CN103295929A - Barrier driving system of furnace tube and method for initializing barrier driving system - Google Patents
Barrier driving system of furnace tube and method for initializing barrier driving system Download PDFInfo
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- CN103295929A CN103295929A CN2013102150511A CN201310215051A CN103295929A CN 103295929 A CN103295929 A CN 103295929A CN 2013102150511 A CN2013102150511 A CN 2013102150511A CN 201310215051 A CN201310215051 A CN 201310215051A CN 103295929 A CN103295929 A CN 103295929A
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- baffle plate
- baffle
- boiler tube
- barrier
- drive system
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- 238000000034 method Methods 0.000 title claims description 12
- 230000004888 barrier function Effects 0.000 title abstract description 30
- 230000033001 locomotion Effects 0.000 claims abstract description 24
- 230000001681 protective effect Effects 0.000 abstract 3
- 238000012423 maintenance Methods 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 6
- 230000009471 action Effects 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 2
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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Abstract
The invention discloses a barrier driving system of a furnace tube. The barrier driving system comprises a barrier and a control device for controlling movement of the barrier. The barrier is positioned at the bottom of the furnace tube and comprises a barrier body and a protective cover, and the protective cover is horizontally fixed to the bottom of the barrier body; the control device comprises a barrier driving unit, a barrier position sensing unit and a control unit, and the barrier driving unit is used for driving the barrier to horizontally move according to control signals; the barrier driving unit comprises a connecting piece, the protective cover is pivotally connected to the connecting piece by a rotary shaft and is provided with a first portion, and the bottom surface of the first portion is in contact with the connecting piece; the first portion is fixedly connected with the connecting piece by fasteners, and the barrier is horizontally positioned owing to the first portion; the barrier position sensing unit is used for sensing the position of the barrier and generates sensing signals; the control unit is connected with the barrier position sensing unit and the barrier driving unit and is used for determining whether to transmit the control signals or not according to the sensing signals. The barrier driving system has the advantages that the barrier can be prevented from being collided with the inner wall of a loading zone when the system is initialized, and accordingly the operational safety is improved.
Description
Technical field
The present invention relates to semiconductor integrated circuit manufacturing technology field, relate in particular to a kind of drive system and initial method thereof of boiler tube baffle plate.
Background technology
The present used wafer Load System of semicon industry, as shown in Figure 1, manipulator 300 with wafer transmission to brilliant boat 200, brilliant boat 200 is at the process chamber of moving into boiler tube after the loaded with wafers from the bottom opening that is positioned at the boiler tube 100 above the loading area, the bottom opening place of boiler tube 100 is provided with baffle plate 1, and it opens or close this opening by horizontally rotating.Figure 2 shows that the partial schematic diagram of barrier driving system in the prior art.The barrier driving system comprises baffle plate 1 and the control device of controlling its motion.Control device comprises baffle-plate driving unit and control unit (not shown), and wherein control unit sends control signal, and 1 on baffle plate drives to carry out horizontal movement by baffle-plate driving unit according to this control signal.As shown in the figure, the baffle plate over cap 1b that comprises baffle body 1a and be fixedly arranged on body 1a below.Be provided with the aqueous vapor pipeline among the over cap 1b, to play the effect to the baffle body cooling in technical process, over cap 1b protection aqueous vapor pipeline is not damaged.Over cap 1b is articulated in the connector 4 of baffle-plate driving unit by rotating shaft 2.This rotating shaft 2 is divided into first and second portion with over cap, and wherein the bottom surface of first is with the connector contact and by securing member 3(such as bolt and nut and/or alignment pin) keep horizontal fixed to be connected.Thus, baffle-plate driving unit can drive baffle plate and carries out the translation of horizontal direction or rotatablely move.When need carry out that the boiler tube cavity is changed or when carrying out time-based maintenance or maintenance; removal of fastener 3; then the second portion of baffle body 1a and over cap 1b just can be around the shaft 2 rotations and opening, letting droop extends into loading area, just can carry out actions such as repair and replacement afterwards easily.
