CN110260851B - An opto-mechanical micromachined gyroscope based on double-subwavelength grating cavity detection - Google Patents
An opto-mechanical micromachined gyroscope based on double-subwavelength grating cavity detection Download PDFInfo
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Abstract
本发明公开了一种基于双亚波长光栅腔检测的光力学微机械陀螺，利用亚波长光栅构建高品质因数光学谐振腔，利用双亚波长光栅腔实现推挽工作方式，通过双亚波长光栅腔谐振频率的差分检测实现角速度解算，可有效提高微机械陀螺的检测灵敏度；利用光信号对微机械陀螺进行检测，相比于电学检测方法，具有精度高、稳定性好、抗电磁干扰能力强、寄生电容小、线性良好、系统体积小、集成度高等优点，并且，亚波长光栅的光栅周期小于入射光波长，将高品质因数亚波长光栅腔用于微机械陀螺检测，相比于现有光学检测方法，检测精度和检测灵敏度更高；质量块的驱动模态与检测模态均采用共面振动方式，可避免微机械陀螺工作时压膜阻尼过大而影响机械灵敏度。
The invention discloses an opto-mechanical micromechanical gyroscope based on double-subwavelength grating cavity detection. The sub-wavelength grating is used to construct a high-quality optical resonant cavity, the double-subwavelength grating cavity is used to realize a push-pull working mode, and The differential detection of the resonance frequency realizes the angular velocity calculation, which can effectively improve the detection sensitivity of the micromachined gyroscope; the detection of the micromachined gyroscope by the optical signal has high precision, good stability and strong anti-electromagnetic interference ability compared with the electrical detection method. , small parasitic capacitance, good linearity, small system volume, high integration, and the grating period of the subwavelength grating is smaller than the wavelength of the incident light. The optical detection method has higher detection accuracy and detection sensitivity; the driving mode and detection mode of the mass block adopt the coplanar vibration method, which can avoid the excessive damping of the lamination film when the micromachined gyroscope works and affect the mechanical sensitivity.
Description
技术领域technical field
本发明涉及微机械系统中的微惯性传感技术领域，尤其涉及一种基于双亚波长光栅腔检测的光力学微机械陀螺。The invention relates to the technical field of micro-inertial sensing in micro-mechanical systems, in particular to an opto-mechanical micro-mechanical gyroscope based on double-subwavelength grating cavity detection.
背景技术Background technique
陀螺是惯性导航系统中的关键惯性传感器件，它通过角速度的测量为运载体提供各种姿态参数，其性能直接决定了惯性导航系统的表现及其应用领域。在诸多类型的陀螺中，微机械陀螺(又称MEMS陀螺)具有体积小、重量轻、成本低、功耗小、集成度高、抗冲击、可批量生产等优点，已成为战术级和中低精度惯性导航系统中的主流惯性传感器件，在民用及军事领域都已得到广泛应用，是关系到国家经济、安全和国际竞争力的一项重要战略技术。Gyro is a key inertial sensor device in inertial navigation system. It provides various attitude parameters for the carrier through the measurement of angular velocity. Its performance directly determines the performance of inertial navigation system and its application field. Among many types of gyroscopes, micromachined gyroscopes (also known as MEMS gyroscopes) have the advantages of small size, light weight, low cost, low power consumption, high integration, shock resistance, and mass production. The mainstream inertial sensor devices in precision inertial navigation systems have been widely used in civil and military fields, and are an important strategic technology related to national economy, security and international competitiveness.
MEMS陀螺需要通过测量哥氏力作用下质量块的位移实现角速度传感。相比于MEMS陀螺的驱动模态，传感模态的振动幅度很小，一般情况都在nm至pm量级，这就决定了MEMS陀螺的性能在很大程度上取决于微位移检测技术的发展与突破。MEMS gyroscopes need to realize angular velocity sensing by measuring the displacement of the mass under the action of Coriolis force. Compared with the driving mode of the MEMS gyroscope, the vibration amplitude of the sensing mode is very small, generally in the order of nm to pm, which determines that the performance of the MEMS gyroscope depends to a large extent on the performance of the micro-displacement detection technology. development and breakthrough.
目前，商用MEMS陀螺多基于位移的电容检测方式，存在抗电磁干扰能力差、寄生电容较大、非线性严重、集成度低、不易片上集成等问题。基于光栅的光学检测方法能够解决微机械陀螺传统电容检测方法存在的上述缺陷，基于光栅检测的微机械陀螺利用的是双层微米光栅干涉现象，通过检测上下层光栅零级衍射光的干涉强度变化实现角速度解算，但其检测精度还有待进一步提高，并且，该方法的双层光栅之间未形成高品质因数的光学谐振腔，光学检测灵敏度较低，此外，双层光栅在工作中离面运动，会造成MEMS陀螺检测模态压膜阻尼过大，机械灵敏度不高。At present, commercial MEMS gyroscopes are mostly based on displacement capacitance detection methods, which have problems such as poor anti-electromagnetic interference capability, large parasitic capacitance, severe nonlinearity, low integration, and difficulty in on-chip integration. The optical detection method based on grating can solve the above-mentioned defects of the traditional capacitive detection method of micromachined gyroscope. The micromachined gyroscope based on grating detection utilizes the interference phenomenon of double-layer micro-gratings. By detecting the change of the interference intensity of the zero-order diffracted light of the upper and lower gratings The angular velocity solution can be solved, but the detection accuracy needs to be further improved. In addition, the optical resonator with high quality factor is not formed between the double-layer gratings of this method, and the optical detection sensitivity is low. In addition, the double-layer grating is out of plane during operation. Movement will cause the MEMS gyroscope to detect the modal pressure film damping too much and the mechanical sensitivity is not high.
发明内容SUMMARY OF THE INVENTION
有鉴于此，本发明提供了一种基于双亚波长光栅腔检测的光力学微机械陀螺，用以解决微机械陀螺传统电容检测方法存在的抗电磁干扰能力差、寄生电容较大、非线性严重、集成度低、不易片上集成等问题，以及解决基于光栅检测的微机械陀螺存在的检测精度和检测灵敏度较低的问题。In view of this, the present invention provides an opto-mechanical micromachined gyroscope based on double-subwavelength grating cavity detection, which is used to solve the problems of poor anti-electromagnetic interference capability, large parasitic capacitance and serious nonlinearity in the traditional capacitance detection method of micromachined gyroscope. , low integration, difficult on-chip integration and other problems, and solve the problems of low detection accuracy and detection sensitivity of micromachined gyroscopes based on grating detection.
