CN112548692B - A micro-feed device for uniformly removing material from the tip of an arc-edged diamond tool - Google Patents
A micro-feed device for uniformly removing material from the tip of an arc-edged diamond tool Download PDFInfo
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- CN112548692B CN112548692B CN202011442853.2A CN202011442853A CN112548692B CN 112548692 B CN112548692 B CN 112548692B CN 202011442853 A CN202011442853 A CN 202011442853A CN 112548692 B CN112548692 B CN 112548692B
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- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 50
- 239000010432 diamond Substances 0.000 title claims abstract description 50
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- 238000004519 manufacturing process Methods 0.000 abstract description 4
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- 238000012545 processing Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B3/00—Sharpening cutting edges, e.g. of tools; Accessories therefor, e.g. for holding the tools
- B24B3/36—Sharpening cutting edges, e.g. of tools; Accessories therefor, e.g. for holding the tools of cutting blades
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/20—Drives or gearings; Equipment therefor relating to feed movement
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Abstract
Description
技术领域technical field
本发明属于超精密制造装备技术领域,涉及一种金刚石刀具微进给装置。The invention belongs to the technical field of ultra-precision manufacturing equipment, and relates to a micro-feeding device for a diamond tool.
背景技术Background technique
超精密加工技术起源于上世纪五十年代末、六十年代初,随着该技术的不断进步和航空宇航、计算机等行业的需求,得到了越来越广泛的运用,现已在军用和高尖端民用产品制造领域中占有非常重要的地位。如大型天体望远镜的反射镜,惯性导航仪表的精密陀螺仪用空气轴承,大规模集成电路制造装备,激光打印机用多面棱镜,高速摄像机的扫描镜等等,都需要超精密加工。Ultra-precision machining technology originated in the late 1950s and early 1960s. With the continuous progress of this technology and the needs of aerospace, computer and other industries, it has been used more and more widely. It is now used in military and high-tech industries. It occupies a very important position in the field of cutting-edge civilian product manufacturing. Such as mirrors for large astronomical telescopes, air bearings for precision gyroscopes of inertial navigation instruments, large-scale integrated circuit manufacturing equipment, polygonal prisms for laser printers, scanning mirrors for high-speed cameras, etc., all require ultra-precision machining.
超精密切削技术作为超精密加工技术中重要的一部分,其技术指标主要有工件的表面粗糙度和面形精度。要想获得符合要求的工件,必须具备以下几个条件:超精密加工机床、高精度和高灵敏度的检测设备、非常稳定的外部加工环境以及与工件产生接触的高精度刀具。金刚石刀具广泛运用于超精密切削加工的场合,其加工过程遵循误差复印原则,即机床的运动误差,外界环境的变化(噪声、振动、温度变化),以及刀具的形状误差会以切削残留的方式复印在工件的表面,从而影响工件的加工质量。因此,高质量的金刚石刀具是超精密切削工作开展的重要保障。Ultra-precision cutting technology is an important part of ultra-precision machining technology, and its technical indicators mainly include the surface roughness and surface shape accuracy of the workpiece. In order to obtain a workpiece that meets the requirements, the following conditions must be met: ultra-precision machine tools, high-precision and high-sensitivity testing equipment, a very stable external processing environment, and high-precision tools that come into contact with the workpiece. Diamond tools are widely used in ultra-precision cutting applications. The processing process follows the principle of error copying, that is, the motion error of the machine tool, changes in the external environment (noise, vibration, temperature changes), and the shape error of the tool will be in the form of cutting residues. Copies on the surface of the workpiece, thereby affecting the processing quality of the workpiece. Therefore, high-quality diamond tools are an important guarantee for ultra-precision cutting work.