Yet, when the wafer transmission Load System chain needs take place carries out initialization, also can do corresponding initialization action to this barrier driving system, namely comprise making the action of baffle plate translation in the horizontal direction one segment distance.If this moment, baffle plate was in normal operation position (horizontal level), then the translation motion of baffle plate can carry out smoothly.If but just carrying out the replacing of boiler tube cavity this moment or carrying out the time-based maintenance maintenance, baffle plate is in the state of vertically transferring and stretches into the inwall of close loading area in the loading area, then it moves horizontally and can make baffle plate and its loading area inwall bump, and causes baffle plate and loading area inwall to damage.
Summary of the invention
Main purpose of the present invention is to overcome the defective of prior art, and a kind of drive system of boiler tube baffle plate is provided, and can detect the baffle plate present position in real time, and baffle plate and loading area inwall bump when avoiding system initialization.
For reaching above-mentioned purpose, the invention provides a kind of drive system of boiler tube baffle plate, comprise baffle plate and control the control device that described baffle plate moves, wherein said baffle plate is positioned at described boiler tube bottom in order to seal described boiler tube, it comprises that baffle body and horizontal fixed are in the over cap of described baffle body bottom, described control device comprises: baffle-plate driving unit, in order to drive the motion that described baffle plate carries out horizontal direction according to control signal; Wherein, described baffle-plate driving unit comprises connector, and described over cap is articulated in described connector by rotating shaft; The bottom surface of described over cap has and the contacted contact site of described connector; Described contact site is fixedlyed connected with described connector by securing member and described baffle plate is horizontal; The baffle position sensing unit is in order to the position of the described baffle plate of sensing and produce sensing signal; And control unit, link to each other with described baffle position sensing unit and described baffle-plate driving unit, in order to determine whether to send described control signal according to described sensing signal.
Preferably, described baffle position sensing unit is relay open in usual.
Preferably, described relay open in usual is located at described connector bottom and near described rotating shaft place, when described baffle plate around described rotating shaft rotation during to the upright position, the moving contact of described relay open in usual contacts with described over cap.
Preferably, described baffle position sensing unit is the normally closed type relay.
Preferably, described normally closed type relay is located at described contact site and the contacted surface of described connector or described connector and the contacted surface of described contact site.
Preferably, described baffle position sensing unit is pressure sensor.
Preferably, described pressure sensor is located at described contact site and the contacted surface of described connector or described connector and close described rotating shaft place in the contacted surface of described contact site or described connector bottom.
Preferably, described baffle position sensing unit is a pair of infrared sensor.
Preferably, described a pair of infrared sensor is located at described baffle body bottom or described over cap bottom surface away from described contact site place, and on the inwall of the loading area of described boiler tube below.
The present invention also provides the above-mentioned boiler tube baffle controls of a kind of application device to carry out the initialized method of wafer transmission Load System, wherein carry out initialization and comprise and send described control signal to drive the motion that described baffle plate carries out horizontal direction, said method comprising the steps of:
The position of the described baffle plate of sensing is to judge whether described baffle plate is horizontal;
If described baffle plate is horizontal, then described drive system is carried out initialization and make described baffle plate carry out the motion of horizontal direction; Otherwise cancellation is carried out initialization to described drive system, and reports to the police.
The invention has the advantages that the location status by detecting the boiler tube baffle plate judges whether and can carry out horizontal movement to baffle plate, thereby avoided when carrying out the replacing of boiler tube cavity or maintenance, moving horizontally or rotating the baffle plate that is in plumbness, and cause baffle plate and loading area inwall case of collision to take place, guaranteed the fail safe of operation.
Description of drawings
Figure 1 shows that the schematic diagram of wafer transmission Load System in the prior art;
Figure 2 shows that the partial schematic diagram of boiler tube barrier driving system in the prior art;
Figure 3 shows that the calcspar of boiler tube barrier driving of the present invention system;
Figure 4 shows that and utilize boiler tube barrier driving of the present invention system to carry out the flow chart of initialization action.
Embodiment
For making content of the present invention clear more understandable, below in conjunction with Figure of description, content of the present invention is described further.Certainly the present invention is not limited to this specific embodiment, and the known general replacement of those skilled in the art also is encompassed in protection scope of the present invention.
