CN114136752A - Sample gas constant temperature device with temperature change resistance and sample gas pretreatment system - Google Patents
Sample gas constant temperature device with temperature change resistance and sample gas pretreatment system Download PDFInfo
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- CN114136752A CN114136752A CN202111469725.1A CN202111469725A CN114136752A CN 114136752 A CN114136752 A CN 114136752A CN 202111469725 A CN202111469725 A CN 202111469725A CN 114136752 A CN114136752 A CN 114136752A
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- 230000008859 change Effects 0.000 title description 4
- 238000001816 cooling Methods 0.000 claims abstract description 45
- 238000010438 heat treatment Methods 0.000 claims abstract description 25
- 238000001914 filtration Methods 0.000 claims abstract description 17
- 230000033228 biological regulation Effects 0.000 claims abstract description 8
- 238000004458 analytical method Methods 0.000 claims description 27
- 230000001105 regulatory effect Effects 0.000 claims description 13
- 238000007789 sealing Methods 0.000 claims description 11
- 230000001276 controlling effect Effects 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 230000000087 stabilizing effect Effects 0.000 claims description 7
- 230000018044 dehydration Effects 0.000 claims description 6
- 238000006297 dehydration reaction Methods 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 6
- 238000007664 blowing Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000005070 sampling Methods 0.000 claims description 2
- 230000003750 conditioning effect Effects 0.000 claims 1
- 230000009467 reduction Effects 0.000 abstract description 8
- 238000000034 method Methods 0.000 abstract description 7
- 238000004868 gas analysis Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 120
- 238000001514 detection method Methods 0.000 description 6
- 230000007613 environmental effect Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000002912 waste gas Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000003546 flue gas Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/44—Sample treatment involving radiation, e.g. heat
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/34—Purifying; Cleaning
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Abstract
The application discloses resistant temperature variation sample gas constant temperature equipment and sample gas pretreatment systems. The method comprises the following steps: the temperature measuring unit, the temperature control unit, the heating unit and the cooling unit are used in a matched manner; the temperature measuring unit is used for detecting the temperature of the filtered sample gas and transmitting temperature data to the temperature control unit, the temperature control unit receives the temperature data, judges that when the temperature data is lower than a first set temperature value, the temperature control unit sends a first control signal to the heating unit, and starts the heating unit to heat the filtered sample gas; when the temperature data is higher than a second set temperature value, the temperature control unit sends a second control signal to the temperature reduction unit, and the temperature reduction unit is started to reduce the temperature of the filtered sample gas; through the temperature of continuous regulation and control filtration sample gas for the temperature of filtering the sample gas tends to steadily and keeps in setting for the temperature range gradually, thereby reduces the influence of external factors to sample gas temperature, improves sample gas analysis precision.
Description
Technical Field
The present disclosure relates generally to the field of gas processing technologies, and more particularly to a temperature-change resistant sample gas thermostat and a sample gas pretreatment system.
Background
In order to guarantee the living environment of people, the atmospheric environment and the flue gas discharged by a factory need to be detected, and the gas to be processed and analyzed is called sample gas. In a traditional sample gas treatment system, the temperature of the sample gas is influenced by external environmental factors to change, so that the pretreatment process of the sample gas is influenced, and the analysis of the sample gas is inaccurate. Therefore, improvements in existing sample gas processing systems are needed.
Disclosure of Invention
In view of the above-mentioned defects or shortcomings in the prior art, it is desirable to provide a sample gas constant temperature device and a sample gas pretreatment system with temperature variation resistance, which are convenient to control the temperature of the sample gas, improve the analysis accuracy of the sample gas, and are easy and convenient to operate and easy to implement.
