CN108608328B - Polishing friction force measuring device and measuring method thereof - Google Patents
Polishing friction force measuring device and measuring method thereof Download PDFInfo
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- CN108608328B CN108608328B CN201810737394.7A CN201810737394A CN108608328B CN 108608328 B CN108608328 B CN 108608328B CN 201810737394 A CN201810737394 A CN 201810737394A CN 108608328 B CN108608328 B CN 108608328B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/006—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the speed
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The invention provides a measuring device for polishing friction force applied to an element in a full-caliber polishing process. The device for measuring polishing friction force comprises a plurality of stress test components, wherein each stress test component comprises a U-shaped clamping plate, a stress sensor is arranged on each U-shaped clamping plate, a signal transmission line and a bearing contact block are arranged on each stress sensor, the signal transmission line is connected with a signal receiver, and the signal receiver sends data to a computer. The polishing device can detect polishing friction forces applied to elements with different shapes in different polishing stages, and can know the surface roughness and material removal characteristics of the polishing disc according to the detected polishing friction forces, thereby guiding the control of the polishing process.
Description
Technical Field
The invention belongs to the field of optical processing, and particularly relates to a device and a method for measuring polishing friction force of an element in a full-caliber polishing process.
Background
Full-bore polishing is one of the key technologies for processing large-bore planar optical elements. The full-caliber polishing machine tool generally adopts natural granite with large size and high thermal stability to manufacture a polishing disc base disc, and annular asphalt adhesive layers are cast on the surface of the base disc to serve as the polishing disc. The endless belt surface of the asphalt polishing disk is sequentially provided with a correction disk for correcting and controlling the shape error of the polishing disk and a workpiece disk for holding the element. During processing, the polishing disc, the correcting disc and the workpiece disc rotate at a constant speed around the anticlockwise direction at a certain rotating speed, and optical elements placed in the workpiece disc are subjected to material removal under the action of the asphalt polishing disc and polishing particles carried by the asphalt polishing disc so as to form an optical surface.
The optical element placed in the workpiece tray can float freely in the vertical direction and is subjected to a pair of balance forces in the vertical direction, namely the self gravity and the positive pressure of the polishing tray; while in the horizontal direction, the polishing surface of the optical element is subjected to the frictional force of the polishing platen, while the side of the optical element is subjected to the positive pressure applied by the workpiece platen to match the frictional force of the polishing platen. The frictional force of the polishing disk against the polishing surface of the optical element is an important parameter in the polishing process, which has an important influence on the material removal speed and processing accuracy of the element. The magnitude and direction of the friction force applied by the polishing disk to the surface of the element are continuously changed along with the rotation of the polishing disk and the element in the polishing process, so that the detection of the friction force is very difficult.
Disclosure of Invention
The invention aims to provide a measuring device for polishing friction force of an element in a full-caliber polishing process.
The invention also provides a measuring method of the measuring device.
The technical scheme adopted for solving the technical problems is as follows: the device for measuring polishing friction force comprises a plurality of stress test components, wherein each stress test component comprises a U-shaped clamping plate, a stress sensor is arranged on each U-shaped clamping plate, a signal transmission line and a bearing contact block are arranged on each stress sensor, the signal transmission line is connected with a signal receiver, and the signal receiver sends data to a computer.
Further, the stress test part further comprises a fastening screw, a movable pressing plate and a holding spring, a penetrating screw hole is formed in the upper end side of the U-shaped clamping plate, the movable pressing plate is arranged between the inner side of the upper end side and the inner side of the lower end side of the U-shaped clamping plate, the movable pressing plate is connected with the inner side of the upper end side of the U-shaped clamping plate through a plurality of holding springs, the fastening screw penetrates through the penetrating screw hole to be in contact with the movable pressing plate, and the distance between the movable pressing plate and the inner side of the lower end side of the U-shaped clamping plate is adjusted through the fastening screw.
Furthermore, the signal receiver is provided with a WIFI function, and can send the load force data of the bearing contact block measured by the stress sensor to the computer.
Further, the bearing contact block has a smooth surface; the signal receiver has a built-in battery.