It is depicted as the calcspar of boiler tube barrier driving of the present invention system Fig. 3.The drive system of boiler tube baffle plate comprises the control device 10 of baffle plate 1 and the motion of control baffle plate.Wherein control device 10 comprises baffle-plate driving unit 11, baffle position sensing unit 12 and control unit 13.Baffle-plate driving unit 11 links to each other with baffle plate 1, in order to drive the motion that described baffle plate carries out horizontal direction according to control signal; Baffle position sensing unit 12 is in order to the position of the described baffle plate of sensing and produce sensing signal; Control unit 13 links to each other with baffle position sensing unit 12 and described baffle-plate driving unit 11, in order to determine whether to send described control signal according to described sensing signal.Please in conjunction with reference to figure 2 and Fig. 3, the boiler tube baffle plate comprises that baffle body 1a and horizontal fixed are in the over cap 1b of baffle body bottom among the present invention; Baffle-plate driving unit 11 comprises connector 4.The bottom surface of the over cap 1b of boiler tube baffle plate has the contact site that contacts with connector.Specifically, over cap 1b is articulated in the connector 4 of baffle-plate driving unit by rotating shaft 2, this rotating shaft 2 is divided into first and second portion with over cap, wherein the bottom surface of first is the contact site that contacts with connector 4, this contact site (first of over cap) forms a fixed connection by securing member 3 and connector 4, makes that also baffle plate remains in horizontal level simultaneously; Second portion does not contact with connector 4, can 2 be rotated down around the shaft.Securing member 3 can be fastening bolt and alignment pin, to be fixed in the vertical direction with on the horizontal direction respectively.Certainly, in other embodiments, also can only adopt a kind of securing member, and securing member also is not limited to above-mentioned two kinds.After securing member was removed, 2 rotations around the shaft of the second portion of baffle body 1a and over cap 1b were also stretched in the loading area of boiler tube below, and this moment, baffle body 1a was in plumbness.
Baffle-plate driving unit 11 is according to control signal, drive baffle plates by connector 4 and carry out the motion of horizontal direction, as horizontal translation/butterfly in technical process 1 when opening or closing the boiler tube bottom opening or system carried out initialization with baffle plate 1 horizontal translation/rotation one segment distance.In one embodiment of this invention, connector 4 is to be set on the rotation axis of driver element 11 motors, can drive baffle plate with the motor rotation and carry out the rotation of horizontal direction, also can adopt other modes to drive baffle plate certainly and carry out horizontal movement.Baffle position sensing unit 12 is in order to the position of sensing baffle plate 1 and produce sensing signal, and control unit 13 links to each other with baffle-plate driving unit 11 and baffle position sensing unit 12, determines whether will send control signal according to sensing signal.When baffle position sensing unit 12 senses baffle plate when being in vertical position, control unit 13 does not send control signal, thereby baffle-plate driving unit 11 just can not drive the motion that baffle plate carries out horizontal direction yet; When baffle position sensing unit 12 senses baffle plate when being horizontal, then control unit 13 can send control signal, makes baffle-plate driving unit 11 drive the baffle plate horizontal movements.
In one embodiment of this invention, baffle position sensing unit 12 is relay open in usual, and it is installed in contact with the over cap 1b bottom of part and near rotating shaft 2 places, when baffle plate 1 was horizontal, relay 12 open in usual produces often opened signal of connector 4; And when carrying out time-based maintenance or maintenance, when 2 rotations were to the upright position around the shaft with baffle plate, the moving contact of relay 12 open in usual contacted with the second portion of over cap, produced closure signal.Thus, whether control unit can produce control signal according to the switching signal deciding that relay 13 produces.When control unit 13 is received as closure signal, do not allow to produce control signal, baffle-plate driving unit 11 also just can't drive baffle plate and carry out horizontal movement, thereby can guarantee that baffle plate can under plumbness misoperation not take place.
In one embodiment of this invention, baffle position sensing unit 12 is the normally closed type relay, and it is installed in the contact site of over cap or the surface one that connector 4 contacts with contact site.When baffle plate was horizontal, normally closed type relay 12 moving contacts contacted with the first of connector 4 or over cap 1b, produce normally closed signal; And when carrying out time-based maintenance or maintenance, when 2 rotations were to the upright position around the shaft with baffle plate, the moving contact of normally closed type relay 12 no longer contacted with the first of connector 4 or over cap 1b, and normally closed type relay 12 produces often opens signal.Thus, whether control unit 13 can produce control signal according to the switching signal deciding that relay 12 produces.When control unit 13 is received as when often opening signal, do not allow to produce control signal, baffle-plate driving unit 11 also just can't drive baffle plate and carry out horizontal movement, thereby can guarantee that baffle plate can under plumbness misoperation not take place.
