CN107783207A - A kind of adjustable focus microlens array - Google Patents
A kind of adjustable focus microlens array Download PDFInfo
- Publication number
- CN107783207A CN107783207A CN201711205676.4A CN201711205676A CN107783207A CN 107783207 A CN107783207 A CN 107783207A CN 201711205676 A CN201711205676 A CN 201711205676A CN 107783207 A CN107783207 A CN 107783207A
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- Prior art keywords
- lenticule
- microlens array
- adjustable focus
- focus microlens
- substrate
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- 230000003287 optical effect Effects 0.000 claims abstract description 18
- 238000010276 construction Methods 0.000 claims abstract description 8
- 238000013519 translation Methods 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims description 30
- 230000033001 locomotion Effects 0.000 claims description 6
- 230000005619 thermoelectricity Effects 0.000 claims description 4
- 238000005452 bending Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims description 2
- 230000008901 benefit Effects 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B15/00—Optical objectives with means for varying the magnification
- G02B15/14—Optical objectives with means for varying the magnification by axial movement of one or more lenses or groups of lenses relative to the image plane for continuously varying the equivalent focal length of the objective
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The present invention relates to micro optical element technical field, and in particular to a kind of adjustable focus microlens array, it is characterised in that:Each lenticule in array has the translation freedoms along optical axis direction, so as to from its position of master regulation, realized by various means focal position from master regulation.Microlens array is simple in construction, easy to adjust, solves the problems, such as that current adjustable focus microlens structure is complicated and adjustable focus microlens array is not present.
Description
Technical field
The present invention relates to micro optical element technical field, and in particular to a kind of adjustable focus microlens array.
Background technology
Microlens array for being split light beam and being focused on respectively is one of the important devices in micro-optics field,
Optic communication, optical oomputing, light network, photoelectronic detecting array, imaging, beam shaping and control, light show, sensed etc. that numerous areas has
Extensive use.
Microlens array is by the array that clear aperature and relief depth are that micron-sized lens form, i.e. identical lens
By certain periodic arrangement in one plane, lens array is just constituted, its not only focusing with conventional lenses, imaging etc.
Basic function, and with the characteristics of unit size is small, integrated level is high so that it, which can complete traditional optical elements, to complete
Function, and many new optical systems can be formed.
Most of microlens arrays its focal length after the completion of processing and fabricating is fixed at present, thus optical property and function
Also just determine completely, it is impossible to regulated and controled.Due to the needs of control, adjustable focus microlens engender in recent years, but at present
Adjustable focus microlens be to change mirror shape by means such as power, heat, electricity to realize the regulation of focusing, such as liquid-type adjustable focus
Lenticule, complicated and volume are big；In addition, using thermal expansion mode change curvature mirror scheme implement in have energization, hair
Heat, expansion, radiating, the process shunk, wherein especially radiation processes speed is slower, and it is influenced by ambient temperature very big；Using liquid
The micro mirror of the schemes such as brilliant spatial light modulator is slower due to the pole slow-response speed thus governing speed of liquid crystal molecule.
As Fig. 1 and Fig. 2 be most conventional Nonadjustable focusing microlens array schematic diagram, usually in one piece of substrate（As melted
Quartz or silicon）Side Surface Machining go out microlens array, to realize focusing to transmitted light or reflected light.Lenticule and base
Piece surface be fixed together or itself be exactly substrate surface a part, thus focusing can not be realized.
At present still without the product appearance that can be built adjustable focus microlens as array, thus, adjustable focus microlens array
It will be a kind of product with larger application potential and wide applicability.
The content of the invention
In order to solve the above technical problems, the present invention provides a kind of adjustable focus microlens array, the letter of microlens array structure
It is single, easy to adjust, focal length of micro-lens array is simply and easily adjusted, current adjustable focus microlens structure complexity is solved and does not deposit
The adjustable focus microlens array the problem of.
Solves a kind of adjustable focus microlens array in the present invention of above technical problem, including lenticule, its feature exist
In:Each lenticule in array has the translation freedoms along optical axis direction, so as to by various means from master regulation its
Position, realize focal position from master regulation.
The microlens array is provided with elastic support structure, and one end of elastic support structure is connected with lenticule, the other end
It is connected with substrate.Lenticule is not fixed or processes in substrate surface, but is connected by elastic support structure with substrate, from
And with the translation freedoms along optical axis direction.Elastic support structure has certain bullet on lenticule optical axis direction in itself
Property, thus lenticule can free movement within the specific limits.
One end of the elastic support structure is fixedly linked with lenticule periphery, and the other end is connected with substrate.The elasticity
Supporting construction is two-end fixed beam, and two-end fixed beam has 4, and substrate is fixed at the both ends of every two-end fixed beam, and both-end is clamped
Beam is connected with lenticule, and the elastic bending of two-end fixed beam will drive lenticule to move, that is, realize elastic support structure
Function.
It is connected in the middle part of the two-end fixed beam with lenticule.
