CN101243204B - Metal carbonitride layer and method for the production of a metal carbonitride layer - Google Patents
Metal carbonitride layer and method for the production of a metal carbonitride layer Download PDFInfo
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- CN101243204B CN101243204B CN2006800298349A CN200680029834A CN101243204B CN 101243204 B CN101243204 B CN 101243204B CN 2006800298349 A CN2006800298349 A CN 2006800298349A CN 200680029834 A CN200680029834 A CN 200680029834A CN 101243204 B CN101243204 B CN 101243204B
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Abstract
The invention relates to a method for coating a tool or tool part, especially a cutting element such as a cutting plate, in which a basic member is supplied and one or several layers are applied to the same, at least one layer being made of a metal carbonitride of one or several of the metals comprising titanium, zirconium, hafnium, vanadium, niobium, tantalum, and/or chromium and being deposited by means of a gas containing methane, nitrogen, and one or several metal compounds. In order to obtain a metal carbonitride layer on which additional layers that have great adhesive strength can be deposited and which is provided with great resistance to wear, the deposition process of the metal carbonitride layer is started at a temperature of the basic member of 850 to 950 DEG C, whereupon the temperature of the basic member is increased by at least 40 DEG C and the deposition process is continued at least in part at the increased temperature. The invention further relates to a metal carbonitride layer that is applied to an object, as well as a tool or tool part, particularly a cutting element such as a cutting plate, encompassing a basic member with one or several layers that are applied thereto, at least one layer representing a metal carbonitride layer which has a nanocomposite structure.
Description
The present invention relates to the part that covers a kind of instrument or instrument, particularly cover method as the cutting element of blade, wherein prepare matrix and cover one deck or multilayered coating on this, here one deck is that carbonitride by one or more metals that comprise titanium, zirconium, hafnium, vanadium, niobium, tantalum and/or chromium constitutes and is to come sedimentary by means of the gas that contains methane, nitrogen and one or more metallic compounds at least.
In addition, the invention still further relates to comprise titanium, zirconium, hafnium, vanadium, niobium, tantalum and/or chromium at least a or multiple metal metal carbonitride layer such as the titanium carbonitride layer covers the coating on the object.
In addition, the present invention relates to the part of instrument or instrument, particularly as the cutting element of blade, it comprises a matrix, is coated with one deck or multilayered coating on this, and wherein one deck coating is a metal carbonitride layer at least.
To denuding demanding instrument such as cutter, press tool or shaping machining tool are all wanted coating usually, so that overcome tool wear in use., also usually use multilayered coating here, have one deck outmost, at the working lining of workpiece side and multilayer layer in its lower section.Though the generation of multilayered coating is more bothersome than individual layer, yet, if what be concerned about is to arrange described coating at desired requirement with possible best mode, can have less fragility and bigger flexibility with same thickness.
Known that from current state of the art the lathe tool blade can have multilayered coating, have one deck titanium nitride layer or alumina layer as layer outmost, in workpiece one side when using, they directly or indirectly are deposited on the metal carbonitride layer as the titanium carbonitride layer.Such as alumina layer chemically is being inertia and heat-stable, thereby protection is positioned at following layer.The characteristics of the titanium carbonitride layer that supports are that hardness is big, should help the wear resistance of coating or instrument.Can be provided with between the blade base that the knitting layer of being made up of titanium carbonitride and Wimet (wolfram varbide) are made other layers, particularly can be well attached to matrix on and can be firmly in conjunction with the layer of knitting layer.
The hardness that is noted that each layer only when adopting multilayered coating greatly to long work-ing life or durability not enough.If the hardest one deck and matrix or be positioned at following one deck and throw off, particularly those not only will stand high mechanical load but also this situation can appear in the blade that will stand high temperature and/or temperature variation, and so, this hardest one deck itself just can not have been used again.
In this relation, to by carbonitride (MeC
xN
y) connection or the middle layer that constitute proposed extra high requirement, because its function just in time is, give the working lining that this coating wear resistance and long-time carrying will be protected.
