CN115528154A - Flip-chip light emitting diode and light emitting device - Google Patents
Flip-chip light emitting diode and light emitting device Download PDFInfo
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Abstract
Description
技术领域technical field
本申请涉及半导体相关技术领域,尤其涉及一种倒装发光二极管和发光装置。The present application relates to the technical field related to semiconductors, in particular to a flip-chip light-emitting diode and a light-emitting device.
背景技术Background technique
倒装发光二极管由于发光效率高、节能、环保、寿命长的特点,广泛应用于各个领域,例如照明、背光。对现有倒装发光二极管进行封装时,需要使用顶针作用在倒装发光二极管正面的某一区域,以将其顶起并进行固晶,顶针的作用区域常常为倒装发光二极管正面的中心区域。倒装发光二极管正面包括外延结构、透明导电层、电极以及用于对外延结构、透明导电层、电极进行保护的保护层和焊盘,保护层通常是由氧化硅材料制成,或者是由氧化硅与氧化钛组合形成的分布式布拉格反射镜。由于保护层的脆性,顶针作用在倒装发光二极管正面时,顶针易刺破或者顶破保护层,露出下面的外延结构、透明导电层或者电极,导致倒装发光二极管易出现漏电失效现象,并影响倒装发光二极管的可靠性。Due to the characteristics of high luminous efficiency, energy saving, environmental protection, and long life, flip-chip light-emitting diodes are widely used in various fields, such as lighting and backlighting. When encapsulating the existing flip-chip LEDs, it is necessary to use thimbles to act on a certain area on the front of the flip-chip LEDs to lift it up and carry out crystal bonding. The active area of the thimbles is usually the central area of the front of the flip-chip LEDs . The front side of a flip-chip light-emitting diode includes an epitaxial structure, a transparent conductive layer, electrodes, and a protective layer and pads for protecting the epitaxial structure, transparent conductive layer, and electrodes. The protective layer is usually made of silicon oxide material, or is made of oxide A distributed Bragg reflector formed by the combination of silicon and titanium oxide. Due to the brittleness of the protective layer, when the thimble acts on the front of the flip-chip LED, the thimble is easy to pierce or break the protective layer, exposing the underlying epitaxial structure, transparent conductive layer or electrode, resulting in leakage failure of the flip-chip LED, and Affect the reliability of flip-chip light-emitting diodes.
发明内容Contents of the invention
本申请的目的在于提供一种倒装发光二极管,其设置与半导体发光单元间隔开的半导体岛结构,该半导体岛结构所在区域作为顶针的作用区域,能够避免顶针刺破或者顶破半导体发光单元处的保护层,并避免倒装发光二极管出现漏电失效现象,提高倒装发光二极管的可靠性。The purpose of this application is to provide a flip-chip light-emitting diode, which is provided with a semiconductor island structure spaced apart from the semiconductor light-emitting unit. The area where the semiconductor island structure is located serves as the active area of the thimble, which can prevent the thimble from piercing or breaking the semiconductor light-emitting unit. The protection layer of the flip-chip light-emitting diode is avoided, and the leakage failure phenomenon of the flip-chip light-emitting diode is avoided, and the reliability of the flip-chip light-emitting diode is improved.
另一目的还在于提供一种发光装置,该发光装置包括上述的倒装发光二极管。Another object is to provide a light-emitting device, which includes the above-mentioned flip-chip light-emitting diode.
第一方面,本申请提供一种倒装发光二极管,其包括:In a first aspect, the present application provides a flip-chip light-emitting diode, which includes:
衬底;Substrate;
至少一个半导体发光单元,位于衬底上;At least one semiconductor light emitting unit is located on the substrate;
半导体岛结构,位于衬底上,并与半导体发光单元之间存在间隙;在倒装发光二极管处于通电状态时,半导体岛结构不发光。The semiconductor island structure is located on the substrate, and there is a gap between it and the semiconductor light-emitting unit; when the flip-chip light-emitting diode is in a power-on state, the semiconductor island structure does not emit light.
在一种可能的实施方案中,半导体岛结构位于该倒装发光二极管的中心区域。In a possible implementation, the semiconductor island structure is located in the central region of the flip-chip light emitting diode.
在一种可能的实施方案中,半导体岛结构的上表面的宽度至少是30μm。In a possible embodiment, the width of the upper surface of the semiconductor island structure is at least 30 μm.
在一种可能的实施方案中,半导体岛结构的上表面形状是圆形或者多边形。In a possible implementation, the shape of the upper surface of the semiconductor island structure is circular or polygonal.
在一种可能的实施方案中,半导体岛结构的高度小于等于半导体发光单元的高度。In a possible implementation, the height of the semiconductor island structure is less than or equal to the height of the semiconductor light emitting unit.
在一种可能的实施方案中,该倒装发光二极管还包括金属块,金属块位于半导体岛结构的上方。In a possible implementation, the flip-chip light emitting diode further includes a metal block, and the metal block is located above the semiconductor island structure.
在一种可能的实施方案中,金属块直接与半导体岛结构的上表面接触。In a possible implementation, the metal block is directly in contact with the upper surface of the semiconductor island structure.
在一种可能的实施方案中,金属块的厚度介于0.5~10μm。In a possible implementation, the thickness of the metal block is between 0.5 μm and 10 μm.
在一种可能的实施方案中,该倒装发光二极管还包括保护层,保护层至少覆盖半导体岛结构的上表面和侧壁。In a possible implementation, the flip-chip light emitting diode further includes a protective layer, and the protective layer covers at least the upper surface and the sidewall of the semiconductor island structure.