圆弧刃金刚石刀具的参数有很多,其中目前公认的最主要的评价参数有刃口钝圆半径,刀尖圆弧圆度和前、后刀面的表面粗糙度。刃口钝圆半径也为刀具的锋利度,不仅影响工件的加工精度,还决定了其最小切深;刀尖圆弧圆度直接影响工件的面形精度;前、后刀面的粗糙度决定刀具工作时与工件之间的摩擦力,是刀具寿命的重要影响因素。目前加工金刚石刀具的方法有很多,综合成本、效率、加工的难易度、精度等多个方面,机械研磨法仍然具有绝对的优势。要想加工出刃口钝圆半径小,刀尖圆弧圆度小的圆弧刃金刚石刀具,在研磨过程中刀刃不能承受大的冲击,且刀尖圆弧上的材料得到均匀去除,即尽量保证刀刃研磨过程缓慢且均匀。由于金刚石材料的各向异性,金刚石刀具不同研磨方向的材料去除率不同,目前还没有合适的装置来实现这种操作过程,只能通过全程的微小进给量保证刀刃材料的微量除去,如此一来,既不能实现研磨刀刃的均匀性,也会导致研磨的效率很低。综上所述,亟需研制一种新型装置来实现圆弧刃金刚石刀具刀尖材料的均匀去除。There are many parameters of arc-edged diamond tools, among which the most recognized evaluation parameters are the blunt radius of the cutting edge, the roundness of the tip arc and the surface roughness of the front and flank surfaces. The blunt circle radius of the cutting edge is also the sharpness of the tool, which not only affects the machining accuracy of the workpiece, but also determines its minimum depth of cut; the roundness of the tool nose arc directly affects the surface accuracy of the workpiece; the roughness of the front and flank surfaces determines The friction between the tool and the workpiece is an important factor affecting the tool life. At present, there are many methods for processing diamond tools. In terms of comprehensive cost, efficiency, difficulty of processing, and precision, mechanical grinding still has absolute advantages. In order to process a diamond tool with a small blunt circle and a small circular arc of the cutting edge, the cutting edge cannot bear a large impact during the grinding process, and the material on the circular arc of the cutting edge is uniformly removed, that is, try to ensure that The blade grinding process is slow and uniform. Due to the anisotropy of diamond materials, the material removal rates of diamond tools in different grinding directions are different. At present, there is no suitable device to realize this operation process. Only a small amount of feed in the whole process can ensure the micro-removal of the blade material. Therefore, the uniformity of the grinding blade cannot be achieved, and the grinding efficiency will be very low. To sum up, there is an urgent need to develop a new type of device to achieve uniform removal of material at the tip of a diamond tool with an arc edge.
发明内容SUMMARY OF THE INVENTION
本发明的目的是为了解决目前为止,没有能够实现金刚石刀具研磨过程中刀尖圆弧材料均匀去除的装置的问题,提供一种高精度且操作简便的基于高精度进给工作台的圆弧刃金刚石刀具刀尖材料均匀去除装置。The purpose of the present invention is to solve the problem that so far, there is no device that can realize the uniform removal of the arc material of the cutting edge in the grinding process of the diamond tool, and to provide a high-precision and easy-to-operate arc blade based on a high-precision feed table Uniform removal device for diamond tool tip material.
为了达到上述目的,本发明所采用的技术方案是:一种圆弧刃金刚石刀具刀尖材料均匀去除微进给装置,包括液体静压转台部件、微进给部件、粗进给部件、刀架和机床基座;所述刀架安装在微进给部件上,所述微进给部件安置于粗进给部件上,所述粗进给部件安装在液体静压转台部件上,所述液体静压转台部件固定在机床基座的上表面。In order to achieve the above-mentioned purpose, the technical scheme adopted in the present invention is: a micro-feeding device for uniformly removing the tip material of a circular-arc-edged diamond tool, including a hydrostatic turntable part, a micro-feeding part, a rough-feeding part, a tool rest and the machine tool base; the tool holder is mounted on the micro-feed part, the micro-feed part is arranged on the rough-feed part, the rough-feed part is mounted on the hydrostatic turntable part, the hydrostatic The press turntable part is fixed on the upper surface of the machine base.
本发明的有益效果在于:The beneficial effects of the present invention are:
1.本发明通过液体静压转台部件、微进给部件和粗进给部件,有效地解决了金刚石刀具高精密研磨过程中,没有装置能够实现刀尖圆弧材料均匀去除的问题,可以简单便捷地进行刀具刀尖圆弧材料均匀去除操作。1. The present invention effectively solves the problem that in the process of high-precision grinding of diamond tools, there is no device that can realize the uniform removal of the tool tip arc material through the hydrostatic rotary table components, the micro-feed components and the rough-feed components, which can be simple and convenient. The tool nose arc material removal operation is carried out smoothly.
2.本发明中微进给部件的直线度误差小于60nm,定位误差小于30nm,分辨率小于2nm,可以实现高精度的刀具定位和极小的刀具进给量,2. In the present invention, the straightness error of the micro-feed component is less than 60nm, the positioning error is less than 30nm, and the resolution is less than 2nm, which can realize high-precision tool positioning and extremely small tool feed.
3.本发明中液体静压转台的轴向、径向回转误差小于0.1μm,可以实现低速平稳的高精度回转运动。3. The axial and radial rotation errors of the hydrostatic turntable in the present invention are less than 0.1 μm, which can realize low-speed, stable and high-precision rotary motion.
