CN111192708A

CN111192708A - Transparent electrode and touch panel using the same

Info

Publication number: CN111192708A
Application number: CN201911118894.3A
Authority: CN
Inventors: 千柄顺; 郑用云; 韩成悳
Original assignee: Dongjin Semichem Co Ltd
Current assignee: Dongjin Semichem Co Ltd
Priority date: 2018-11-15
Filing date: 2019-11-15
Publication date: 2020-05-22
Also published as: KR20200056938A

Abstract

The invention provides a transparent electrode with improved light transmittance and visibility and a touch panel device using the same. The disclosed transparent electrode includes: a substrate; a plurality of sensor portions formed on the substrate; and a signal opening portion formed inside each of the plurality of sensor portions. Also, the touch panel includes: a first transparent electrode having a first substrate, a plurality of first sensor portions on the first substrate, and a first signal opening portion inside the first sensor portions; and a second transparent electrode having a second substrate on the first substrate, a second sensor portion on the second substrate, and a second signal opening portion inside the second sensor portion.

Description

Transparent electrode and touch panel using the same

Technical Field

The present invention relates to a transparent electrode and a touch panel using the same, and more particularly, to a transparent electrode having improved light transmittance and visibility and a touch panel device using the same.

Background

Generally, a transparent electrode is a thin film electrode having high light transmittance and low surface resistance, and is widely used in the electronic industry fields of Touch Screen Panels (TSP), solar cells, electro-optical elements, Liquid Crystal Displays (LCD), Organic Light Emitting Diodes (OLED), and the like.

In particular, indium tin Oxide (hereinafter referred to as "ITO") is mainly used as a transparent electrode used in displays such as TSP, OLED, and LCD. The ITO electrode has the advantages of optical transparency, electric conductivity, environmental stability and the like.

In addition, the ITO transparent electrode has a limitation in realizing a wide screen of 20 inches or more because of its high surface resistance. Further, the ITO transparent electrode has a sharply increased resistance value on the curved surface, and thus the conductivity is weakened and broken. Thus, there is a limitation in implementing a retractable display screen.

Thus, development of a transparent electrode replacing the ITO transparent electrode is required. As a transparent electrode having characteristics similar to those of the ITO transparent electrode, there is a transparent electrode of an Oxide-Metal-Oxide (hereinafter referred to as "OMO") multilayer thin-film structure. Compared with an ITO transparent electrode using an indium material, the OMO transparent electrode has the following advantages: the competitiveness of the production cost is reduced, and a small-sized touch panel is realized, and a wide screen and a curved screen are easily realized due to low surface resistance, so that a large-sized touch panel can be realized.

In addition, although the above-described advantages are exhibited by the OMO transparent electrode, the presence of the metal thin film constituting the multilayer thin film structure significantly lowers the light transmittance and lowers the visibility.

Documents of the prior art

[ patent document ]

(patent document 1) Korean laid-open patent publication No. 10-2018-0045606

(patent document 2) Korean registered patent publication No. 10-1639519

(patent document 3) Korean registered patent publication No. 10-1262173

(patent document 4) Korean laid-open patent publication No. 10-2015-0092529

Disclosure of Invention

Technical problem to be solved by the invention

The present invention has been made in view of the above problems, and an object of the present invention is to provide a transparent electrode and a touch panel using the same, which can be applied to small and large touch panels and improve light transmittance and visibility.

Means for solving the problems

In order to achieve the object, the transparent electrode of the present invention comprises: a substrate; a plurality of sensor portions on the substrate; and a signal opening part inside the sensor part.

Here, each of the plurality of sensor portions includes a structure in which a first oxide layer, a metal layer, and a second oxide layer are sequentially stacked.

The metal layer is made of at least one metal selected from the group of conductive metals consisting of gold, silver, copper, nickel, titanium, aluminum, and tungsten, or an alloy thereof. The thickness Mt of the metal layer is 5 to 50[ nm ].

In the present invention, dummy block portions (dummy) are further included between the plurality of sensor portions. The dummy block portion further includes a dummy block opening portion therein.