在一种可能的实施方案中,保护层位于金属块与半导体岛结构之间,或者,保护层位于金属块的上方。In a possible implementation, the protection layer is located between the metal block and the semiconductor island structure, or the protection layer is located above the metal block.
在一种可能的实施方案中,该倒装发光二极管还包括第一焊盘和第二焊盘;In a possible implementation, the flip-chip light emitting diode further includes a first bonding pad and a second bonding pad;
保护层覆盖的区域还包括半导体发光单元的上表面和侧壁;半导体发光单元包括第一半导体层、有源层和第二半导体层;The area covered by the protective layer also includes the upper surface and side walls of the semiconductor light emitting unit; the semiconductor light emitting unit includes a first semiconductor layer, an active layer and a second semiconductor layer;
第一焊盘位于保护层上,并穿过保护层与半导体发光单元中的第一半导体层电性连接,第二焊盘位于保护层上,并穿过保护层与半导体发光单元中的第二半导体层电性连接。The first welding pad is located on the protection layer, and is electrically connected to the first semiconductor layer in the semiconductor light emitting unit through the protection layer, and the second welding pad is located on the protection layer, and is connected to the second semiconductor light emitting unit in the semiconductor light emitting unit through the protection layer. The semiconductor layers are electrically connected.
在一种可能的实施方案中,第一焊盘和第二焊盘均未在金属块的上方。In a possible implementation, neither the first pad nor the second pad is above the metal block.
在一种可能的实施方案中,半导体发光单元的数量为1个。In a possible implementation, the number of semiconductor light emitting units is one.
在一种可能的实施方案中,半导体发光单元环绕于半导体岛结构的外围。In a possible implementation, the semiconductor light emitting unit surrounds the periphery of the semiconductor island structure.
在一种可能的实施方案中,半导体发光单元的数量为多个,且多个半导体发光单元间隔布置;半导体发光单元的数量为奇数个或者偶数个。In a possible implementation, the number of semiconductor light emitting units is multiple, and the multiple semiconductor light emitting units are arranged at intervals; the number of semiconductor light emitting units is an odd number or an even number.
在一种可能的实施方案中,半导体岛结构位于相邻半导体发光单元之间。In a possible implementation, the semiconductor island structure is located between adjacent semiconductor light emitting units.
在一种可能的实施方案中,半导体岛结构位于该倒装发光二极管中心区域处的相邻半导体发光单元之间。In a possible implementation, the semiconductor island structure is located between adjacent semiconductor light-emitting units at the central region of the flip-chip light-emitting diode.
在一种可能的实施方案中,相邻半导体发光单元之间电性连接。In a possible implementation, adjacent semiconductor light emitting units are electrically connected.
在一种可能的实施方案中,半导体岛结构与半导体发光单元之间的间隙的宽度自下而上递增。In a possible implementation, the width of the gap between the semiconductor island structure and the semiconductor light emitting unit increases from bottom to top.
第二方面,本申请提供一种发光装置,其包括上述的倒装发光二极管。In a second aspect, the present application provides a light-emitting device, which includes the above-mentioned flip-chip light-emitting diode.
与现有技术相比,本申请至少具有如下有益效果:Compared with the prior art, the present application has at least the following beneficial effects:
在倒装发光二极管的中心区域处形成半导体岛结构,该半导体岛结构与半导体发光单元之间存在间隙,且不用于倒装发光二极管的导电发光;半导体岛结构所在区域作为顶针的作用区域,在顶针作用在上述区域时,顶针所刺破或顶破保护层的裂缝仅延伸至半导体岛结构的上表面或者侧壁周围,在一定程度上可避免裂缝直接传递到半导体发光单元处的保护层上,从而避免倒装发光二极管因半导体发光单元处的保护层被刺破或者顶破而出现的漏电失效现象,提高倒装发光二极管的可靠性。A semiconductor island structure is formed at the central area of the flip-chip light-emitting diode. There is a gap between the semiconductor island structure and the semiconductor light-emitting unit, and it is not used for conductive light emission of the flip-chip light-emitting diode; the area where the semiconductor island structure is located is used as the action area of the thimble. When the thimble acts on the above-mentioned area, the crack pierced or broken by the thimble only extends to the upper surface or around the side wall of the semiconductor island structure, which can prevent the crack from being directly transmitted to the protective layer at the semiconductor light-emitting unit to a certain extent. , so as to avoid the leakage failure phenomenon of the flip-chip light-emitting diode due to the protective layer at the semiconductor light-emitting unit being pierced or broken, and improve the reliability of the flip-chip light-emitting diode.
附图说明Description of drawings
为了更清楚地说明本申请实施例的技术方案,下面将对实施例中所需要使用的附图作简单地介绍,应当理解,以下附图仅示出了本申请的某些实施例,因此不应被看作是对范围的限定,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他相关的附图。In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following will briefly introduce the accompanying drawings used in the embodiments. It should be understood that the following drawings only show some embodiments of the present application, so It should be regarded as a limitation on the scope, and those skilled in the art can also obtain other related drawings based on these drawings without creative work.