因此，本发明提供了一种基于双亚波长光栅腔检测的光力学微机械陀螺，包括：敏感头单元和外围光学检测单元；其中，Therefore, the present invention provides an opto-mechanical micromechanical gyroscope based on double-subwavelength grating cavity detection, comprising: a sensitive head unit and a peripheral optical detection unit; wherein,
所述敏感头单元，包括：质量块、位于所述质量块前侧的第一固定梳齿电极和第一可动梳齿电极、位于所述质量块后侧的第二固定梳齿电极和第二可动梳齿电极、以及分别位于所述质量块左右两侧的第一亚波长光栅腔和第二亚波长光栅腔；其中，所述第一亚波长光栅腔包括相互分离且平行共面设置的第一固定亚波长光栅和第一可动亚波长光栅，所述第二亚波长光栅腔包括相互分离且平行共面设置的第二固定亚波长光栅和第二可动亚波长光栅；所述第一可动梳齿电极、所述第二可动梳齿电极、所述第一可动亚波长光栅和所述第二可动亚波长光栅分别与所述质量块固定连接；The sensitive head unit includes: a mass block, a first fixed comb-tooth electrode and a first movable comb-tooth electrode located on the front side of the mass block, and a second fixed comb-tooth electrode and a first comb-tooth electrode located on the rear side of the proof block. Two movable comb-teeth electrodes, and a first subwavelength grating cavity and a second subwavelength grating cavity respectively located on the left and right sides of the mass block; wherein, the first subwavelength grating cavity includes mutually separated and parallel coplanar settings the first fixed subwavelength grating and the first movable subwavelength grating, the second subwavelength grating cavity comprises a second fixed subwavelength grating and a second movable subwavelength grating that are separated from each other and arranged in parallel and coplanar; the the first movable comb-teeth electrode, the second movable comb-teeth electrode, the first movable sub-wavelength grating and the second movable sub-wavelength grating are respectively fixedly connected to the mass block;
所述第一固定梳齿电极、所述第二固定梳齿电极、所述第一可动梳齿电极和所述第二可动梳齿电极用于在被施加电压时对所述质量块进行共面静电驱动，带动所述第一亚波长光栅腔中的第一可动亚波长光栅和所述第二亚波长光栅腔中的第二可动亚波长光栅共面振动；The first fixed comb-tooth electrode, the second fixed comb-tooth electrode, the first movable comb-tooth electrode, and the second movable comb-tooth electrode are used to perform a voltage on the mass when a voltage is applied. Coplanar electrostatic drive drives the first movable subwavelength grating in the first subwavelength grating cavity and the second movable subwavelength grating in the second subwavelength grating cavity to vibrate coplanarly;
所述外围光学检测单元，包括：激光光源、与所述激光光源连接的耦合器、分别与所述耦合器连接的第一锥形光纤和第二锥形光纤、与所述第一锥形光纤连接的第一探测器以及与所述第二锥形光纤连接的第二探测器；The peripheral optical detection unit includes: a laser light source, a coupler connected to the laser light source, a first tapered optical fiber and a second tapered optical fiber respectively connected to the coupler, and the first tapered optical fiber a first detector connected and a second detector connected to the second tapered optical fiber;
所述第一固定亚波长光栅与所述第一可动亚波长光栅之间的间距小于所述激光光源的光波长，所述第二固定亚波长光栅与所述第二可动亚波长光栅之间的间距小于所述激光光源的光波长；The distance between the first fixed subwavelength grating and the first movable subwavelength grating is smaller than the light wavelength of the laser light source, and the distance between the second fixed subwavelength grating and the second movable subwavelength grating is The spacing between them is smaller than the light wavelength of the laser light source;
所述激光光源通过所述耦合器分光后，利用所述第一锥形光纤耦合进所述第一亚波长光栅腔，利用所述第二锥形光纤耦合进所述第二亚波长光栅腔，所述第一亚波长光栅腔和所述第二亚波长光栅腔中光栅间因角速度输入和静电驱动引起的相对位移以推挽方式变化，利用所述第一探测器和所述第二探测器分别对所述第一亚波长光栅腔和所述第二亚波长光栅腔的谐振频率进行差频检测，实现角速度的解算。After the laser light source is split by the coupler, it is coupled into the first subwavelength grating cavity by the first tapered fiber, and is coupled into the second subwavelength grating cavity by the second tapered fiber, The relative displacement between the gratings in the first subwavelength grating cavity and the second subwavelength grating cavity due to angular velocity input and electrostatic drive changes in a push-pull manner, using the first detector and the second detector Difference frequency detection is performed on the resonance frequencies of the first subwavelength grating cavity and the second subwavelength grating cavity respectively, so as to realize the calculation of the angular velocity.
在一种可能的实现方式中，在本发明提供的上述光力学微机械陀螺中，所述第一锥形光纤位于所述第一亚波长光栅腔上方的近场区域内；In a possible implementation manner, in the above-mentioned optomechanical micromachined gyroscope provided by the present invention, the first tapered optical fiber is located in the near-field region above the first subwavelength grating cavity;
所述第二锥形光纤位于所述第二亚波长光栅腔上方的近场区域内。The second tapered fiber is located in the near field region above the second subwavelength grating cavity.
在一种可能的实现方式中，在本发明提供的上述光力学微机械陀螺中，所述敏感头单元，还包括：衬底，固定于所述衬底上的第一光栅固定台面、第二光栅固定台面、第一锚点、第二锚点、第三锚点和第四锚点，与所述驱动轴方向平行的驱动轴第一悬臂梁、驱动轴第二悬臂梁、驱动轴第三悬臂梁、驱动轴第四悬臂梁、驱动轴第五悬臂梁、驱动轴第六悬臂梁、驱动轴第七悬臂梁、驱动轴第八悬臂梁、驱动轴第九悬臂梁和驱动轴第十悬臂梁，以及与所述检测轴方向平行的检测轴第一悬臂梁、检测轴第二悬臂梁、检测轴第三悬臂梁、检测轴第四悬臂梁、检测轴第五悬臂梁、检测轴第六悬臂梁、检测轴第七悬臂梁、检测轴第八悬臂梁、检测轴第九悬臂梁和检测轴第十悬臂梁；其中，所述第一固定梳齿电极和所述第二固定梳齿电极固定于所述衬底上；所述第一固定亚波长光栅与所述第一光栅固定台面固定连接，所述第二固定亚波长光栅与所述第二光栅固定台面固定连接；In a possible implementation manner, in the above-mentioned opto-mechanical micromachined gyroscope provided by the present invention, the sensing head unit further includes: a substrate, a first grating fixing mesa, a second grating fixing mesa and a second grating fixed on the substrate The grating fixing table, the first anchor point, the second anchor point, the third anchor point and the fourth anchor point, the first cantilever beam of the drive shaft, the second cantilever beam of the drive shaft, and the third cantilever beam of the drive shaft parallel to the direction of the drive shaft Cantilever beam, drive shaft fourth cantilever beam, drive shaft fifth cantilever beam, drive shaft sixth cantilever beam, drive shaft seventh cantilever beam, drive shaft eighth cantilever beam, drive shaft ninth cantilever beam and drive shaft tenth cantilever beam beam, and the first cantilever beam of the detection axis, the second cantilever beam of the detection axis, the third cantilever beam of the detection axis, the fourth cantilever beam of the detection axis, the fifth cantilever beam of the detection axis, and the sixth cantilever beam of the detection axis, which are parallel to the direction of the detection axis cantilever beam, detection axis seventh cantilever beam, detection axis eighth cantilever beam, detection axis ninth cantilever beam and detection axis tenth cantilever beam; wherein, the first fixed comb-tooth electrode and the second fixed comb-tooth electrode being fixed on the substrate; the first fixed subwavelength grating is fixedly connected with the first grating fixing table, and the second fixed subwavelength grating is fixedly connected with the second grating fixing table;
所述第一锚点、所述第二锚点、所述第三锚点和所述第四锚点分别位于正方形的四个顶点，所述质量块位于正方形的中心，所述第一可动梳齿电极、所述第二可动梳齿电极、所述第一亚波长光栅腔和所述第二亚波长光栅腔分别位于正方形的四个边上，所述第一可动梳齿电极与所述第二可动梳齿电极相对，所述第一亚波长光栅腔与所述第二亚波长光栅腔相对；所述第一固定梳齿电极位于所述第一可动梳齿电极所在边的外侧，所述第一固定梳齿电极的梳齿与所述第一可动梳齿电极的梳齿交替分布，所述第二固定梳齿电极位于所述第二可动梳齿电极所在边的外侧，所述第二固定梳齿电极的梳齿与所述第二可动梳齿电极的梳齿交替分布；所述第一光栅固定台面位于所述第一亚波长光栅腔所在边的外侧，所述第二光栅固定台面位于所述第二亚波长光栅腔所在边的外侧；The first anchor point, the second anchor point, the third anchor point and the fourth anchor point are respectively located at the four vertices of the square, the mass block is located at the center of the square, and the first movable The comb-teeth electrode, the second movable comb-teeth electrode, the first sub-wavelength grating cavity and the second sub-wavelength grating cavity are respectively located on the four sides of the square, and the first movable comb-teeth electrode and the The second movable comb-teeth electrodes are opposite to each other, and the first sub-wavelength grating cavity is opposite to the second sub-wavelength grating cavity; the first fixed comb-teeth electrodes are located on the side where the first movable comb-teeth electrodes are located outside, the comb teeth of the first fixed comb-tooth electrode and the comb teeth of the first movable comb-tooth electrode are alternately distributed, and the second fixed comb-tooth electrode is located on the side where the second movable comb-tooth electrode is located the outer side of the second fixed comb-tooth electrode, the comb teeth of the second fixed comb-tooth electrode and the comb-tooth of the second movable comb-tooth electrode are alternately distributed; the first grating fixed mesa is located on the outside of the side where the first subwavelength grating cavity is located , the second grating fixed mesa is located outside the side where the second subwavelength grating cavity is located;