In a first aspect, the present application provides a temperature-change resistant sample gas thermostat, comprising: the temperature measuring unit, the temperature control unit, the heating unit and the cooling unit are used in a matched manner;
the temperature measuring unit is used for measuring the temperature of the filtered sample gas and transmitting temperature data to the temperature control unit;
the temperature control unit is used for judging that when the temperature data is lower than a first set temperature value, the temperature control unit sends a first control signal to the heating unit;
when the temperature data is higher than a second set temperature value, the temperature control unit sends a second control signal to the cooling unit;
the heating unit is used for starting to heat the filtered sample gas when receiving the first control signal;
and the cooling unit is used for starting to cool the filtered sample gas when receiving the second control signal.
According to the technical scheme provided by the embodiment of the application, the cooling unit comprises: the air cooling module and the electronic cooling module are used in a matched manner;
the air cooling module is used for blowing air to cool the filtered sample gas;
and the electronic cooling module is used for refrigerating and cooling the filtered sample gas.
According to the technical scheme provided by the embodiment of the application, the method further comprises the following steps: the dehydration unit is connected with the cooling unit;
and the dehydration unit is used for removing water in the filtered sample gas.
According to the technical scheme provided by the embodiment of the application, the method further comprises the following steps:
the sample gas path is used for conveying and filtering sample gas; the sample gas path is provided with a through hole, and the circuits for the temperature measuring unit, the heating unit and the cooling unit extend into the sample gas path;
and the sealing component is annularly arranged at the through hole and used for sealing the contact part of the line and the through hole.
According to the technical scheme provided by the embodiment of the application, the sealing assembly comprises:
a support sleeve having an end ring disposed around the through hole and communicating with the through hole;
the supporting plate is arranged on the inner wall of the supporting sleeve in a surrounding mode, and one side, close to the through hole, of the supporting plate is arranged;
a flexible hose disposed inside the support sleeve; the flexible hose is communicated with the through hole and used for accommodating the circuit to penetrate through; one end of the flexible hose is connected with one side of the supporting plate far away from the supporting sleeve; an installation space is formed between the flexible hose and the supporting sleeve;
an elastic air bag disposed in the installation space;
and adjusting the clamping degree of the flexible hose to the circuit by changing the inflation and deflation state of the elastic air bag.
According to the technical scheme provided by the embodiment of the application, the inner wall of the flexible hose is provided with a sealing gasket.
In a second aspect, the present application provides a sample gas pretreatment system comprising: the sample gas source, the filtering unit, the temperature-change-resistant sample gas constant-temperature device, the adjusting unit and the analyzing unit are used in a matched manner;
the sample gas source is used for providing sample gas;
the filtering unit is used for extracting the sample gas and filtering the sample gas to obtain filtered sample gas;
the adjusting unit is used for adjusting the flow of the filtered sample gas after the sample gas constant temperature device is adjusted to the set temperature;
the analysis unit is used for analyzing the components and the corresponding contents of the filtered sample gas.
According to the technical scheme provided by the embodiment of the application, the adjusting unit comprises: the pressure regulating module, the flow regulating module and the pressure stabilizing module are used in a matched manner;
the pressure adjusting module is used for adjusting the gas pressure of the filtered sample gas after temperature adjustment;
the flow regulating module is used for controlling the gas flow of the filtered sample gas after temperature regulation;
and the pressure stabilizing module is used for controlling the constant output of the filtered sample gas.
According to the technical scheme provided by the embodiment of the application, the analysis unit comprises: the gas production module, the analysis module and the waste gas treatment module are used in a matched manner;
the gas production module is used for extracting the filtered sample gas released by the adjusting unit;
the analysis module is used for analyzing the components and the corresponding contents of the filtered sample gas;
the waste gas treatment module is used for collecting the waste gas generated by the analysis module.