Here, the signal opening and the dummy block opening have the same shape.

And the plurality of sensor portions respectively include: a plurality of signal forming sections that form signals by touch; a signal transmission unit connected to the plurality of signal forming units and transmitting the signal formed in the signal forming unit,

the pitch (Sg) between the plurality of sensor sections satisfies a range of 0.001 to 2.0[ mm ], and the width (Sd) of each of the plurality of signal forming sections satisfies a range of 80% or less of the Sg value.

And, the sensor portion includes: a tracker portion connected by the sensor portion, the tracker portion extending from a metal layer of the sensor portion. Here, the thickness of the tracker portion is thicker than the thickness of the sensor portion. The thickness (Tt) of the tracker portion satisfies a range of 70 to 1560[ nm ], and the thickness (TMt) of the metal layer in the tracker portion satisfies a range of 10 to 1500[ nm ].

And the width Dw of the lines of the net pattern of the dummy block portion is in the range of 0.5 to 50[ mu ] m, and the line pitch Dd of the net pattern of the dummy block portion satisfies the range of 0.5 to 1000[ mu ] m.

Further, a touch panel of the present invention includes: a first transparent electrode having a first substrate, a plurality of first sensor portions on the first substrate, and a first signal opening portion inside the first sensor portions; and a second transparent electrode having a second substrate on the first substrate, a second sensor portion on the second substrate, and a second signal opening portion inside the second sensor portion.

Further, the first sensor unit includes: a first signal forming section; a first signal transmission section connected to the first signal forming section, the second sensor section including: a second signal forming section; and a second signal transmission part connected to the second signal forming part, wherein a space (SFg) between the first signal forming part and the second signal forming part satisfies a range of 0.03 to 0.5[ mm ].

When the first transparent electrode and the second transparent electrode are laminated in two layers, the light transmittance (T) is in a range of more than 78 but less than 95 [% ].

ADVANTAGEOUS EFFECTS OF INVENTION

The transparent electrode of the present invention has a low surface resistance characteristic compared to a conventional ITO transparent electrode, and thus can be applied to a small touch panel and a large-screen touch panel of 20 inches or more.

In addition, when a display to which the transparent electrode of the present invention is applied is bent, the display can be operated normally, and thus can be used as a transparent electrode of a retractable display panel.

Further, an OMO multilayer thin film structure having an opening can be applied to a substrate, and even when the transparent electrode of the present invention is formed in a two-layer structure, the light transmittance and visibility at a level similar to ITO can be improved.

Drawings

FIGS. 1 and 2 are a cross-sectional view and a plan view schematically showing a transparent electrode according to a first embodiment of the present invention;

FIG. 3 is a plan view schematically showing a transparent electrode according to a second embodiment of the present invention;

fig. 4 is a plan view schematically showing an example in which transparent electrodes of a second embodiment of the present invention are overlapped into a double layer;

FIG. 5 is a plan view schematically showing a transparent electrode according to a third embodiment of the present invention;

fig. 6 and 7 are a cross-sectional view and a plan view, respectively, showing a touch panel of an embodiment of the present invention;

fig. 8a and 8b are drawings schematically showing modifications for changing the aperture ratio of the touch panel according to the embodiment of the present invention;

fig. 9 is a sequence diagram showing a method of manufacturing a touch panel according to an embodiment of the present invention.

Description of the reference numerals

100 transparent electrode, first transparent electrode 110 substrate, first substrate

130. 230 sensor part,

first sensor parts

130a, 230a first signal forming part

130b, 230b, a first signal transmission section 131, a first oxide layer

133 metal layer 135 second oxide layer

137 signal opening, first signal opening 150, 250 dummy block

151 dummy block opening, first dummy block opening 200, 300 transparent electrode

230 first sensor part 270 second sensor part

270a, a second signal forming part 270b, a second signal transmitting part

330 sensor part 350 tracker part

400 second transparent electrode 410 second substrate

430 second sensor part 430a second signal forming part

430b, a second signal transmission part 450, a second dummy block part

451 the second dummy block opening

Detailed Description

Hereinafter, embodiments of the present invention will be specifically described with reference to the drawings. In the drawings, portions that are not related to the description are omitted for the sake of clarity, and the same reference numerals are used for the same or similar components throughout the specification.

