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CN102931873B - A kind of small all-in-one parallel rotation ultrasonic motor - Google Patents

A kind of small all-in-one parallel rotation ultrasonic motor Download PDF

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CN102931873B
CN102931873B CN201210433818.3A CN201210433818A CN102931873B CN 102931873 B CN102931873 B CN 102931873B CN 201210433818 A CN201210433818 A CN 201210433818A CN 102931873 B CN102931873 B CN 102931873B
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langevin
composite
stator
mover
parallel
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CN102931873A (en
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姚志远
胡正旭
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Nanjing University of Aeronautics and Astronautics
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Abstract

本发明涉及一种小型一体式并联旋转超声电机,属于超声电机技术领域。包括定子(1)和作为轴承的动子(2),所述定子(1)由N(N≥3)个复合振子并联组成,所述复合振子通过柔性支持元件相连接,且复合振子围绕动子沿周向对称放置;所述每个复合振子由两个兰杰文振子成一定角度互相交叉构成;同时该两个兰杰文振子头部联为一体形成复合振子的驱动足(13),且所述兰杰文振子均在同一个平面上;每个兰杰文振子由弹性体(11)以及压电陶瓷片(12)组成,所述压电陶瓷片的正极朝外,负极指向弹性体(11)的基体表面。本发明不仅能量密度高、结构紧凑,而且在纵向尺寸上很薄的情况下,仍可以提供较大的输出力矩。

The invention relates to a small integrated parallel rotating ultrasonic motor, which belongs to the technical field of ultrasonic motors. It includes a stator (1) and a mover (2) as a bearing. The stator (1) is composed of N (N≥3) composite oscillators connected in parallel. The composite oscillators are connected through flexible support elements, and the composite oscillators surround the moving The sons are placed symmetrically along the circumferential direction; each composite vibrator is composed of two Langevin vibrators intersecting each other at a certain angle; at the same time, the heads of the two Langevin vibrators are joined together to form the driving foot (13) of the composite vibrator, And the Langevin vibrators are all on the same plane; each Langevin vibrator is composed of an elastomer (11) and a piezoelectric ceramic sheet (12), the positive electrode of the piezoelectric ceramic sheet faces outward, and the negative electrode points to the elastic The substrate surface of body (11). The invention not only has high energy density and compact structure, but also can provide relatively large output torque in the case of being very thin in the longitudinal dimension.

Description

一种小型一体式并联旋转超声电机A Small Integrated Parallel Rotating Ultrasonic Motor

技术领域technical field

本发明涉及一种由多个复合振子一体式周向对称并联而成的旋转超声电机,属超声电机领域。The invention relates to a rotary ultrasonic motor which is composed of a plurality of composite oscillators which are integrally connected in parallel circumferentially and symmetrically, and belongs to the field of ultrasonic motors.