Drive device is additionally provided between the lenticule and substrate, drive device is located on substrate, and each lenticule
There is drive device corresponding.By autonomous control drive device, the position of regulation lenticule is realized, is focused so as to realize.
The drive device is piezoelectricity, thermoelectricity or electrostatic actuator, be respectively provided with simple in construction, difficulty of processing is low, operation
The advantages that simple.
The drive device is electrostatic drive electrodes, is rectangular slat film, there is 4 pieces, positioned at each two-end fixed beam
Lower section.
The lenticule both can be refractive lenticule or diffraction type lenticule；It can be transmission-type or anti-
Penetrate formula.
The present invention solves micro- by adding elastic support structure and drive device in Nonadjustable focusing microlens array
The problem of lens array can not focus, and with the advantage such as simple in construction, easy to operate.
Beneficial effects of the present invention：
A, it is simple in construction：Compared with prior art, without the adjustable focus microlens of liquid-type needed for confined space；
B, array can be realized：Method proposed by the invention can realize multiple-unit adjustable focus microlens array, and this is current
Advantage not available for other schemes；
C, governing speed is faster.
Brief description of the drawings
Below in conjunction with the accompanying drawings and embodiment does further detailed description to the present invention：
Fig. 1 is conventional Nonadjustable focusing microlens array structural representation
Fig. 2 is the schematic three dimensional views of conventional one unit of Nonadjustable focusing lenticule
Fig. 3 is adjustable focus microlens array structural representation in the present invention
Fig. 4 is the schematic three dimensional views before a unit of a specific implementation structure of adjustable focus microlens in the present invention is not focused
Fig. 5 is the schematic three dimensional views after the unit focusing of a specific implementation structure of adjustable focus microlens in the present invention
Fig. 6 is schematic diagram when each lenticule of adjustable focus microlens array in the present invention is diffraction type
Fig. 7 is schematic diagram when each lenticule of adjustable focus microlens array in the present invention is reflective
Mark is specially in figure：1. lenticule, 5. micro-reflectors, 6. substrates, 7. elastic support structures, 8. drive devices, 11.
Diffraction type lenticule, 31. two-end fixed beams, 41. electrostatic drive electrodes
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, it is right below in conjunction with drawings and Examples
The present invention is further elaborated.It should be appreciated that specific embodiment described herein is only to explain the present invention, not
For limiting the present invention.
Embodiment 1
A kind of adjustable focus microlens array, including lenticule, each lenticule in array have translation along optical axis direction from
By spending, so as to from its position of master regulation, realized by various means focal position from master regulation.
It may include to be provided with lenticule and substrate, be additionally provided with elastic support structure, one end of elastic support structure and lenticule
It is connected, the other end is connected with substrate.Lenticule is not fixed or processes in substrate surface, but by elastic support structure with
Substrate is connected, so as to the translation freedoms along optical axis direction.Elastic support structure has on lenticule optical axis direction in itself
There is certain elasticity, thus lenticule can free movement within the specific limits.
Drive device is additionally provided between lenticule and substrate, drive device is located on substrate, and each lenticule has drive
Dynamic device is corresponding.By autonomous control drive device, the position of regulation lenticule is realized, is focused so as to realize.Driving dress
Piezoelectricity, thermoelectricity or electrostatic actuator are set to, is respectively provided with the advantages that simple in construction, difficulty of processing is low, operation is simple.
Microlens array both can be refractive microlens array or diffraction type microlens array.
It is main with the microlens array of routine if Fig. 3 is adjustable focus microlens array schematic diagram proposed by the present invention
Difference is that now lenticule 1 is no longer secured to the surface of substrate 6, but is supported by elastic support structure 7, so as to hanging.Elasticity
One end of supporting construction 7 is connected with lenticule 1, and the other end is connected with substrate 6.Because elastic support structure 7 itself is in lenticule
There is certain elasticity on optical axis direction, thus lenticule 1 can free movement within the specific limits.In addition, the present invention and routine
It is exactly a drive device 8 be present that microlens array, which also has a difference, and the drive device 8 can be electrostatic, piezoelectricity or thermoelectricity
Driver, by the on-load voltage of drive device 8, so as to control the precise motion of lenticule 1, reaching the position of needs.
Embodiment 2
A kind of adjustable focus microlens array, including lenticule, each lenticule in array have translation along optical axis direction from
By spending, so as to from its position of master regulation, realized by various means focal position from master regulation.
It may include to be provided with lenticule and substrate, be additionally provided with elastic support structure, one end of elastic support structure and lenticule
It is connected, the other end is connected with substrate.Lenticule is not fixed or processes in substrate surface, but by elastic support structure with
Substrate is connected, so as to the translation freedoms along optical axis direction.Elastic support structure has on lenticule optical axis direction in itself
There is certain elasticity, thus lenticule can free movement within the specific limits.Drive device is additionally provided between lenticule and substrate,
Drive device is located on substrate, and each lenticule has drive device corresponding.