Fig. 1 and 2 are a cross-sectional view and a plan view schematically showing a transparent electrode according to a first embodiment of the present invention.

Referring to fig. 1 and 2, a transparent electrode 100 according to a first embodiment of the present invention includes: a substrate 110; a plurality of sensor portions 130 formed on the substrate 110. The plurality of sensor units 130 are arranged at predetermined intervals from each other. Here, the plurality of sensor portions 130 are formed with signal opening portions 137.

The sensor unit 130 has an OMO thin film stack structure in which a first oxide layer 131, a metal layer 133, and a second oxide layer 135 are sequentially stacked on a substrate 110. The metal layer 133 is made of at least one metal selected from a conductive metal group consisting of gold, silver, copper, nickel, titanium, aluminum, and tungsten, or an alloy thereof, but is not limited thereto.

The thickness Mt of the metal layer 133 satisfies the following formula 1.

[ EQUATION 1 ]

5≤Mt≤50[nm]

Here, when the thickness Mt of the metal layer is less than 5nm, the surface resistance uniformity is reduced because the lamination thickness is not constant in the process of manufacturing the metal layer 133. This makes it impossible to obtain a surface resistance value that can be applied to a large-sized touch panel. On the other hand, when the thickness Mt of the metal layer exceeds 50nm, there is a problem that the light transmittance is lowered.

Further, as shown in fig. 2, the transparent electrode according to an embodiment of the present invention further includes a dummy block portion 150 disposed between the plurality of sensor portions 130. A dummy block opening 151 is also formed in the dummy block portion 150, but the present invention is not limited thereto.

Here, the signal opening 137 and the dummy block opening 151 are formed in the same shape. Fig. 2 is a diagram illustrating a case where the signal opening 137 and the dummy block opening 151 are regularly arranged while being formed in a square shape having the same size. Thus, when the touch panel is implemented by stacking two or more transparent electrodes by forming the signal opening 137 and the dummy block opening 151, the aperture ratio can be easily adjusted. The specific description thereof will be described later. Further, fig. 2 illustrates a case where the signal opening 137 and the dummy block opening 151 are each formed in a square shape, but the present invention is not limited thereto, and may be formed in various shapes such as a circle, a triangle, a polygon having a shape equal to or larger than a pentagon, and the like.

The transparent electrode 100 of the first embodiment of the present invention includes: a substrate 110; a plurality of sensor portions 130 formed on the substrate 110; a plurality of dummy block portions 150.

Each of the plurality of sensor units 130 includes: a plurality of signal forming portions 130 a; and a signal transmission unit 130b connected to the plurality of signal forming units 130 a. When the transparent electrode has a two-layer structure, the plurality of signal forming portions 130a can be arranged to intersect with signal forming portions of other layers in the vertical direction, and can form signals by touching. The signal transmitting part 130b transmits the signal formed at the signal forming part 130 b.

The plurality of signal forming portions satisfy the following formula 2.

[ equation 2 ]

0.001≤Sg≤2.0[mm]

Sd≤0.8Sg

Here, Sg refers to a pitch between the plurality of signal forming portions, and Sd refers to a width of each line of the plurality of signal forming portions.

Equation 2 considers the case of constituting a small-sized touch screen panel, and a large-screen touch screen panel of 30 inches or more. Here, when the pitches Sg and Sd are less than the lower limit values, the linear resistance increases, which limits the touch driving. On the other hand, if the pitch Sg exceeds the upper limit, that is, 2.0mm, the parasitic capacitance increases, which causes a problem of lowering the touch sensitivity. Further, when the width Sd of the line exceeds 80% of the Sd value, there is a problem of reducing the light transmittance.