背景技术Background technique

直线超声电机是20世纪80年代迅速发展和应用的一种新型微电机,它利用压电元件的逆压电效应和弹性体的超声振动,并通过定子和动子之间的摩擦作用,把弹性体的微幅振动转换成动子的宏观直线(旋转)运动,直接推动负载。目前国内直线超声电机的发展很快。在中国专利网上,有多项关于直线超声电机的专利。这其中,杆结构直线超声电机备受关注,这是因为该电机的定子是由兰杰文振子构成的。兰杰文振子利用纵振,有明确的节点。它具有很高的能量传输效率,并有利于夹持。专利【200810124426.2】提出基于连续变幅杆原理的K形直线超声电机,该电机的定子有2个对称的兰杰文振子构成。专利【201010556088.7】提出基于直线超声电机的柔性夹持技术,它是通过柔性圆弧片段将所有压电振子连接起来,并通过柔性圆弧片段将振子与带有圆形通孔的固定端相连接,从而简化了的夹持结构。随着近年来直线超声电机在机器人、航空航天领域等领域的应用研究,直线超声电机的问题也慢慢暴露出来,其中之一就是单个电机的输出力不足,在某些需要大输出力的应用场合不能满足要求,这就促使了对大推力直线超声电机的研究。目前对于大推力直线超声电机的研究主要集中在两个方面:The linear ultrasonic motor is a new type of micro-motor developed and applied rapidly in the 1980s. It uses the inverse piezoelectric effect of the piezoelectric element and the ultrasonic vibration of the elastic body, and through the friction between the stator and the mover, the elastic The micro-vibration of the body is converted into the macroscopic linear (rotational) motion of the mover, which directly pushes the load. At present, the development of domestic linear ultrasonic motor is very fast. On the China Patent Network, there are many patents on linear ultrasonic motors. Among them, the rod structure linear ultrasonic motor has attracted much attention because the stator of the motor is composed of Langevin oscillators. The Langevin oscillator uses longitudinal vibration and has clear nodes. It has high energy transfer efficiency and facilitates gripping. The patent [200810124426.2] proposes a K-shaped linear ultrasonic motor based on the principle of a continuous horn. The stator of the motor is composed of two symmetrical Langevin vibrators. The patent [201010556088.7] proposes a flexible clamping technology based on linear ultrasonic motors, which connects all piezoelectric vibrators through flexible arc segments, and connects the vibrators to fixed ends with circular through holes through flexible arc segments , thus simplifying the clamping structure. With the application research of linear ultrasonic motors in robotics, aerospace and other fields in recent years, the problems of linear ultrasonic motors have gradually been exposed. One of them is that the output force of a single motor is insufficient. In some applications that require large output force Occasions cannot meet the requirements, which prompts the research on high-thrust linear ultrasonic motors. At present, the research on high-thrust linear ultrasonic motors mainly focuses on two aspects:

一是增大直线超声电机的体积。但根据直线超声电机的特性,在小体积的情况下电机才能有较大的优势,电机体积变大之后输出力并没有提高很多,而且超声电机应用的场合一般对体积都有所限制,所以仅仅增加电机的体积并不能解决问题。One is to increase the volume of the linear ultrasonic motor. However, according to the characteristics of the linear ultrasonic motor, the motor can have a greater advantage in the case of a small volume. After the motor volume becomes larger, the output force does not increase much, and the application of the ultrasonic motor generally has restrictions on the volume, so only Increasing the size of the motor does not solve the problem.

二是将直线超声电机并联使用。在保持单个电机体积不变的情况下,增加驱动电机的数目来提高整体输出力能比增加电机体积获得的效果要好。目前直线超声电机并联方式多采用由多个电机小平台组装成并联平台,装夹繁琐,推重比低。The second is to use the linear ultrasonic motor in parallel. In the case of keeping the volume of a single motor unchanged, increasing the number of driving motors to improve the overall output force can be better than increasing the volume of the motor. At present, the parallel connection of linear ultrasonic motors mostly adopts the assembly of multiple small motor platforms into a parallel platform, which is cumbersome to clamp and has a low thrust-to-weight ratio.

直线超声电机的并联性能研究对直线超声电机的要求较高,国内由于超声电机的研究起步较晚,所以目前这类研究以国外为主。1998年,Kurosawa提出的一种直线型超声电机并联方案,该方案利用三个直线超声电机同时驱动一个大圆盘,应用于大型天文望远镜的精密驱动系统中;德国Mracek等人对直线超声电机如何协调一致的运行也做了一些初步的研究,主要利用改变并联直线超声电机的驱动方式,研究直线超声电机在并联条件下的整体输出新能。The research on the parallel performance of linear ultrasonic motors has higher requirements on linear ultrasonic motors. Since the domestic research on ultrasonic motors started relatively late, this kind of research is currently dominated by foreign countries. In 1998, Kurosawa proposed a linear ultrasonic motor parallel scheme, which uses three linear ultrasonic motors to drive a large disc at the same time, and is used in the precision drive system of large astronomical telescopes; German Mracek et al. Coordinated operation has also done some preliminary research, mainly by changing the driving mode of parallel linear ultrasonic motors to study the overall output new energy of linear ultrasonic motors under parallel conditions.