In another embodiment of the present invention, baffle position sensing unit 12 is pressure sensor, is installed in one of them of two surfaces that the over cap contact site contacts with connector.When baffle plate 1 was horizontal, the contact site of over cap contacted with connector 4, and pressure sensor 12 produces first piezoelectric signal.If securing member is removed baffle plate 2 rotations around the shaft, then the first of over cap will upwards lift counterclockwise, and pressure sensor 12 will produce second piezoelectric signal.Control unit 13 can judge according to the variation of piezoelectric signal (for example by piezoelectric signal and a threshold ratio) whether baffle plate is horizontal, and determines that then whether producing control signal carries out corresponding control with the motion to the baffle plate horizontal direction.Certainly, pressure sensor 12 also can be installed on connector 4 with the bottom of over cap contact portion and near rotating shaft 2 places, can produce different piezoelectric signals according to the change in location of baffle plate equally.
In another embodiment of the present invention; baffle position sensing unit 12 is a pair of infrared sensor; comprise infrared emission end and infrared receiving terminal; one of them is installed in baffle body 1a bottom or baffle plate over cap 1b away from the bottom (being the bottom of second portion) of contact site; another infrared sensor is installed on the inwall of boiler tube below loading area, is preferably on the inwall near the loading area top.2 rotations are around the shaft rotated to the upright position from horizontal level if securing member is removed baffle plate, then the infrared sensing signal of infrared sensor 12 receiving terminals generation can change, whether control unit 13 can be judged the change in location of baffle plate according to the sensing signal of this variation and determine will send to control signal to baffle-plate driving unit 11, then corresponding control be carried out in the motion of baffle plate horizontal direction.
Certainly; above-mentioned multiple baffle position sensing unit only is embodiment; also can adopt other sensor elements well-known to those skilled in the art as the baffle position sensing unit among the present invention, as long as position that can the sensing baffle plate and produce sensing signal all within protection scope of the present invention.
Next, please refer to Fig. 4, it is depicted as boiler tube barrier driving of the present invention system and carries out initialized method, wherein carries out initialization and comprises that driving described baffle plate carries out the motion of horizontal direction, and described method specifically comprises:
The position of sensing baffle plate also judges whether it is horizontal;
If described baffle plate is horizontal, then described drive system is carried out initialization and make baffle plate carry out the motion of horizontal direction;
If baffle plate is not horizontal, then described drive system is carried out initialization and warning.
In sum, a kind of boiler tube barrier driving system and initialized method thereof proposed by the invention, variation by automatic detection baffle position, and as judging whether decision can carry out baffle plate horizontal movement or system initialization action, the situation that can avoid being in the baffle plate misoperation of plumbness and cause baffle plate and loading area inwall to bump has been guaranteed the fail safe of operation.
Though the present invention discloses as above with preferred embodiment; right described many embodiment only give an example for convenience of explanation; be not in order to limit the present invention; those skilled in the art can do some changes and retouching without departing from the spirit and scope of the present invention, and the protection range that the present invention advocates should be as the criterion so that claims are described.
Claims (10)
1. the drive system of a boiler tube baffle plate; comprise baffle plate and control the control device that described baffle plate moves; wherein said baffle plate is positioned at described boiler tube bottom in order to seal described boiler tube; it comprises that baffle body and horizontal fixed are in the over cap of described baffle body bottom; it is characterized in that described control device comprises:
Baffle-plate driving unit is in order to drive the motion that described baffle plate carries out horizontal direction according to control signal; Wherein, described baffle-plate driving unit comprises connector, and described over cap is articulated in described connector by rotating shaft; The bottom surface of described over cap has and the contacted contact site of described connector; Described contact site is fixedlyed connected with described connector by securing member and described baffle plate is horizontal;
The baffle position sensing unit is in order to the position of the described baffle plate of sensing and produce sensing signal; And
Control unit links to each other with described baffle position sensing unit and described baffle-plate driving unit, in order to determine whether to send described control signal according to described sensing signal.