Fig. 3 is a plan view schematically showing a transparent electrode according to a second embodiment of the present invention.

Referring to fig. 3, the transparent electrode 200 of the second embodiment of the present invention includes: a substrate; a plurality of sensor portions 230 formed on the substrate; a plurality of dummy block portions 250. The layer structure of the sensor portion 230 has substantially the same structure as the sensor portion 130 of the transparent electrode of the first embodiment, and therefore, detailed description thereof is omitted.

Each of the plurality of sensor portions 230 includes: a plurality of signal forming parts 230 a; and a signal transmission unit 230b connected to the plurality of signal forming units 230 a. When the transparent electrode is formed in a two-layer structure, the plurality of signal forming portions 230a can be arranged to intersect with signal forming portions of other layers in the vertical direction, and can form signals by touching. The signal transmitting part 230b transmits the signal formed at the signal forming part 230 a.

The plurality of signal forming portions satisfy the following formula 3.

[ equation 3 ]

0.001≤Sg≤2.0[mm]

Here, Sg refers to a pitch between the plurality of signal forming portions.

Equation 3 considers the case of configuring a small-sized touch screen panel and a large-sized touch screen panel of 30 inches or more, and when the pitch Sg is less than the lower limit value, there is a limitation in touch driving due to an increase in linear resistance. On the other hand, if the pitch Sg exceeds the upper limit, that is, 2.0mm, the parasitic capacitance increases, which causes a problem of lowering the touch sensitivity.

The dummy block portion 250 is formed in a mesh pattern of a dot image around the sensor portion 230. The dummy block portion 250 is formed by a photoresist method. For example, the etching solution is formed by using a commonly used etching solution of phosphoric acid or hydrofluoric acid series. Here, it is preferable that the dummy block part 250 satisfies the following conditional ranges of equations 4 to 6.

The width Dw of the lines constituting the mesh pattern of the dummy block portion 250 satisfies the following formula 4.

[ EQUATION 4 ]

0.5≤Dw≤50[μm]

Here, when the width Dw of the lines of the mesh pattern is less than 0.5 μm, the pattern is not easily formed, and the process cost is increased. And in the case where the width Dw of the lines of the mesh pattern exceeds 50 μm, the mesh pattern appears in the eyes of the user.

Also, the line pitch Dd of the mesh pattern of the dummy block portion 250 satisfies formula 5.

[ EQUATION 5 ]

0.5≤Dd≤1000[μm]

Here, when the line pitch Dd of the mesh pattern is less than 0.5 μm, the light transmittance is reduced, and when the line pitch Dd of the mesh pattern exceeds 1000 μm, the mesh pattern appears.

And, the internal angle Da of the mesh pattern measured based on the edge of the transparent electrode satisfies formula 6. More precisely, it refers to the internal angle of the mesh pattern measured on the basis of the tracker portion of the transparent electrode.

[ equation 6 ]

5≤Da≤95[deg]

Here, when the angle Da deviates from the condition range of equation 6, a mesh pattern appears.

Test example 1

The light transmittance and visibility evaluation of the dummy block 250 were performed four times with the conditions changed as shown in test example 1.

First, an OMO transparent electrode having surface resistances of 7 to 10 Ω/□ and a transmittance of 88% was prepared, and then a mesh pattern of dummy blocks was formed by applying a photoresist method. Then, the width Dw of the lines of the mesh pattern, the line pitch Dd of the mesh pattern, and the angle Da between the intersecting squares in the mesh pattern were changed and evaluated.

[ TABLE 1 ]

Table showing visibility and transmittance change according to Dw, Dd, Da change

Test sequence	Dw[μm]	Dd[μm]	Da[deg]	Visibility of	Light transmittance
						1	5	300	30	Is excellent in	84.3％
2	5	600	45	Is excellent in	85.6％
						3	10	300	30	Is excellent in	83.5％
4	10	600	45	Is excellent in	84.7％
						5	30	300	30	Deficiency of	82.7％
6	30	600	45	Deficiency of	84.1％

In the case where the width of the line constituting the mesh pattern of the dummy block portion 250 satisfies 10 μm of the condition range of Dw equation 4 in the study of the test results, the evaluation visibility is "excellent". On the other hand, if the thickness deviates from the condition range of equation 4 by 30 μm, the visibility is evaluated as "insufficient".