Particularly the layer that is made of titanium carbonitride is the knitting layer that especially uses in be everlasting multilayered coating or coating system.Reason is that in known titanium carbonitride layer, carbon can be all by nitrogen displacement (perhaps nitrogen is replaced by carbon conversely), and therefore, the characteristic of these layers can be regulated by composition and be changed.At last, these layers characteristic of having the characteristic between titanium carbide and titanium nitride or can regulating.
As practice for many years, can adopt CVD (chemical vapour deposition chemical vapour deposition) method to generate the titanium carbonitride layer, here, deposit under 950 to 1100 ℃ base reservoir temperature with the mixed gas that contains methane, nitrogen, titanium tetrachloride and hydrogen as carrier gas.The titanium carbonitride layer that obtains like this is to be constituted and formed a closely knit layer by spheric grain.
With with illustrated mode with so so-called high temperature-titanium carbonitride be deposited on interrelate in the Wimet substrate be, though between Wimet and titanium carbonitride layer, be equipped with articulamentum, the thick titanium nitride layer of 0.5 μ m is not for example wished the substrate decarburization that occurs but usually observe.In order to prevent this decarburization, transfer to people recently and to use the gas that contains titanium tetrachloride and acetonitrile (acetonitrile) to come the deposit carbon titanium nitride, depositing temperature can drop to 750 to 900 ℃ lesser temps thus.The titanium carbonitride of Chan Shenging is known as middle temperature-titanium carbonitride like this, and has the column construction that is made of shaft-like crystal, and its thickness surpasses 750 dusts or 75 nanometers.
Especially known high temperature or middle temperature titanium carbonitride layer are used as articulamentum as mentioned, deposit other layers in the above.Yet, show that the adhesion strength of the working lining of titanium nitride layer or other kinds on traditional titanium carbonitride layer is also not enough as other metal carbonitride layer, because of coming off, original attrition resistant working lining is restricted the work-ing life of instrument.
In addition, in general known titanium carbonitride layer and metal carbonitride layer also are used as outmost, as to be configured in workpiece side layer, that is to say as working lining.Here, they just use certainly in practice very limitedly.In such layer, adhesion (aufklebungen) can appear in estimation when using as working lining, although therefore hardness is still shorter big work-ing life.
The present invention from here on and propose this task, a kind of method that applies metal carbonitride layer that beginning is mentioned is described, other layers that have high-adhesion on the one hand can be deposited on the described metal carbonitride layer, described on the other hand metal carbonitride layer has high wear resistance, and the instrument of coating or the part of instrument can be used in the case of necessary immediately.
Another object of the present invention is that explanation covers the sort of coating that beginning is mentioned on object, it has metal carbonitride layer such as the titanium carbonitride layer at least, can deposit the layer that other have high-adhesion in described metal carbonitride layer on the one hand, described on the other hand metal carbonitride layer also is a highly abrasion-resistant, and the instrument of coating or the part of instrument can be used in the case of necessary immediately.
In addition, the objective of the invention is to create the sort of instrument that beginning mentions or the part of instrument, wherein metal carbonitride layer is a highly abrasion-resistant, and, if necessary, for deposition layer in the above provides high-adhesion.
The purpose of method of the present invention aspect can solve by method according to claim 1.Favourable variant according to the inventive method is the theme of claim 2 to 7.
The advantage that obtains with the present invention particularly in, produce and have microstructural metal carbonitride layer such as the titanium carbonitride layer, it is applicable to the layer that deposits other with reliable tack admirably.Observe from crystal chemistry, crystal has element heterogeneous respectively and distributes on the transverse section.For example titanium nitride, aluminum oxide or the diamond layer of Fu Gaiing can be better attached on this layer, even also do not come off under the hardest working conditions or the only intensity appearance to reduce greatly subsequently.