In summary, the present technical solution specifically discloses a specific structure of a temperature-variation-resistant sample gas thermostat. The temperature measuring unit is used for detecting the temperature of the filtered sample gas and transmitting temperature data to the temperature control unit, the temperature control unit receives the temperature data, judges that when the temperature data is lower than a first set temperature value, the temperature control unit sends a first control signal to the heating unit, and starts the heating unit to heat the filtered sample gas; when the temperature data is higher than a second set temperature value, the temperature control unit sends a second control signal to the temperature reduction unit, and the temperature reduction unit is started to reduce the temperature of the filtered sample gas; through the temperature of continuous regulation and control filtration sample gas for the temperature of filtering the sample gas tends to steadily and keeps in setting for the temperature range gradually, thereby reduces the influence of external factors to sample gas temperature, improves sample gas analysis precision.
Drawings
Other features, objects and advantages of the present application will become more apparent upon reading of the following detailed description of non-limiting embodiments thereof, made with reference to the accompanying drawings in which:
FIG. 1 is a schematic flow diagram of a temperature-change-resistant sample gas thermostat.
FIG. 2 is a schematic flow diagram of a sample gas pretreatment system.
Fig. 3 is a schematic structural view of the seal structure.
Fig. 4 is a schematic structural view of a portion a in fig. 3.
Reference numbers in the figures: 1. a temperature measuring unit; 2. a temperature control unit; 3. a heating unit; 4. a temperature reduction unit; 5. a dehydration unit; 6. a source of sample gas; 7. a filtration unit; 8. an adjustment unit; 9. an analysis unit; 10. a flow regulation module; 11. a pressure regulation module; 12. a voltage stabilization module; 13. a gas production module; 14. an analysis module; 15. an exhaust gas treatment module; 16. a support sleeve; 17. a support plate; 18. a flexible hose; 19. an elastic air bag; 20. and a gasket.
Detailed Description
The present application will be described in further detail with reference to the following drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not restrictive of the invention. It should be noted that, for convenience of description, only the portions related to the present invention are shown in the drawings.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
Example 1
Please refer to fig. 1, which is a schematic flow chart of a temperature-change-resistant sample gas thermostat device provided in the present application, comprising: the temperature measuring unit 1, the temperature control unit 2, the heating unit 3 and the cooling unit 4 are used in a matched manner;
the temperature measuring unit 1 is used for measuring the temperature of the filtered sample gas and transmitting temperature data to the temperature control unit 2;
the temperature control unit 2 is configured to determine that when the temperature data is lower than a first set temperature value, the temperature control unit 2 sends a first control signal to the heating unit 3;
when the temperature data is higher than a second set temperature value, the temperature control unit 2 sends a second control signal to the cooling unit 4;
the heating unit 3 is used for starting to heat the filtered sample gas when receiving the first control signal;
and the cooling unit 4 is used for starting to cool the filtered sample gas when receiving the second control signal.
In the embodiment, the temperature measuring unit 1, the temperature control unit 2, the heating unit 3 and the cooling unit 4 which are used in a matched manner are designed, and the filtered sample gas is in a set temperature range through temperature regulation, so that the influence of external environmental factors on the temperature of the sample gas is reduced, the influence of the environmental temperature on the pretreatment process of the sample gas is avoided, and the analysis accuracy of the sample gas is improved;
as shown in fig. 1, the temperature measuring unit 1 is configured to measure the temperature of the filtered sample gas and transmit temperature data to the temperature control unit 2; here, the temperature measuring unit 1 is of the type, for example, a temperature sensor, of the type, for example, WZP 2;
the temperature control unit 2 is used for sending a first control signal to the heating unit 3 if the temperature is lower than a first set temperature value, and starting the heating unit 3 to heat the filtered sample gas; when the temperature data is higher than a second set temperature value, the temperature control unit 2 sends a second control signal to the temperature reduction unit 4, and the temperature reduction unit 4 is started to reduce the temperature of the filtered sample gas;
a set temperature range is formed between the first set temperature value and the second set temperature value, and when the temperature data is in the set temperature range, the temperature of the sample gas is in a stable state;
when the measured temperature data is lower than a first set temperature value, the heating unit 3 is started to heat the filtered sample gas, and when the measured temperature data is higher than a second set temperature value, the cooling unit 4 is started to cool the filtered sample gas; moreover, the temperature control unit 2 gradually stabilizes the temperature of the filtered sample gas and keeps the temperature within a set temperature range by continuously debugging and controlling the starting of the heating unit 3 and the cooling unit 4; here, the type of the temperature control unit 2 is, for example, a thermostat;
the heating unit 3 is used for starting to heat the filtered sample gas when receiving the first control signal; here, the type of the heating unit 3 is, for example, a heater;
the temperature reduction unit 4 is used for starting to reduce the temperature of the filtered sample gas when receiving the second control signal;
wherein, cooling unit 4 includes: the air cooling module and the electronic cooling module are used in a matched manner to form a double cooling mode, so that the cooling effect is improved;
the air cooling module is used for cooling the filtered sample air by blowing; here, the air cooling module is, for example, a mechanical air cooling radiator;
the electronic cooling module is used for refrigerating and cooling the filtered sample gas; here, the electronic cooling module is of the type, for example, an electronic refrigerator.