所述第一可动梳齿电极通过所述驱动轴第二悬臂梁、所述驱动轴第三悬臂梁和所述驱动轴第四悬臂梁与所述质量块固定连接，所述第二可动梳齿电极通过所述驱动轴第七悬臂梁、所述驱动轴第八悬臂梁和所述驱动轴第九悬臂梁与所述质量块固定连接；所述第一可动亚波长光栅通过所述检测轴第二悬臂梁、所述检测轴第三悬臂梁和所述检测轴第四悬臂梁与所述质量块固定连接，所述第二可动亚波长光栅通过所述检测轴第七悬臂梁、所述检测轴第八悬臂梁和所述检测轴第九悬臂梁与所述质量块固定连接，所述质量块、所述第一可动梳齿电极、所述第二可动梳齿电极、所述第一可动亚波长光栅和所述第二可动亚波长光栅构成微机械可动结构，通过所述驱动轴第一悬臂梁和所述检测轴第一悬臂梁与所述第一锚点固定连接，通过所述驱动轴第六悬臂梁和所述检测轴第五悬臂梁与所述第二锚点固定连接，通过所述驱动轴第五悬臂梁和所述检测轴第六悬臂梁与所述第三锚点固定连接，通过所述驱动轴第十悬臂梁和所述检测轴第十悬臂梁与所述第四锚点固定连接。The first movable comb-tooth electrode is fixedly connected to the mass block through the second cantilever beam of the drive shaft, the third cantilever beam of the drive shaft and the fourth cantilever beam of the drive shaft, and the second movable The comb-tooth electrode is fixedly connected to the mass block through the seventh cantilever beam of the drive shaft, the eighth cantilever beam of the drive shaft, and the ninth cantilever beam of the drive shaft; the first movable subwavelength grating passes through the The second cantilever beam of the detection axis, the third cantilever beam of the detection axis and the fourth cantilever beam of the detection axis are fixedly connected to the mass block, and the second movable sub-wavelength grating passes through the seventh cantilever beam of the detection axis , The eighth cantilever beam of the detection axis and the ninth cantilever beam of the detection axis are fixedly connected to the mass block, the mass block, the first movable comb-tooth electrode, and the second movable comb-tooth electrode , The first movable sub-wavelength grating and the second movable sub-wavelength grating constitute a micro-mechanical movable structure, and the first cantilever beam of the driving axis and the first cantilever beam of the detection axis are connected with the first The anchor point is fixedly connected, and the sixth cantilever beam of the driving shaft and the fifth cantilever beam of the detection shaft are fixedly connected to the second anchor point, and the fifth cantilever beam of the driving shaft and the sixth cantilever beam of the detection shaft are fixedly connected to the second anchor point. The beam is fixedly connected to the third anchor point, and is fixedly connected to the fourth anchor point through the tenth cantilever beam of the drive shaft and the tenth cantilever beam of the detection shaft.
在一种可能的实现方式中，在本发明提供的上述光力学微机械陀螺中，所述驱动轴第一悬臂梁与所述检测轴第一悬臂梁、所述驱动轴第二悬臂梁与所述检测轴第二悬臂梁、所述驱动轴第三悬臂梁与所述检测轴第三悬臂梁、所述驱动轴第四悬臂梁与所述检测轴第四悬臂梁、所述驱动轴第五悬臂梁与所述检测轴第五悬臂梁、所述驱动轴第六悬臂梁与所述检测轴第六悬臂梁、所述驱动轴第七悬臂梁与所述检测轴第七悬臂梁、所述驱动轴第八悬臂梁与所述检测轴第八悬臂梁、所述驱动轴第九悬臂梁与所述检测轴第九悬臂梁、所述驱动轴第十悬臂梁与所述检测轴第十悬臂梁分别关于所述第一锚点与所述第四锚点的连线方向对称。In a possible implementation manner, in the above-mentioned optomechanical micromachined gyroscope provided by the present invention, the first cantilever beam of the driving axis and the first cantilever beam of the detection axis, the second cantilever beam of the driving axis and the The second cantilever beam of the detection axis, the third cantilever beam of the driving axis and the third cantilever beam of the detection axis, the fourth cantilever beam of the driving axis and the fourth cantilever beam of the detection axis, the fifth cantilever beam of the driving axis The cantilever beam and the fifth cantilever beam of the detection shaft, the sixth cantilever beam of the drive shaft and the sixth cantilever beam of the detection shaft, the seventh cantilever beam of the driving shaft and the seventh cantilever beam of the detection shaft, the The eighth cantilever beam of the drive shaft and the eighth cantilever beam of the detection shaft, the ninth cantilever beam of the drive shaft and the ninth cantilever beam of the detection shaft, the tenth cantilever beam of the driving shaft and the tenth cantilever beam of the detection shaft The beams are respectively symmetrical with respect to the connecting direction of the first anchor point and the fourth anchor point.
在一种可能的实现方式中，在本发明提供的上述光力学微机械陀螺中，所述第一固定梳齿电极与所述第二固定梳齿电极的结构相同。In a possible implementation manner, in the above-mentioned optomechanical micromachined gyroscope provided by the present invention, the structures of the first fixed comb-teeth electrode and the second fixed comb-teeth electrode are the same.
在一种可能的实现方式中，在本发明提供的上述光力学微机械陀螺中，所述第一可动梳齿电极与所述第二可动梳齿电极的结构相同。In a possible implementation manner, in the above-mentioned optomechanical micromachined gyroscope provided by the present invention, the structures of the first movable comb-teeth electrode and the second movable comb-teeth electrode are the same.
在一种可能的实现方式中，在本发明提供的上述光力学微机械陀螺中，所述第一亚波长光栅腔与所述第二亚波长光栅腔的结构相同。In a possible implementation manner, in the above-mentioned opto-mechanical micromachined gyroscope provided by the present invention, the structures of the first subwavelength grating cavity and the second subwavelength grating cavity are the same.
在一种可能的实现方式中，在本发明提供的上述光力学微机械陀螺中，所述衬底的材料为硅；In a possible implementation manner, in the above-mentioned optomechanical micromachined gyroscope provided by the present invention, the material of the substrate is silicon;
所述第一光栅固定台面、所述第二光栅固定台面、所述第一锚点、所述第二锚点、所述第三锚点、所述第四锚点、所述质量块、所述第一亚波长光栅腔、所述第二亚波长光栅腔、所述驱动轴第一悬臂梁、所述驱动轴第二悬臂梁、所述驱动轴第三悬臂梁、所述驱动轴第四悬臂梁、所述驱动轴第五悬臂梁、所述驱动轴第六悬臂梁、所述驱动轴第七悬臂梁、所述驱动轴第八悬臂梁、所述驱动轴第九悬臂梁、所述驱动轴第十悬臂梁、所述检测轴第一悬臂梁、所述检测轴第二悬臂梁、所述检测轴第三悬臂梁、所述检测轴第四悬臂梁、所述检测轴第五悬臂梁、所述检测轴第六悬臂梁、所述检测轴第七悬臂梁、所述检测轴第八悬臂梁、所述检测轴第九悬臂梁和所述检测轴第十悬臂梁的材料为氮化硅；The first grating fixing table, the second grating fixing table, the first anchor point, the second anchor point, the third anchor point, the fourth anchor point, the mass, the The first subwavelength grating cavity, the second subwavelength grating cavity, the first cantilever beam of the drive shaft, the second cantilever beam of the drive shaft, the third cantilever beam of the drive shaft, the fourth cantilever beam of the drive shaft cantilever beam, the fifth cantilever beam of the drive shaft, the sixth cantilever beam of the drive shaft, the seventh cantilever beam of the drive shaft, the eighth cantilever beam of the drive shaft, the ninth cantilever beam of the drive shaft, the The tenth cantilever beam of the drive shaft, the first cantilever beam of the detection shaft, the second cantilever beam of the detection shaft, the third cantilever beam of the detection shaft, the fourth cantilever beam of the detection shaft, and the fifth cantilever beam of the detection shaft The material of the beam, the sixth cantilever beam of the detection axis, the seventh cantilever beam of the detection axis, the eighth cantilever beam of the detection axis, the ninth cantilever beam of the detection axis and the tenth cantilever beam of the detection axis are nitrogen Silicon;
所述第一固定梳齿电极、所述第二固定梳齿电极、所述第一可动梳齿电极和所述第二可动梳齿电极的材料为表面镀金/铬合金的氮化硅。The materials of the first fixed comb-tooth electrode, the second fixed comb-tooth electrode, the first movable comb-tooth electrode and the second movable comb-tooth electrode are silicon nitride with gold/chrome alloy plating on the surface.
