CN101329365B

CN101329365B - Probe clip and combined assembly method

Info

Publication number: CN101329365B
Application number: CN200710112429XA
Authority: CN
Inventors: 王正仪
Original assignee: JUNYANG ELECTRONIC CO Ltd
Current assignee: JUNYANG ELECTRONIC CO Ltd
Priority date: 2007-06-21
Filing date: 2007-06-21
Publication date: 2010-09-22
Anticipated expiration: 2027-06-21
Also published as: CN101329365A

Abstract

The invention provides a probe card and a combination assembly method thereof, comprising a substrate, a plurality of testing needles, a fixed ring and a fixed part; wherein, the fixed ring is provided with a hole; the external wall of the bottom of the fixed ring is used for being combined with the testing needle to arrange the needle on the wall; furthermore, after combination, the fixed ring and the testing needle form a distance so as to lead the end of the testing needle body to be arranged on a position below the hole and the front end thereof to form electric connection with the substrate or external wires when the fixed ring passes through the hole of the substrate; the fixed part is used for being combined on the hole of the fixed ring; furthermore, the end of the fixed part is convex out of the hole, and the end of the fixed part and the end of the testing needle form micro strip line relationship.

Description

Probe and combine and assemble method thereof

Technical field

The present invention relates to a kind of probe and combine and assemble method thereof, be meant a kind of design of passing through a set collar and fixture especially, and it makes probe card configuration and the combine and assemble method thereof that forms microstrip line relation (micro strip line) with the end of testing needle, it is simple in structure, cost is low, is applicable to that the probe card of measuring high frequency range signal uses.

Background technology

In semiconductor factory, when wafer has finished all processing procedures, all can carry out testing electrical property (the wafer testing of wafer usually; WAT), to confirm the electrically whether normal of described product wafer; And when generally wafer being carried out testing electrical property, can pass through a probe (probe card) comes as the measurement interface, to guarantee the quality of processing procedure, detects just can deliver after qualified and encapsulates (package) step and each property detection (final test).

As shown in Figure 5, described probe is a printed circuit board (PCB) A, it has the testing needle C (probe pins) that many circuit are electrically connected with each circuit, wherein said probe is provided with a center pit B (centralaperture), described several testing needles C is combined on the zone, outside of bottom surface of probe, and in downward extension mode, along a vergence direction and from the peripheral region towards the center pit B of described probe, and the end of each testing needle C is positioned on the lower position of described center pit B just, and each needle point and the circuit corresponding with it promptly constitute a passage, when desiring to carry out the electrical measurement of wafer, only need the specific contact point of the accurate place of all needle points on wafer on the probe, and signal is measured in feeding, whether the electric characteristics that can judge described wafer is normal, yet when measuring the signal frequency gets higher, speed increases, and promptly need consider the problem of impedance matching, and the manufacture method of conventional probe then can't satisfy this demand.

Now in the design of high frequency probe card, be to measure, but because the volume of coaxial cable own is thicker to utilize concentric cable to replace conventional probe, can't be on limited substrate space design and fabrication, and for the operator, it not is very convenient adjusting with measuring.In addition, industry is also developed a kind of film probe, carries out the measurement of high-frequency signals to replace concentric cable, though it can reach required purpose, only must increase loaded down with trivial details steps such as the cover that opens the light on making, and its cost higher also be a problem.

Summary of the invention

Fundamental purpose of the present invention provides a kind of probe and combine and assemble method thereof, by the design of a set collar and fixture, and makes the end of itself and testing needle form microstrip line relation (micro strip line).

For achieving the above object, the technical solution used in the present invention comprises:

A kind of probe is characterized in that, it comprises: one has the substrate of electronic circuit, and described substrate is provided with a hole; Several testing needles, described testing needle is provided with a body; One set collar, its central part has a perforated holes, be combined with described several testing needles on the described set collar bottom outer wall, and the set collar bottom has preset distance with testing needle, described set collar is worn plug on the hole of aforesaid substrate, described testing needle body front end and substrate or external circuit form and be electrically connected, and be terminal then be positioned at the below of described hole; And a fixture, be combined on the hole of said fixing ring, and described fixture end is to protrude outside hole the terminal microstrip line relation that forms of the terminal and described testing needle of described fixture.