4.因为金刚石刀具单位时间内材料的去除率与研磨的方向有关,越好磨的方向,材料单位时间内的去除率越大,而单位时间总去除量正比于单位时间内材料的去除率与研磨压力的乘积。在金刚石刀具圆弧刃的研磨过程中,去除好磨方向材料时,可以控制微进给部件减小进给量从而减小研磨压力,去除难磨方向材料时,可以控制微进给部件增大进给量从而增大研磨压力,进而实现金刚石刀具研磨过程中,刀尖圆弧材料始终被均匀去除,如此可以提高圆弧刃的波纹度,得到质量更高的金刚石刀具。4. Because the material removal rate per unit time of the diamond tool is related to the grinding direction, the better the grinding direction, the greater the material removal rate per unit time, and the total removal amount per unit time is proportional to the material removal rate per unit time and The product of grinding pressure. In the grinding process of the arc edge of the diamond tool, when removing the material in the good grinding direction, the micro-feed part can be controlled to reduce the feed amount to reduce the grinding pressure; when the material in the difficult-to-grind direction is removed, the micro-feed part can be controlled to increase The feed rate increases the grinding pressure, so that during the grinding process of the diamond tool, the arc material of the tool tip is always uniformly removed, so that the waviness of the arc edge can be improved, and a higher quality diamond tool can be obtained.
附图说明Description of drawings
图1为本发明的总体结构的三维立体图,图1中的箭头所指的方向为机床工作时金刚石刀具的进给方向;Fig. 1 is a three-dimensional perspective view of the overall structure of the present invention, and the direction indicated by the arrow in Fig. 1 is the feeding direction of the diamond tool when the machine tool is working;
图2为本发明的总体主视图;Fig. 2 is the general front view of the present invention;
图3为图2的俯视图;Fig. 3 is the top view of Fig. 2;
图4为液体静压转台部件的主剖视图;4 is a front cross-sectional view of a hydrostatic turntable component;
图5为微进给部件的俯视结构图;Fig. 5 is the top structure view of the micro-feed component;
图6为粗进给部件的主剖视图;6 is a front cross-sectional view of a rough feed component;
图7为导轨座和导轨安装示意图;Figure 7 is a schematic diagram of the installation of the guide rail seat and the guide rail;
图8为移动块安装示意图;Fig. 8 is a schematic diagram of moving block installation;
图9为防尘板安装示意图;Figure 9 is a schematic diagram of the installation of the dust-proof plate;
图中:1、液体静压转台部件;1-1、转台底座;1-2、壳体;1-3、密封圈;1-4、工作台面;1-5、径向轴承定子;1-6、轴承转轴;1-7、圆光栅;1-8、读数头;1-9、读数头支架;1-10、转台电机;1-11、节流器;1-12、轴向轴承止推板;2、微进给部件;2-1、柔性铰链;2-2、压电陶瓷;2-3、刚性支撑架;3、粗进给部件;3-1、底座挡板;3-2、丝杠轴承;3-3、进给丝杠;3-4、导轨;3-5、移动块;3-6、导轨座;3-7、平移台面;3-8、进给螺母;3-9、平移台底座;3-10、防尘板;3-11、轴承支架;3-12、联轴器;3-13、进给电机;3-14、电机壳体;4、刀架;5、机床基座。In the figure: 1. Hydrostatic turntable components; 1-1. Turntable base; 1-2. Housing; 1-3. Sealing ring; 1-4. Working table; 1-5. Radial bearing stator; 1- 6. Bearing shaft; 1-7, circular grating; 1-8, reading head; 1-9, reading head bracket; 1-10, turntable motor; 1-11, restrictor; 1-12, axial bearing stop Push plate; 2. Micro-feed part; 2-1, Flexible hinge; 2-2, Piezoelectric ceramics; 2-3, Rigid support frame; 3, Rough feed part; 3-1, Base baffle; 3- 2. Screw bearing; 3-3, Feed screw; 3-4, Guide rail; 3-5, Moving block; 3-6, Guide rail seat; 3-7, Translation table; 3-8, Feed nut; 3-9, translation stage base; 3-10, dustproof plate; 3-11, bearing bracket; 3-12, coupling; 3-13, feed motor; 3-14, motor housing; 4, Tool holder; 5. Machine tool base.