在一种可能的实现方式中，在本发明提供的上述光力学微机械陀螺中，第一固定亚波长光栅、第一可动亚波长光栅、第二固定亚波长光栅和第二可动亚波长光栅的光栅周期小于所述激光光源的光波长。In a possible implementation manner, in the above-mentioned optomechanical micromachined gyroscope provided by the present invention, the first fixed sub-wavelength grating, the first movable sub-wavelength grating, the second fixed sub-wavelength grating and the second movable sub-wavelength grating The grating period of the grating is smaller than the light wavelength of the laser light source.
在一种可能的实现方式中，在本发明提供的上述光力学微机械陀螺中，还包括：闭环反馈冷却单元；In a possible implementation manner, the above-mentioned opto-mechanical micromachined gyroscope provided by the present invention further includes: a closed-loop feedback cooling unit;
所述闭环反馈冷却单元，包括：分别与所述耦合器和所述第一锥形光纤连接的第一强度调制器、分别与所述耦合器和所述第二锥形光纤连接的第二强度调制器、与所述第一探测器连接的第一带通滤波器、与所述第二探测器连接的第二带通滤波器、分别与所述第一带通滤波器和所述第一强度调制器连接的第一模拟微分电路以及分别与所述第二带通滤波器和所述第二强度调制器连接的第二模拟微分电路；其中，The closed-loop feedback cooling unit includes: a first intensity modulator connected to the coupler and the first tapered fiber, respectively, and a second intensity modulator connected to the coupler and the second tapered fiber, respectively a modulator, a first bandpass filter connected to the first detector, a second bandpass filter connected to the second detector, respectively connected to the first bandpass filter and the first a first analog differential circuit connected to the intensity modulator and a second analog differential circuit connected to the second bandpass filter and the second intensity modulator respectively; wherein,
所述第一探测器的输出信号依次通过所述第一带通滤波器和所述第一模拟微分电路反馈给所述第一强度调制器，所述第二探测器的输出信号依次通过所述第二带通滤波器和所述第二模拟微分电路反馈给所述第二强度调制器，通过光强调制实现闭环反馈冷却，利用光压抵消热噪声产生的随机力。The output signal of the first detector is fed back to the first intensity modulator sequentially through the first band-pass filter and the first analog differential circuit, and the output signal of the second detector is sequentially passed through the The second band-pass filter and the second analog differential circuit are fed back to the second intensity modulator, closed-loop feedback cooling is realized through light intensity modulation, and random force generated by thermal noise is canceled by light pressure.
本发明提供的上述光力学微机械陀螺，利用亚波长光栅构建高品质因数光学谐振腔，利用双亚波长光栅腔实现推挽工作方式，并通过双亚波长光栅腔谐振频率的差分检测实现微机械陀螺的角速度解算，可有效提高微机械陀螺的检测灵敏度；利用光信号对微机械陀螺进行检测，相比于现有的电学检测方法，具有精度高、稳定性好、抗电磁干扰能力强、寄生电容小、线性良好、系统体积小、集成度高等优点，并且，亚波长光栅的光栅周期小于入射光波长，将高品质因数亚波长光栅腔用于微机械陀螺检测，相比于现有的光学检测方法，检测精度和检测灵敏度更高；质量块的驱动模态与检测模态均采用共面振动方式，可避免微机械陀螺工作时压膜阻尼过大而影响微机械陀螺的机械灵敏度。The above-mentioned opto-mechanical micromechanical gyroscope provided by the present invention utilizes a subwavelength grating to construct a high quality factor optical resonant cavity, utilizes a double subwavelength grating cavity to realize a push-pull working mode, and realizes a micromechanical micromechanical gyroscope through differential detection of the resonant frequency of the double subwavelength grating cavity. The angular velocity calculation of the gyroscope can effectively improve the detection sensitivity of the micromachined gyroscope; the use of optical signals to detect the micromachined gyroscope, compared with the existing electrical detection methods, has the advantages of high precision, good stability, strong anti-electromagnetic interference ability, It has the advantages of small parasitic capacitance, good linearity, small system volume, and high integration. In addition, the grating period of the subwavelength grating is smaller than the wavelength of the incident light. The high quality factor subwavelength grating cavity is used for micromachined gyroscope detection. The optical detection method has higher detection accuracy and detection sensitivity; the driving mode and detection mode of the mass block adopt the coplanar vibration method, which can avoid the excessive damping of the lamination film when the micromachined gyroscope is working and affect the mechanical sensitivity of the micromachined gyroscope.
附图说明Description of drawings
图1为本发明实施例提供的基于双亚波长光栅腔检测的光力学微机械陀螺中敏感头单元的平面结构示意图；1 is a schematic plan view of a sensing head unit in an optomechanical micromachined gyroscope based on dual subwavelength grating cavity detection according to an embodiment of the present invention;
图2为本发明实施例提供的基于双亚波长光栅腔检测的光力学微机械陀螺中敏感头单元的立体结构示意图；2 is a schematic three-dimensional structural diagram of a sensing head unit in an optomechanical micromachined gyroscope based on dual-subwavelength grating cavity detection according to an embodiment of the present invention;
图3为本发明实施例提供的基于双亚波长光栅腔检测的光力学微机械陀螺中外围光学检测单元的结构示意图；3 is a schematic structural diagram of a peripheral optical detection unit in an optomechanical micromachined gyroscope based on dual-subwavelength grating cavity detection according to an embodiment of the present invention;
图4为本发明实施例提供的基于双亚波长光栅腔检测的光力学微机械陀螺中外围光学检测单元与闭环反馈冷却单元的结构示意图。4 is a schematic structural diagram of a peripheral optical detection unit and a closed-loop feedback cooling unit in an optomechanical micromachined gyroscope based on dual-subwavelength grating cavity detection according to an embodiment of the present invention.
附图说明：1.质量块；2.第一固定梳齿电极；3.第一可动梳齿电极；4.第二固定梳齿电极；5.第二可动梳齿电极；6.第一亚波长光栅腔；7.第二亚波长光栅腔；8.第一固定亚波长光栅；9.第一可动亚波长光栅；10.第二固定亚波长光栅；11.第二可动亚波长光栅；12.激光光源；13.耦合器；14.第一锥形光纤；15.第二锥形光纤；16.第一探测器；17.第二探测器；18.衬底；19.第一光栅固定台面；20.第二光栅固定台面；21.第一锚点；22.第二锚点；23.第三锚点；24.第四锚点；25.驱动轴第一悬臂梁；26.驱动轴第二悬臂梁；27.驱动轴第三悬臂梁；28.驱动轴第四悬臂梁；29.驱动轴第五悬臂梁；30.驱动轴第六悬臂梁；31.驱动轴第七悬臂梁；32.驱动轴第八悬臂梁；33.驱动轴第九悬臂梁；34.驱动轴第十悬臂梁；35.检测轴第一悬臂梁；36.检测轴第二悬臂梁；37.检测轴第三悬臂梁；38.检测轴第四悬臂梁；39.检测轴第五悬臂梁；40.检测轴第六悬臂梁；41.检测轴第七悬臂梁；42.检测轴第八悬臂梁；43.检测轴第九悬臂梁；44.检测轴第十悬臂梁；45.第一强度调制器；46.第二强度调制器；47.第一带通滤波器；48.第二带通滤波器；49.第一模拟微分电路；50.第二模拟微分电路。Description of the drawings: 1. Mass; 2. The first fixed comb-tooth electrode; 3. The first movable comb-tooth electrode; 4. The second fixed comb-tooth electrode; 5. The second movable comb-tooth electrode; 6. The first a subwavelength grating cavity; 7. a second subwavelength grating cavity; 8. a first fixed subwavelength grating; 9. a first movable subwavelength grating; 10. a second fixed subwavelength grating; 11. a second movable subwavelength grating wavelength grating; 12. laser light source; 13. coupler; 14. first tapered fiber; 15. second tapered fiber; 16. first detector; 17. second detector; 18. substrate; 19. 20. The second grating fixing table; 21. The first anchor point; 22. The second anchor point; 23. The third anchor point; 24. The fourth anchor point; 25. The first cantilever beam of the
具体实施方式Detailed ways
下面将结合本申请实施方式中的附图，对本申请实施方式中的技术方案进行清楚、完整的描述，显然，所描述的实施方式仅仅是作为例示，并非用于限制本申请。The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only used as examples and are not intended to limit the present application.