When the light transmittance is observed in contrast, it is understood that the light transmittance is superior when the line pitch Dd of the mesh pattern of the dummy block portion 250 is close to 600 μm, which is the upper limit value of equation 5, compared to 300 μm, which is the lower limit value of equation 5.

Fig. 3 shows the sensor unit 230, which is not limited to the above, but the sensor unit is exemplified as a whole in a form having a diamond shape repeatedly arranged.

Fig. 4 is a plan view schematically showing an example in which transparent electrodes of the second embodiment of the present invention are overlapped into a double layer.

Referring to fig. 4, the first sensor parts 230 constituting the double-layered transparent electrode respectively include: the first signal forming part 230 a; the first signal transmission unit 230b is connected to the first signal forming unit 230 a. The second sensor portions 270 constituting the single-layer transparent electrode respectively include: a second signal forming section 270 a; and a second signal transmission section 270b connected to the second signal forming section 270 a. Thus, when the transparent electrode is formed in a two-layer structure, the first signal forming portion 230a and the second signal forming portion 270a can be arranged to intersect with each other, and a signal can be formed by a touch. Thus, when the touch panel is manufactured by overlapping the transparent electrodes in two layers, the first signal transmission portion 230b is positioned above the dummy block portion of the single-layer transparent electrode, and the second signal transmission portion 270b is positioned below the dummy block portion of the double-layer transparent electrode.

With the above-described configuration, the pitch (SFg) between the first signal forming part 230a and the second signal forming part 270a satisfies the following formula 7.

[ EQUATION 7 ]

0.03≤SFg≤0.5[mm]

Here, if SFg is less than 0.03mm, an overlapping region is generated between the first signal forming portion 230a and the second signal forming portion 270a, which causes a problem in terms of capacitance uniformity. On the other hand, if SFg exceeds 0.5mm, touch sensitivity is reduced during the manufacture of the touch panel, and a problem occurs in touch performance.

Fig. 5 is a plan view schematically showing a transparent electrode according to a third embodiment of the present invention.

Referring to fig. 5, the transparent electrode 300 of the third embodiment of the present invention includes: a substrate; a sensor portion 330 formed on the substrate; a tracker portion 350. The layer structure of the sensor section 330 has substantially the same structure as the sensor section 130 of the transparent electrode of the first embodiment, and thus, a detailed description thereof is omitted. The tracker portion 350 is formed by connecting the sensor portions 330. That is, the tracker portion 350 is formed by extending the metal layer of the sensor portion 330. The tracker portion 350 has a structure in which a first oxide layer, a metal layer, and a second oxide layer are stacked in this order as shown in the sensor portion 330. Also, the thickness of the tracker portion 350 is relatively thicker than the thickness of the sensor portion 330.

The tracker part satisfies the condition of the following equation 8.

[ EQUATION 8 ]

70≤Tt≤1560[nm]

10≤TMt≤1500[nm]

Here, Tt denotes a thickness of the tracker portion, and TMt denotes a thickness of the metal layer in the tracker portion.

The OMO transparent electrode of the present invention configured as described above can be operated normally even when bent, and thus can be used as a transparent electrode for a retractable display panel. Further, the OMO transparent electrode of the present invention can be applied not only to a small touch panel but also to a large-screen touch panel of 20 inches or more because the surface resistance of the OMO transparent electrode is lower than that of a conventional ITO transparent electrode.

Fig. 6 and 7 are a cross-sectional view and a plan view schematically showing a touch panel according to an embodiment of the present invention.

Referring to fig. 6 and 7, the touch panel according to the embodiment of the present invention includes a first transparent electrode 100 and a second transparent electrode 300 stacked in a two-layer structure.

