CN103817810A - Silicon wafer cutting method of NTC-PV 800 silicon wafer cutting machine - Google Patents
Silicon wafer cutting method of NTC-PV 800 silicon wafer cutting machine Download PDFInfo
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- CN103817810A CN103817810A CN201410086937.5A CN201410086937A CN103817810A CN 103817810 A CN103817810 A CN 103817810A CN 201410086937 A CN201410086937 A CN 201410086937A CN 103817810 A CN103817810 A CN 103817810A
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- mortar
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- steel wire
- silicon wafer
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- 238000005520 cutting process Methods 0.000 title claims abstract description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 19
- 239000010703 silicon Substances 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 title claims abstract description 11
- 229910000831 Steel Inorganic materials 0.000 claims abstract description 19
- 239000010959 steel Substances 0.000 claims abstract description 19
- 239000004570 mortar (masonry) Substances 0.000 claims abstract description 17
- 239000000498 cooling water Substances 0.000 claims abstract description 4
- 239000002002 slurry Substances 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 239000002210 silicon-based material Substances 0.000 description 2
- 230000006641 stabilisation Effects 0.000 description 2
- 238000011105 stabilization Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
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- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention relates to the solar photovoltaic industry, in particular to a silicon wafer cutting method of an NTC-PV 800 silicon wafer cutting machine. The main roll slot pitch of the cutting machine is changed to be 0.325 mm, and the diameter of a steel line is changed to be 0.11m; a one-way cutting process is adopted, and the process parameters are as follows: the tension of the steel line is 19N-23N, the knife feeding speed is 0.22mm/min-0.32mm/min, the speed of the steel line is 560m/min-700m/min; the line feeding distance is 70m/min-120m/min, the mortar temperature is 20 DEG C-23 DEG C, and the mortar flow rate is 60 L/min-90 L/min; the cooling water temperature is kept at 10 DEG C-12DEG C, the workshop temperature is kept at 25+/-2 DEG C; the single tool using amount of the steel line is 270km-400km, the mortar density is kept to be 1.65g/cm-1.68g/cm, cutting is started, mortar is changed once every two times of cutting, and the change amount of the mortar is controlled to be 550kg-750kg.
Description
Technical field
The present invention relates to photovoltaic industry, specifically a kind of NTC-PV800 silicon chip cutter method for cutting silicon chips.
Background technology
Concerning photovoltaic industry, cost is most important, strengthens multi-wire saw new technology and improves research and development ability, and progressively reducing production costs is permanently effective lifeblood of depending on for existence of enterprise.Infiltration each link aborning reduces production costs.Process improving and reducing production costs, comprises the auxiliary material evaluation of auxiliary material, the importing of new product new technology etc.Silicon material has almost accounted for 60% in silicon chip processing cost.
Summary of the invention
Technical problem to be solved by this invention is: how to improve the piece rate of unit mass silicon rod, reduce silicon stockline and cut loss, Simultaneous Stabilization improves the yields of thin slice, thereby reduces silicon chip preparation cost.
The technical solution adopted in the present invention is: a kind of NTC-PV800 silicon chip cutter method for cutting silicon chips, carries out according to following step:
Step 1, the home roll slot pitch of revising this cutting machine is 0.325mm, steel wire diameter is 0.11m;
Step 2, adopt unidirectional cutting technique, technological parameter is: steel wire tension force: 19 N~23N, feed velocity: 0.22 mm/min~0.32mm/min, steel wire speed: 560 m/min~700m/min, line sending distance: 70 m/min~120m/min, mortar temperature: 20 ° of C~23 ° C, mortar flow: 60 l/min~90 l/min;
Step 3, cooling water temperature keeps 10 ° of C~12 ° C, and factory building temperature keeps 25 ± 2 ° of C;
Step 4, steel wire hilted broadsword consumption 270 km~400km, slurry density remains on 1.65 g/cm~1.68g/cm, starts cutting, and every cutting two cuttves are changed a mortar, and mortar replacing amount is controlled at 550 kg~750kg.