图1为根据本申请实施例示出的一种倒装发光二极管的俯视图;FIG. 1 is a top view of a flip-chip light-emitting diode according to an embodiment of the present application;
图2为根据本申请实施例示出的一种图1的A-A截面示意图;Fig. 2 is a schematic cross-sectional view of A-A of Fig. 1 shown according to an embodiment of the present application;
图3为根据本申请实施例示出的一种图1的A-A截面示意图;Fig. 3 is a schematic cross-sectional view of A-A of Fig. 1 shown according to an embodiment of the present application;
图4为根据本申请实施例示出的一种图1的A-A截面示意图;Fig. 4 is a schematic cross-sectional view of A-A of Fig. 1 shown according to an embodiment of the present application;
图5为根据本申请实施例示出的一种倒装发光二极管的俯视图;Fig. 5 is a top view of a flip-chip light-emitting diode according to an embodiment of the present application;
图6为根据本申请实施例示出的一种图5的A-A截面示意图;Fig. 6 is a schematic cross-sectional view of A-A of Fig. 5 shown according to an embodiment of the present application;
图7为根据本申请实施例示出的一种图5的A-A截面示意图;Fig. 7 is a schematic cross-sectional view of A-A of Fig. 5 shown according to an embodiment of the present application;
图8为根据本申请实施例示出的一种图5的A-A截面示意图;FIG. 8 is a schematic cross-sectional view of A-A of FIG. 5 shown according to an embodiment of the present application;
图9为根据本申请实施例示出的一种图5的B-B截面示意图;Fig. 9 is a schematic cross-sectional view of B-B of Fig. 5 shown according to an embodiment of the present application;
图10~图12为根据本申请实施例示出的一种倒装发光二极管处于不同制备阶段的A-A截面示意图。10 to 12 are A-A schematic cross-sectional views of a flip-chip light-emitting diode at different manufacturing stages according to an embodiment of the present application.
图示说明:Graphical description:
100衬底;200半导体堆叠层;201第一半导体层;202有源层;203第二半导体层;210半导体发光单元;220半导体岛结构;230沟槽;240隔离槽;300电流阻挡层;400透明导电层;500第一电极;510第二电极;520互连电极;600保护层;700第一焊盘;710第二焊盘;800金属块。100 substrate; 200 semiconductor stacking layer; 201 first semiconductor layer; 202 active layer; 203 second semiconductor layer; 210 semiconductor light emitting unit; 220 semiconductor island structure; 230 groove; 500 first electrode; 510 second electrode; 520 interconnection electrode; 600 protective layer; 700 first pad; 710 second pad; 800 metal block.
具体实施方式detailed description
以下通过特定的具体实施例说明本申请的实施方式,本领域技术人员可由本说明书所揭露的内容轻易地了解本申请的其他优点与功效。本申请还可以通过另外不同的具体实施方式加以实施或营业,本申请中的各项细节也可以基于不同观点与应用,在没有背离本申请的精神下进行各种修饰或改变。The implementation of the present application is described below through specific specific examples, and those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification. The present application can also be implemented or operated through other different specific implementation modes, and various modifications or changes can be made to the details in the present application based on different viewpoints and applications without departing from the spirit of the present application.
在本申请的描述中,需要说明的是,术语“上”、“下”、“左”和“右”等指示的方位或位置关系为基于附图所示的方位或位置关系,或者是该申请产品使用时惯常摆放的方位或位置关系,仅是为了便于描述本申请和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本申请的限制。此外,术语“第一”和“第二”等仅用于区分描述,而不能理解为指示或暗示相对重要性。In the description of the present application, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "left" and "right" are based on the orientation or positional relationship shown in the drawings, or the The usual orientation or positional relationship of the application product when used is only for the convenience of describing the application and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, therefore It should not be construed as a limitation of the application. In addition, the terms "first" and "second" etc. are only used for distinguishing descriptions, and should not be construed as indicating or implying relative importance.
根据本申请的一个方面,提供一种倒装发光二极管。参见图1~图9,该倒装发光二极管包括衬底100、形成在衬底100上的半导体发光单元210和半导体岛结构220。半导体岛结构220与半导体发光单元210之间存在间隙,在倒装发光二极管处于通电状态时,半导体岛结构220不发光。半导体岛结构220优选为设置在该倒装发光二极管的中心区域,倒装发光二极管的中心区域指的是其俯视图的中心区域。According to one aspect of the present application, a flip-chip light emitting diode is provided. Referring to FIGS. 1 to 9 , the flip-chip light emitting diode includes a
保护层600覆盖半导体发光单元210的上表面和侧壁、半导体岛结构220的上表面和侧壁、以及半导体岛结构220与半导体发光单元210之间的间隙。The
倒装发光二极管的正面与衬底100的上表面朝向相同,也就是说倒装发光二极管正面的中心区域设置有半导体岛结构220,该半导体岛结构220与半导体发光单元210独立设置。半导体岛结构220所在区域作为顶针的作用区域,在顶针作用在上述区域时,顶针所刺破或顶破保护层600的裂缝产生在半导体岛结构220的上表面或者进一步延伸至半导体岛结构220的侧壁周围,半导体发光单元210与半导体岛结构220之间的间隙一定程度上可阻挡裂缝传递到半导体发光单元210处的保护层600上,从而避免倒装发光二极管因半导体发光单元210处的保护层600被刺破或者顶破而出现的漏电失效现象,提高倒装发光二极管的可靠性。另外,在倒装发光二极管通电的情况下该半导体岛结构220不导电发光。The front of the flip-chip LED faces the same direction as the upper surface of the
下面以倒装发光二极管的具体实施结构为例进行说明:The specific implementation structure of the flip-chip light-emitting diode is taken as an example for illustration below:
实施例1Example 1
本申请提供一种倒装发光二极管,图1为该倒装发光二极管的俯视图,图2~图4为图1的A-A截面示意图。The present application provides a flip-chip light-emitting diode, FIG. 1 is a top view of the flip-chip light-emitting diode, and FIGS. 2 to 4 are schematic cross-sectional views along A-A of FIG. 1 .