国内对于超声电机的并联研究利用了目前比较成熟的60行波电机,该方案将电机由单定子、单转子改为双定子、双转子并联输出,通过实验得出与相同尺寸的单定子旋转型行波超声电机性能相比,扭矩和空转速度都提高了一倍多。Domestic research on parallel connection of ultrasonic motors uses the relatively mature 60 traveling wave motors. This scheme changes the motor from single stator and single rotor to dual stators and dual rotors in parallel output. Through experiments, it is obtained that the same size single stator rotary Compared with the performance of traveling wave ultrasonic motor, the torque and idling speed are more than doubled.

尽管目前对于超声电机并联有了一定的研究和应用,但均不够系统和深入,特别是目前还没有系统的理论解决多个直线超声电机分体式并联效率不够理想的问题。Although there has been some research and application on the parallel connection of ultrasonic motors, none of them are systematic and in-depth. In particular, there is no systematic theory to solve the problem of unsatisfactory efficiency of split parallel connection of multiple linear ultrasonic motors.

发明内容Contents of the invention

本发明针对上述问题的不足,提出一种高能量密度、多振子一体式并联旋转超声电机,在纵向尺寸上很薄的情况下,仍可以提供较大的输出力矩的小型一体式并联旋转超声电机。The present invention aims at the deficiencies of the above problems, and proposes a high energy density, multi-vibrator integrated parallel rotary ultrasonic motor, which can still provide a small integrated parallel rotary ultrasonic motor with a relatively large output torque in the case of a very thin longitudinal dimension. .

本发明为解决上述技术问题提出的技术方案是:一种小型一体式并联旋转超声电机,包括定子(1)和作为轴承的动子(2),所述定子由N(N≥3)个复合振子并联组成,所述复合振子通过柔性支持元件(3)相连接,且复合振子围绕动子(2)沿周向对称放置;所述每个复合振子由两个兰杰文振子成一定角度互相交叉构成;同时该两个兰杰文振子头部联为一体形成复合振子的驱动足(13),且所述兰杰文振子均在同一个平面上;每个兰杰文振子由弹性体(11)以及压电陶瓷片(12)组成,所述压电陶瓷片的正极朝外,负极指向弹性体(11)的基体表面。The technical solution proposed by the present invention to solve the above technical problems is: a small-sized integrated parallel rotary ultrasonic motor, including a stator (1) and a mover (2) as a bearing, and the stator is composed of N (N≥3) composite The oscillators are connected in parallel, the composite oscillators are connected through flexible support elements (3), and the composite oscillators are placed symmetrically around the mover (2) along the circumferential direction; each composite oscillator consists of two Langevin oscillators at a certain angle to each other The two Langevin vibrator heads are combined to form the driving foot (13) of the composite vibrator at the same time, and the Langevin vibrators are all on the same plane; each Langevin vibrator is composed of an elastic body ( 11) and a piezoelectric ceramic sheet (12), the positive electrode of the piezoelectric ceramic sheet faces outward, and the negative electrode points to the surface of the base body of the elastomer (11).

优选的:所述定子采用同频激励的并联激励方式。Preferably: the stator is excited in parallel with the same frequency.

优选的:所述各复合振子的同一侧的兰杰文振子为一组,两组陶瓷片分别施加同频率,等电压,π/2相位差的正弦激励信号,同时激发出电机的纵振模态与弯振模态。Preferably: the Langevin vibrator on the same side of each composite vibrator is a group, and the two groups of ceramic plates are respectively applied with sinusoidal excitation signals of the same frequency, equal voltage, and π/2 phase difference, and simultaneously excite the longitudinal vibration mode of the motor state and bending mode.

优选的:所述柔性支持元件由用于固定定子及施加预压力的柔性铰链(31)和用于固定整个电机的固定端(32)构成;所述柔性铰链(31)设计在弹性体(11)纵振节面处,而所述固定端设置于所述柔性铰链的外侧上,同时所述固定端之间相间有一个复合振子。Preferably: the flexible supporting element is composed of a flexible hinge (31) for fixing the stator and applying preload and a fixed end (32) for fixing the entire motor; the flexible hinge (31) is designed on the elastic body (11 ) at the longitudinal vibration node, and the fixed end is arranged on the outer side of the flexible hinge, and there is a composite vibrator alternately between the fixed ends.