Further, still include: the dehydration unit 5 is connected with the cooling unit 4 and is used for removing moisture in the filtered sample gas, so that the moisture in the sample gas is prevented from influencing the sensitivity of the temperature measuring unit 1 and the temperature measuring unit 1 is easily damaged;
further, as shown in fig. 3, the method further includes:
the sample gas path is used for conveying and filtering sample gas; moreover, the sample gas path is provided with a through hole for the circuits of the temperature measuring unit 1, the heating unit 3 and the cooling unit 4 to extend into the sample gas path, so that the equipment can conveniently detect and regulate the sample gas in the sample gas path; the number of the through holes is set according to the circuit of the device to be inserted;
the sealing assembly is arranged at the through hole in a surrounding mode and used for sealing the contact part of the circuit and the through hole; the sample gas is prevented from leaking from the through hole, and the harm to the working personnel and the external environment is avoided.
Specifically, as shown in fig. 4, the seal assembly includes:
a support sleeve 16, one end of which is disposed around the through hole and which communicates with the through hole, as a main support member of the seal assembly;
the supporting plate 17 is arranged on the inner wall of the supporting sleeve 16 in a surrounding mode, and one side of the supporting plate, close to the through hole, is arranged; as a connecting part between the support sleeve 16 and the flexible hose 18, it can also support the elastic bladder.
A flexible hose 18 disposed inside the support sleeve 16; a flexible hose 18 is in communication with the through hole for accommodating the passage of the line; one end of a flexible hose 18 is connected with one side of the support plate 17 far away from the support sleeve 16, and an installation space is formed between the flexible hose 18 and the support sleeve 16 and used for accommodating an elastic air bag 19;
an elastic air bag 19 provided in the installation space for changing a gap space between the flexible hose 18 and the line;
the clamping degree of the flexible hose 18 to the line is adjusted by changing the inflation and deflation state of the elastic air bag 19.
Specifically, the elastic air bag 19 is provided with an air guide pipeline which penetrates through the support sleeve 16 and can be connected with an external inflator pump; the elastic air bag 19 is inflated by an inflator pump, the elastic air bag 19 expands to extrude the flexible hose 18 until the flexible hose 18 is tightly attached to the circuit; when the line needs to be replaced or disassembled, the elastic air bag 19 is deflated, the elastic air bag 19 is softened and retracted to be in a natural state, the flexible hose 18 loses extrusion force and is separated from the line, and the line can be taken out smoothly.
Further, a sealing gasket 20 is disposed on the inner wall of the flexible hose 18 for further assisting the flexible hose 18 to cling to the line, so as to improve the sealing performance at the through hole.