Unexpectedly, be also noted that according to the present invention that sedimentary layer is compared with traditional metal carbonitride layer and also show to have good especially antiwear characteristic, so advantage is also can be used as working lining.Even people's imagination, sedimentary metal carbonitride layer has the little hardness (perhaps microhardness) of titanium carbonitride layer than the crystalline-granular texture that adopts classical pathway to make when chemical constitution is identical according to the present invention under specific circumstances, and this is observed and still more makes us being surprised.
Be enhanced if be in the temperature of the matrix under the deposition of progressively carrying out, this is favourable to implementing the method according to this invention.Make not interruption of growth of metal carbonitride layer by this, this is favourable making as far as possible aspect the coat structure zero defect.
Begin to form nitrided metal layer after forming in initial metal nitride nucleus structure, substrate temperature after deposition beginning within 350 minutes, particularly reached raising within 120 minutes temperature is rational.
If deposition is proceeded at least 60 minutes after reaching the temperature of raising,, be favourable to the high strength of sedimentary metal carbonitride layer so that minimum bed thickness is at least 0.5 μ m.
The preferred temperature that improves is 1010 to 1040 ℃.In this temperature range, quick growth of each crystal and defective seldom so just cause the quick growth of high strength layer.
If form and the deposit carbon titanium nitride layer, can obtain outstanding especially coating aspect the service performance of the part of instrument or instrument by means of the gas that contains methane, nitrogen and titanium tetrachloride.If it is 1 that gas contains mol ratio: (8 to 11): it is 1 to 8% titanium tetrachloride that methane, nitrogen and the hydrogen of (15 to 25) and gas contain percent by volume, then proves good.Can significantly reduce or avoid undesirable kryptol titanium nitride composition thus, further improve the advantage that obtains according to the present invention.In this case, the composition TiC of this layer
xN
yX equal 0.15 to 0.25, y equals 0.85 to 0.75.
Reaction gas pressure itself is not critical, can change in very wide boundary.Preferably, metal carbonitride layer 100 to 800 millibars, especially deposit under 200 to 400 millibars of pressure.
If metal carbonitride layer has nanometer-composite structure that the crystal that distributed by non-homogeneous element constitutes, another object of the present invention just can be resolved, it is by the metal carbonitride layer of one or more metals that comprise titanium, zirconium, hafnium, vanadium, niobium, tantalum and/or chromium such as the layer that the titanium carbonitride layer constitutes that the layer that covers on the object wherein of the present invention has one deck at least, it is a highly abrasion-resistant, and, if necessary, can be deposited on high adhesion strength on other layers.
The advantage that obtains with the present invention particularly in, have the metal carbonitride layer of nanometer-composite structure such as this titanium carbonitride layer has microstructure, it is applicable to the deposition of other layers admirably with reliable tack.
The heterogeneous structure form that those skilled in the art will have the nanometer range inside dimension is interpreted as nanometer-composite structure.
Check shows do not have decarburization basically in the zone near substrate surface in surprise, from also there not being the bonding metal carbonitride layer that diffuses into mutually here.
Have many single crystalline composite structures in nanometer-size range and also cause the crystal boundary face that increases in fact, improve tectal toughness thus.
Because the carbonitride crystal when coating in nanometer-size range is grown, so there is crackle on the surface, as and if many little, unique point or little bars structurally are provided when other layers deposit, and they are favourable to multiple grappling.Therefore, for example titanium nitride, aluminum oxide or the diamond layer of Fu Gaiing can adhere to better subsequently, even also do not come off under the hardest working conditions or the only intensity appearance to reduce greatly.
Unexpectedly, be also noted that according to the present invention that sedimentary layer is compared with traditional metal carbonitride layer and also show to have good especially antiwear characteristic, so advantage is also to be used for the layer of working.Even people's imagination, sedimentary metal carbonitride layer has the little hardness (perhaps microhardness) of titanium carbonitride layer than the crystalline-granular texture that adopts classical pathway to make when chemical constitution is identical according to the present invention under specific circumstances, and this is observed and still makes us being surprised.