本发明实施例提供的一种基于双亚波长光栅腔检测的光力学微机械陀螺，包括：敏感头单元和外围光学检测单元；其中，An opto-mechanical micromachined gyroscope based on dual-subwavelength grating cavity detection provided by an embodiment of the present invention includes: a sensitive head unit and a peripheral optical detection unit; wherein,
敏感头单元，如图1和图2所示，包括：质量块1、位于质量块1前侧的第一固定梳齿电极2和第一可动梳齿电极3、位于质量块1后侧的第二固定梳齿电极4和第二可动梳齿电极5、以及分别位于质量块1左右两侧的第一亚波长光栅腔6和第二亚波长光栅腔7；其中，第一亚波长光栅腔6包括相互分离且平行共面设置的第一固定亚波长光栅8和第一可动亚波长光栅9，第二亚波长光栅腔7包括相互分离且平行共面设置的第二固定亚波长光栅10和第二可动亚波长光栅11；第一可动梳齿电极3、第二可动梳齿电极5、第一可动亚波长光栅9和第二可动亚波长光栅11分别与质量块1固定连接；The sensing head unit, as shown in FIG. 1 and FIG. 2 , includes: a
第一固定梳齿电极2、第二固定梳齿电极4、第一可动梳齿电极3和第二可动梳齿电极5用于在被施加电压时对质量块1进行共面静电驱动，带动第一亚波长光栅腔6中的第一可动亚波长光栅9和第二亚波长光栅腔7中的第二可动亚波长光栅11共面振动；The first fixed comb-
外围光学检测单元，如图3所示，包括：激光光源12、与激光光源12连接的耦合器13、分别与耦合器13连接的第一锥形光纤14和第二锥形光纤15、与第一锥形光纤14连接的第一探测器16以及与第二锥形光纤15连接的第二探测器17；The peripheral optical detection unit, as shown in FIG. 3, includes: a
第一固定亚波长光栅8与第一可动亚波长光栅9之间的间距小于激光光源12的光波长，第二固定亚波长光栅10与第二可动亚波长光栅11之间的间距小于激光光源12的光波长；The distance between the first fixed subwavelength grating 8 and the first movable subwavelength grating 9 is smaller than the light wavelength of the
激光光源12通过耦合器13分光后，利用第一锥形光纤14耦合进第一亚波长光栅腔6，利用第二锥形光纤15耦合进第二亚波长光栅腔7，第一亚波长光栅腔6和第二亚波长光栅腔7中光栅间因角速度输入和静电驱动引起的相对位移以推挽方式变化，利用第一探测器16和第二探测器17分别对第一亚波长光栅腔6和第二亚波长光栅腔7的谐振频率进行差频检测，实现角速度的解算。After the
本发明实施例提供的上述光力学微机械陀螺，利用亚波长光栅构建高品质因数光学谐振腔，利用双亚波长光栅腔实现推挽工作方式，并通过双亚波长光栅腔谐振频率的差分检测实现微机械陀螺的角速度解算，可有效提高微机械陀螺的检测灵敏度；利用光信号对微机械陀螺进行检测，相比于现有的电学检测方法，具有精度高、稳定性好、抗电磁干扰能力强、寄生电容小、线性良好、系统体积小、集成度高等优点，并且，亚波长光栅的光栅周期小于入射光波长，将高品质因数亚波长光栅腔用于微机械陀螺检测，相比于现有的光学检测方法，检测精度和检测灵敏度更高；质量块的驱动模态与检测模态均采用共面振动方式，可避免微机械陀螺工作时压膜阻尼过大而影响微机械陀螺的机械灵敏度。The above-mentioned opto-mechanical micromachined gyroscope provided by the embodiment of the present invention uses a sub-wavelength grating to construct a high-quality optical resonant cavity, uses a double-sub-wavelength grating cavity to realize a push-pull working mode, and realizes the differential detection of the resonant frequency of the double-sub-wavelength grating cavity. The angular velocity calculation of the micro-machined gyroscope can effectively improve the detection sensitivity of the micro-machined gyroscope; the detection of the micro-machined gyroscope by the optical signal has high precision, good stability and anti-electromagnetic interference ability compared with the existing electrical detection methods. In addition, the grating period of the subwavelength grating is smaller than the wavelength of the incident light, and the high quality factor subwavelength grating cavity is used for the detection of micromachined gyroscopes. Some optical detection methods have higher detection accuracy and detection sensitivity; the driving mode and detection mode of the mass block adopt the coplanar vibration method, which can avoid the excessive damping of the lamination film when the micromachined gyroscope is working and affect the mechanical properties of the micromachined gyroscope. sensitivity.
本发明实施例提供的上述光力学微机械陀螺的工作原理为：对第一固定梳齿电极2、第二固定梳齿电极4、第一可动梳齿电极3和第二可动梳齿电极5施加带有直流偏置的交流电压产生沿驱动轴方向(如图1和图2所示的y轴方向)交变的静电驱动力，对质量块1进行共面静电驱动，驱动质量块1振动；当沿敏感轴方向(如图1和图2所示的z轴方向)输入角速度时，静电驱动的质量块1因哥氏效应产生沿检测轴方向(如图1和图2所示的x轴方向)的哥氏力，引起与驱动模态垂直的共面检测模态，检测模态的振动幅度与旋转角速度成正比；激光光源12通过耦合器13分光后，利用第一锥形光纤14耦合进第一亚波长光栅腔6形成谐振，利用第二锥形光纤15耦合进第二亚波长光栅腔7形成谐振，由于第一亚波长光栅腔6和第二亚波长光栅腔7具有高品质因数特性，其谐振频率对亚波长光栅检测轴方向(如图1和图2所示的x轴方向)上的相对位移极为敏感；角速度输入和静电驱动引起的检测模态使第一亚波长光栅腔6和第二亚波长光栅腔7中光栅间的相对位移以推挽方式变化，从而使第一亚波长光栅腔6的谐振频率和第二亚波长光栅腔7的谐振频率发生反向变化，利用第一探测器16和第二探测器17分别对第一亚波长光栅腔6的谐振频率和第二亚波长光栅腔7的谐振频率进行差频检测，实现角速度的解算。The working principle of the above-mentioned opto-mechanical micromachined gyroscope provided in the embodiment of the present invention is as follows: the first fixed comb-
在具体实施时，在本发明实施例提供的上述光力学微机械陀螺中，为了实现利用第一锥形光纤将光耦合进第一亚波长光栅腔形成谐振，利用第二锥形光纤将光耦合进第二亚波长光栅腔形成谐振，可以将第一锥形光纤设置于第一亚波长光栅腔上方的近场区域内，将第二锥形光纤设置于第二亚波长光栅腔上方的近场区域内。当然，还可以通过其他方式来实现利用第一锥形光纤将光耦合进第一亚波长光栅腔形成谐振，利用第二锥形光纤将光耦合进第二亚波长光栅腔形成谐振，在此不做限定。In specific implementation, in the above-mentioned opto-mechanical micromachined gyroscope provided by the embodiment of the present invention, in order to realize the use of the first tapered fiber to couple light into the first subwavelength grating cavity to form resonance, the second tapered fiber is used to couple the light Enter the second subwavelength grating cavity to form resonance, the first tapered fiber can be arranged in the near-field region above the first subwavelength grating cavity, and the second tapered fiber can be arranged in the near field above the second subwavelength grating cavity within the area. Of course, the first tapered fiber can also be used to couple light into the first subwavelength grating cavity to form resonance, and the second tapered fiber can be used to couple light into the second subwavelength grating cavity to form resonance. Do limit.