Example 2
Fig. 2 shows a specific process of a sample gas pretreatment system provided in the present application, which includes: a sample gas source 6, a filtering unit 7, the sample gas constant temperature device with the temperature change resistance described in embodiment 1, an adjusting unit 8 and an analyzing unit 9 which are used in cooperation;
a sample gas source 6 for supplying a sample gas;
the filtering unit 7 is used for extracting the sample gas, filtering the sample gas to obtain filtered sample gas, and transmitting the filtered sample gas to the temperature measuring unit 1; here, the type of the filter unit 7 is, for example, a multistage filter;
the adjusting unit 8 is used for adjusting the flow of the filtered sample gas after the sample gas constant temperature device is adjusted to the set temperature;
specifically, the adjusting unit 8 includes: a pressure regulating module 11, a flow regulating module 10 and a pressure stabilizing module 12 which are used in a matching way;
the pressure adjusting module 11 is used for adjusting the gas pressure of the filtered sample gas after temperature adjustment; here, the pressure regulating module 11 is of the type, for example, a pressure regulating valve;
the flow regulating module 10 is used for controlling the gas flow of the filtered sample gas after temperature regulation; here, the type of the flow rate adjustment module 10 is, for example, a flow meter;
the pressure stabilizing module 12 is used for controlling the constant output of the filtered sample gas; here, the pressure stabilizing module 12 is, for example, a relief valve.
An analysis unit 9 for analyzing the components and the corresponding contents of the filtered sample gas;
the analysis unit 9 can analyze the filtered sample gas based on various analysis modes such as a spectral analysis principle, an electrochemical reagent detection principle and the like; the analysis content comprises the following steps: gas composition and content concentration, etc.; here, the gas composition and the content concentration are not limited, and the corresponding amount can be analyzed and detected according to actual requirements;
specifically, the analysis unit 9 includes: a gas production module 13, an analysis module 14 and an exhaust gas treatment module 15 which are used in a matching way;
the gas sampling module 13 is used for extracting the filtered sample gas released by the adjusting unit 8; here, the type of the gas production module 13 is, for example, a gas production pump;
an analysis module 14 for analyzing the composition and corresponding content of the filtered sample gas; the type of analysis module 14, for example a gas detection sensor;
and an exhaust gas treatment module 15 for collecting the exhaust gas generated by the analysis module 14.
A moisture detection module is arranged between the cooling unit 4 and the adjusting unit 8 and is used for detecting whether the filtered sample gas contains moisture or not; the type of moisture detection module, such as a water detection sensor;
if the moisture content in the filtered sample gas is detected to be larger than the set value, the moisture detection module gives an alarm and returns to the cooling unit 4 to continue dewatering; if the moisture content is detected to be less than the set value, the sample gas smoothly enters the analysis unit 9 for subsequent gas component analysis.
The above description is only a preferred embodiment of the application and is illustrative of the principles of the technology employed. It will be appreciated by a person skilled in the art that the scope of the invention as referred to in the present application is not limited to the embodiments with a specific combination of the above-mentioned features, but also covers other embodiments with any combination of the above-mentioned features or their equivalents without departing from the inventive concept. For example, the above features may be replaced with (but not limited to) features having similar functions disclosed in the present application.
Claims (9)
1. A temperature-variation-resistant sample gas thermostat device, characterized by comprising: the temperature measuring unit (1), the temperature control unit (2), the heating unit (3) and the cooling unit (4) are used in a matched manner;
the temperature measuring unit (1) is used for measuring the temperature of the filtered sample gas and transmitting temperature data to the temperature control unit (2);
the temperature control unit (2) is used for judging that when the temperature data is lower than a first set temperature value, the temperature control unit (2) sends a first control signal to the heating unit (3);
when the temperature data is higher than a second set temperature value, the temperature control unit (2) sends a second control signal to the cooling unit (4);
the heating unit (3) is used for starting to heat the filtered sample gas when receiving the first control signal;
and the cooling unit (4) is used for starting to cool the filtered sample gas when receiving the second control signal.
2. A sample gas thermostat device resistant to variations in temperature according to claim 1, characterized in that the cooling unit (4) comprises: the air cooling module and the electronic cooling module are used in a matched manner;
the air cooling module is used for blowing air to cool the filtered sample gas;
and the electronic cooling module is used for refrigerating and cooling the filtered sample gas.