该倒装发光二极管包括衬底100、形成在衬底100上的一个半导体发光单元210和半导体岛结构220。半导体岛结构220设置在该倒装发光二极管的中心区域,半导体发光单元210呈环形,且环绕于半导体岛结构220的外围;半导体岛结构220与半导体发光单元210彼此独立地位于衬底100上,并且两者之间存在间隙,无半导体层或者导电层连接两者。在倒装发光二极管通电时,半导体岛结构220不发光。此处倒装发光二极管的中心区域指的是其俯视图的中心区域。The flip chip light emitting diode includes a
保护层600覆盖半导体发光单元210的上表面和侧壁、半导体岛结构220的上表面和侧壁、以及半导体岛结构220与半导体发光单元210之间的间隙。The
第一焊盘700和第二焊盘710均位于保护层600上,并均穿过保护层600与半导体发光单元210电性连接。Both the
当倒装发光二极管被安装到应用基板上时,第一焊盘700和第二焊盘710可通过回流焊工艺或者热压等工艺实现与应用基板上的电极连接。第一焊盘700、第二焊盘710与应用基板上的电极之间可以存在含锡成分的连接层,含锡连接层可以是锡膏。第一焊盘700或者第二焊盘710上可设置有含锡连接层,进而避免锡膏的使用。When the flip-chip LED is mounted on the application substrate, the
第一焊盘700和第二焊盘710可包括黏附层、反射层、阻挡层和金层。其中,黏附层为钛层或者铬层;反射层为铝层;阻挡层为镍层,或者镍层与铂层的重复叠层。上述的阻挡层可用于阻挡含锡连接层渗入至倒装发光二极管的内部。较佳地,第一焊盘700和第二焊盘710还包括位于金层上的厚锡层。The
从图1所示的倒装发光二极管的俯视图来看,半导体岛结构220位于第一焊盘700和第二焊盘710之间。从图2所示的倒装发光二极管的A-A截面示意图来看,第一焊盘700和第二焊盘710均不位于半导体岛结构220的上方。From the top view of the flip-chip LED shown in FIG. 1 , the
当转移用的装置的顶针作用到蓝膜等柔性材料支撑的倒装发光二极管以将其转移离开至其它的装置或者基板上,例如应用基板上,顶针会作用到第一焊盘700和第二焊盘710之间的半导体岛结构220上方的表面上,也就是保护层600表面上。半导体岛结构220所在区域作为顶针的作用区域,在顶针作用在上述区域时,顶针所刺破或顶破保护层600的裂缝产生在半导体岛结构220的上表面或者进一步延伸至其侧壁周围,半导体发光单元210与半导体岛结构220之间的间隙一定程度上可阻挡裂缝传递到半导体发光单元210处的保护层600上,从而避免倒装发光二极管因半导体发光单元210处的保护层600被刺破或者顶破而出现的漏电失效现象,提高倒装发光二极管的可靠性。另外,在倒装发光二极管通电的情况下该半导体岛结构220不导电发光。When the thimble of the transfer device acts on the flip-chip light-emitting diode supported by flexible materials such as blue film to transfer it to other devices or substrates, such as the application substrate, the thimble will act on the
较佳地,半导体岛结构220与半导体发光单元210之间的间隙的宽度W 1 自下而上递增。间隙在底部的宽度W 1 大于等于3μm。Preferably, the width W1 of the gap between the
在一种实施方式中,半导体岛结构220的堆叠材料层的材料组成以及各层的厚度与半导体发光单元210一致。半导体发光单元210的厚度为3~10μm。In one embodiment, the material composition of the stacked material layers of the
参见图2~图4,半导体发光单元210包括有第一半导体堆叠层,半导体岛结构220包括有第二半导体堆叠层。半导体岛结构220的高度小于等于半导体发光单元210的高度,半导体岛结构220的高度优选为小于等于第一半导体堆叠层的高度。第一半导体堆叠层和第二半导体堆叠层均包括有第一半导体层201、有源层202和第二半导体层203;第一半导体层201为N型半导体层,有源层202为多层量子阱层,其可提供蓝光、绿光或者红光的辐射,也可以提供紫外或者红外的辐射,第二半导体层203为P型半导体层。N型半导体层、多层量子阱层、P型半导体层仅是第一半导体堆叠层的基本构成单元,在此基础上,第一半导体堆叠层还可以包括其他对倒装发光二极管的性能具有优化作用的功能结构层。Referring to FIG. 2 to FIG. 4 , the semiconductor
为了获得半导体发光单元210和半导体岛结构220,可在衬底100上先获得半导体堆叠层200,然后通过纵向蚀刻工艺自半导体堆叠层200的表面向衬底100表面蚀刻半导体堆叠层200,以形成独立的半导体发光单元210和半导体岛结构220。较佳地,进一步蚀刻半导体岛结构220上的部分半导体材料层,可使半导体岛结构220的高度小于半导体发光单元210的高度。In order to obtain the semiconductor
半导体岛结构220的上表面形状包括但不限于是圆形或者多边形,且半导体岛结构220的上表面的宽度至少是30μm,较佳地,半导体岛结构220上表面的宽度根据目前的顶针尺寸实施,半导体岛结构220上表面的宽度至少为50μm。本实施例中,半导体岛结构220的上表面和下表面均呈圆形,且半导体岛结构220上表面的直径小于半导体岛结构220下表面的直径。The shape of the upper surface of the
在一种实施方式中,该倒装发光二极管还可包括金属块800,金属块800位于半导体岛结构220的上方。金属块800具有一定的延展性,可一定程度地缓冲顶针的作用力。金属块800的厚度介于0.5~10μm,金属块800的厚度优选为1~3μm,在本实施例中,金属块800的制备材料包括但不限于是Au、Ti、Al、Cr、Pt、TiW合金或Ni的任意组合。In one embodiment, the flip-chip light emitting diode may further include a
参见图3,金属块800直接与半导体岛结构220的上表面接触,保护层600位于金属块800的上方。具体地,金属块800覆盖半导体岛结构220的上表面,或者,金属块800覆盖半导体岛结构220的上表面和至少部分侧壁。Referring to FIG. 3 , the