If being different at the carbon in center and peripheral zone and the content of nitrogen aspect its chemical constitution, can generate layer with good especially antiwear characteristic according to crystal preferred construction form.
If at least two kinds of crystal with different geometries constitute described layer, the toughness of metal carbonitride layer and adhesion strength can further improve.
If described layer is made of at least a starlike aciculiform structure and at least a sheet structure, not only the intensity of metal carbonitride layer itself and toughness can improve, and can improve with layer, for example titanium nitride or the engaging also of alumina layer of growth.
In one embodiment, metal carbonitride layer can doped with boron, silicon, zirconium, hafnium, vanadium or rare earth element, thereby such as can improve the hot hardness of coating.In this relation, mix and be interpreted as that single content can reach 0.01 weight percent of the weight of whole coating.
If shaft-like crystalline arithmetical averaging thickness is less than 65 nanometers, especially less than 45 nanometers, then be particularly advantageous.Crystal is thin more, and the time to be used to the effect that supports with grappling just good more for deposition on metal carbonitride layer according to the present invention, and the tack of additional settled layer is just good more.
According to a preferred embodiment of the present invention, the intermediate value of crystallographic dimension outwards, that is to say in tool side and be enhanced.Like this, on the one hand, on one deck such as reached high grappling quality on the Wimet-blade (cutter head) of instrument, advantage on the other hand is that even without other layers, this part also can reach long working life to metal carbonitride layer below.
According to the present invention, metal carbonitride layer (for example titanium carbonitride layer) with one or more metals that comprise titanium, zirconium, hafnium, vanadium, niobium, tantalum and/or chromium, described metal carbonitride layer is a highly abrasion-resistant, and if necessary can be deposited on other layers with high-adhesion, it has composition MeC
xN
y, wherein x equals 0.1 to less than 0.3, and y equals 0.9 to greater than 0.7.
Especially, titanium nitride is compared with titanium carbide has much smaller hardness, make those skilled in the art surprised be, the titanium carbonitride that has on average less than 0.3 carbon component according to the present invention has constituted high antifriction layer, the instrument of coating (for example in the cutting metal material) directly in practice uses high life.
Especially, concerning the titanium carbonitride layer unexpectedly, coating microhardness according to the present invention has only about 2000Hv, is significantly smaller than traditional titanium carbonitride layer microhardness, and traditional titanium carbonitride microhardness (along with the raising of carbon content) may be for 2300 to 3400Hv.Wonderful in this relation also have, although the carbon content in the described coating is apparent in view, adhesion sharply descends, and this helps antiwear characteristic.
Here, if value x=0.15 to 0.20 and y=0.85 to 0.80, then the service performance of coating can reach top.
From optics, metal carbonitride layer according to the present invention is characterised in that the Huang-laterite look with light-dark structure, particularly having such texture structure, is distinguishable in the Photomicrograph that the amplification under opticmicroscope of described texture structure is 500-1000 times.
Another object of the present invention is, that creates that beginning mentions the sort ofly has the instrument of such coating that is applied in or a part of instrument, wherein metal carbonitride layer be the height grappling and be highly abrasion-resistant, and for may be sedimentary on this layer high adhesion strength is provided, wherein under metal carbonitride layer be to apply to 17 coating according to Claim 8.Advantage is, carbonitride layer outwards is, that is to say in the star-shaped aciculiform of workpiece side, and supports the top layer as the oxide compound coating, and described top layer is preferably alumina layer (Al
2O
3) or carbon-coating, particularly diamond layer.
According to the advantage of the part of instrument of the present invention or instrument particularly in, the metal carbonitride layer that is provided with is more wear-resisting than traditional metal carbonitride layer on the one hand, deposition attach or grappling securely during other layers on metal carbonitride layer on the other hand, this is favourable to the work-ing life of the part of instrument or instrument equally.