Further, the maximum measuring range of the stress testing component is not smaller than the sum of the gravity and the loading pressure of the optical element to be tested, and the measuring precision is not smaller than 2% of the maximum measuring range.
Furthermore, for a round optical element, 3-12 stress test parts are arranged and uniformly distributed on a round workpiece hole; for square or rectangular optical elements, 4-12 stress test elements are provided, and 1-3 stress test elements are provided on each side of the workpiece aperture.
A method of measuring polishing friction, the method comprising the steps of:
1) Clamping each stress testing part on a workpiece hole through a U-shaped clamping plate, adjusting a fastening screw to ensure that each stress testing part is completely fixed on a workpiece disc, and placing an element to be tested in the workpiece hole;
2) Starting the polishing disc and the workpiece disc to rotate at a constant speed in the anticlockwise direction, and then starting the signal receiver and the computer;
3) When the side edge of the element to be tested corresponding to the 1 st stress test component rotates to the outer side of the polishing disk and is perpendicular to the offset direction of the workpiece disk, starting to record load pressure data measured by each stress test component, receiving the load pressure data measured by each stress test component in real time by a signal receiver, sending the data to a computer, and stopping recording the data after m sampling points are measured by each stress test component;
4) The offset direction of the workpiece disc is taken as an X axis, the center of the workpiece disc is taken as an origin to establish a rectangular coordinate system, and the radial component, the circumferential component and the comprehensive value of the sum of the acting forces measured by the sampling points i at the same time of each stress testing component are respectively as follows:
wherein:
θ k initial phase angles at the beginning of recording data for the respective stress test elements;
k=1, …, n, representing the 1 st, … th, n stress test element;
i=1, …, m, representing the 1 st, … th, m sampling points measured by the respective stress test elements;
F k (i) Data representing the i=1, …, m sample points measured by each stress test element, respectively;
the rotation angle of each stress test part in the sampling period is set as t(s), the rotation speed of the workpiece disc is set as omega (RPM), and the phase angles corresponding to m sampling points are respectively measured
Further, in the step 1), the element to be tested is placed in the workpiece hole, and at this time, the distance between the bearing contact block of the stress testing component and the element is controlled within a range of 5 mm.
The beneficial effects of the invention are as follows: the polishing device can detect polishing friction forces applied to elements with different shapes in different polishing stages, and can know the surface roughness and material removal characteristics of the polishing disc according to the detected polishing friction forces, thereby guiding the control of the polishing process.
Drawings
FIG. 1 is a perspective view of a stress testing component of the measuring device of the present invention.
Fig. 2 is a top view of the measuring device according to the invention in operation.
Fig. 3 is a schematic view of the working state of the measuring device of the present invention.
FIG. 4 is a schematic diagram of the actual measured force of the stress testing component in an embodiment of the invention.
FIG. 5 is a schematic diagram of the radial component of force measured by the stress testing element in an embodiment of the invention.
FIG. 6 is a schematic illustration of the circumferential components of the force measured by the stress testing component in an embodiment of the invention.
FIG. 7 is a schematic diagram of the combined friction of the forces measured by the stress testing means in an embodiment of the invention.
Detailed Description
As shown in fig. 1 to 3, the polishing friction measuring device of the present invention comprises a plurality of stress test parts 1 and a signal receiver 13, wherein each stress test part 1 comprises a U-shaped clamping plate 5, a fastening screw 7, a holding spring 8, a movable pressing plate 9, a stress sensor 10, a signal transmission line 11 and a bearing contact block 12; a penetrating screw hole 6 is formed in the upper end side of the U-shaped clamping plate 5 (the side on which the U-shaped clamping plate 5 is positioned when the U-shaped clamping plate works is the upper end side of the U-shaped clamping plate 5), a movable pressing plate 9 is arranged between the inner side of the upper end side and the inner side of the lower end side of the U-shaped clamping plate 5, the movable pressing plate 9 is connected with the inner side of the upper end side of the U-shaped clamping plate 5 through a plurality of holding springs 8, the fastening screw 7 passes through the penetrating screw hole 6 to be in contact with the movable pressing plate 9, and the distance between the movable pressing plate 9 and the inner side of the lower end side of the U-shaped clamping plate 5 can be adjusted through the fastening screw 7 so as to adapt to different thicknesses of the side edges of the workpiece hole 24, so that firm clamping is ensured; the U-shaped clamping plate 5 is provided with a stress sensor 10, the stress sensor 10 is provided with a signal transmission line 11 and a bearing contact block 12, the signal transmission line 11 is connected with a signal receiver 13, the signal receiver 13 is provided with a WIFI function, and load force data of the bearing contact block 12 measured by the stress sensor 10 can be sent to a computer.