或者,参见图4,金属块800位于保护层600上表面,且处于半导体岛结构220上方,也就是说保护层600位于金属块800与半导体岛结构220之间。优选的,金属块800的材料和厚度均与第一焊盘700和第二焊盘710相同,金属块800位于第一焊盘700、第二焊盘710之间,并与第一焊盘700和第二焊盘710之间保持一定的间距。金属块的800的宽度小于等于半导体岛结构220的宽度。Alternatively, referring to FIG. 4 , the
需要说明的是,半导体岛结构220的设计即可一定程度地防止半导体发光单元210处的保护层600破裂,金属块800并不必需地设置。It should be noted that the design of the
在一种实施方式中,衬底100是透明衬底,例如,蓝宝石衬底。衬底100的上表面可以具备蓝宝石图形,或者衬底100的上表面可以具备异质材料的图形,例如氧化硅。上述图形的高度可以是1~3μm,宽度可以是1~4。衬底100还包括上表面、下表面以及侧面,有源层202辐射的光可从衬底100的侧面和上表面辐射出光。衬底100的厚度优选为60μm以上,例如80μm、120μm、150μm或者250μm。In one embodiment, the
在一种实施方式中,参见图1~图4,第一半导体堆叠层具有暴露出部分第一半导体层201的台面,第一电极500形成在该台面上。In one embodiment, referring to FIGS. 1 to 4 , the first semiconductor stack layer has a mesa exposing part of the
半导体发光单元210还包括有位于第二半导体层203上的透明导电层400,其包括但不限于是氧化铟锡层。透明导电层400包括有开口,且开口暴露出部分第二半导体层203。第二电极510形成在透明导电层400上并穿过开口与第二半导体层203接触。The semiconductor
第二电极510包括块状部分以及自块状部分延伸出去的至少一条条状部分,第二电极510包括块状的一部分或者条状的一部分通过透明导电层400中的开口与第二半导体层203接触,以改善第二电极510的附着性。The
位于第二电极510中条状部分下方的开口的宽度大于第二电极510中条状部分的宽度。位于第二电极510中块状部分下方的开口的宽度小于第二电极510中块状部分的宽度,以实现块状部分的边缘位于透明导电层400的上表面。The width of the opening located under the strip portion in the
第一电极500和第二电极510可包括黏附层、反射层和阻挡层,其中,黏附层为铬层或者钛层,反射层为铝层,阻挡层为钛层和铂层组成的重复叠层。The
保护层600分别设有位于第一电极500、第二电极510上方的通孔,第一焊盘700、第二焊盘710位于保护层600上,并分别通过上述通孔与第一电极500、第二电极510连接。第一焊盘700和第二焊盘710均未在金属块800的上方。The
保护层600包括但不限于是分布式布拉格反射镜或者单层绝缘层,本实施例中,该保护层600的材料为SiO2、TiO2、ZnO2、ZrO2、Cu2O3等不同材料中的至少两种,其具体为采用诸如电子束蒸镀或者离子束溅射等技术使两种材料以交替层叠成多层的方式所制成的分布式布拉格反射镜。The
实施例2Example 2
本申请提供一种倒装发光二极管,具体为高压倒装发光二极管。图5为该倒装发光二极管的俯视图,图6~图8为图5的A-A截面示意图,图9为图5的B-B截面示意图。The present application provides a flip-chip light-emitting diode, specifically a high-voltage flip-chip light-emitting diode. FIG. 5 is a top view of the flip-chip light-emitting diode, FIGS. 6 to 8 are schematic cross-sectional views of A-A in FIG. 5 , and FIG. 9 is a schematic cross-sectional view of B-B in FIG. 5 .
该倒装发光二极管包括衬底100、形成在衬底100上的多个半导体发光单元210和半导体岛结构220。多个半导体发光单元210按照预设方向排列且间隔布置,相邻半导体发光单元210之间电性连接。半导体岛结构220位于该倒装发光二极管中心区域处的相邻半导体发光单元210之间,且和与其相邻的半导体发光单元210之间存在间隙,此处倒装发光二极管的中心区域指的是其俯视图的中心区域。半导体发光单元210的数量为奇数或者偶数,半导体发光单元210的数量优选为偶数。The flip chip light emitting diode includes a
保护层600覆盖每个半导体发光单元210的上表面和侧壁、半导体岛结构220的上表面和侧壁、以及半导体岛结构220与半导体发光单元210之间的间隙。The
第一焊盘700位于保护层600上并穿过保护层600与首端的半导体发光单元210电性连接,第二焊盘710位于保护层600上并穿过保护层600与尾端的半导体发光单元210电性连接。The
较佳地,半导体岛结构220和与其相邻的半导体发光单元210之间的间隙的宽度W 1 自下而上递增。间隙在底部的宽度W 1 大于等于3μm。Preferably, the width W1 of the gap between the
在一种实施方式中,半导体岛结构220的堆叠材料层的材料组成以及各层的厚度与半导体发光单元210一致。半导体发光单元210的厚度为3~10μm。In one embodiment, the material composition of the stacked material layers of the
参见图6~图8,每个半导体发光单元210均包括有第一半导体堆叠层,半导体岛结构220包括有第二半导体堆叠层。半导体岛结构220的高度小于等于半导体发光单元210的高度,半导体岛结构220的高度优选为小于等于第一半导体堆叠层的高度。第一半导体堆叠层和第二半导体堆叠层均包括有第一半导体层201、有源层202和第二半导体层203;第一半导体层201为N型半导体层,有源层202为多层量子阱层,其可提供蓝光、绿光或者红光的辐射,也可以提供紫外或者红外的辐射,第二半导体层203为P型半导体层。N型半导体层、多层量子阱层、P型半导体层仅是第一半导体堆叠层的基本构成单元,在此基础上,第一半导体堆叠层还可以包括其他对倒装发光二极管的性能具有优化作用的功能结构层。Referring to FIGS. 6-8 , each semiconductor