Though in instrument according to the present invention, can on metal carbonitride layer, cover different layers such as the layer of working lining,, if covered the titanium aluminum nitride layer, just can observe firm especially adhering to.By aluminium oxide Al
2O
3Perhaps the layer of diamond formation also can both cover with good especially adhesion strength according on metal carbonitride layer of the present invention, particularly the titanium carbonitride layer.
In conjunction with the context of specification sheets and following so as to further specifying other advantages and the beneficial effect that to learn in the embodiments of the invention according to instrument of the present invention.
Shown in the figure:
Fig. 1 is REM (the scanning electronic microscope)-photo according to Ti of the present invention (CN) laminar surface;
Fig. 2 is the image of TEM (transmission electron microscope)-check;
Fig. 3 is the transition Photomicrograph (sample with 15 ° angle cutting and grinding) of coating;
The polishing scratch width V of Fig. 4 for obtaining with test
bThe synoptic diagram that concerns with the cutting number of times of indexable insert tip, throw away tip with different coating;
Fig. 5 is the temperature changing process synoptic diagram during the coating.
Fig. 1 has provided according to the REM on titanium carbonitride of the present invention surface (scanning electronic microscope)-photo.Described layer is to grow in substrate with starlike aciculiform and the mode that is embedded in the composite structure in the sheet.The maximum longitudinal extension of these sheets is approximately 1 μ m, is flat, and width average is approximately 0.7 μ m, and on the contrary, the thickness of starlike pin is smaller.Sheet has non-homogeneous element distribution and also has more different average compositions with needle-shaped crystals.
The high-adhesion that forms the after-applied for it layer in the metal carbonitride layer surface of this structure provides best condition.
In order to recognize the crystallization phases of this layer, using CuK-to carry out the X-ray diffraction check under the ray.In layer according to the present invention, the XRD measurement for Evaluation has obtained a C/N ratio in C/N=(0.14 to 0.19)/(0.86 to 0.81) scope.
The value that the mean particle size of measuring according to the She Er method draws is 26 and 17nm.Therefore, described layer has nanometer-structure.
Dark areas of from the transmission electron microscope photo of Fig. 2, indicating with symbol 1 as can be seen and the light tone zone of indicating with symbol 2.Compare when this sample of check, dark areas is rich carbon, and the light tone zone is rich nitrogen.Be clear that the difference of relevant crystal grain composition aspect thus, this has disclosed special crystal grain core-shell-structure.
After carrying out the transition to, deposit the transition position of working lining, be rapid crackle shape and be aciculiform (Fig. 3) according to the free surface of titanium carbonitride layer of the present invention.This surface tissue helps adhering to securely later layer, because this can be in the tight infiltration of interface scope generation coating.Here, each crystallite is definitely expected in the deviation of surface range and accurate 90 ° of positions, because suitable irregularity can make described coating combine closely mutually better.
Fig. 4 shows the Wear Test Data of reversible cutting insert, and these blades are coated with the multilayer CVD-coating according to table 4 structure.The geometrical dimension of Wimet substrate and blade is identical to all reversible cutting inserts.
Table 1: the formation and the bed thickness that are used for the multilayered coating of blade A to C
| Coating | Bed thickness [μ m] | ||
| A | B | C | |
| TiN | 0.5 | 0.5 | 0.5 |
| MT-TiCN * | 10.0 | 3.0 | 3.0 |
| E-TiCN ** | ----- | 4.0 | 7.0 |
| Al 2O 3 | 3.0 | 3.0 | 3.0 |
| TiN | 0.5 | 0.5 | 0.5 |
| Add up to | 14.0 | 11.0 | 14.0 |
*... middle temperature-titanium carbonitride
*... the sedimentary titanium carbonitride according to the present invention
Reversible cutting insert is in the test of carrying out during at the turning work material under the following test conditions:
Processed steel: 34CrNiMo 6,261HB
Cutting speed V
c: 280m/min (minute)
Depth of cut a
p: 1.50mm
Depth of cut f:0.28mm/U
Emulsifying agent is used in cutting, cuts 30 seconds at every turn.