具体实施方式Detailed ways
如图1~图6所示,一种圆弧刃金刚石刀具刀尖材料均匀去除微进给装置,包括液体静压转台部件1、微进给部件2、粗进给部件3、刀架4和机床基座5;所述刀架4安装在微进给部件2上,所述微进给部件2安置于粗进给部件3上,所述粗进给部件3安装在液体静压转台部件1上,所述液体静压转台部件1固定在机床基座5的上表面。As shown in Figures 1 to 6, a micro-feeding device for uniformly removing material from the tip of an arc-edged diamond tool includes a
如图5所示,所述微进给部件2包括柔性铰链2-1、压电陶瓷2-2及刚性支撑架2-3;所述柔性铰链2-1和刚性支撑架2-3为一整体结构,所述压电陶瓷2-2的左侧面与柔性铰链2-1的右侧面固定连接,压电陶瓷2-2的右侧面与刚性支撑架2-3的内表面固定连接,所述刀架4紧固安装在柔性铰链2-1的上表面上。As shown in FIG. 5 , the
微进给部件2可以将压电陶瓷2-2的微量伸缩量转化为微进给部件2的微量移动量,可以实现超高精度的进给。The
如图6~9所示,所述粗进给部件3包括进给丝杠3-3、移动块3-5、平移台面3-7、进给螺母3-8、联轴器3-12及进给电机3-13;所述进给电机3-13通过联轴器3-12与进给丝杠3-3同轴连接并带动进给丝杠3-3转动,所述进给丝杠3-3上螺纹套装有进给螺母3-8并带动进给螺母3-8沿进给丝杠3-3移动,所述进给螺母3-8通过移动块3-5与平移台面3-7连接,所述平移台面3-7用于安装微进给部件2。As shown in FIGS. 6-9 , the
所述粗进给部件3还包括底座挡板3-1、导轨3-4、平移台底座3-9、防尘板3-10及电机壳体3-14;所述电机壳体3-14和底座挡板3-1之间固定有上下设置的防尘板3-10和平移台底座3-9,所述防尘板3-10穿过平移台面3-7与移动块3-5之间设有的间隙。The
所述粗进给部件3还包括两个丝杠轴承3-2;所述进给电机3-13安装在电机壳体3-14的内表面上,所述进给丝杠3-3一端通过丝杠轴承3-2嵌套在底座挡板3-1内,进给丝杠3-3另一端通过另一个丝杠轴承3-2嵌套在电机壳体3-14内的轴承支架3-11中。The
如图7所示,所述粗进给部件3还包括导轨座3-6;所述移动块3-5通过导轨座3-6滑道安装在两条导轨3-4上,导轨座3-6底部凹槽装卡在两条导轨3-4上,所述两条导轨3-4平行安装在平移台底座3-9的上表面上。As shown in FIG. 7 , the
粗进给部件3可以通过丝杠螺母副结构,将电机的旋转运动转化为平移台面的直线运动,适用于较高精度的进给运动,粗进给部件10相对微进给部件9,精度较低但量程更大,通过这种粗、精结合的控制方式,可以更好地控制刀具的进给运动。The
如图4所示,所述液体静压转台部件1包括转台底座1-1、工作台面1-4、径向轴承定子1-5、轴承转轴1-6及转台电机1-10;所述转台电机1-10的外圆表面与转台底座1-1的内圆表面过盈安装,转台电机1-10套装在轴承转轴1-6上带动轴承转轴1-6转动,所述轴承转轴1-6顶面上安装有用于安装粗进给部件3的工作台面1-4,所述径向轴承定子1-5套装在轴承转轴1-6外圆表面上用于支撑轴承转轴1-6且放置在转台底座1-1的顶面上,As shown in FIG. 4 , the
所述液体静压转台部件1还包括节流器1-11,所述径向轴承定子1-5的上下表面和内圆表面设有内凹的油槽,每个油槽的正中心都设有一个节流孔,每个节流孔内镶嵌着一个节流器1-11,且节流器1-11的上表面和油槽的内表面处于同一平面。The
所述液体静压转台部件1还包括壳体1-2、密封圈1-3、轴向轴承止推板1-12;所述壳体1-2套装在径向轴承定子1-5外侧,壳体1-2和径向轴承定子1-5之间设有密封圈1-3,壳体1-2下端套装在转台底座1-1外侧,壳体1-2上端与工作台面1-4底面凹凸间隙插接,所述轴向轴承止推板1-12套装在轴承转轴1-6且设置在径向轴承定子1-5下方。The
所述液体静压转台部件1还包括圆光栅1-7、读数头1-8及读数头支架1-9;所述圆光栅1-7套装在轴承转轴1-6上,所述读数头1-8靠近圆光栅1-7设置且通过读数头支架1-9安装在转台底座1-1上。The
圆光栅1-7用于检测转台转动的位置信息,读数头1-8用于读取圆光栅1-7的位置并生成反馈信号传输给转台的控制系统。该圆光栅1-7组件用于实现转台的闭环控制。The circular grating 1-7 is used to detect the position information of the rotation of the turntable, and the reading head 1-8 is used to read the position of the circular grating 1-7 and generate a feedback signal and transmit it to the control system of the turntable. The circular grating 1-7 assembly is used to realize the closed-loop control of the turntable.