The invention has the beneficial effects as follows: the present invention has improved the piece rate of unit mass silicon rod, reduce silicon stockline and cut loss, Simultaneous Stabilization improves the yields of thin slice, thereby reduces silicon chip preparation cost.
The specific embodiment
The present invention adopts NTC-PV800 silicon chip cutter to carry out silicon chip cutting, current NTC-PV800 silicon chip cutter standard cell distance is 0.33mm, per kilogram silicon material can theoretical slice 53.43, if slot pitch be adjusted into 0.325mm can theoretical slice 54.26, slice number increases by 0.83.But can cause some row problems after adjusting standard cell distance, slot pitch reduces, in cutting process, steel wire wearing and tearing increase, too much, carrying capacity weakens in steel wire wearing and tearing, easily produces stria in silicon chip cutting process, and wear extent increases, and steel wire tensile strength weakens, easily there is broken string phenomenon.How to meet and carried out slot pitch, obtain how theoretical slice number, meet again other technological requirement simultaneously, the present invention finds that adjustment tank distance is 0.325mm, need to set according to certain technological parameter for rear, just can meet the demands, specific as follows;
Step 1, first selects a set of home roll 0.325mm slot pitch of again slotting, and it is 0.11m that steel wire diameter is set.
Step 2, adopt unidirectional cutting technique, technological parameter is: steel wire tension force: 19 N~23N, feed velocity: 0.22 mm/min~0.32mm/min, steel wire speed: 560 m/min~700m/min, line sending distance: 70 m/min~120m/min, mortar temperature: 20 ° of C~23 ° C, mortar flow: 60 l/min~90 l/min;
Step 3, cooling water temperature keeps 10 ° of C~12 ° C, and factory building temperature keeps 25 ± 2 ° of C;
Step 4, steel wire hilted broadsword consumption 270 km~400km, slurry density remains on 1.65 g/cm~1.68g/cm, starts cutting, and every cutting two cuttves are changed a mortar, and mortar replacing amount is controlled at 550 kg~750kg.
Claims (1)
1. a NTC-PV800 silicon chip cutter method for cutting silicon chips, is characterized in that: carry out according to following step:
Step 1, the home roll slot pitch of revising this cutting machine is 0.325mm, steel wire diameter is 0.11m;
Step 2, adopt unidirectional cutting technique, technological parameter is: steel wire tension force: 19 N~23N, feed velocity: 0.22 mm/min~0.32mm/min, steel wire speed: 560 m/min~700m/min, line sending distance: 70 m/min~120m/min, mortar temperature: 20 ° of C~23 ° C, mortar flow: 60 l/min~90 l/min;
Step 3, cooling water temperature keeps 10 ° of C~12 ° C, and factory building temperature keeps 25 ± 2 ° of C;
Step 4, steel wire hilted broadsword consumption 270 km~400km, slurry density remains on 1.65 g/cm~1.68g/cm, starts cutting, and every cutting two cuttves are changed a mortar, and mortar replacing amount is controlled at 550 kg~750kg.