As from seeing Fig. 4, under identical working conditions, reversible cutting insert B compares with reversible cutting insert A with C, and when the knitting layer (0.5 μ m TiN) identical and outer (0.5 μ m TiN) that engages with Wimet was identical, the polishing scratch width was smaller.After cutting 20 times, the polishing scratch width of reversible cutting insert A is 0.5 μ m, and reversible cutting insert B is 0.32 μ m, and reversible cutting insert C is 0.14 μ m.Determine in relatively at the bed thickness of reversible cutting insert B and A, although the less raising tear strength that also reached of bed thickness.This means aspect manufacturing technology it is favourable, because every micron (μ m) bed thickness is estimated to need about 1 hour when adopting CVD chemical gaseous phase depositing process deposition.That is to say, can generate more attrition resistant coating with the short time now.
Other tests show, also can advantageously be used for doing outmost working lining according to titanium carbonitride layer of the present invention.In the identical layer structure during with identical bed thickness, have the outermost blade that constitutes by titanium carbonitride according to the present invention aspect wearing quality than with in temperature-titanium nitride strong 1.5 times or more as the blade of working lining, even microhardness is smaller.This effect has special structure owing to the titanium carbonitride that generates according to the present invention.
Fig. 5 exemplarily shows process according to coating method of the present invention by means of temperature-time curve figure with synoptic diagram: in the temperature T of matrix or reaction chamber
1During for about 960 ℃ (" 0 " constantly), add and to contain proportional to be that 1: 10: 20 the reactant gases of methane, nitrogen, hydrogen and volume percent are 4 titanium tetrachloride, as hypothesis, can to deposit shaft-like titanium nitride nucleus by this.And then, temperature improved constantly 1050 ℃ within 150 minutes when constantly contacting with reactant gases; But it also is progressively to carry out that temperature is brought up to 1050 ℃ from 960, and last, coating operates under 1050 ℃ of reactant gasess identical with component and proceeds 250 minutes, finishes then.
Claims (24)
1. method that covers the part of instrument or instrument, wherein, prepare a matrix and on described matrix, cover one or more layers coating, wherein one deck is by comprising titanium at least, zirconium, hafnium, vanadium, niobium, the carbonitride of one or more metals of tantalum and/or chromium constitutes, here, when being 850 to 950 ℃, substrate temperature begins to deposit described metal carbonitride layer, after this, substrate temperature improves 40 ℃ at least, and deposition process is also proceeded under the temperature that improves at least every now and then
It is characterized in that,
Described coating deposits by means of the gas of being made up of methane, nitrogen, hydrogen and one or more metallic compounds,
Substrate temperature reaches the temperature of described raising within 350 minutes after the deposition beginning, and
After reaching the temperature of described raising, deposition is proceeded 60 minutes at least.
2. method according to claim 1,
It is characterized in that,
Substrate temperature is enhanced under the deposition of carrying out gradually.
3. method according to claim 1,
It is characterized in that,
Substrate temperature reaches the temperature of described raising within 120 minutes after the deposition beginning.
4. method according to claim 1,
It is characterized in that,
The temperature of described raising is 1010 to 1040 ℃.
5. method according to claim 1,
It is characterized in that,
Form and deposit described coating by means of the gas of forming by methane, nitrogen, hydrogen and titanium tetrachloride.
6. method according to claim 5,
It is characterized in that,
Described gas contain mol ratio be 1: 8 to 11: 15 to 25 methane, nitrogen and hydrogen, and described gas to contain volume percent be 1 to 8 titanium tetrachloride.
7. coating that covers on the matrix, described coating have at least one deck by the metal carbonitride layer of one or more metals that comprise titanium, zirconium, hafnium, vanadium, niobium, tantalum and/or chromium,
It is characterized in that,
Described metal carbonitride layer presents nanometer-composite structure, and described metal carbonitride layer is made of the crystal of the element with non-uniform Distribution.