为了获得多个半导体发光单元210和半导体岛结构220,可在衬底100上先获得半导体堆叠层200,然后通过纵向蚀刻工艺自半导体堆叠层200的表面向衬底100表面蚀刻半导体堆叠层200,以形成多个半导体发光单元210和半导体岛结构220。较佳地,进一步蚀刻半导体岛结构220上的部分半导体材料层,可使半导体岛结构220的高度小于半导体发光单元210的高度。In order to obtain a plurality of semiconductor
半导体岛结构220的上表面形状包括但不限于是圆形或者多边形,且半导体岛结构220的上表面的宽度至少是30μm,较佳地,半导体岛结构220上表面的宽度根据目前的顶针尺寸实施,半导体岛结构220上表面的宽度至少为50μm。本实施例中,半导体岛结构220的上表面和下表面均呈圆形,且半导体岛结构220上表面的直径小于半导体岛结构220下表面的直径。The shape of the upper surface of the
在一种实施方式中,该倒装发光二极管还可包括金属块800,金属块800位于半导体岛结构220的上方。金属块800具有一定的延展性,可一定程度地缓冲顶针的作用力。金属块800的厚度介于0.5~10μm,金属块800的厚度优选为1~3μm,在本实施例中,金属块800的制备材料包括但不限于是Au、Ti、Al、Cr、Pt、TiW合金或Ni的任意组合。In one embodiment, the flip-chip light emitting diode may further include a
参见图7,金属块800直接与半导体岛结构220的上表面接触,保护层600位于金属块800的上方。具体地,金属块800覆盖半导体岛结构220的上表面,或者,金属块800覆盖半导体岛结构220的上表面和至少部分侧壁。Referring to FIG. 7 , the
或者,参见图8,金属块800位于保护层600上表面,且处于半导体岛结构220上方,也就是说保护层600位于金属块800与半导体岛结构220之间。优选的,金属块800的材料和厚度均与第一焊盘700和第二焊盘710相同,金属块800位于第一焊盘700、第二焊盘710之间,并与第一焊盘700和第二焊盘710之间保持一定的间距。金属块的800的宽度小于等于半导体岛结构220的宽度。Alternatively, referring to FIG. 8 , the
需要说明的是,半导体岛结构220的设计即可一定程度地防止半导体发光单元210处的保护层600破裂,金属块800并不必需地设置。It should be noted that the design of the
在一种实施方式中,参见图9,倒装发光二极管还包括有电流阻挡层300,在每相邻的两个半导体发光单元210中,电流阻挡层300自左侧半导体发光单元210中的第二半导体层203延伸至右侧半导体发光单元210中的第一半导体层201。电流阻挡层300的材料可选为氧化硅、氮化硅、碳化硅或氮氧化硅的一种或多种。In one embodiment, referring to FIG. 9 , the flip-chip light emitting diode further includes a
首端的半导体发光单元210设置有第一电极500,第一电极500与该半导体发光单元210中的第一半导体层201电性连接。The semiconductor
尾端的半导体发光单元210设置有第二电极510。在尾端的半导体发光单元210中,第二半导体层203上形成有透明导电层400,透明导电层400包括但不限于是氧化铟锡层。透明导电层400包括有开口,且开口暴露出部分第二半导体层203,第二电极510穿过开口与第二半导体层203接触。The semiconductor
第二电极510包括块状部分以及自块状部分延伸出去的至少一条条状部分,第二电极510包括块状的一部分或者条状的一部分通过透明导电层400中的开口与第二半导体层203接触,以改善第二电极510的附着性。The
位于第二电极510中条状部分下方的开口的宽度大于第二电极510中条状部分的宽度。位于第二电极510中块状部分下方的开口的宽度小于第二电极510中块状部分的宽度,以实现块状部分的边缘位于透明导电层400的上表面。The width of the opening located under the strip portion in the
相邻的两个半导体发光单元210通过互连电极520电性连接,具体地,在每相邻的两个半导体发光单元210中,左侧半导体发光单元210包括有上述透明导电层400,透明导电层400位于第二半导体层203上方的电流阻挡层300上,互连电极520自左侧半导体发光单元210中的透明导电层400延伸至右侧半导体发光单元210中的第一半导体层201上。Two adjacent semiconductor
第一电极500、第二电极510和互连电极520可包括黏附层、反射层和阻挡层,其中,黏附层为铬层或者钛层,反射层为铝层,阻挡层为钛层和铂层组成的重复叠层。The
保护层600分别设有位于第一电极500、第二电极510上方的通孔,第一焊盘700、第二焊盘710位于保护层600上,并分别通过上述通孔与第一电极500、第二电极510连接。The
保护层600包括但不限于是分布式布拉格反射镜或者单层绝缘层,本实施例中,该保护层600的材料为SiO2、TiO2、ZnO2、ZrO2、Cu2O3等不同材料中的至少两种,其具体为采用诸如电子束蒸镀或者离子束溅射等技术使两种材料以交替层叠成多层的方式所制成的分布式布拉格反射镜。The
实施例3Example 3
本申请提供一种倒装发光二极管的制备方法,具体提供一种图1所示的倒装发光二极管的制备方法。该制备方法包括以下步骤:The present application provides a method for preparing a flip-chip light-emitting diode, and specifically provides a method for preparing a flip-chip light-emitting diode as shown in FIG. 1 . The preparation method comprises the following steps:
S1、参见图10,提供衬底100,并在衬底100上形成半导体堆叠层200。S1. Referring to FIG. 10 , a
半导体堆叠层200包括第一半导体层201、有源层202和第二半导体层203;第一半导体层201为N型半导体层,有源层202为多层量子阱层,第二半导体层203为P型半导体层。本实施例中,衬底100为蓝宝石图形化衬底或者蓝宝石平底衬底。The
