises:
Framed structure with first member;
Be fixed to the contactor assembly of described first member, described contactor assembly comprises:
Electric contactor comprises the contactor base plate, and a plurality of electric terminals on the described contactor base plate;
Card extender, the card extender base plate that comprises conduction with first and second sides, a plurality of first and second resilient interconnection elements of extending respectively from first and second sides of described card extender base plate, wherein said card extender is positioned at the precalculated position with respect to described electric contactor, the electric terminal of each first resilient interconnection elements and described electric contactor electrically contacts in this precalculated position, and wherein said second resilient interconnection elements electrically contacts with the base plate that forms electronic circuit to be tested thereon;
Keep assembly, have first that is fixed to described electric contactor and the second portion that is fixed to described card extender, thereby described card extender is remained on precalculated position with respect to described electric contactor.
33. test probes assembly according to claim 32, wherein said framed structure further comprises second member, and described first and second members define space therebetween when make-position.
34. test probes assembly according to claim 33, it further comprises the wafer holder that is used for fixing wafer that is fixed to described second member, described first and second members can relatively move mutually, so that described second resilient interconnection elements produces deformation, thereby it is contacted with electric terminal on the wafer.
35. test probes assembly according to claim 32, at least one in wherein said contactor base plate and the card extender base plate comprise that block is to limit the spacing between described contactor base plate and the card extender base plate.
36. test probes assembly according to claim 32, wherein said card extender base plate comprise that block is used to limit the spacing between described card extender base plate and the described wafer.
37. contactor assembly according to claim 32, wherein said first and second resilient interconnection elements comprise spring.
38. test probes assembly according to claim 32, wherein said maintenance assembly comprises annulation, the similar edge surface that described annulation has the ring-shaped depression that holds described card extender therein and is fixed to described electric contactor.
39. test probes assembly according to claim 32, wherein said precalculated position is corresponding to the reference mark positions aligning that makes on described each contactor base plate and the card extender base plate.
40. the alignment machine of be used to align electric contactor and card extender, described alignment machine comprises:
The framework that the electric contactor top position is movable;
Be installed to the carriage of described framework, be used in the x-y plane, producing displacement with the z direction vertical with the x-y plane;
Displacement parts on the described framework, can so that described carriage in the x-y plane and z direction top offset;
Erecting device on the described carriage is used for described card extender is installed to described carriage.
41. according to the described alignment machine of claim 40, it further comprises the alignment parts that are installed to described framework, be used to indicate described card extender when with described electric contactor spatial alignment.
42. according to the described alignment machine of claim 41, wherein said alignment parts comprise be used to amplify lay respectively on the described electric contactor and described card extender on the amplification system of reference mark.
43. according to the described alignment machine of claim 42, wherein said displacement parts comprise a plurality of micrometers, be used to make described carriage at x-y plane intrinsic displacement with the described reference mark of aliging.
44. according to the described alignment machine of claim 43, wherein said displacement parts comprise micrometer, be used to make described carriage at z direction top offset so that described card extender touches described electric contactor.
45. according to the described alignment machine of claim 40, wherein said erecting device comprises the fixed member that can become flexible, and is used for work package is fixed to described carriage, wherein said work package size is for can hold described card extender.
46. according to the described alignment machine of claim 45, wherein said erecting device size is contained in described card extender in the described work package to produce suction force for can allow evacuated panel to attach to described work package.
47. the method for an assembling test contactor, described method comprises:
Alignment card extender and electric contactor, the resilient interconnection elements of wherein said card extender produce elastic deformation with described electric contactor on corresponding electric terminal electrically contact; And
Card extender and electric contactor after the alignment are secured together.
48. according to the described method of claim 47, the described card extender that wherein aligns comprises at first in the x-y plane primary importance that described card extender is aligned in above the described electric contactor, and each resilient interconnection elements of wherein said card extender is alignd with the electric terminal corresponding with it on the described electric contactor; And then with described card extender in the upper second place that moves on to of z direction, each resilient interconnection elements of wherein said card extender contacts with corresponding electric terminal on the described electric contactor.
49. according to the described method of claim 48, the described card extender that wherein aligns comprises further that with described card extender in upper the 3rd position that moves on to of z direction, each resilient interconnection elements of wherein said card extender is in the compression.
50. according to the described method of claim 49, wherein when the block on the described card extender touched described electric connector, described card extender was in described the 3rd position.
51. according to the described method of claim 48, wherein the described card extender of alignment comprises described card extender at x, y or θ direction top offset in the x-y plane.
52. according to the described method of claim 48, the described card extender that wherein aligns in the x-y plane comprises the reference mark on align respectively described card extender and the electric contactor.
53. an assembling test contactor is with the method for testing integrated circuits, described method comprises:
Card extender is placed its base;
Described base is attached to alignment machine;
The described base of adjusting on the described alignment machine that is arranged so that is displaced to aligned position with respect to electric contactor, the resilient interconnection elements of wherein said card extender produce elastic deformation with described electric contactor on corresponding electric terminal electrically contact; And
At described aligned position described base is fixed to described electric contactor.
54., wherein described card extender is placed described base to comprise the seat that described card extender is remained on described base with suction according to the described method of claim 53.
55. according to the described method of claim 53, wherein said base comprises the annulation with the ring-shaped depression that limits the seat.
56., wherein adjust described setting and comprise the displacement parts of adjusting described alignment machine, thereby the reference mark on align respectively described card extender and the described electric contactor with mobile described base in the x-y plane according to the described method of claim 53.
57., comprise that further adjusting described displacement parts sends described card extender into aligned position to move described base on the z direction thereby wherein adjust described the setting according to the described method of claim 56.
58. according to the described method of claim 57, the displacement on the wherein said z direction is limited by the block between described card extender and the electric contactor, when described card extender and electric contactor were positioned at aligned position, described block was run into described electric contactor.
59. according to the described method of claim 55, it further comprises installs evacuated panel to the one side of described annulation and produce negative pressure region between described card extender and described seat.
60. according to the described method of claim 59, it removes described evacuated panel after further being included in described annulation being fixed to described electric contactor.
61. the method for an assembling test contactor, described method comprises:
Alignment card extender and electric contactor, first resilient interconnection elements of wherein said card extender produce elastic deformation with described electric contactor on corresponding electric terminal electrically contact;
Card extender after the alignment and electric contactor are secured together to form subassembly;
Described subassembly is moved towards the test base plate, so that second resilient interconnection elements on the described card extender and described test base plate electrically contact; And
Described electric contactor is connected to the test probes circuit.
62. the method for an assembling test contactor, described method comprises:
Card extender is positioned the primary importance above the electric contactor in the x-y plane, the reference mark on wherein said card extender and the described contactor is respectively in described primary importance alignment;
At the described card extender of z direction top offset to the second place, each in a plurality of resilient interconnection elements of wherein said card extender respectively with described electric contactor on a plurality of electric terminals in each electrically contact; And
In the described card extender to the of z direction top offset three positions, each resilient interconnection elements of wherein said card extender is in the compression.
CNB038166755A 2002-07-16 2003-07-15 Assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component Expired - Fee Related CN100523826C (en)

