CN113544556B - Optical element and light source device - Google Patents
Optical element and light source device Download PDFInfo
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- CN113544556B CN113544556B CN202080019345.5A CN202080019345A CN113544556B CN 113544556 B CN113544556 B CN 113544556B CN 202080019345 A CN202080019345 A CN 202080019345A CN 113544556 B CN113544556 B CN 113544556B
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- volume phase
- diffraction grating
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- 230000003287 optical effect Effects 0.000 title claims abstract description 53
- 238000000605 extraction Methods 0.000 claims abstract description 14
- 230000000737 periodic effect Effects 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 7
- 230000001678 irradiating effect Effects 0.000 claims description 6
- 108010010803 Gelatin Proteins 0.000 claims description 4
- 229920000159 gelatin Polymers 0.000 claims description 4
- 239000008273 gelatin Substances 0.000 claims description 4
- 235000019322 gelatine Nutrition 0.000 claims description 4
- 235000011852 gelatine desserts Nutrition 0.000 claims description 4
- 238000000151 deposition Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000000609 electron-beam lithography Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- SOCTUWSJJQCPFX-UHFFFAOYSA-N dichromate(2-) Chemical compound [O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O SOCTUWSJJQCPFX-UHFFFAOYSA-N 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 108010025899 gelatin film Proteins 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 206010034972 Photosensitivity reaction Diseases 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- JOSWYUNQBRPBDN-UHFFFAOYSA-P ammonium dichromate Chemical compound [NH4+].[NH4+].[O-][Cr](=O)(=O)O[Cr]([O-])(=O)=O JOSWYUNQBRPBDN-UHFFFAOYSA-P 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000001427 coherent effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000000025 interference lithography Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000036211 photosensitivity Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V9/00—Elements for modifying spectral properties, polarisation or intensity of the light emitted, e.g. filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/01—Head-up displays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/44—Grating systems; Zone plate systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/32—Holograms used as optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
- G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
- G03H1/22—Processes or apparatus for obtaining an optical image from holograms
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Holo Graphy (AREA)
- Planar Illumination Modules (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
The invention provides an optical element and a light source device which are small and lightweight and can expand the light irradiation range. The optical element includes: a light guide unit (11) having a light incident surface (11 a) on which light is incident and a light extraction surface (11 b) on which light reaches; a volume phase hologram grating (13) provided on the light extraction surface (11 b); and a diffraction grating section (12) provided on the volume phase hologram grating (13).
Description
Technical Field
The present invention relates to an optical element and a light source device, and more particularly, to an optical element and a light source device using a diffraction grating.
Background
Conventionally, a dashboard on which icons are displayed by lighting is used as a device for displaying various information in a vehicle. In addition, as the amount of information to be displayed increases, it has also been proposed to incorporate an image display device into a dashboard and to form the entire dashboard from the image display device.
However, since the instrument panel is located below the front windshield of the vehicle, the driver needs to move the line of sight downward while driving in order to visually recognize information displayed on the instrument panel, which poses a safety hazard. Accordingly, a Head-Up Display (hereinafter, referred to as "Head Up Display") has been proposed, which projects an image onto a front windshield to read information when a driver views the front of a vehicle (see, for example, patent document 1). In addition, for the purpose of automatic driving technology and driving assistance technology of vehicles, sensor technology has been developed that measures inter-vehicle distances and checks obstacles by using irradiation and light reception of laser light.
In the head-up display and the sensor described above, an optical member such as a lens is used for irradiating a wide range of laser light. However, in an optical system using lenses, it is necessary to combine a plurality of lenses and to increase the lens diameter in order to irradiate a laser beam over a wide range, and it is difficult to achieve downsizing of the light source device.
In order to solve the above-described problems, a technique of expanding the irradiation range of laser light by using a diffraction grating instead of an optical lens has been proposed. Fig. 3 is a schematic diagram showing an outline of a conventional light source device using a diffraction grating. As shown in fig. 3, the conventional light source device includes a light guide unit 1, a diffraction grating unit 2, and a light source unit 4. The light irradiated from the light source part 4 enters the back surface side of the light guide part 1 and is irradiated at an angle phi 0 Transmits the inside of the light guide portion 1 and reaches the diffraction grating portion 2 formed on the light guide portion 1. In the diffraction grating section 2, light is diffracted by diffraction conditions to an irradiation angle Φ 1 And irradiating to the outside. By properly designing the wavelength of the light emitted from the light source section 4 and the pitch of the diffraction grating section 2, the irradiation angle Φ of the emitted light can be made 1 Is larger than the irradiation angle phi in the light guide part 1 0 。
Patent document 1: japanese patent laid-open publication No. 2018-118669
However, in the conventional light source device shown in fig. 3, the irradiation angle Φ of the light to be externally irradiated 1 Since the light irradiation range is limited by the pitch of the diffraction grating portion 2 alone.