The first transparent electrode 100 includes: a first substrate 110; a plurality of first sensor portions 130 are formed on the first substrate 110. The first sensor unit 130 includes: a first signal forming part 130a forming a signal at the time of touch; the first signal transmission unit 130b transmits the signal generated by the first signal generation unit 130 a. The plurality of first sensor portions 130 are arranged in a line shape with a predetermined pitch therebetween. Here, the plurality of first sensor portions 130 are formed with first signal opening portions 137. Here, as shown in fig. 8, the first transparent electrode 100 further includes a first dummy block portion 150 disposed between the plurality of first sensor portions 130. A first dummy block opening 151 is formed in the first dummy block 150. Here, the first transparent electrode 100 has substantially the same structure as the transparent electrode according to the first embodiment of the present invention described with reference to fig. 1 and 2. Therefore, substantially the same constituent elements of the first transparent electrode 100 are given the same reference numerals, and detailed description of the layer structure including the sensor portion 130 and the like is omitted to avoid redundant description.

The second transparent electrode 400 includes: a second substrate 410; a plurality of second sensor portions 430 formed on the second substrate 410. Here, the second substrate 410 is disposed on the first sensor portion 130 of the first transparent electrode 100, and the second sensor portion 430 includes: a second signal forming part 430a forming a signal upon touch; the second signal transmission unit 430b transmits the signal generated by the second signal generation unit 430 a.

The plurality of second sensor portions 430 are arranged in a line shape with a predetermined pitch therebetween. Thus, when the second sensor portions 430 are arranged, the second sensor portions 430 are arranged in a direction perpendicular to the first sensor portions 130. Therefore, the first signal forming portion 130a and the second signal forming portion 430a are disposed opposite to each other.

Here, the second signal opening portions 437 are formed in the plurality of second sensor portions 430. Here, the second transparent electrode 400 further includes a second dummy block 450 disposed between the plurality of second sensor portions 430, as shown in fig. 8. A second dummy block opening 451 is formed in the second dummy block 450. Here, the second transparent electrode 400 is different only in the arrangement direction of the second sensor portions 430, and the other structure is substantially the same as the first transparent electrode 100, and thus, a detailed description thereof is omitted.

In the case of the touch panel configured as described above, the first signal forming unit 130a and the second signal forming unit 430a can be arranged to intersect each other, and form a signal by a touch. Thus, in the case of manufacturing a touch panel by overlapping the first and second transparent electrodes in two layers, the second signal transmission portion 430b is located above the first dummy block portion 150, and the first signal transmission portion 270b is located below the second dummy block portion 450. Here, the space (SFg) between the first signal forming part 130a and the second signal forming part 430a satisfies the above formula 6.

Test example 2

As described above, in the case of forming the touch panel, the light transmittance was measured by changing the conditions so that the aperture ratio was changed when the first and second transparent electrodes were laminated.

Fig. 7, 8a and 8b show, as examples, the respective aperture ratios of the first and second apertures, i.e., the aperture ratios of the first and. Here, the first and second openings are formed in a regular pattern.

As described above, when the aperture ratio was measured while changing the aperture ratio on one side, the aperture ratio when the first and second transparent electrodes were laminated, that is, the aperture ratio on both sides and the light transmittance of the touch panel were as shown in table 2 below.

[ TABLE 2 ]

Table for displaying measured values of light transmittance according to variations in aperture ratio

Item	#1 (FIG. 7)	#2 (FIG. 8a)	#3 (FIG. 8b)	#4 (not shown)
					Single face open ratio	29.6％	70.4％	59.2％	75.0％
Ratio of opening on both sides	0.0％	5.3％	29.0％	75.0％
					Light transmittance (measured value)	81.4％	87.7％	90.3％	93.5％

As can be seen from table 2, the light transmittance was measured at 0%, 5.3%, 29% and 75% opening ratios of both sides, and was 81.4%, 87.7%, 90.3% and 93.5%. In the case of item #4, the pattern region is formed by imprinting (imprinting), and the size thereof is several μm, which is not shown.