优选的:所述N个驱动足在以动子运动方向的平面内形成一个圆,且所述动子的直径大于该圆的直径。Preferably: the N driving feet form a circle in the plane with the moving direction of the mover, and the diameter of the mover is larger than the diameter of the circle.

优选的:所述每个复合振子的两个兰杰文振子的交叉角度在0°-180°之间。Preferably: the intersection angle of the two Langevin oscillators of each composite oscillator is between 0°-180°.

本发明的一种小型一体式并联旋转超声电机,相比现有技术,具有以下有益效果:由于本发明包括定子(1)和作为轴承的动子(2),所述定子由N(N≥3)个复合振子并联组成,所述复合振子通过柔性支持元件(3)相连接,且复合振子围绕动子(2)沿周向对称放置,同时对直线超声电机来说,主要有板结构和杆结构两种形式。板结构直线超声电机为扁平形式,结构简单,在特定场合能发挥作用。杆结构直线超声电机利用兰杰文振子可以产生大的输出力和高的输出效率。重要的是,兰杰文振子有明确的纵振节点,有利于电机的夹持和预压力加载。因此本发明结合这两种直线超声电机的特点,提出利用多个兰杰文振子设计直线超声电机。一方面该电机的主体结构为杆结构的兰杰文振子,另一方面其外观结构为环面形板结构,因而本发明具有以下特点:(1)多个复合振子周向并联,横向结构紧凑,空间利用率高;(2)一体式并联结构保证了并联电机具有相近激励频率,提高并联效率,具有更优的输出特性;(3)周向对称排布保证了结构的稳定性及所施加的预压力的均匀性,纵向尺寸与单个复合振子相同。综上所述本发明具有结构紧凑,空间利用率高;并联效率优,力矩输出大;性能稳定,纵向尺寸薄的突出优点。A small-sized integrated parallel rotary ultrasonic motor of the present invention has the following beneficial effects compared with the prior art: since the present invention includes a stator (1) and a mover (2) as a bearing, the stator consists of N (N≥ 3) Composite vibrators are connected in parallel, the composite vibrators are connected through flexible supporting elements (3), and the composite vibrators are placed symmetrically around the mover (2) along the circumferential direction. Meanwhile, for linear ultrasonic motors, there are mainly plate structures and There are two types of rod structure. The plate structure linear ultrasonic motor is flat and simple in structure, and can play a role in specific occasions. The rod structure linear ultrasonic motor can generate large output force and high output efficiency by using the Langevin vibrator. The important thing is that the Langevin vibrator has a clear longitudinal vibration node, which is beneficial to the clamping and preloading of the motor. Therefore, the present invention combines the characteristics of these two linear ultrasonic motors, and proposes to design a linear ultrasonic motor by using multiple Langevin vibrators. On the one hand, the main structure of the motor is a Langevin vibrator with a rod structure, and on the other hand, its appearance structure is a ring-shaped plate structure, so the present invention has the following characteristics: (1) Multiple composite vibrators are connected in parallel in the circumferential direction, and the horizontal structure is compact , high space utilization; (2) The integrated parallel structure ensures that the parallel motors have similar excitation frequencies, improves parallel efficiency, and has better output characteristics; (3) The circumferential symmetrical arrangement ensures the stability of the structure and the applied The uniformity of the preload, the longitudinal dimension is the same as that of a single composite vibrator. In summary, the present invention has the outstanding advantages of compact structure, high space utilization rate, excellent parallel connection efficiency, large torque output, stable performance and thin longitudinal dimension.

附图说明Description of drawings

图1是小型一体式并联旋转超声电机结构示意图。Figure 1 is a schematic diagram of the structure of a small integrated parallel rotating ultrasonic motor.

图2是单个定子压电陶瓷片的极化以及信号加载示意图.图2(b)是图2(a)的k-k剖视图。Figure 2 is a schematic diagram of polarization and signal loading of a single stator piezoelectric ceramic sheet. Figure 2(b) is a k-k cross-sectional view of Figure 2(a).