The carrier contact block 12 has a smooth surface which acts to receive the forward force applied by the side of the optical element with negligible lateral friction between the side of the optical element and the surface of the carrier contact block 12; the signal receiver 13 has a built-in battery, which can be supplied with power by the battery.
The maximum measuring range of the stress testing component 1 is not less than the sum of the gravity and the loading pressure of the optical element to be tested, and the measuring precision is not less than 2% of the maximum measuring range; for a round optical element, 3-12 stress test components 1 are preferably arranged and uniformly distributed on a round workpiece hole; for square or rectangular optical elements, 4-12 stress test elements 1 are preferably provided, with 1-3 stress test elements 1 being provided on each side of the workpiece aperture.
The method for measuring the polishing friction force of the element in the full-caliber polishing process comprises the following steps:
1) Clamping each stress test part 1 on a workpiece hole 24 through a U-shaped clamping plate 5, adjusting a fastening screw 7 to ensure that each stress test part 1 is completely fixed on a workpiece disc 23, placing an element to be tested in the workpiece hole 24, and controlling the distance between a bearing contact block 12 of the stress test part 1 and the element to be in a 5mm range;
2) Starting the polishing disc 22 and the workpiece disc 23 to rotate at a constant speed in the anticlockwise direction, and then starting the signal receiver 13 and the computer;
3) When the side edge of the element to be tested corresponding to the 1 st stress test part 1 rotates to the outer side of the polishing disc 22 and is perpendicular to the offset direction of the workpiece disc 23, the signal receiver 13 starts to record the load pressure data measured by each stress test part 1, receives the load pressure data measured by each stress test part 1 in real time, sends the data to a computer through a WIFI function, and displays the data in real time by the computer, and after each stress test part 1 measures m sampling points, the data recording is stopped.
In order to measure the polishing friction force of the element in the polishing process, a plurality of stress test parts 1 are sequentially arranged on a workpiece hole 24, and the polishing friction force of the element surface is obtained by measuring the positive pressure of the side surface of the element acting on the stress test parts 1. The force measured by each stress testing component 1 is positive pressure of the element acting on the surface in the vertical direction, the force can be decomposed into a component force (radial component force) along the radial direction of the polishing disc and a component force (circumferential component force) along the circumferential direction, and the radial component force and the circumferential component force of the comprehensive force of the optical element acting on each stress testing component 1 can be obtained by summing the component force and the circumferential component force respectively, namely the radial component force and the circumferential component force of the polishing friction force of the polishing disc 22 acting on the element surface.
With the offset direction of the workpiece disc 23 as the X axis, the center of the workpiece disc 23 is used as the origin to establish a rectangular coordinate system, as shown in fig. 2, at this time, the X component of the acting force F applied to the stress testing component 1 is a radial component Fx, and the Y component of the acting force F applied thereto is a circumferential component Fy, which satisfies the following formula, where θ is a phase angle:
F x ＝F cosθ；F y ＝F sinθ
the initial phase angle of each stress test element 1 at the time of starting recording data is noted as θ k K=1, …, n, and represents the 1 st, … th, n-th stress test member 1. The sampling period of each stress test element 1 is set to t(s), the rotation speed of the workpiece disk 23 is set to ω (RPM), and the data of the m sampling points measured by each stress test element 1 are recorded as F k (i) I=1, …, m. The individual stress test elements 1 rotate through an angle of sampling period ofThe phase angle corresponding to the m sampling points measured respectively is +.>Individual stress testThe radial component, circumferential component and integrated value of the sum of the forces measured at the sampling point i of the component 1 at the same instant are respectively:
thereby, the polishing friction force of the polishing pad 22 against the element surface at each time can be obtained.