Disclosure of Invention
The present invention has been made in view of the above-described conventional problems, and an object thereof is to provide an optical element and a light source device which are small and lightweight and can expand the light irradiation range.
In order to solve the above-described problems, an optical element of the present invention includes: a light guide unit having a light incident surface on which light is incident and a light extraction surface on which the light reaches; a volume phase hologram grating disposed on the light extraction surface; and a diffraction grating unit formed by depositing a dielectric on the volume phase hologram grating, wherein a protective film is formed on a side surface of the optical element, and the volume phase hologram grating is sealed by the protective film and the diffraction grating unit.
In the optical element of the present invention, the multiple diffraction grating is formed by a combination of the volume phase hologram grating and the diffraction grating portion. Thus, the irradiation angle of light can be enlarged by the volume phase hologram grating, and the irradiation angle of light can be enlarged by the diffraction grating portion, so that the light irradiation range can be enlarged while being small and lightweight.
In one embodiment of the present invention, the volume phase hologram grating has a periodic structure of refractive index formed inside the gelatin layer.
Further, an image display device of the present invention includes: any one of the optical elements described above; and a light source unit that irradiates the light onto the light incident surface, and irradiates a part of the light from the diffraction grating unit to the outside.
In one aspect of the present invention, the light source unit is an optical phased array in which a plurality of light emitting units are two-dimensionally arranged.
The present invention can provide an optical element and a light source device which are small and lightweight and can expand the light irradiation range.
Drawings
Fig. 1 is a schematic perspective view showing the structure of an optical element according to a first embodiment.
Fig. 2 is a schematic cross-sectional view showing the structure and the optical path of the light source device 10 using the optical element.
Fig. 3 is a schematic diagram showing an outline of a conventional light source device using a diffraction grating.
Detailed Description
(first embodiment)
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. The same or equivalent structural elements, members, and processes shown in the drawings are denoted by the same reference numerals, and repetitive description thereof will be omitted as appropriate. In addition, the drawings schematically show the structures of the optical element and the light source device, and the dimensions and angles in the drawings do not show the actual dimensions in the optical element and the light source device 10.
Fig. 1 is a schematic perspective view showing the structure of an optical element in the present embodiment. As shown in fig. 1, the optical element includes a light guide portion 11, a diffraction grating portion 12, and a volume phase hologram grating (VPHG: volume Phase Holographic Gratings) 13.
The light guide 11 is a substantially plate-shaped portion made of a light-transmitting material, and includes a light incident surface 11a and a light extraction surface 11b. The size of the light guide 11 is not limited, but may be, for example, about 10mm in width and about 3mm in thickness. The material constituting the light guide 11 is not limited, but for example, siO is preferably used 2 Glass having a refractive index of about 1.5 as a main component. The light incident surface 11a is a flat surface on which light from a light source arranged outside the optical element is incident, and faces the light extraction surface 11b. The light extraction surface 11b is a flat surface on which the volume phase hologram grating 13 is formed, and faces the light incidence surface 11a.
The diffraction grating portion 12 is a substantially plate-shaped portion formed on the volume phase hologram grating 13, and a plurality of convex portions 12a and concave portions 12b are formed periodically on the surface thereof to constitute a diffraction grating.
Fig. 1 shows an example in which the convex portion 12a and the concave portion 12b of the diffraction grating portion 12 are formed to extend in parallel stripes, but the shape is not limited to the stripe shape, and the convex portion 12a and the concave portion 12b may be two-dimensionally arranged. In fig. 1, the cross-sections of the convex portions 12a and concave portions 12b of the diffraction grating portion 12 are shown as rectangular, but the cross-section shape is not limited, and a slant grating and a blazed grating may be used.
The material constituting the diffraction grating portion 12 is not limited, but a dielectric material having a large refractive index difference from the volume phase hologram 13 is preferably used, and for example, a material using TiO is preferably used 2 A dielectric material having a refractive index of about 2.5 as a main component. The diffraction grating portion 12 is not particularly limited in size, but preferably has a thickness capable of transmitting light in the in-plane direction. The diffraction grating portion 12 may be formed by a known method, and for example, a nanoimprint technique, an EBL (Electron Beam Lithography: electron beam lithography) technique, or the like may be used.
The volume phase hologram grating 13 is formed on the light extraction surface 11b of the light guide portion 11, and is a layer that internally three-dimensionally constitutes a periodic structure 13a of refractive index. A diffraction grating portion 12 is formed on the surface of the volume phase hologram grating 13. The material constituting the volume phase hologram grating 13 is not particularly limited, but a material having photosensitivity is preferably used, and for example, a known material such as dichromated gelatin can be used.