For achieving the above object, the technical solution used in the present invention also comprises:

The method of a kind of combine and assemble probe as claimed in claim 1 is characterized in that it may further comprise the steps: a, several testing needles are arranged on the tool; B, make several testing needle bodies and be provided with that local location glueds joint fixing mutually between the set collar bottom of hole by a sticker; C, set collar is worn plug on the hole of probe card substrate, and described testing needle body front end formed with substrate or external circuit be electrically connected; Testing needle under d, the adjustment probe hole makes described testing needle end be positioned at the below of described hole; E, a fixture is combined in the hole of set collar after, described fixture is terminal to be protruded outside described hole, and with the terminal microstrip line relation that forms of testing needle.

Compared with prior art, the beneficial effect that has of the present invention is:

1. the present invention is provided with a fixture in addition, make described fixture wear plug behind the hole of set collar, described fixture is terminal to be protruded outside described hole, and concern (micro stripline) with the terminal microstrip line that forms of testing needle, simultaneously described set collar bottom be can be made as and testing needle front end and end between body form the microstrip line relation, to reach and to improve purpose and the effect of measuring high-frequency signals.

2. the present invention is a structural design of utilizing fixture and set collar, can reach the purpose of measuring high-frequency signals, has effects such as simple in structure, that cost is low.

3. fixture of the present invention is but that direct forming is in the hole of set collar, and make described set collar and fixture form a holder, make described holder bottom all can form microstrip line relation (micro strip line), to reach better efficiency of measurement with relative described testing needle body major part to terminal.

Description of drawings

Fig. 1 is that the outward appearance of probe of the present invention is decomposed cut-away view;

Fig. 2 is the outward appearance cut-away view after the probe combination of the present invention;

Fig. 3 is the process flow diagram of probe combined method of the present invention;

Fig. 4 is that set collar and fixture form combination outward appearance cut-away view behind the holder in the probe of the present invention;

Fig. 5 is the outward appearance cut-away view of existing probe.

Description of reference numerals: 1-probe; The 11-substrate; 111-hole 12-testing needle; The 121-body; The 122-end; The 13-set collar; The 131-hole; The 132-outer wall; The 14-fixture; The 141-end; The 15-holder; The 151-end; The 152-outer wall; The 2-sticker; The A-printed circuit board (PCB); The B-center pit; The C-testing needle; Step a-is arranged in described several testing needles on one tool; Step b-makes several testing needle bodies and one wear that the part interfixes between pertusate set collar bottom by a sticker; Step c-makes set collar wear plug on a hole of probe card substrate, and described testing needle body front end is electrically connected for forming with substrate or external circuit; Testing needle under steps d-adjustment probe hole; After step e-made a fixture be combined in the hole of set collar, described fixture end can protrude outside described hole, and concerned with the terminal microstrip line that forms of testing needle.

Embodiment

See also Fig. 1, Fig. 2, diagramatic content is an embodiment of probe 1 of the present invention, and it is made up of substrate 11, several testing needles 12, a set collar 13 and the fixture 14 with electronic circuit.

Described substrate 11 is provided with a hole 111, and described testing needle 12 is provided with a body 121.

Described set collar 13, its central part is penetrated with a hole 131, described set collar 13 bottoms are the outer walls 132 that are provided with a downward vergence direction, supply above-mentioned several testing needles 12 in conjunction with on it, and form a distance in conjunction with set collar 13 bottoms, back and testing needle 12, and described outer wall 132 is and testing needle 12 front ends and end between body 121 form microstrip line relation (micro strip line), make described set collar 13 wear plug on the hole 111 of aforesaid substrate 11 time, on the position of terminal 122 belows that are positioned at described hole 111 of described testing needle 12 bodies 121, and testing needle 12 bodies 121 front ends are electrically connected for forming with substrate 11 or external circuit, described several testing needle 12 bodies 121 are to be combined on the outer wall 132 of set collar 13 around arranging with a downward vergence direction in addition, and the end 122 of described testing needle 12 is the angle bendings that form for measuring.

Described fixture 14 is to be combined on the described hole 131 with screw-in version, and described fixture 14 ends 141 are to protrude outside hole 131, and make described fixture 14 terminal 141 and described testing needle 12 terminal 122 form microstrip line relation (micro strip line).