S2、参见图11,蚀刻半导体堆叠层200并形成贯穿该半导体堆叠层200的沟槽230,沟槽230呈环形并将半导体堆叠层200划分成独立的半导体发光单元210和半导体岛结构220,半导体发光单元210环绕于半导体岛结构220的外围。S2. Referring to FIG. 11 , etch the
沟槽230的宽度为半导体岛结构220与半导体发光单元210之间的间隙的宽度W 1 ,W 1 自下而上递增。The width of the
半导体岛结构220的上表面形状是圆形或者多边形,且半导体岛结构220的上表面的宽度至少是30μm,较佳地,半导体岛结构220上表面的宽度根据目前的顶针尺寸实施,半导体岛结构220上表面的宽度至少为50μm。本实施例中,半导体岛结构220的上表面和下表面均呈圆形,且半导体岛结构220上表面的直径小于半导体岛结构220下表面的直径。The shape of the upper surface of the
S3、参见图12,于半导体发光单元210、半导体岛结构220以及沟槽230处形成保护层600,保护层600包括但不限于是分布式布拉格反射镜或者单层绝缘层。S3. Referring to FIG. 12 , a
具体地,半导体发光单元210包括有第一半导体堆叠层,在第一半导体堆叠层上形成透明导电层400,透明导电层400包括有开口,且开口暴露出部分第二半导体层203。透明导电层400的材料一般选择具有透明性质的导电材料,可具体选为氧化铟锡。Specifically, the semiconductor
第一半导体堆叠层具有暴露出部分第一半导体层201的台面,在该台面上形成第一电极500;在透明导电层400上形成第二电极510,第二电极510穿过开口与第二半导体层203接触。The first semiconductor stack layer has a mesa that exposes part of the
第二电极510包括块状部分以及自块状部分延伸出去的至少一条条状部分,第二电极510包括块状的一部分或者条状的一部分通过透明导电层400中的开口与第二半导体层203接触,以改善第二电极510的附着性。The
位于第二电极510中条状部分下方的开口的宽度大于第二电极510中条状部分的宽度。位于第二电极510中块状部分下方的开口的宽度小于第二电极510中块状部分的宽度,以实现块状部分的边缘位于透明导电层400的上表面。The width of the opening located under the strip portion in the
蚀刻保护层600并分别形成位于第一电极500、第二电极510上方的通孔,上述通孔用于形成与第一电极500对应的第一焊盘700,以及与第二电极510对应的第二焊盘710。Etching the
S4、形成与半导体发光单元210电性连接的第一焊盘700和第二焊盘710。此步骤可得到图2所示的倒装发光二极管。S4, forming the
在一种实施方式中,还包括:在形成第一电极500和第二电极510的同时,在半导体岛结构220上形成金属块800;金属块800覆盖半导体岛结构220的上表面,或者,金属块800覆盖半导体岛结构220的上表面和至少部分侧壁。金属块800的厚度介于0.5~10μm,金属块800的厚度优选为1~3μm,在本实施例中,金属块800的制备材料可与第一电极500、第二电极510相同。此步骤可得到图3所示的倒装发光二极管。In one embodiment, it also includes: while forming the
在一种实施方式中,还包括:在形成第一焊盘700和第二焊盘710的同时,在保护层600上表面中处于半导体岛结构220上方的区域上形成金属块800。金属块800的厚度介于0.5~10μm,金属块800的厚度优选为1~3μm,在本实施例中,金属块800的制备材料可与第一焊盘700和第二焊盘710相同。此步骤可得到图4所示的倒装发光二极管。In one embodiment, the method further includes: forming the
实施例4Example 4
本申请提供一种倒装二极管的制备方法,具体提供一种图5所示的倒装发光二极管的制备方法。该制备方法包括以下步骤:The present application provides a method for manufacturing a flip-chip diode, and specifically provides a method for manufacturing a flip-chip light-emitting diode as shown in FIG. 5 . The preparation method comprises the following steps:
S10、提供衬底100,并在衬底100上形成多个按照预设方向排列且间隔布置的半导体发光单元210,相邻半导体发光单元210之间电性连接;该倒装发光二极管中心区域处的相邻半导体发光单元210之间形成有半导体岛结构220,且半导体岛结构220和与其相邻的半导体发光单元210之间存在间隙。半导体发光单元210的数量为奇数或者偶数,半导体发光单元210的数量优选为偶数。半导体岛结构220处于倒装发光二极管的中心区域,以便于实现各半导体发光单元210的发光区域面积尽量接近。S10, providing a
具体地,在衬底100上形成半导体堆叠层200,半导体堆叠层200包括第一半导体层201、有源层202和第二半导体层203;第一半导体层201为N型半导体层,有源层202为多层量子阱层,第二半导体层203为P型半导体层。蚀刻半导体堆叠层200并形成多个用于形成半导体发光单元210的第一半导体堆叠层,相邻第一半导体堆叠层之间通过隔离槽240间隔,半导体岛结构220形成在衬底100中心区域的隔离槽240内。Specifically, a
半导体岛结构220和与其相邻的半导体发光单元210之间的间隙的宽度W 1 自下而上递增。半导体岛结构220的上表面形状是圆形或者多边形,且半导体岛结构220的上表面的宽度至少是30μm,较佳地,半导体岛结构220上表面的宽度根据目前的顶针尺寸实施,半导体岛结构220上表面的宽度至少为50μm。本实施例中,半导体岛结构220的上表面和下表面均呈圆形,且半导体岛结构220上表面的直径小于半导体岛结构220下表面的直径。The width W1 of the gap between the
在每相邻的两个半导体发光单元210中,电流阻挡层300自左侧的第二半导体层203经隔离槽240延伸至右侧的第一半导体层201。电流阻挡层300的材料可选为氧化硅、氮化硅、碳化硅或氮氧化硅的一种或多种。In every two adjacent semiconductor
在尾端的半导体发光单元210中,于第二半导体层203上形成透明导电层400,其材料一般选择具有透明性质的导电材料,可具体选为氧化铟锡。在每相邻的两个半导体发光单元210中,左侧半导体发光单元210也包括有上述透明导电层400,透明导电层400位于第二半导体层203上方的电流阻挡层300上。In the semiconductor