在具体实施时，在本发明实施例提供的上述光力学微机械陀螺中，敏感头单元的具体结构可以如图1和图2所示，还可以包括：衬底18，固定于衬底18上的第一光栅固定台面19、第二光栅固定台面20、第一锚点21、第二锚点22、第三锚点23和第四锚点24，与驱动轴方向(如图1和图2所示的y轴方向)平行的驱动轴第一悬臂梁25、驱动轴第二悬臂梁26、驱动轴第三悬臂梁27、驱动轴第四悬臂梁28、驱动轴第五悬臂梁29、驱动轴第六悬臂梁30、驱动轴第七悬臂梁31、驱动轴第八悬臂梁32、驱动轴第九悬臂梁33和驱动轴第十悬臂梁34，以及与检测轴方向(如图1和图2所示的x轴方向)平行的检测轴第一悬臂梁35、检测轴第二悬臂梁36、检测轴第三悬臂梁37、检测轴第四悬臂梁38、检测轴第五悬臂梁39、检测轴第六悬臂梁40、检测轴第七悬臂梁41、检测轴第八悬臂梁42、检测轴第九悬臂梁43和检测轴第十悬臂梁44；其中，第一固定梳齿电极2和第二固定梳齿电极4也固定于衬底18上；第一固定亚波长光栅8与第一光栅固定台面19固定连接，第二固定亚波长光栅10与第二光栅固定台面20固定连接；第一锚点21、第二锚点22、第三锚点23和第四锚点24分别位于正方形的四个顶点，质量块1位于正方形的中心，第一可动梳齿电极3、第二可动梳齿电极5、第一亚波长光栅腔6和第二亚波长光栅腔7分别位于正方形的四个边上，第一可动梳齿电极3与第二可动梳齿电极5相对，第一亚波长光栅腔6与第二亚波长光栅腔7相对；第一固定梳齿电极2位于第一可动梳齿电极3所在边的外侧，第一固定梳齿电极2的梳齿与第一可动梳齿电极3的梳齿交替分布，第二固定梳齿电极4位于第二可动梳齿电极5所在边的外侧，第二固定梳齿电极4的梳齿与第二可动梳齿电极5的梳齿交替分布；第一光栅固定台面19位于第一亚波长光栅腔6所在边的外侧，第二光栅固定台面20位于第二亚波长光栅腔7所在边的外侧；第一可动梳齿电极3通过驱动轴第二悬臂梁26、驱动轴第三悬臂梁27和驱动轴第四悬臂梁28与质量块1固定连接，第二可动梳齿电极5通过驱动轴第七悬臂梁31、驱动轴第八悬臂梁32和驱动轴第九悬臂梁33与质量块1固定连接，且驱动轴第二悬臂梁26、驱动轴第三悬臂梁27、驱动轴第四悬臂梁28、驱动轴第七悬臂梁31、驱动轴第八悬臂梁32和驱动轴第九悬臂梁33均垂直于质量块1的连接边，这样，可以形成驱动轴方向的大刚度连接，减小机械结构沿检测轴方向运动对驱动轴方向的影响；第一固定亚波长光栅8和第一可动亚波长光栅9、第二固定亚波长光栅10和第二可动亚波长光栅11构成检测轴方向(如图1和图2所示的x轴方向)位移敏感的双亚波长光栅腔；第一可动亚波长光栅9通过检测轴第二悬臂梁36、检测轴第三悬臂梁37和检测轴第四悬臂梁38与质量块1固定连接，第二可动亚波长光栅11通过检测轴第七悬臂梁41、检测轴第八悬臂梁42和检测轴第九悬臂梁43与质量块1固定连接，且检测轴第二悬臂梁36、检测轴第三悬臂梁37、检测轴第四悬臂梁38、检测轴第七悬臂梁41、检测轴第八悬臂梁42和检测轴第九悬臂梁43均垂直于质量块1的连接边，这样，可以形成检测轴方向的大刚度连接，减小机械结构沿驱动轴方向运动对检测轴方向的影响；质量块1、第一可动梳齿电极3、第二可动梳齿电极5、第一可动亚波长光栅9和第二可动亚波长光栅11构成微机械可动结构，通过驱动轴第一悬臂梁25和检测轴第一悬臂梁35与第一锚点21固定连接，通过驱动轴第六悬臂梁30和检测轴第五悬臂梁39与第二锚点22固定连接，通过驱动轴第五悬臂梁29和检测轴第六悬臂梁40与第三锚点23固定连接，通过驱动轴第十悬臂梁34和检测轴第十悬臂梁44与第四锚点24固定连接。综上，第一可动亚波长光栅9与检测轴第二悬臂梁36、检测轴第三悬臂梁37、检测轴第四悬臂梁38、驱动轴第一悬臂梁25和驱动轴第六悬臂梁30之间的机械连接，以及第二可动亚波长光栅11与检测轴第七悬臂梁41、检测轴第八悬臂梁42、检测轴第九悬臂梁43、驱动轴第五悬臂梁29和驱动轴第十悬臂梁34之间的机械连接，可以使双亚波长光栅腔工作在差动状态。During specific implementation, in the above-mentioned optomechanical micromachined gyroscope provided in the embodiment of the present invention, the specific structure of the sensing head unit may be as shown in FIG. 1 and FIG. 2 , and may further include: a substrate 18 , which is fixed on the substrate 18 The first grating fixing table 19, the second grating fixing table 20, the first anchor point 21, the second anchor point 22, the third anchor point 23 and the fourth anchor point 24, and the direction of the driving axis (as shown in Figure 1 and Figure 2 y-axis direction shown) parallel drive shaft first cantilever beam 25, drive shaft second cantilever beam 26, drive shaft third cantilever beam 27, drive shaft fourth cantilever beam 28, drive shaft fifth cantilever beam 29, drive shaft The sixth cantilever beam 30 of the drive shaft, the seventh cantilever beam 31 of the drive shaft, the eighth cantilever beam 32 of the drive shaft, the ninth cantilever beam 33 of the drive shaft and the tenth cantilever beam 34 of the drive shaft, and the direction of the detection axis (as shown in FIG. 1 and FIG. 2) parallel detection axis first cantilever beam 35, detection axis second cantilever beam 36, detection axis third cantilever beam 37, detection axis fourth cantilever beam 38, detection axis fifth cantilever beam 39, The sixth cantilever beam 40 of the detection axis, the seventh cantilever beam 41 of the detection axis, the eighth cantilever beam 42 of the detection axis, the ninth cantilever beam 43 of the detection axis, and the tenth cantilever beam 44 of the detection axis; The second fixed comb-tooth electrode 4 is also fixed on the substrate 18; the first fixed subwavelength grating 8 is fixedly connected with the first grating fixing table 19, and the second fixed subwavelength grating 10 is fixedly connected with the second grating fixing table 20; An anchor point 21, a second anchor point 22, a third anchor point 23 and a fourth anchor point 24 are respectively located at the four vertices of the square, the mass 1 is located at the center of the square, the first movable comb electrode 3, the second movable The movable comb-teeth electrode 5 , the first subwavelength grating cavity 6 and the second subwavelength grating cavity 7 are respectively located on the four sides of the square. The first movable comb-
在具体实施时，在本发明实施例提供的上述光力学微机械陀螺中，如图1和图2所示，可以将驱动轴第一悬臂梁25与检测轴第一悬臂梁35设置为关于第一锚点21与第四锚点24的连线方向对称，将驱动轴第二悬臂梁26与检测轴第二悬臂梁36设置为关于第一锚点21与第四锚点24的连线方向对称，将驱动轴第三悬臂梁27与检测轴第三悬臂梁37设置为关于第一锚点21与第四锚点24的连线方向对称，将驱动轴第四悬臂梁28与检测轴第四悬臂梁38设置为关于第一锚点21与第四锚点24的连线方向对称，将驱动轴第五悬臂梁29与检测轴第五悬臂梁39设置为关于第一锚点21与第四锚点24的连线方向对称，将驱动轴第六悬臂梁30与检测轴第六悬臂梁40设置为关于第一锚点21与第四锚点24的连线方向对称，将驱动轴第七悬臂梁31与检测轴第七悬臂梁41设置为关于第一锚点21与第四锚点24的连线方向对称，将驱动轴第八悬臂梁32与检测轴第八悬臂梁42设置为关于第一锚点21与第四锚点24的连线方向对称，将驱动轴第九悬臂梁33与检测轴第九悬臂梁43设置为关于第一锚点21与第四锚点24的连线方向对称，将驱动轴第十悬臂梁34与检测轴第十悬臂梁44设置为关于第一锚点21与第四锚点24的连线方向对称，这样，可以有效抑制驱动模态与检测模态之间的机械耦合，实现驱动模态与检测模态之间的解耦。During specific implementation, in the above-mentioned opto-mechanical micromachined gyroscope provided by the embodiment of the present invention, as shown in FIG. 1 and FIG. 2 , the first cantilever beam 25 of the driving axis and the first cantilever beam 35 of the detection axis may be set to be relative to the first cantilever beam 25 of the detection axis The direction of the connecting line between an anchor point 21 and the fourth anchor point 24 is symmetrical, and the second cantilever beam 26 of the driving axis and the second cantilever beam 36 of the detection axis are set to be related to the connecting line direction of the first anchor point 21 and the fourth anchor point 24 Symmetrically, the third cantilever beam 27 of the drive shaft and the third cantilever beam 37 of the detection shaft are set to be symmetrical with respect to the connection direction of the first anchor point 21 and the fourth anchor point 24, and the fourth cantilever beam 28 of the drive shaft and the detection shaft The four cantilever beams 38 are arranged to be symmetrical with respect to the connecting line direction of the first anchor point 21 and the fourth anchor point 24 , and the fifth cantilever beam 29 of the driving shaft and the fifth cantilever beam 39 of the detection shaft are arranged to be symmetrical with respect to the connection line between the first anchor point 21 and the fourth anchor point 24 . The connection directions of the four