The thickness of the volume phase hologram 13 is not limited, but is preferably about 10 to 30 μm. This is because, when the wavelength of the volume phase hologram 13 is λ, the thickness is t, the angle between the two light beams in the hologram is θ, and the refractive index is n, the wavelength selection range of the reproduced light is defined by Δλ=λ 2 And/nt (1-cos θ). For example, in order to reduce the wavelength selection range of the reproduction light to about Δλ=20 nm, t=24 μm is suitable under the conditions of λ=532 nm, n=1.5, θ=90°.
An example of a method of manufacturing the optical element shown in fig. 1 is described. First, a plate-shaped light guide 11 is prepared in a substrate preparation step, and then a dichromate gelatin film is formed by coating a gelatin film on the light guide 11 in a deposition step and immersing the film in an aqueous ammonium dichromate solution. Next, in the photolithography step, a three-dimensional periodic structure 13a having a refractive index is exposed to a dichromate film using a known interference lithography technique, thereby forming a volume phase hologram 13.
Next, in the dielectric forming step, tiO is formed on the volume phase hologram 13 by vapor deposition or the like 2 A layer, followed by a step of forming a diffraction grating on the TiO 2 The layer surface is formed with the convex portions 12a and concave portions 12b using EBL technique, and the diffraction grating portions 12 are formed. Finally, the optical element of the present embodiment can be obtained by cutting the optical element into a predetermined size in the dicing step. Although not shown in fig. 1, a protective film such as glass may be formed on the side surface of the optical element as necessary, and the side surface of the volume phase hologram 13 may be sealed.
Fig. 2 is a schematic cross-sectional view showing the structure and the optical path of the light source device 10 using the optical element. As shown in fig. 2, in the light source device 10 of the present embodiment, light is irradiated from the light source unit 14 to the light incident surface 11a of the optical element shown in fig. 1. The light source unit 14 is not limited as long as it is a light source that irradiates coherent light of a predetermined wavelength, but an optical phased array (OPA: optical Phased Array) in which a plurality of light emitting units irradiating laser light are two-dimensionally arranged is preferably used.
As shown in fig. 2, the laser light emitted from the light source 14 is incident substantially perpendicularly to the light incident surface 11a of the light guide 11, and is irradiated at an irradiation angle Φ inside the light guide 11 0 Travels and reaches the light extraction surface 11b. The light transmitted volume phase hologram 13 and the diffraction grating portion 12 reaching the light extraction surface 11b and having an irradiation angle Φ 2 And irradiating to the outside. At this time, the laser light is diffracted by the periodic structure 13a having a refractive index in the volume phase hologram 13, and then is diffracted by the diffraction grating portion 12. Thus, the irradiation angle Φ can be enlarged as compared with the case where the diffraction grating portion 12 or the volume phase hologram grating 13 is used alone 2 。
As shown in fig. 2, since the light transmitted through the diffraction grating portion 12 is light diffracted by the volume phase hologram 13, it is necessary to design the convex portion 12a and the concave portion 12b in the diffraction grating portion 12 on the premise of diffraction in the volume phase hologram 13. The angle at which the laser light irradiated from the light source unit 14 enters the light guide unit 11 needs to satisfy the diffraction conditions of the diffraction grating unit 12 and the volume phase hologram grating 13.
In the optical element and the light source device 10 of the present embodiment, since the multiple diffraction grating is formed by combining the diffraction grating portion 12 and the volume phase hologram grating 13, the reduction in size and weight can be achieved as compared with the case where the irradiation angle is enlarged by using an optical lens and a mirror. Further, by using the diffraction grating portion 12 and the volume phase hologram grating 13, the light irradiation range can be enlarged without setting the focal distance between the optical element and the light source portion 14, and the degree of freedom in design can be improved.
Instead of forming the diffraction grating portion 12 on the volume phase hologram 13, an additional volume phase hologram layer may be formed as the optical element of the present invention. However, when an additional volume phase hologram layer is formed on the volume phase hologram 13, an air gap may be generated between the two layers, and there is a possibility that optical characteristics may be degraded.
In contrast, in the optical element and the light source device 10 of the present embodiment, since the diffraction grating portion 12 is formed by vapor deposition of the dielectric on the volume phase hologram 13, it is possible to prevent the occurrence of an air gap at the interface, and to suppress the deterioration of the optical characteristics. In addition, although the formation of the volume phase hologram grating 13 requires a large number of steps and manufacturing time, the manufacturing process can be simplified by forming only one layer of the volume phase hologram grating 13 and combining it with the diffraction grating portion 12.