图3是椭圆抛物面形直线超声电机系统工作模态的示意图。其中,图3(a)是定子对称工作模态的示意图,图3(b)定子反对称工作模态的示意图。Fig. 3 is a schematic diagram of the working mode of the elliptical parabolic linear ultrasonic motor system. Wherein, FIG. 3( a ) is a schematic diagram of a stator in a symmetrical working mode, and FIG. 3( b ) is a schematic diagram of a stator in an antisymmetrical working mode.

图中标号名称:1为定子,2为动子,3为柔性支持元件,11为弹性体,12为陶瓷片,13为驱动足,31为柔性铰链,32为固定端。The names of the symbols in the figure: 1 is the stator, 2 is the mover, 3 is the flexible supporting element, 11 is the elastic body, 12 is the ceramic sheet, 13 is the driving foot, 31 is the flexible hinge, and 32 is the fixed end.

具体实施方式detailed description

附图非限制性地公开了本发明一个优选实施例的结构示意图,以下将结合附图详细地说明本发明的技术方案。The accompanying drawing discloses a schematic structural view of a preferred embodiment of the present invention without limitation, and the technical solution of the present invention will be described in detail below in conjunction with the accompanying drawings.

实施例Example

本实施例的一种小型一体式并联旋转超声电机如图1-3所示,包括定子1和作为轴承的动子2,所述定子由N个复合振子并联组成,N≥3,所述复合振子通过柔性支持元件3相连接,且复合振子围绕动子2沿周向对称放置。因此所述N个复合振子对动子的力自然平衡,整个定子可通过线切割方式一体化加工,保证对各复合振子实现夹持且又不干扰其振动模态频率,还可使定子对动子有一定的预压力。所述每个复合振子由两个兰杰文振子成一定角度互相交叉构成,所述每个复合振子的两个兰杰文振子的交叉角度在0°-180°之间;同时该两个兰杰文振子头部联为一体形成复合振子的驱动足13,且所述兰杰文振子均在同一个平面上;每个兰杰文振子由弹性体11以及压电陶瓷片12组成,所述压电陶瓷片的正极朝外,负极指向弹性体11的基体表面。A small integrated parallel rotary ultrasonic motor of this embodiment is shown in Figure 1-3, including a stator 1 and a mover 2 as a bearing, the stator is composed of N composite oscillators connected in parallel, N≥3, the composite The vibrator is connected through the flexible support element 3, and the composite vibrator is placed symmetrically around the mover 2 in the circumferential direction. Therefore, the force of the N composite vibrators on the mover is naturally balanced, and the entire stator can be processed in an integrated manner by wire cutting to ensure that the clamping of each composite vibrator is achieved without disturbing its vibration modal frequency, and the stator can also be made to move. The sub has a certain pre-pressure. Each composite vibrator is composed of two Langevin vibrators crossing each other at a certain angle, and the intersection angle of the two Langevin vibrators of each composite vibrator is between 0°-180°; The heads of the Jiewen vibrator are connected together to form the driving foot 13 of the composite vibrator, and the Langevin vibrators are all on the same plane; each Langevin vibrator is composed of an elastic body 11 and a piezoelectric ceramic sheet 12, the The positive electrode of the piezoelectric ceramic sheet faces outward, and the negative electrode points to the surface of the base body of the elastic body 11 .

所述定子采用同频激励的并联激励方式。即所述各复合振子的同一侧的兰杰文振子为一组,也就是说由于所述复合振子由两个兰杰文振子构成,因此可将这两个兰杰文振子沿定子的顺时针方向分为第一兰杰文振子和第二兰杰文振子,所有的第一兰杰文振子构成一组,而剩余的第二兰杰文振子构成一组,两组陶瓷片分别施加同频率,等电压,π/2相位差的正弦激励信号,同时激发出电机的纵振模态与弯振模态。The stator adopts the parallel excitation method of the same frequency excitation. That is, the Langevin oscillators on the same side of each composite oscillator are a group, that is to say, since the composite oscillator is composed of two Langevin oscillators, the two Langevin oscillators can be arranged clockwise along the stator The direction is divided into the first Langevin oscillator and the second Langevin oscillator. All the first Langevin oscillators form a group, and the remaining second Langevin oscillators form a group. The two groups of ceramic plates are respectively applied with the same frequency. , Equal voltage, sinusoidal excitation signal with π/2 phase difference, simultaneously excite the longitudinal vibration mode and bending vibration mode of the motor.