在具体实施时，在本发明实施例提供的上述光力学微机械陀螺中，可以将第一固定梳齿电极与第二固定梳齿电极设置为结构相同，这样，可以实现质量块的稳幅驱动。In specific implementation, in the above-mentioned opto-mechanical micromachined gyroscope provided by the embodiment of the present invention, the first fixed comb-tooth electrode and the second fixed comb-tooth electrode can be set to have the same structure, so that the stable amplitude driving of the mass block can be realized. .
在具体实施时，在本发明实施例提供的上述光力学微机械陀螺中，可以将第一可动梳齿电极与第二可动梳齿电极设置为结构相同，这样，可以实现质量块的稳幅驱动。During specific implementation, in the above-mentioned opto-mechanical micromachined gyroscope provided by the embodiment of the present invention, the first movable comb-teeth electrode and the second movable comb-teeth electrode may be set to have the same structure, so that the stability of the mass block can be realized. Amplitude drive.
在具体实施时，在本发明实施例提供的上述光力学微机械陀螺中，可以将第一亚波长光栅腔与第二亚波长光栅腔设置为结构相同，这样，可以确保两个亚波长光栅腔具有相同的谐振频率，从而更易实现高精度差分检测。During specific implementation, in the above-mentioned opto-mechanical micromachined gyroscope provided in the embodiment of the present invention, the first sub-wavelength grating cavity and the second sub-wavelength grating cavity can be set to have the same structure, so that two sub-wavelength grating cavities can be ensured. It has the same resonant frequency, which makes it easier to achieve high-precision differential detection.
在具体实施时，在本发明实施例提供的上述光力学微机械陀螺中，可以将四个锚点设置为结构相同，也可以将十个驱动轴悬臂梁设置为结构相同，还可以将十个检测轴悬臂梁设置为结构相同，这样，可以实现驱动模态与检测模态的机械谐振频率相同，提高陀螺的机械灵敏度。During specific implementation, in the above-mentioned opto-mechanical micromachined gyroscope provided by the embodiment of the present invention, the four anchor points may be set to have the same structure, the ten drive shaft cantilever beams may be set to the same structure, or the ten cantilevers can be set to the same structure. The cantilever beam of the detection axis is set to have the same structure, so that the mechanical resonance frequency of the driving mode and the detection mode can be the same, and the mechanical sensitivity of the gyro can be improved.
在具体实施时，在本发明实施例提供的上述光力学微机械陀螺中，衬底可以选取硅(Si)衬底，第一光栅固定台面、第二光栅固定台面、第一锚点、第二锚点、第三锚点、第四锚点、质量块、第一亚波长光栅腔、第二亚波长光栅腔、驱动轴第一悬臂梁、驱动轴第二悬臂梁、驱动轴第三悬臂梁、驱动轴第四悬臂梁、驱动轴第五悬臂梁、驱动轴第六悬臂梁、驱动轴第七悬臂梁、驱动轴第八悬臂梁、驱动轴第九悬臂梁、驱动轴第十悬臂梁、检测轴第一悬臂梁、检测轴第二悬臂梁、检测轴第三悬臂梁、检测轴第四悬臂梁、检测轴第五悬臂梁、检测轴第六悬臂梁、检测轴第七悬臂梁、检测轴第八悬臂梁、检测轴第九悬臂梁和检测轴第十悬臂梁的材料可以选择氮化硅(Si3N4)材料，第一固定梳齿电极、第二固定梳齿电极、第一可动梳齿电极和第二可动梳齿电极的材料可以为表面镀金/铬合金的氮化硅(即在氮化硅的表面先镀一层铬再镀一层金)，也就是说，敏感头单元中除衬底外的其它部件均可以采用氮化硅材料加工，这样，更容易实现微机械陀螺的单片集成，并且，两个亚波长光栅腔采用氮化硅材料，还可以使两个亚波长光栅腔的品质因数更高，从而可以使微机械陀螺的检测灵敏度更高。In specific implementation, in the above-mentioned optomechanical micromachined gyroscope provided in the embodiment of the present invention, the substrate may be a silicon (Si) substrate, the first grating fixed mesa, the second grating fixed mesa, the first anchor point, the second grating fixed mesa Anchor point, third anchor point, fourth anchor point, mass, first subwavelength grating cavity, second subwavelength grating cavity, first drive shaft cantilever beam, drive shaft second cantilever beam, drive shaft third cantilever beam , the fourth cantilever beam of the drive shaft, the fifth cantilever beam of the drive shaft, the sixth cantilever beam of the drive shaft, the seventh cantilever beam of the drive shaft, the eighth cantilever beam of the drive shaft, the ninth cantilever beam of the drive shaft, the tenth cantilever beam of the drive shaft, Detection axis first cantilever beam, detection axis second cantilever beam, detection axis third cantilever beam, detection axis fourth cantilever beam, detection axis fifth cantilever beam, detection axis sixth cantilever beam, detection axis seventh cantilever beam, detection axis The material of the eighth cantilever beam of the axis, the ninth cantilever beam of the detection axis and the tenth cantilever beam of the detection axis can be selected from silicon nitride (Si 3 N 4 ) material, the first fixed comb-tooth electrode, the second fixed comb-tooth electrode, the first The materials of the movable comb-teeth electrode and the second movable comb-teeth electrode can be silicon nitride with gold/chromium alloy plating on the surface (that is, a layer of chromium is first plated on the surface of the silicon nitride and then a layer of gold is plated), that is, All other components in the sensing head unit except the substrate can be made of silicon nitride material, which makes it easier to realize the monolithic integration of the micromachined gyroscope. The quality factor of the two subwavelength grating cavities is higher, so that the detection sensitivity of the micromachined gyroscope can be higher.