During enforcement, please consult Fig. 1～3 figure again, at first several testing needles 12 are arranged on the tool, and make by a sticker 2 that the part interfixes between several testing needle 12 bodies 121 and set collar 13 bottoms, again set collar 13 is worn plug on the hole 111 of probe 1 substrate 11, and described testing needle 12 bodies 121 front ends are electrically connected for forming with substrate 11 or external circuit, terminal 122 then are positioned on the position of below of described hole 111, for wafer on relative bond pad contact.

Then, the set collar 13 that is equipped with hole 131 is worn plug in the hole 111 of probe 1 substrate 11, after adjusting testing needle 12 under probe 1 hole 111 by described hole 131, again fixture 14 is worn plug on the hole 131 of set collar 13, described fixture 14 terminal 141 is protruded outside described hole 131, and form microstrip line relation (micro strip line) with testing needle 12 terminal 122.

Therefore, the present invention mainly may further comprise the steps:

A, described several testing needles are arranged on the tool;

B, make several testing needle bodies and one wear that the part interfixes between pertusate set collar bottom by a sticker;

C, make set collar wear plug on a hole of probe card substrate, and described testing needle body front end is electrically connected for forming with substrate or external circuit;

Testing needle under the hole of d, adjustment probe;

E, make a fixture be combined in the hole of set collar after, described fixture is terminal to be protruded outside described hole, and with the terminal microstrip line relation (micro strip line) that forms of testing needle.

In addition, as shown in Figure 4, the aforesaid fixture 14 of the present invention is but that direct forming is in the hole 131 of aforementioned fixation ring 13, and make aforesaid set collar 13 and fixture 14 form a holder 15, make described holder 15 bottom end 151 and described testing needle 12 terminal 122 form microstrip line relation (micro stripline).And described holder 15 bottoms also can be made as the outer wall 152 of a downward vergence direction, and described outer wall 152 is and testing needle 12 front ends and end between body 121 form microstrip line relation (micro stripline).

More than explanation is just illustrative for the purpose of the present invention, and it is nonrestrictive, those of ordinary skills understand, under the situation of the spirit and scope that do not break away from claim and limited, can make many modifications, variation or equivalence, but but all will fall within the claim restricted portion of the present invention.

Claims

1. probe is characterized in that it comprises:

One has the substrate of electronic circuit, and described substrate is provided with a hole;

Several testing needles, described testing needle is provided with a body;

One set collar, its central part has a perforated holes, be combined with described several testing needles on the described set collar bottom outer wall, and the set collar bottom has preset distance with testing needle, described set collar is worn plug on the hole of aforesaid substrate, described testing needle body front end and substrate or external circuit form and be electrically connected, and be terminal then be positioned at the below of the hole of described substrate; And

One fixture is combined on the hole of said fixing ring, and described fixture end is to protrude outside the hole of set collar, the terminal microstrip line relation that forms of the terminal and described testing needle of described fixture.

2. probe according to claim 1 is characterized in that: described set collar bottom is the outer wall that is provided with a downward vergence direction, and described outer wall is and testing needle front end and end between body form the microstrip line relation.

3. probe according to claim 1 is characterized in that: described fixture is to combine with the hole of set collar with screw-in version.

4. probe according to claim 1, it is characterized in that: described fixture is that direct forming is in the hole of set collar, and make described set collar and fixture form a holder, make the terminal microstrip line relation that forms of described holder bottom end and described testing needle.

5. probe according to claim 4 is characterized in that: described holder bottom is the outer wall that is provided with a downward vergence direction, and described outer wall is and testing needle front end and end between body form microstrip line relation.

6. the method for a combine and assemble probe as claimed in claim 1 is characterized in that, it may further comprise the steps:

A, several testing needles are arranged on the tool;

B, make several testing needle bodies and be provided with that local location glueds joint fixing mutually between the set collar bottom of hole by a sticker;

C, set collar is worn plug on the hole of probe card substrate, and described testing needle body front end formed with substrate or external circuit be electrically connected;

Testing needle under the hole of d, adjustment probe card substrate makes described testing needle end be positioned at the below of the hole of described probe card substrate;

E, a fixture is combined in the hole of set collar after, described fixture is terminal to be protruded outside the hole of described set collar, and with the terminal microstrip line relation that forms of testing needle.

7. the method for combine and assemble probe according to claim 6, it is characterized in that: the fixture among the step e is that direct forming is in the hole of set collar, and make described set collar and fixture form a holder, make the terminal microstrip line relation that forms of described holder bottom end and described testing needle.