Priority Applications (1)
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CN201410086937.5A CN103817810B (en) | 2014-03-11 | 2014-03-11 | A kind of NTC-PV800 silicon chip cutter method for cutting silicon chips |
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CN201410086937.5A CN103817810B (en) | 2014-03-11 | 2014-03-11 | A kind of NTC-PV800 silicon chip cutter method for cutting silicon chips |
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CN103817810A true CN103817810A (en) | 2014-05-28 |
CN103817810B CN103817810B (en) | 2015-10-14 |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105382949A (en) * | 2015-10-30 | 2016-03-09 | 江苏耀阳电子有限公司 | Slicing operation technology of polycrystalline silicon chips |
CN107030908A (en) * | 2017-05-15 | 2017-08-11 | 天津市环欧半导体材料技术有限公司 | Fine sanding cutting process for eight-inch semiconductor silicon wafer fine wire |
CN107813433A (en) * | 2017-05-15 | 2018-03-20 | 开封大学 | A kind of special construction steel wire method for cutting silicon chips of NTC PV800H silicon chip cutters |
CN108000739A (en) * | 2017-11-28 | 2018-05-08 | 江苏奥明能源有限公司 | A kind of mortar cutting method |
CN109352845A (en) * | 2018-10-23 | 2019-02-19 | 开封大学 | A kind of NTC-MWM442DM silicon material cutting machine silicon wafer cutting method |
CN109551651A (en) * | 2018-10-23 | 2019-04-02 | 开封大学 | A kind of special construction steel wire method for cutting silicon chips being applicable in NTC-MWM442DM silicon materials cutting machine |
Citations (6)
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JPH10249701A (en) * | 1997-03-17 | 1998-09-22 | Super Silicon Kenkyusho:Kk | Wire saw cutting method and device for ingot |
CN102059748A (en) * | 2010-12-13 | 2011-05-18 | 天津市环欧半导体材料技术有限公司 | Process for cutting silicon chip by using steel wire with diameter of 0.11 millimeter |
CN102275233A (en) * | 2011-09-06 | 2011-12-14 | 太仓协鑫光伏科技有限公司 | Method for cutting 170-micrometer silicon wafers |
CN102990792A (en) * | 2012-11-28 | 2013-03-27 | 天津市环欧半导体材料技术有限公司 | Eight-inch single crystal silicon wafer multi-wire sawing machine and sawing method thereof |
CN103072211A (en) * | 2013-02-17 | 2013-05-01 | 英利集团有限公司 | Fretsaw cutting method |
CN103448154A (en) * | 2013-08-28 | 2013-12-18 | 衡水英利新能源有限公司 | Silicon-block cutting method |
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2014
- 2014-03-11 CN CN201410086937.5A patent/CN103817810B/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10249701A (en) * | 1997-03-17 | 1998-09-22 | Super Silicon Kenkyusho:Kk | Wire saw cutting method and device for ingot |
CN102059748A (en) * | 2010-12-13 | 2011-05-18 | 天津市环欧半导体材料技术有限公司 | Process for cutting silicon chip by using steel wire with diameter of 0.11 millimeter |
CN102275233A (en) * | 2011-09-06 | 2011-12-14 | 太仓协鑫光伏科技有限公司 | Method for cutting 170-micrometer silicon wafers |
CN102990792A (en) * | 2012-11-28 | 2013-03-27 | 天津市环欧半导体材料技术有限公司 | Eight-inch single crystal silicon wafer multi-wire sawing machine and sawing method thereof |
CN103072211A (en) * | 2013-02-17 | 2013-05-01 | 英利集团有限公司 | Fretsaw cutting method |
CN103448154A (en) * | 2013-08-28 | 2013-12-18 | 衡水英利新能源有限公司 | Silicon-block cutting method |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN105382949A (en) * | 2015-10-30 | 2016-03-09 | 江苏耀阳电子有限公司 | Slicing operation technology of polycrystalline silicon chips |
CN107030908A (en) * | 2017-05-15 | 2017-08-11 | 天津市环欧半导体材料技术有限公司 | Fine sanding cutting process for eight-inch semiconductor silicon wafer fine wire |
CN107813433A (en) * | 2017-05-15 | 2018-03-20 | 开封大学 | A kind of special construction steel wire method for cutting silicon chips of NTC PV800H silicon chip cutters |
CN108000739A (en) * | 2017-11-28 | 2018-05-08 | 江苏奥明能源有限公司 | A kind of mortar cutting method |
CN108000739B (en) * | 2017-11-28 | 2019-11-12 | 泉州台商投资区中达工业设计有限公司 | A kind of mortar cutting method |
CN109352845A (en) * | 2018-10-23 | 2019-02-19 | 开封大学 | A kind of NTC-MWM442DM silicon material cutting machine silicon wafer cutting method |
CN109551651A (en) * | 2018-10-23 | 2019-04-02 | 开封大学 | A kind of special construction steel wire method for cutting silicon chips being applicable in NTC-MWM442DM silicon materials cutting machine |
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