所述柔性支持元件由用于固定定子及施加预压力的柔性铰链31和用于固定整个电机的固定端32构成;所述柔性铰链31设计在弹性体11纵振节面处,而所述固定端设置于所述柔性铰链的外侧上,同时所述固定端之间相间有一个复合振子;固定端为带有通孔的矩形夹持件,通过螺钉将电机装配在外部装置上。The flexible support element is composed of a flexible hinge 31 for fixing the stator and applying a preload and a fixed end 32 for fixing the entire motor; the flexible hinge 31 is designed at the longitudinal vibration node of the elastic body 11, and the fixed The ends are arranged on the outer side of the flexible hinge, and there is a composite vibrator between the fixed ends; the fixed end is a rectangular clamp with a through hole, and the motor is assembled on the external device through screws.

所述N个驱动足在以动子运动方向的平面内形成一个圆,且所述动子的直径大于该圆的直径,这样就可以通过柔性铰链的微小变形施加预压力。因此此电机并没有专门的施加预压力的装置,结构较为简单。The N driving feet form a circle in the plane with the moving direction of the mover, and the diameter of the mover is larger than the diameter of the circle, so that pre-pressure can be applied through the slight deformation of the flexible hinge. Therefore, this motor does not have a special device for applying preload, and its structure is relatively simple.

图2为压电陶瓷片的极化及信号加载示意图。每个复合振子由两个兰杰文振子以一定角度交叉组成,施加相位差π/2的同频正弦信号,利用压电陶瓷片d31效应同时激励两个压电振子来分别激发定子的两个振动模态,这两个振动模态的叠加使得驱动足端面上各质点产生椭圆运动来推动动子作连续旋转运动。当激励信号相反时,即可实现动子的反方向直线运动。N个复合振子采用相同的驱动方式(同频、同相),驱动动子向同一方向运动,提高了输出力和输出功率,并提高了空间利用率。Fig. 2 is a schematic diagram of the polarization and signal loading of the piezoelectric ceramic sheet. Each composite vibrator is composed of two Langevin vibrators crossing at a certain angle, applying a sinusoidal signal of the same frequency with a phase difference of π/2, and using the d 31 effect of the piezoelectric ceramic sheet to simultaneously excite the two piezoelectric vibrators to respectively excite the two piezoelectric vibrators of the stator. The superposition of these two vibration modes makes the particles on the end surface of the driving foot produce elliptical motion to push the mover to perform continuous rotational motion. When the excitation signals are opposite, the reverse linear motion of the mover can be realized. The N composite oscillators adopt the same driving mode (same frequency, same phase) to drive the movers to move in the same direction, which improves the output force and output power, and improves the space utilization rate.