Examples:
the device and the method for measuring the polishing friction force of the component in the full-caliber polishing process of the embodiment are performed on a large ring polishing machine 21, as shown in fig. 1. The polishing disk 22 has a diameter of four meters, a work disk 23 is provided above the polishing disk 22, a square work hole 24 is provided in the work disk 23, and the polishing disk 22 and the work disk 23 are driven to perform rotational movement by a servo motor.
In the embodiment, 4 stress test components 1 are adopted, as shown in fig. 2-3, the maximum measuring range of the 4 stress test components 1 is 100N, and the measuring accuracy is better than 0.2N.
The method for measuring polishing friction force comprises the following steps:
4 stress test elements 1 were mounted in a counter-clockwise arrangement on four sides of a square workpiece hole 24, namely: optionally, one stress test element 1 may be used as the 1 st stress test element, and the 2 nd, 3 rd and 4 th stress test elements may be mounted in a counter-clockwise arrangement on four sides of the square workpiece aperture 24. During installation, the U-shaped clamping plates 5 of the 4 stress test parts 1 are respectively clamped at the middle positions of the 4 sides of the square workpiece hole 24, and the fastening screw 7 is adjusted to control the distance between the movable pressing plate 9 and the inner side of the lower end side of the U-shaped clamping plates 5, so that the 4 stress test parts 1 are ensured to be completely fixed on the workpiece disc 23; placing a square element 15 in a workpiece hole 24, wherein the size of the square element 15 is 330mm multiplied by 40mm, the distance between the square element 15 and a bearing contact block 12 is 2mm, starting the counterclockwise uniform rotation motion of a polishing disc 22 and a workpiece disc 23, then starting a signal receiver 13 and a computer, and enabling the signal receiver 13 to receive load pressure data measured by 4 stress test components 1 in real time and send the data to the computer through a WIFI function, and displaying the data in real time by the computer; when the element side corresponding to the 1 st stress test part 1 rotates to the outer side of the polishing disc 22 and is perpendicular to the offset direction of the workpiece disc 23, recording data measured by 4 stress test parts 1 is started, and after the 4 stress test parts 1 measure 16000 sampling points, recording data is stopped.
As shown in fig. 3, a rectangular coordinate system XOY is established with the offset direction of the workpiece tray 23 as the X axis and the center of the workpiece tray 23 as the origin. The initial phase angle of the 4 stress test elements 1 is θ k = (k-1) pi/2, k=1, 2, 3, 4, representing the 1 st, 2 nd, 3 rd, 4 th stress test component 1. The sampling period of the 4 stress test components 1 is t=0.01(s), the rotating speed of the workpiece disc is ω=0.29 (RPM), and the data of 16000 sampling points respectively measured by the 4 stress test components 1 are recorded as F k (i) I=1, …, 16000. As shown in fig. 4, the measured values of the 4 stress test components 1 are the radial component, the circumferential component and the integrated value of the sum of the forces measured at the sampling points i of the 4 stress test components 1 at the same time are:
the results are shown in fig. 5 to 7, whereby the polishing frictional force of the polishing pad against the element surface can be obtained at various times.