在首端的半导体发光单元210中的第一半导体层201上形成有第一电极500。A
在尾端的半导体发光单元210中的透明导电层400上形成有第二电极510,第二电极510穿过开口与第二半导体层203接触。A
第二电极510包括块状部分以及自块状部分延伸出去的至少一条条状部分,第二电极510包括块状的一部分或者条状的一部分通过透明导电层400中的开口与第二半导体层203接触,以改善第二电极510的附着性。The
位于第二电极510中条状部分下方的开口的宽度大于第二电极510中条状部分的宽度。位于第二电极510中块状部分下方的开口的宽度小于第二电极510中块状部分的宽度,以实现块状部分的边缘位于透明导电层400的上表面。The width of the opening located under the strip portion in the
形成用于连接相邻半导体发光单元210的互连电极520,在每相邻的两个半导体发光单元210中,互连电极520自左侧半导体发光单元210中的透明导电层400延伸至右侧半导体发光单元210中的第一半导体层201上。An
S20、于多个半导体发光单元210、半导体岛结构220以及隔离槽240处形成保护层600,保护层600包括但不限于是分布式布拉格反射镜或者单层绝缘层。S20 , forming a
蚀刻保护层600并分别形成位于第一电极500、第二电极510上方的通孔,上述通孔用于形成与第一电极500对应的第一焊盘700,以及与第二电极510对应的第二焊盘710。Etching the
S30、形成与首端半导体发光单元210电性连接的第一焊盘700,以及与尾端半导体发光单元210电性连接的第二焊盘710。此步骤可得到图6所示的倒装发光二极管。S30 , forming a
在一种实施方式中,还包括:在形成第一电极500、第二电极510和互连电极520的同时,在半导体岛结构220上形成金属块800;金属块800覆盖半导体岛结构220的上表面,或者,金属块800覆盖半导体岛结构220的上表面和至少部分侧壁。金属块800的厚度介于0.5~10μm,金属块800的厚度优选为1~3μm,在本实施例中,金属块800的制备材料可与第一电极500、第二电极510或者互连电极520相同。此步骤可得到图7所示的倒装发光二极管。In one embodiment, it further includes: forming a
在一种实施方式中,还包括:在形成第一焊盘700和第二焊盘710的同时,在保护层600上表面中处于半导体岛结构220上方的区域上形成金属块800。金属块800的厚度介于0.5~10μm,金属块800的厚度优选为1~3μm,在本实施例中,金属块800的制备材料可与第一焊盘700和第二焊盘710相同。此步骤可得到图4所示的倒装发光二极管。In one embodiment, the method further includes: forming the
根据本申请的一个方面,提供一种发光装置,该发光装置可以是照明用装置、背光装置、显示装置,例如灯具、电视、手机、面板,或者可以是RGB显示屏。发光装置包括上述实施例中的倒装发光二极管,上述倒装发光二极管以数百颗或者数千颗或者数万颗的数量集成式的安装在应用基板或者封装基板上,形成发光光源部分。According to one aspect of the present application, a light-emitting device is provided. The light-emitting device may be an illumination device, a backlight device, a display device, such as a lamp, a TV, a mobile phone, a panel, or an RGB display. The light-emitting device includes the flip-chip light-emitting diodes in the above embodiments, and the above-mentioned flip-chip light-emitting diodes are integrally mounted on the application substrate or the packaging substrate in the number of hundreds, thousands, or tens of thousands to form the light source part.
由以上的技术方案可知,本申请在倒装发光二极管的中心区域处形成半导体岛结构220,该半导体岛结构220与半导体发光单元210之间存在间隙,且不用于倒装发光二极管的导电发光过程;半导体岛结构220所在区域作为顶针的作用区域,在顶针作用在上述区域时,顶针所刺破或顶破保护层600的裂缝仅延伸至半导体岛结构220的上表面或者侧壁周围,在一定程度上可避免裂缝直接传递到半导体发光单元210处的保护层600上,从而避免倒装发光二极管因半导体发光单元210处的保护层600被刺破或者顶破而出现的漏电失效现象,提高倒装发光二极管的可靠性。It can be known from the above technical solutions that the present application forms a
以上所述仅是本申请的优选实施方式,应当指出,对于本技术领域的普通技术人员来说,在不脱离本申请技术原理的前提下,还可以做出若干改进和替换,这些改进和替换也应视为本申请的保护范围。The above description is only the preferred implementation mode of the present application. It should be pointed out that for those of ordinary skill in the art, without departing from the technical principle of the present application, some improvements and replacements can also be made. These improvements and replacements It should also be regarded as the protection scope of the present application.
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