3. A variable-temperature-tolerant sample gas thermostat as claimed in claim 1, further comprising: the dehydration unit (5) is connected with the cooling unit (4);
and the dehydration unit (5) is used for removing water in the filtered sample gas.
4. A variable-temperature-tolerant sample gas thermostat as claimed in claim 1, further comprising:
the sample gas path is used for conveying and filtering sample gas; the sample gas path is provided with a through hole, and the lines of the temperature measuring unit (1), the heating unit (3) and the cooling unit (4) extend into the sample gas path;
and the sealing component is annularly arranged at the through hole and used for sealing the contact part of the line and the through hole.
5. A variable temperature-tolerant sample gas thermostat device according to claim 4, wherein the seal assembly comprises:
a support sleeve (16) having an end ring disposed around the through hole and communicating with the through hole;
the supporting plate (17) is arranged on the inner wall of the supporting sleeve (16) in a surrounding mode, and one side, close to the through hole, of the supporting plate is arranged;
a flexible hose (18) arranged inside the support sleeve (16); the flexible hose (18) is communicated with the through hole and is used for accommodating the line to penetrate through; one end of the flexible hose (18) is connected with one side of the supporting plate (17) far away from the supporting sleeve (16); an installation space is formed between the flexible hose (18) and the support sleeve (16);
an elastic air bag (19) provided in the installation space;
and the clamping degree of the flexible hose (18) to the line is adjusted by changing the inflation and deflation state of the elastic air bag (19).
6. A temperature-variation-resistant sample gas thermostat according to claim 5, characterized in that the inner wall of the flexible hose (18) is provided with a sealing gasket (20).
7. A sample gas pretreatment system, comprising: -a source of sample gas (6), a filtering unit (7), a sample gas thermostat device resistant to varying temperatures according to any one of claims 1 to 6, a regulating unit (8) and an analysis unit (9) to be used in cooperation;
the sample gas source (6) is used for providing sample gas;
the filtering unit (7) is used for extracting the sample gas and filtering the sample gas to obtain filtered sample gas;
the adjusting unit (8) is used for adjusting the flow of the filtered sample gas after the sample gas constant temperature device is adjusted to the set temperature;
the analysis unit (9) is used for analyzing the components and the corresponding contents of the filtered sample gas.
8. A sample gas pretreatment system according to claim 7, characterized in that the conditioning unit (8) comprises: a pressure regulating module (11), a flow regulating module (10) and a pressure stabilizing module (12) which are matched for use;
the pressure adjusting module (11) is used for adjusting the gas pressure of the filtered sample gas after temperature adjustment;
the flow regulating module (10) is used for controlling the gas flow of the filtered sample gas after temperature regulation;
and the pressure stabilizing module (12) is used for controlling the constant output of the filtered sample gas.
9. A sample gas pretreatment system according to claim 8, characterized in that the analysis unit (9) comprises: a gas production module (13), an analysis module (14) and an exhaust gas treatment module (15) which are matched for use;
the gas sampling module (13) is used for extracting the filtered sample gas released by the regulating unit (8);
the analysis module (14) is used for analyzing the components and the corresponding contents of the filtered sample gas;
the exhaust gas treatment module (15) is used for collecting the exhaust gas generated by the analysis module (14).
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| CN202111469725.1A CN114136752A (en) | 2021-12-03 | 2021-12-03 | Sample gas constant temperature device with temperature change resistance and sample gas pretreatment system |
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| CN202111469725.1A CN114136752A (en) | 2021-12-03 | 2021-12-03 | Sample gas constant temperature device with temperature change resistance and sample gas pretreatment system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115341199A (en) * | 2022-08-19 | 2022-11-15 | 江苏实为半导体科技有限公司 | Cavity temperature control system based on multi-cavity CVD equipment |
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