Applications Claiming Priority (4)

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US10/197,104 US6867608B2 (en) 2002-07-16 2002-07-16 Assembly for electrically connecting a test component to a testing machine for testing electrical circuits on the test component
US10/197,133 2002-07-16
US10/197,104 2002-07-16
US10/197,133 US6853209B1 (en) 2002-07-16 2002-07-16 Contactor assembly for testing electrical circuits

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CN100523826C CN100523826C (en) 2009-08-05

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JP (1) JP2005533254A (en)
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CN103187326A (en) * 2011-12-28 2013-07-03 巨擘科技股份有限公司 Packaging method of ultrathin substrate
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CN101051067B (en) * 2006-04-03 2010-08-11 航天科工防御技术研究试验中心 Comprehensive detection control device design method for electric connector
CN101779135B (en) * 2007-08-14 2013-08-28 电子科学工业有限公司 Automated contact alignment tool
CN101545926B (en) * 2008-03-25 2011-05-11 旺矽科技股份有限公司 Probe testing device
CN102365557A (en) * 2009-03-10 2012-02-29 弗劳恩霍弗实用研究促进协会 Measuring device for measuring structures that can be connected on one side for electrical measuring planes
CN103187326A (en) * 2011-12-28 2013-07-03 巨擘科技股份有限公司 Packaging method of ultrathin substrate
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WO2004008163A3 (en) 2004-06-10
CN100523826C (en) 2009-08-05
WO2004008163A2 (en) 2004-01-22
EP1523685A2 (en) 2005-04-20
JP2005533254A (en) 2005-11-04
AU2003249276A8 (en) 2004-02-02
KR20050029215A (en) 2005-03-24
AU2003249276A1 (en) 2004-02-02

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