Such as Fig. 4, wherein elastic support structure is two-end fixed beam, and two-end fixed beam has 4, and the both ends of every beam are fixed on
Substrate, beam middle part is connected with lenticule, thus the elastic bending of beam will drive lenticule to move, that is, realize resilient support knot
The function of structure.The drive device is electrostatic drive electrodes, is rectangular slat film, there is 4 pieces, positioned at each two-end fixed beam
Lower section.When to electrostatic drive electrodes on-load voltage, making it electrical potential difference between two-end fixed beam be present, due to the work of electrostatic force
With, it will attract to be bent downwardly in the middle part of two-end fixed beam, drive lenticule to move downward, overall microlens array structure is formed
State as shown in Figure 5, so as to reach the purpose of focusing.
In addition to two-end fixed beam, elastic support structure can also have a variety of other forms, similarly drive device
A kind of more than structure of electrostatic drive electrodes, any modification made within the spirit and principles of the invention, equivalent substitution and
Improve etc., it should be included in the scope of the protection.
Embodiment 3
Content in other contents such as embodiment 1, microlens array both can be refractive microlens array or diffraction
Type microlens array.
For example the lenticule 1 in Fig. 1 ~ Fig. 5 is refractive lenticule, the present invention can also use diffraction type lenticule,
Reference picture 6, it is that same function is completed using diffraction type lenticule 11.In general, refractive lenticule and diffraction type are micro-
Lens respectively have advantage and disadvantage, can be selected according to different situations and application field.
Embodiment 4
Content in other contents such as embodiment 1, microlens array can be transmission-types or reflective.
For example the lenticule 1 in Fig. 1 ~ Fig. 5 is transmission-type micro mirror, the present invention can also use reflective micro mirror, reference
Fig. 7, it is that same function is completed using reflective micro mirror 5.Similarly, transmission-type and reflective micro mirror are also required to according to specific feelings
Condition uses to distinguish.
The preferred embodiments of the present invention are the foregoing is only, are merely illustrative for the purpose of the present invention, and it is nonrestrictive；
Those of ordinary skill in the art understand that can carry out many to it in the spirit and scope that the claims in the present invention are limited changes
Become, modification, or even equivalent change, but fall within protection scope of the present invention.
Claims (9)
1. a kind of adjustable focus microlens array, including lenticule and substrate, it is characterised in that:Each lenticule in the array
With the translation freedoms along optical axis direction, so as to from its position of master regulation, realized by N kinds mode focal position from homophony
Control.
A kind of 2. adjustable focus microlens array according to claim 1, it is characterised in that:The microlens array is provided with bullet
Property supporting construction, one end of elastic support structure are connected with lenticule, and the other end is connected with substrate.
A kind of 3. adjustable focus microlens array according to claim 2, it is characterised in that:The elastic support structure is double
Hold clamped beam, two-end fixed beam has 4, and substrate is fixed at the both ends of every two-end fixed beam, and two-end fixed beam every with it is micro-
Lens are connected, and the elastic bending of two-end fixed beam drives lenticule motion.
A kind of 4. adjustable focus microlens array according to claim 3, it is characterised in that:In the middle part of the two-end fixed beam with
Lenticule is connected.
A kind of 5. adjustable focus microlens array according to claim 1, it is characterised in that:Between the lenticule and substrate
Drive device is additionally provided with, drive device is located on substrate, and each lenticule has drive device corresponding.
A kind of 6. adjustable focus microlens array according to claim 5, it is characterised in that:The drive device is provided with pressure
Electricity, thermoelectricity or electrostatic actuator.
A kind of 7. adjustable focus microlens array according to claim 6, it is characterised in that:The drive device is driven for electrostatic
Moving electrode, electrostatic drive electrodes are 4 pieces, and every piece respectively positioned at the lower section of each two-end fixed beam.
A kind of 8. adjustable focus microlens array according to any one of claim 1-7, it is characterised in that:The lenticule
For refractive lenticule or diffraction type lenticule.
A kind of 9. adjustable focus microlens array according to any one of claim 1-7, it is characterised in that:The lenticule
For transmission-type or reflective.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711205676.4A CN107783207A (en) | 2017-11-27 | 2017-11-27 | A kind of adjustable focus microlens array |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711205676.4A CN107783207A (en) | 2017-11-27 | 2017-11-27 | A kind of adjustable focus microlens array |
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| CN107783207A true CN107783207A (en) | 2018-03-09 |
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| CN201711205676.4A Pending CN107783207A (en) | 2017-11-27 | 2017-11-27 | A kind of adjustable focus microlens array |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109143425A (en) * | 2018-09-27 | 2019-01-04 | 杭州行开科技有限公司 | It is a kind of for acquiring the microlens array structure of light field image |
| WO2020078903A1 (en) * | 2018-10-19 | 2020-04-23 | Osram Opto Semiconductors Gmbh | Optical display device and method for operating an optical display device |
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Application publication date: 20180309 |