2. the drive system of boiler tube baffle plate according to claim 1 is characterized in that, described baffle position sensing unit is relay open in usual.
3. the drive system of boiler tube baffle plate according to claim 2; it is characterized in that; described relay open in usual is located at described connector bottom and close described rotating shaft place; when described baffle plate around described rotating shaft rotation during to the upright position, the moving contact of described relay open in usual contacts with described over cap.
4. the drive system of boiler tube baffle plate according to claim 1 is characterized in that, described baffle position sensing unit is the normally closed type relay.
5. the drive system of boiler tube baffle plate according to claim 4 is characterized in that, described normally closed type relay is located at described contact site and the contacted surface of described connector or described connector and the contacted surface of described contact site.
6. the drive system of boiler tube baffle plate according to claim 1 is characterized in that, described baffle position sensing unit is pressure sensor.
7. the drive system of boiler tube baffle plate according to claim 6, it is characterized in that described pressure sensor is located at described contact site and the contacted surface of described connector or described connector and close described rotating shaft place in the contacted surface of described contact site or described connector bottom.
8. the drive system of boiler tube baffle plate according to claim 1 is characterized in that, described baffle position sensing unit is a pair of infrared sensor.
9. the drive system of boiler tube baffle plate according to claim 8 is characterized in that, described a pair of infrared sensor is located at described baffle body bottom or described over cap bottom surface away from described contact site place, and on the inwall of the loading area of described boiler tube below.
10. the drive system according to each described boiler tube baffle plate of claim 1～9 is carried out initialized method, wherein carrying out initialization comprises and sends described control signal to drive the motion that described baffle plate carries out horizontal direction, it is characterized in that described method comprises:
The position of the described baffle plate of sensing is to judge whether described baffle plate is horizontal;
If described baffle plate is horizontal, then described drive system is carried out initialization and make described baffle plate carry out the motion of horizontal direction; Otherwise cancellation is carried out initialization to described drive system, and reports to the police.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310215051.1A CN103295929B (en) | 2013-05-31 | 2013-05-31 | The drive system of boiler tube baffle plate and initial method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310215051.1A CN103295929B (en) | 2013-05-31 | 2013-05-31 | The drive system of boiler tube baffle plate and initial method thereof |
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| Publication Number | Publication Date |
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| CN103295929A true CN103295929A (en) | 2013-09-11 |
| CN103295929B CN103295929B (en) | 2016-01-27 |
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| CN201310215051.1A Active CN103295929B (en) | 2013-05-31 | 2013-05-31 | The drive system of boiler tube baffle plate and initial method thereof |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010038002A (en) * | 1999-10-21 | 2001-05-15 | 박종섭 | Apparatus for leveling wafer boat |
| US20070080156A1 (en) * | 2005-10-04 | 2007-04-12 | Samsung Electronics Co., Ltd. | Heat treatment equipment and method of driving the same |
| US20070224712A1 (en) * | 2006-03-24 | 2007-09-27 | Tokyo Electron Limited | Method of monitoring a semiconductor processing system using a wireless sensor network |
| US20100162952A1 (en) * | 2005-09-27 | 2010-07-01 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus |
| CN201942793U (en) * | 2011-01-18 | 2011-08-24 | 山东科芯电子有限公司 | High temperature diffusion furnace tube of semiconductor |
-
2013
- 2013-05-31 CN CN201310215051.1A patent/CN103295929B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010038002A (en) * | 1999-10-21 | 2001-05-15 | 박종섭 | Apparatus for leveling wafer boat |
| US20100162952A1 (en) * | 2005-09-27 | 2010-07-01 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus |
| US20070080156A1 (en) * | 2005-10-04 | 2007-04-12 | Samsung Electronics Co., Ltd. | Heat treatment equipment and method of driving the same |
| US20070224712A1 (en) * | 2006-03-24 | 2007-09-27 | Tokyo Electron Limited | Method of monitoring a semiconductor processing system using a wireless sensor network |
| CN201942793U (en) * | 2011-01-18 | 2011-08-24 | 山东科芯电子有限公司 | High temperature diffusion furnace tube of semiconductor |
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| Publication number | Publication date |
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| CN103295929B (en) | 2016-01-27 |
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