上述所述小型一体式并联旋转超声电机的工作模态:每个复合振子的两个工作模态如图3所示。复合振子的两个兰杰文振子做同相的纵向振动时,激发复合振子的对称模态;两个兰杰文振子做互为反相的纵向振动时,激发复合振子的反对称模态。采用两个相位差为π/2的正弦信号同时激励复合振子的两个兰杰文振子,激发复合振子两个同频相位差π/2的振动,使复合振子上驱动足质点做椭圆运动。在电机工作时,N个复合振子采用相同的驱动方式(同频、同相),驱动动子向同一方向运动。动子为圆柱形结构,在驱动足处与复合振子相接触。n个驱动足在以动子运动方向的平面内形成一个圆,圆柱形动子的直径大于该圆的直径。由于圆柱形动子的直径大于该圆的直径,所以在定子和动子之间产生预压力。图3a说明复合振子的两个压电振子做同向的纵向伸缩振动,在驱动足处合成为上下运动。图3b说明复合振子的两个压电振子做反向的纵向伸缩振动,在驱动足处合成为左右运动。The working modes of the small integrated parallel rotating ultrasonic motor mentioned above: the two working modes of each composite vibrator are shown in Fig. 3 . When the two Langevin oscillators of the composite oscillator vibrate longitudinally in the same phase, the symmetrical mode of the composite oscillator is excited; when the two Langevin oscillators vibrate in opposite phases to each other, the antisymmetric mode of the composite oscillator is excited. Two sine signals with a phase difference of π/2 are used to simultaneously excite the two Langevin oscillators of the composite oscillator, and two vibrations of the composite oscillator with the same frequency and a phase difference of π/2 are used to drive the foot mass on the composite oscillator to perform elliptical motion. When the motor is working, the N composite oscillators adopt the same driving mode (same frequency, same phase) to drive the movers to move in the same direction. The mover is a cylindrical structure, which is in contact with the compound vibrator at the driving foot. The n driving feet form a circle in the plane with the moving direction of the mover, and the diameter of the cylindrical mover is larger than the diameter of the circle. Since the diameter of the cylindrical mover is larger than the diameter of the circle, a preload is created between the stator and the mover. Figure 3a shows that the two piezoelectric vibrators of the composite vibrator perform longitudinal stretching vibration in the same direction, which is synthesized into up and down motion at the driving foot. Figure 3b shows that the two piezoelectric vibrators of the composite vibrator do reverse longitudinal stretching vibrations, which are synthesized into left and right motions at the driving feet.

上面结合附图所描述的本发明优选具体实施例仅用于说明本发明的实施方式,而不是作为对前述发明目的和所附权利要求内容和范围的限制,凡是依据本发明的技术实质对以上实施例所做的任何简单修改、等同变化与修饰,均仍属本发明技术和权利保护范畴。The preferred specific embodiments of the present invention described above in conjunction with the accompanying drawings are only used to illustrate the implementation of the present invention, rather than as a limitation to the foregoing invention purpose and the content and scope of the appended claims. Any simple modifications, equivalent changes and modifications made in the embodiments still belong to the technical and rights protection scope of the present invention.

Claims (4)

1. a small all-in-one parallel rotation ultrasonic motor, comprise stator (1) and the mover (2) as bearing, it is characterized in that: described stator is composed in parallel by N number of composite oscillator, N >=3, described composite oscillator is connected by flexible supporting element (3), and composite oscillator is placed around mover (2) is circumferentially symmetrical simultaneously; Described each composite oscillator is made up of two angled crossing one another of Langevin-type transducer; These two Langevin-type transducer heads combine as a whole driving foot (13) forming composite oscillator simultaneously, and described Langevin-type transducer is all in same plane; Each Langevin-type transducer is made up of elastomer (11) and piezoelectric ceramic piece (12), and outwardly, negative pole points to the matrix surface of elastomer (11) to the positive pole of described piezoelectric ceramic piece; Described stator adopts the parallel connection excitement mode with excitation frequently; Described flexible supporting element is by the flexible hinge (31) for fixed stator and applying precompression and form for the stiff end (32) of fixing whole motor; Described flexible hinge (31) design is at elastomer (11) longitudinal vibration nodal section place, and described stiff end is arranged on the outside of described flexible hinge, and simultaneously alternate between described stiff end have a composite oscillator.
2. small all-in-one parallel rotation ultrasonic motor according to claim 1, it is characterized in that: the Langevin-type transducer of the same side of described each composite oscillator is one group, two groups of potsherds apply same frequency respectively, Deng voltage, the sinusoidal excitation signal of pi/2 phase difference, inspires longitudinal vibration mode and the bending vibration modes of motor simultaneously.
3. small all-in-one parallel rotation ultrasonic motor according to claim 1, is characterized in that: described N number of driving foot is to form a circle in the plane of the mover direction of motion, and the diameter of described mover is greater than this diameter of a circle.
4. small all-in-one parallel rotation ultrasonic motor according to claim 1, is characterized in that: the intersecting angle of two Langevin-type transducers of described each composite oscillator is between 0 °-180 °.
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