在具体实施时，在本发明实施例提供的上述光力学微机械陀螺中，对于第一固定亚波长光栅、第一可动亚波长光栅、第二固定亚波长光栅和第二可动亚波长光栅而言，光栅周期可以小于激光光源的光波长，较佳地，为了使微机械陀螺的检测灵敏度更高，光栅周期可以小于激光光源的光波长的一半，例如，光栅周期可以为600nm，光栅孔的尺寸可以为300×450(μm2)，光栅孔的数量可以为50个，光栅梁的尺寸即光栅的外围尺寸可以为1000×120×0.8(μm3)。当然，四个亚波长光栅的上述参数并非局限于此，具体根据敏感头单元的尺寸和灵敏度需求来确定，在此不做限定。During specific implementation, in the above-mentioned opto-mechanical micromachined gyroscope provided in the embodiment of the present invention, for the first fixed subwavelength grating, the first movable subwavelength grating, the second fixed subwavelength grating and the second movable subwavelength grating In other words, the grating period can be smaller than the light wavelength of the laser light source. Preferably, in order to make the detection sensitivity of the micromachined gyroscope higher, the grating period can be smaller than half of the light wavelength of the laser light source. For example, the grating period can be 600 nm, and the grating hole The size of the grating can be 300×450 (μm 2 ), the number of grating holes can be 50, and the size of the grating beam, that is, the peripheral size of the grating can be 1000×120×0.8 (μm 3 ). Of course, the above-mentioned parameters of the four subwavelength gratings are not limited to this, and are specifically determined according to the size and sensitivity requirements of the sensitive head unit, which are not limited here.
在具体实施时，在本发明实施例提供的上述光力学微机械陀螺中，质量块的尺寸可以为1000×1000×10(μm3)；十个驱动轴悬臂梁的结构可以与十个检测轴悬臂梁的结构相同，单个悬臂梁的尺寸可以为320×8×10(μm3)；四个锚点的结构可以相同，单个锚点的尺寸可以为30×30×24(μm3)；两个固定梳齿电极的梳齿与两个可动梳齿电极的梳齿可以结构相同，单个梳齿的尺寸可以为42×4×10(μm3)，相邻两个梳齿之间的间距可以为4μm，每个梳齿电极的梳齿数量可以为60个，每个固定梳齿电极架的尺寸可以为1200×150×24(μm3)，每个可动梳齿电极架的尺寸可以为1000×120×10(μm3)。当然，上述结构的尺寸并非局限于此，具体根据敏感头单元的尺寸和灵敏度需求来确定，在此不做限定。During specific implementation, in the above-mentioned opto-mechanical micromachined gyroscope provided by the embodiment of the present invention, the size of the mass block may be 1000×1000×10 (μm 3 ); the structure of ten drive axis cantilever beams may be combined with ten detection axes The structure of the cantilever beam is the same, and the size of a single cantilever beam can be 320×8×10 (μm 3 ); the structure of the four anchor points can be the same, and the size of a single anchor point can be 30×30×24 (μm 3 ); two The comb teeth of one fixed comb tooth electrode and the comb teeth of two movable comb tooth electrodes can have the same structure, the size of a single comb tooth can be 42×4×10 (μm 3 ), and the distance between two adjacent comb teeth can be It can be 4 μm, the number of comb teeth of each comb electrode can be 60, the size of each fixed comb electrode holder can be 1200×150×24 (μm 3 ), and the size of each movable comb electrode holder can be It is 1000×120×10 (μm 3 ). Of course, the size of the above structure is not limited to this, and is specifically determined according to the size and sensitivity requirements of the sensitive head unit, which is not limited here.
在具体实施时，在本发明实施例提供的上述光力学微机械陀螺中，如图4所示，还可以包括：闭环反馈冷却单元；闭环反馈冷却单元具体可以包括：分别与耦合器13和第一锥形光纤14连接的第一强度调制器45、分别与耦合器13和第二锥形光纤15连接的第二强度调制器46、与第一探测器16连接的第一带通滤波器47、与第二探测器17连接的第二带通滤波器48、分别与第一带通滤波器47和第一强度调制器45连接的第一模拟微分电路49以及分别与第二带通滤波器48和第二强度调制器46连接的第二模拟微分电路50；其中，第一探测器16的输出信号依次通过第一带通滤波器47和第一模拟微分电路49，经微分运算后将输出信号反馈给第一强度调制器45，第二探测器17的输出信号依次通过第二带通滤波器48和第二模拟微分电路50，经微分运算后将输出信号反馈给第二强度调制器46，这样，可以通过光强反馈调制改变第一亚波长光栅腔6和第二亚波长光栅腔7的光压大小，用以抵消热噪声所产生的随机力，实现系统的闭环反馈冷却控制，有效降低系统热噪声，同时通过光压调制实现微机械陀螺多性能的共同提高。During specific implementation, in the above-mentioned opto-mechanical micromachined gyroscope provided by the embodiment of the present invention, as shown in FIG. 4 , it may further include: a closed-loop feedback cooling unit; the closed-loop feedback cooling unit may specifically include: A first intensity modulator 45 connected to the tapered fiber 14, a second intensity modulator 46 connected to the coupler 13 and the second tapered fiber 15, respectively, and a first bandpass filter 47 connected to the first detector 16 , a second bandpass filter 48 connected to the second detector 17, a first analog differential circuit 49 connected to the first bandpass filter 47 and the first intensity modulator 45, respectively, and a second bandpass filter 49, respectively 48 and the second analog differential circuit 50 connected to the second intensity modulator 46; wherein, the output signal of the first detector 16 passes through the first band-pass filter 47 and the first analog differential circuit 49 in turn, and after differential operation, the output signal will be output The signal is fed back to the first intensity modulator 45, and the output signal of the second detector 17 passes through the second band-pass filter 48 and the second analog differential circuit 50 in turn, and the output signal is fed back to the second intensity modulator 46 after differential operation. , in this way, the light pressure of the first subwavelength grating
本发明实施例提供的上述光力学微机械陀螺，利用亚波长光栅构建高品质因数光学谐振腔，利用双亚波长光栅腔实现推挽工作方式，并通过双亚波长光栅腔谐振腔频率的差分检测实现微机械陀螺的角速度解算，可有效提高微机械陀螺的检测灵敏度；利用光信号对微机械陀螺进行检测，相比于现有的电学检测方法，具有精度高、稳定性好、抗电磁干扰能力强、寄生电容小、线性良好、系统体积小、集成度高等优点，并且，亚波长光栅的光栅周期小于入射光波长，将高品质因数亚波长光栅腔用于微机械陀螺检测，相比于现有的光学检测方法，检测精度和检测灵敏度更高；质量块的驱动模态与检测模态均采用共面振动方式，可避免微机械陀螺工作时压膜阻尼过大而影响微机械陀螺的机械灵敏度。The above-mentioned opto-mechanical micromachined gyroscope provided by the embodiment of the present invention uses a sub-wavelength grating to construct a high-quality optical resonant cavity, uses a double-sub-wavelength grating cavity to realize a push-pull working mode, and uses differential detection of the frequency of the double-sub-wavelength grating cavity resonator cavity. The realization of the angular velocity calculation of the micromachined gyroscope can effectively improve the detection sensitivity of the micromachined gyroscope; the use of optical signals to detect the micromachined gyroscope has the advantages of high precision, good stability and anti-electromagnetic interference compared with the existing electrical detection methods. It has the advantages of strong capability, small parasitic capacitance, good linearity, small system volume, and high integration. In addition, the grating period of the subwavelength grating is smaller than the wavelength of the incident light. The high quality factor subwavelength grating cavity is used for micromachined gyroscope detection. The existing optical detection method has higher detection accuracy and detection sensitivity; the driving mode and detection mode of the mass block adopt the coplanar vibration method, which can avoid the excessive damping of the lamination film when the micromachined gyroscope is working and affect the performance of the micromachined gyroscope. Mechanical Sensitivity.
显然，本领域的技术人员可以对本发明进行各种改动和变型而不脱离本发明的精神和范围。这样，倘若本发明的这些修改和变型属于本发明权利要求及其等同技术的范围之内，则本发明也意图包含这些改动和变型在内。It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit and scope of the invention. Thus, provided that these modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include these modifications and variations.
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