Further, since the diffraction grating portion 12 made of a dielectric is formed on the upper surface of the volume phase hologram grating 13 made of a material such as gelatin, the volume phase hologram grating 13 can be protected from contact with air. Here, if a protective film such as glass is also formed on the side surface of the optical element, the volume phase hologram 13 can be sealed by the diffraction grating portion 12 and the protective film, which is more preferable.
The diffraction grating portion 12 may employ not only the convex portion 12a and the concave portion 12b having rectangular cross sections as described above, but also a slanted grating, a blazed grating, and a two-dimensional diffraction grating. This improves the degree of freedom in optical design of the diffraction grating portion 12, and also facilitates adjustment of the optical characteristics of the optical element and the light source device 10.
As described above, the optical element and the light source device 10 of the present embodiment are small and lightweight, and can expand the light irradiation range, compared with the case where the reflecting mirror and the optical lens are used.
(second embodiment)
Next, a second embodiment of the present invention will be described. The description is omitted from the repeated description of the first embodiment. Fig. 1 shows that light incident from the light source unit 14 is incident in the light guide unit 11 at an irradiation angle Φ 0 In the traveling example, the laser light from the light source unit 14 may be made incident on the light incident surface 11a as collimated light by a lens or the like. In this case, the irradiation angle Φ 0 =0 degrees.
By setting the light entering the light guide 11 to collimated light, the area of the optical phased array used by the light source 14 can be set to the same level as that of the optical element, and the light intensity per unit area can be increased.
(third embodiment)
Next, a third embodiment of the present invention will be described. The description is omitted from the repeated description of the first embodiment. In the first embodiment, the rear surface side of the light guide portion 11 is the light incident surface 11a, and the laser light is made to enter the light incident surface 11a substantially perpendicularly, but the laser light may be made to enter the light incident surface 11a at an incidence angle inclined at a predetermined angle. In this case, it is necessary to appropriately design the periodic structure 13a of refractive index formed inside the volume phase hologram 13 and the convex portion 12a and the concave portion 12b formed in the diffraction grating portion 12, respectively, corresponding to the incident angle.
In fig. 1, the back surface side of the light guide 11 is the light incident surface 11a, but the side surface may be the light incident surface 11a, so that the laser light reaches the light extraction surface 11b at an incidence angle inclined at a predetermined angle.
The present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the claims, and embodiments obtained by appropriately combining the technical means disclosed in the respective different embodiments are also included in the technical scope of the present invention.
The present international application claims priority from japanese patent application publication No. 2019-081905, of which the application date is 2019, 4, 23, and the entire contents of the japanese patent application publication No. 2019-081905 are incorporated by reference into the present international application.
The foregoing description of specific embodiments of the present invention has been presented for the purpose of illustration. The above description is not intended to be exhaustive or to limit the invention to the precise form disclosed. Numerous variations and modifications will occur to those skilled in the art in light of the foregoing description.
Description of the reference numerals
10 light source device
11 light guide part
11a light incident surface
11b light extraction face
12 diffraction grating part
12a convex portion
12b recess
13 volume phase holographic grating
13a refractive index periodic structure
14 light source portion.
Claims (4)
1. An optical element, comprising:
a light guide unit having a light incident surface on which light is incident and a light extraction surface on which the light reaches;
a volume phase hologram grating disposed on the light extraction surface; and
a diffraction grating section formed by depositing a dielectric on the volume phase hologram grating,
the optical element has a protective film formed on a side surface, and the volume phase hologram grating is sealed by the protective film and the diffraction grating portion.
2. The optical element of claim 1, wherein the volume phase hologram grating has a periodic structure of refractive index formed inside a gelatin layer.
3. A light source device, comprising:
the optical element of claim 1 or 2; and
a light source unit for irradiating the light incident surface with the light,
and irradiating a part of the light from the diffraction grating portion to the outside.
4. A light source device according to claim 3, wherein the light source section is an optical phased array in which a plurality of light emitting sections are two-dimensionally arranged.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019081905A JP7398878B2 (en) | 2019-04-23 | 2019-04-23 | Optical elements and light source devices |
| JP2019-081905 | 2019-04-23 | ||
| PCT/JP2020/016527 WO2020218106A1 (en) | 2019-04-23 | 2020-04-15 | Optical element and light source device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113544556A CN113544556A (en) | 2021-10-22 |
| CN113544556B true CN113544556B (en) | 2023-08-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202080019345.5A Active CN113544556B (en) | 2019-04-23 | 2020-04-15 | Optical element and light source device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP7398878B2 (en) |
| CN (1) | CN113544556B (en) |
| WO (1) | WO2020218106A1 (en) |
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Also Published As
| Publication number | Publication date |
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| JP7398878B2 (en) | 2023-12-15 |
| JP2020181005A (en) | 2020-11-05 |
| CN113544556A (en) | 2021-10-22 |
| WO2020218106A1 (en) | 2020-10-29 |
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