In general, in the case of a metal mesh-shaped transparent electrode, the light transmittance characteristic is about 84%, and it is necessary to ensure light transmittance of the same or higher. Based on this aspect, the light transmittance satisfies formula 9.

[ equation 9 ]

78％<T<95％

When the light transmittance is 78% or less, the optical characteristics are limited. The light transmittance refers to light transmittance including a substrate.

The touch panel according to the embodiment of the present invention further includes a tracker portion (350 in fig. 5) having an OMO multilayer thin-film structure, which is formed on the outer edge of the active region of the first transparent electrode 100 and the second transparent electrode 300.

In the description of the first and second transparent electrodes of the touch panel according to the embodiment of the present invention, the transparent electrodes substantially the same as those shown in fig. 1 and 2 are described as an example, but the present invention is not limited thereto. That is, the touch panel according to the embodiment of the present invention can also have the structure shown in fig. 5.

Even when the touch panel is configured as described above and the OMO transparent electrode is formed in a two-layer structure, the transmittance and visibility can be improved at a level similar to those of the touch panel configured with the ITO transparent electrode. In addition, the touch panel to which the OMO transparent electrode is applied has a lower surface resistance characteristic than the touch panel to which the ITO transparent electrode is applied, and thus a large screen of 20 inches or more can be realized.

Next, a method for manufacturing a touch panel according to the present invention will be described.

Fig. 9 is a sequence diagram showing a method of manufacturing a touch panel according to an embodiment of the present invention. Referring to fig. 9, the OMO transparent electrodes constituting the first and second transparent electrodes are manufactured. That is, the first oxide layer, the metal layer, and the second oxide layer are sequentially stacked to form the OMO transparent electrode (S10). The transparent electrode is formed by a sputtering process or an electron beam manner. Here, the metal layer may be made of at least one metal selected from a conductive metal group consisting of gold, silver, copper, nickel, titanium, aluminum, and tungsten, or an alloy thereof, but is not limited thereto.

In this case, the OMO transparent electrode includes: a sensor unit (330 in fig. 5) which is an active region that reacts to whether or not a touch is made when constituting a touch sensor; and a tracker part (350 in fig. 6) disposed on the circumference of the sensor part. The metal layer constituting the tracker portion is formed thicker than the metal layer of the sensor portion. The sensor unit is formed simultaneously with the tracker unit.

Thus, the entire OMO transparent electrode is patterned into a predetermined shape to form an opening (S20). The entire pattern is formed in the sensor portion and the dummy block portion or only in the dummy block portion. The entire pattern is formed in a shape selected from one or more of a circle, a square, a rectangle, and a polygon having at least five sides, or a combination thereof. The entire pattern is processed by any one of inkjet printing using an etching ink, screen printing using an etching paste, gravure printing, and reverse printing, but is not limited thereto.

Specific examples of the processing method are as follows.

Ink jet printing

The etching ink was printed at 0.5mm pitch on an OMO transparent electrode using Roll-to-Roll (Roll). The drying conditions were 120 degrees and after 5 minutes washing with water.

Screen printing

After a mask having a pattern of 75mmX75mm size was manufactured, a screen etching paste (etchingpaste) was applied thereto, and the mask was printed at 120 degrees for 10 minutes and dried. After that, washing was performed with a developer (sodium hydroxide (NaOH), 3%) or water.

Gravure plate

The pattern is processed on a Gravure cylinder (Gravure roll). Thereby, after scraping (Doctoring) the etching paste, it is transferred to a blanket (blanket) of a gravure cylinder. Thereafter, the transferred etching paste was printed on an OMO transparent electrode and dried at a temperature of 120 ℃ for 10 minutes. After drying, the substrate is washed with a developer.

When the transparent electrode is processed by the above-described processing, the transparent electrode is manufactured in the entire pattern, that is, in the desired aperture ratio of the opening.