液体静压转台部件1工作时,工作台面1-4在液压油的作用下浮起,并跟随轴承转轴1-6在电机1-10的带动下做旋转运动。When the hydrostatic
液体静压转台部件1的轴承在工作中没有磨损,油膜的误差均化作用可以提高该部件的回转精度,此外,这种电机直驱的驱动方式从根本上解决了机械传动系统具有反向间隙的问题,进一步提高了部件的精度,该驱动方式还能加快系统的响应速度,因此适合对转台精度和响应速度要求较高的圆弧刃金刚石刀具刀尖材料均匀去除微进给装置。The bearing of the hydrostatic
工作方式:实行快速进刀、快速退刀或者金刚石刀具粗加工进给操作时,控制粗进给部件3的进给电机3-13带动进给丝杠3-3旋转,通过丝杠螺母传动副将进给电机3-13的旋转运动转化为进给螺母3-8的直线运动,平移台面3-7跟随移动块3-5,在进给螺母3-8的带动下做高精度的直线运动,从而使平移台面3-7上的微进给部件2带动刀架4做直线移动;精加工金刚石刀具刀尖圆弧半径时,需要更高的进给精度,此时固定粗进给部件3的平移台面3-7,控制微进给部件2的压电陶瓷2-2伸缩,使与之接触的柔性铰链2-1发生微小变形,从而带动刀架4移动实现金刚石刀具的微量进给;在金刚石刀具研磨的整个过程中,液体静压转台部件1的工作台面1-4始终做高精度的旋转运动,从而带动工作台面1-4上的部件实现高精度的摆动,当去除难磨方向的刀尖圆弧材料时,适当地加大微进给量,去除好磨方向的刀尖圆弧材料时,适当地减小微进给量,可以实现圆弧刃金刚石刀具刀尖材料的均匀去除,降低刀具圆弧刃的波纹度。Working mode: When performing rapid feed, quick withdrawal or roughing feed operation of diamond tool, the feed motor 3-13 that controls the
所述液体静压转台部件1的节流器1-11的内孔直径为0.2-0.5mm,径向轴承定子11-5与轴承转轴11-6之间的间隙,以及轴向轴承止推板11-12和转台台面11-4与径向轴承定子11-5之间的间隙均为20-30μm。The diameter of the inner hole of the restrictor 1-11 of the
所述粗进给部件3的行程为80-120mm,微进给部件2的行程为50-80μm。The stroke of the
工作原理:working principle:
本发明的一种圆弧刃金刚石刀具刀尖材料均匀去除微进给装置,实行快速进刀、快速退刀或者金刚石刀具粗加工进给操作时,控制粗进给部件3工作台面带动微进给部件2移动;精加工金刚石刀具刀尖圆弧半径时,固定粗进给部件3工作台面,控制微进给部件2压电陶瓷伸缩驱动柔性铰链实现刀具的微量进给。金刚石刀具研磨时,材料单位时间内去除量正比于研磨压力、单位时间内材料去除率,其计算公式如式一所示:The micro-feeding device of the present invention is a circular-arc-edged diamond tool tip material uniformly removed. When the rapid feed, rapid withdrawal or roughing feed operation of the diamond tool is performed, the working table surface of the
Dv∝P•△MDv∝P•△M
其中,Dv——单位时间内材料去除量;P——研磨压力;△M——单位时间内材料的去除率。Among them, Dv——material removal amount per unit time; P——grinding pressure; △M——material removal rate per unit time.
从公式一可以看出,由于△M是根据刀具圆弧上各点切线方向不同而不断变化的,要想在研磨不同面时达到相同的单位时间内材料去除量Dv,只要使研磨压力P按照与△M相反的趋势变化就能实现。金刚石刀具研磨过程中的研磨压力P随着进给量的增大而增大,因此,在金刚石刀具圆弧刃的研磨过程中,去除好磨方向材料时,可以控制微进给部件减小进给量从而减小研磨压力,去除难磨方向材料时,可以控制微进给部件增大进给量从而增大研磨压力,进而实现金刚石刀具研磨过程中,刀尖圆弧材料始终被均匀去除,如此可以提高圆弧刃的波纹度,得到质量更高的金刚石刀具。It can be seen from
以上所述仅为本发明的优选实施例而已,并不用于限制本发明,对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.
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