Claims (8)
1. A method for measuring polishing friction, comprising the steps of:
1) Clamping each stress testing part (1) on a workpiece hole (24) through a U-shaped clamping plate (5), adjusting a fastening screw (7) to ensure that each stress testing part (1) is completely fixed on a workpiece disc (23), and placing an element to be tested in the workpiece hole (24); the measuring device of the polishing friction force measuring method comprises a plurality of stress testing components (1), wherein the stress testing components (1) comprise U-shaped clamping plates (5), stress sensors (10) are arranged on the U-shaped clamping plates (5), signal transmission lines (11) and bearing contact blocks (12) are arranged on the stress sensors (10), the signal transmission lines (11) are connected with signal receivers (13), and the signal receivers (13) send data to a computer; the signal receiver (13) is provided with a WIFI function, and can send the load force data of the bearing contact block (12) measured by the stress sensor (10) to a computer;
2) Starting the polishing disc (22) and the workpiece disc (23) to rotate at a constant speed in the anticlockwise direction, and then starting the signal receiver (13) and the computer;
3) When the side edge of the element to be tested corresponding to the 1 st stress test component (1) rotates to the outer side of the polishing disc (22) and is perpendicular to the offset direction of the workpiece disc (23), starting to record load pressure data measured by each stress test component (1), receiving the load pressure data measured by each stress test component (1) in real time by a signal receiver (13), sending the data to a computer, and stopping recording the data after measuring m sampling points by each stress test component (1); 4) The offset direction of the workpiece disc (23) is taken as an X axis, the center of the workpiece disc (23) is taken as an origin to establish a rectangular coordinate system, and the radial component, the circumferential component and the comprehensive value of the sum of the acting forces measured by the sampling points i of each stress testing component (1) at the same time are respectively as follows:
wherein:
θ k an initial phase angle for each stress test element (1) at the beginning of the recording of data;
k=1, …, n, representing the 1 st, … th, n stress test part (1);
i=1, …, m, representing the 1 st, … th, m sampling points measured by the respective stress test means (1), respectively;
F k (i) Data representing the i=1, …, m sampling points measured by each stress test component (1), respectively;
the rotation angle of each stress test component (1) in the sampling period is set as t(s) for the sampling period of each stress test component (1), the rotation speed of the workpiece disc (23) is set as omega (RPM), and the phase angles corresponding to m sampling points measured respectively are +.>
2. The method for measuring polishing friction as defined in claim 1, wherein: and step 1) placing the element to be tested in the workpiece hole (24), wherein the distance between the bearing contact block (12) of the stress test component (1) and the element is controlled within the range of 5 mm.
3. The method for measuring polishing friction as defined in claim 1, wherein: the stress test component (1) further comprises a fastening screw (7), a movable pressing plate (9) and a holding spring (8), wherein a penetrating screw hole (6) is formed in the upper end side of the U-shaped clamping plate (5), the movable pressing plate (9) is arranged between the inner side of the upper end side and the inner side of the lower end side of the U-shaped clamping plate (5), the movable pressing plate (9) is connected with the inner side of the upper end side of the U-shaped clamping plate (5) through a plurality of holding springs (8), the fastening screw (7) penetrates through the penetrating screw hole (6) to be in contact with the movable pressing plate (9), and the distance between the movable pressing plate (9) and the inner side of the lower end side of the U-shaped clamping plate (5) is adjusted through the fastening screw (7).
4. A method for measuring polishing friction as defined in claim 1 or 3, wherein: the carrier contact block (12) has a smooth surface.
5. A method for measuring polishing friction as defined in claim 1 or 3, wherein: the signal receiver (13) has a built-in battery.
6. A method for measuring polishing friction as defined in claim 1 or 3, wherein: the maximum measuring range of the stress testing component (1) is not smaller than the sum of the gravity and the loading pressure of the optical element to be tested, and the measuring precision is not smaller than 2% of the maximum measuring range.
7. A method for measuring polishing friction as defined in claim 1 or 3, wherein: for a round optical element, 3-12 stress test components (1) are arranged and uniformly distributed on a round workpiece hole.
8. A method for measuring polishing friction as defined in claim 1 or 3, wherein: for square or rectangular optical elements, 4-12 stress test elements (1) are provided, and 1-3 stress test elements (1) are provided on each side of the workpiece aperture.
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| CN210550116U (en) * | 2019-03-01 | 2020-05-19 | 中国工程物理研究院激光聚变研究中心 | Intelligent ring polishing machine tool |
| CN110153839B (en) * | 2019-06-06 | 2023-12-26 | 中国工程物理研究院激光聚变研究中心 | Full-caliber polishing immersed element processing device, processing method and polishing machine |
| CN110900356B (en) * | 2019-11-08 | 2024-10-22 | 中国工程物理研究院激光聚变研究中心 | Online detection device and method for polishing disc surface friction characteristics in full-caliber polishing |
| CN112629727B (en) * | 2020-12-14 | 2021-08-03 | 大连理工大学 | Limiting support and friction force online monitoring integrated device in annular polishing process |
| CN112683478B (en) * | 2020-12-29 | 2023-04-25 | 江苏奥斯汀光电科技股份有限公司 | Device and method for detecting impact effect of vehicle-mounted liquid crystal display |
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