Then, a plurality of sensor portions formed in a touch pattern are formed on the OMO transparent electrode on which the entire pattern is formed, the sensor portions being arranged in a line shape with a predetermined pitch therebetween (S30). The sensor part is processed by means of laser or photoresist.

The present invention forms a touch pattern after processing the entire pattern as described above, thereby being easy to process and having price competitiveness compared to the conventional OMO transparent electrode.

Thus, two transparent electrodes having the above-described structure are prepared and stacked one on top of the other. Namely, the first and second transparent electrodes are laminated (S40). That is, the first and second transparent electrodes are laminated by FPCB (flexible substrate) bonding, COP (Chip On Panel) bonding, or the like, and glass bonding is performed to complete the touch Panel.

The described embodiments are intended to be illustrative only, as numerous variations and equivalent other embodiments will be apparent to those of ordinary skill in the art to which the present invention pertains. Therefore, the true technical scope of the present invention should be determined by the technical idea of the invention described in the claims.

Claims

1. A transparent electrode, characterized in that,

the method comprises the following steps:

a substrate;

a plurality of sensor portions formed on the substrate; and

and signal opening parts in the plurality of sensor parts.

2. The transparent electrode according to claim 1,

each of the plurality of sensor portions has a structure in which a first oxide layer, a metal layer, and a second oxide layer are sequentially stacked.

3. The transparent electrode according to claim 2,

the metal layer is made of at least one metal selected from the group of conductive metals consisting of gold, silver, copper, nickel, titanium, aluminum, and tungsten, or an alloy thereof.

4. The transparent electrode according to claim 3,

the metal layer satisfies the following formula 1,

< equation 1>

5≤Mt≤50[nm]

Here, Mt refers to the thickness of the metal layer.

5. The transparent electrode according to claim 1,

further comprising:

and a dummy block part formed between the plurality of sensor parts.

6. The transparent electrode according to claim 5,

the dummy block further includes:

and a dummy block opening part located inside the dummy block part.

7. The transparent electrode according to claim 6,

the signal opening portion and the dummy block opening portion have the same shape.

8. The transparent electrode according to claim 1,

the plurality of sensor portions respectively include:

a plurality of signal forming sections that form signals by touch;

a signal transmission section for connecting the plurality of signal forming sections and transmitting the signal formed in the signal forming section,

the plurality of signal forming parts satisfy the following formula 2,

< equation 2>

0.001≤Sg≤2.0[mm]

Sd≤0.8Sg

Here, Sg denotes a pitch between the plurality of signal forming sections, and Sd denotes a width of each line of the plurality of signal forming sections.

9. The transparent electrode according to any one of claims 1 to 8,

further comprising:

a tracker portion connected by the sensor portion,

the tracker portion extends from the metal layer of the sensor portion.

10. The transparent electrode according to claim 9,

the thickness of the tracker portion is relatively thicker than the thickness of the sensor portion.

11. The transparent electrode according to claim 10,

the tracker portion satisfies the following formula 3,

< equation 3>

70≤Tt≤1560[nm]

10≤TMt≤1500[nm]

12. A touch panel is characterized in that a touch panel is provided,

the method comprises the following steps:

a first transparent electrode including a first substrate, a plurality of first sensor portions on the first substrate, and a first signal opening portion inside the first sensor portions;

and a second transparent electrode having a second substrate on the first substrate, a second sensor portion on the second substrate, and a second signal opening portion inside the second sensor portion.

13. The touch panel according to claim 12,

the first sensor portion includes:

a first signal forming section;

a first signal transmission part connected to the first signal forming part,

the second sensor portion includes:

a second signal forming section;

a second signal transmission part connected to the second signal forming part,

a pitch (SFg) between the first signal forming part and the second signal forming part satisfies the following formula 4,

< equation 4>

0.03≤SFg≤0.5[mm]。

14. The touch panel according to claim 12 or 13,

a light transmittance (T) when the first transparent electrode and the second transparent electrode are laminated in two layers satisfies the following formula 5,

< equation 5>

78<T<95[％]。