8. coating according to claim 7,
It is characterized in that,
Described metal carbonitride layer is the titanium carbonitride layer.
9. coating according to claim 7,
It is characterized in that,
With regard to chemical constitution, the described crystal heart therein has different carbon and nitrogen content with fringe region.
10. coating according to claim 7,
It is characterized in that,
At least two kinds of crystal with different geometries constitute described coating.
11. coating according to claim 7,
It is characterized in that,
Described coating is made of at least a starlike aciculiform structure and at least a sheet structure.
12. coating according to claim 7,
It is characterized in that,
Described coating doped with boron, silicon, zirconium, hafnium, vanadium or rare earth element.
13. coating according to claim 7,
It is characterized in that,
Granularity is less than 65nm in the middle of the described crystalline.
14. coating according to claim 13,
It is characterized in that,
Granularity is less than 45nm in the middle of the described crystalline.
15. coating according to claim 7,
It is characterized in that,
In the middle of the described crystalline granularity outwards, that is to say in workpiece side and be enhanced.
16. coating according to claim 7,
It is characterized in that,
Described coating has composition MeC
xN
y, wherein x equals 0.1 to less than 0.3, and y equals 0.9 to greater than 0.7.
17. coating according to claim 16,
It is characterized in that,
Described value x=0.15 to 0.20, and y=0.85 to 0.80.
18. coating according to claim 7,
It is characterized in that,
Described coating color is the Huang-laterite look with light-dark structure.
19. coating according to claim 18,
It is characterized in that,
It is distinguishable texture structure that described coating has in the Photomicrograph that amplifies 500-1000 times under opticmicroscope.
20. the part of instrument or instrument is included in the matrix that covers one or more layers coating above this, wherein one deck is a metal carbonitride layer at least,
It is characterized in that,
Described coating is the coating according to one of claim 7 to 19.
21. the part of instrument according to claim 20 or instrument,
It is characterized in that,
Described carbonitride layer outwards is, that is to say in the star-shaped aciculiform of workpiece side, and has the top layer.
22. the part of instrument according to claim 21 or instrument,
It is characterized in that,
Described top layer is the oxide compound coating.
23. the part of instrument according to claim 21 or instrument,
It is characterized in that,
Described top layer is alumina layer or carbon-coating.
24. the part of instrument according to claim 23 or instrument,
It is characterized in that,
Described top layer is a diamond layer.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ATA1876/2005 | 2005-11-17 | ||
| AT18762005A AT503050B1 (en) | 2005-11-17 | 2005-11-17 | Coating a tool with titanium, zirconium, hafnium, vanadium, niobium, tantalum or chromium carbonitride by chemical vapor deposition comprises increasing the temperature during deposition |
| ATA1585/2006 | 2006-09-22 | ||
| AT15852006A AT503946B1 (en) | 2006-09-22 | 2006-09-22 | Coating a tool with titanium, zirconium, hafnium, vanadium, niobium, tantalum or chromium carbonitride by chemical vapor deposition comprises increasing the temperature during deposition |
| PCT/AT2006/000469 WO2007056785A1 (en) | 2005-11-17 | 2006-11-16 | Metal carbonitride layer and method for the production of a metal carbonitride layer |
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| Publication Number | Publication Date |
|---|---|
| CN101243204A CN101243204A (en) | 2008-08-13 |
| CN101243204B true CN101243204B (en) | 2011-12-28 |
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| CN2006800298349A Active CN101243204B (en) | 2005-11-17 | 2006-11-16 | Metal carbonitride layer and method for the production of a metal carbonitride layer |
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|---|---|
| CN (1) | CN101243204B (en) |
| AT (1) | AT503050B1 (en) |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008013964A1 (en) * | 2008-03-12 | 2009-09-17 | Kennametal Inc. | Hard material coated body |
| CN102321867B (en) * | 2011-10-23 | 2013-03-27 | 常州碳元科技发展有限公司 | Carbon layer material with protective layer structure and preparation method thereof |
| JP6548072B2 (en) * | 2014-05-30 | 2019-07-24 | 三菱マテリアル株式会社 | Surface coated cutting tool |
| WO2020068576A1 (en) | 2018-09-28 | 2020-04-02 | Corning Incorporated | Methods for sub-austenite transformation temperture deposition of inorganic particles and articles produced by the same |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1104263A (en) * | 1992-11-21 | 1995-06-28 | 克鲁伯·韦狄亚有限公司 | Tool and method for forming coated layer of body of same |
| US6146697A (en) * | 1999-03-02 | 2000-11-14 | Kennametal Inc. | MT CVD process |
| EP1160353A1 (en) * | 2000-05-31 | 2001-12-05 | Mitsubishi Materials Corporation | Coated cemented carbide cutting tool member and process for producing the same |
| CN1406694A (en) * | 2001-08-31 | 2003-04-02 | 三菱综合材料株式会社 | Surface coated super hard alloy cutting device |
| CN1578710A (en) * | 2001-10-30 | 2005-02-09 | 三菱综合材料神户工具株式会社 | Surface coated cemeted carbide cutting tool having hard coating layer exhibiting excellent wear resisitance in high speed machining |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2775955B2 (en) * | 1990-01-31 | 1998-07-16 | 三菱マテリアル株式会社 | Manufacturing method of coating cermet with excellent wear resistance |
| US5436071A (en) * | 1990-01-31 | 1995-07-25 | Mitsubishi Materials Corporation | Cermet cutting tool and process for producing the same |
| US5665431A (en) * | 1991-09-03 | 1997-09-09 | Valenite Inc. | Titanium carbonitride coated stratified substrate and cutting inserts made from the same |
| JP3878232B2 (en) * | 1995-01-10 | 2007-02-07 | 住友電工ハードメタル株式会社 | Coated cemented carbide |
| JP3526392B2 (en) * | 1997-05-15 | 2004-05-10 | 日立金属株式会社 | Hard film coated tool, hard film coated roll, and hard film coated mold |
| JPH10323724A (en) * | 1997-05-28 | 1998-12-08 | Hitachi Tool Eng Co Ltd | Covering form member |
| US6956999B2 (en) * | 2001-02-20 | 2005-10-18 | Cyberoptics Corporation | Optical device |
-
2005
- 2005-11-17 AT AT18762005A patent/AT503050B1/en not_active IP Right Cessation
-
2006
- 2006-11-16 CN CN2006800298349A patent/CN101243204B/en active Active
- 2006-11-16 ES ES06804390T patent/ES2370840T3/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1104263A (en) * | 1992-11-21 | 1995-06-28 | 克鲁伯·韦狄亚有限公司 | Tool and method for forming coated layer of body of same |
| US6146697A (en) * | 1999-03-02 | 2000-11-14 | Kennametal Inc. | MT CVD process |
| EP1160353A1 (en) * | 2000-05-31 | 2001-12-05 | Mitsubishi Materials Corporation | Coated cemented carbide cutting tool member and process for producing the same |
| CN1406694A (en) * | 2001-08-31 | 2003-04-02 | 三菱综合材料株式会社 | Surface coated super hard alloy cutting device |
| CN1578710A (en) * | 2001-10-30 | 2005-02-09 | 三菱综合材料神户工具株式会社 | Surface coated cemeted carbide cutting tool having hard coating layer exhibiting excellent wear resisitance in high speed machining |
Also Published As
| Publication number | Publication date |
|---|---|
| AT503050A1 (en) | 2007-07-15 |
| CN101243204A (en) | 2008-08-13 |
| AT503050B1 (en) | 2007-09-15 |
| ES2370840T3 (en) | 2011-12-23 |
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