CN106716187A - Optical component, optical module, and method for manufacturing optical component - Google Patents
Optical component, optical module, and method for manufacturing optical component Download PDFInfo
- Publication number
- CN106716187A CN106716187A CN201580051648.4A CN201580051648A CN106716187A CN 106716187 A CN106716187 A CN 106716187A CN 201580051648 A CN201580051648 A CN 201580051648A CN 106716187 A CN106716187 A CN 106716187A
- Authority
- CN
- China
- Prior art keywords
- lens
- prism
- light
- substrate
- integrated glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/04—Prisms
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/026—Monolithically integrated components, e.g. waveguides, monitoring photo-detectors, drivers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Optical Couplings Of Light Guides (AREA)
- Optical Elements Other Than Lenses (AREA)
- Semiconductor Lasers (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
The optical component pertaining to the present invention is provided with a substrate (1), a prism (2) disposed adjacent to a substrate top face (1a), a lens-integrated prism (4) in which a lens and a prism are integrated, and a joining member (3) for transmitting light, the prism (2) and the lens-integrated prism (4) being joined via the joining member (3), a prism bottom face (4d) of the lens-integrated prism (4) and a prism bottom face (2c) and a prism top face (2b) of the prism (2) being parallel to the substrate (1), a mirror face (4a) of the lens-integrated prism (4) and a mirror face (2a) of the prism (2) each being non-parallel to the substrate (1) and non-parallel to the optical axis of the lens of the lens-integrated prism (4), and the optical axis of the lens of the lens-integrated prism (4) being parallel to the substrate (1).
Description
Technical field
Manufacture method the present invention relates to be used for the light part, optical module and light part of optic communication etc..
Background technology
Optical module is used in the logical credit device such as optical transceiver, the optical module is by semiconductor LD (Laser Diode：
Laser diode) or PD (Photo Diode：Photodiode) etc. emitting element and lens, mirror, wave filter, plane wave
The light such as chip member storage is led in gas-tight seal 1 encapsulation with light input/output ports such as fiber optic hub mouthful.
In optical module, for the efficient connection between the optical fiber realizing emitting element and be inserted into light input/output port mouthful, need
Optical component that will accurately inside configuration packages, makes the light Lu Zhizheng of optical system be directed at emitting element, slab guide
The waveguide component of chip and the optical axis of optical fiber.But, emitting element and planar waveguide chip, the optical axis of optical fiber highly have
Deviation.Also, can also produce position to offset when die bond (die bonding) is carried out to them.Also, closed in spatial mode
Also the angle into emergent light axis can be produced to offset in channel-splitting filter.It is saturating by adjustment under normal circumstances in order to correct their skew
The position of optical component of the adjustment configuration such as angle of position, mirror and prism of mirror in optical system and angle, so as to correct
The light path central angle of optical system.
In recent years, the miniaturization of optical module and integrated is being advanced.For example have a kind of integrated disclosed in patent document 1
Optical module, the integrated optical module is integrated multiple LD elements, multiple lens and is formed by the wave multiplexer that multiple wave filters are constituted
Optical module.In integrated optical module, usual emitting element and optical component are in same installation base plate plane or limited
Two-dimensionally configured in the range of the height of system, in most cases light Lu Zhizheng is horizontal direction on installation base plate.This be because
It is, except being easily configured various parts, easily to be formed outside complicated optical system as channel join-splitting device, if stacking a large amount of parts
Then the height tolerance of each part is accumulated and causes light shaft offset.
Here in the configuration of optical component, the adjustment of position and the angle of pitch on the direction vertical with installation base plate plane
As problem.Specifically, the optical axis direction in the horizontal plane set with installation base plate level is Z axis, in the horizontal plane with light
The vertical direction of axle is X-axis, and when the direction orthogonal with the plane of installation base plate is Y-axis, the position of X-axis and angle adjustment can lead to
Cross and implement moving horizontally and carried out around the rotation of Y-axis in X-Z plane, on the other hand, the position adjustment of Y-axis and around X, Z axis
Angle adjustment be necessary to ensure that enough attachment thickness and suitably control attachment thickness i.e. height and distribution.
The attachment or Yin Re or UV (Ultra Violet of meltbility are heated using scolding tin etc. usually as attachment：It is ultraviolet
Line) light irradiation and the resin such as the acrylic acid series that solidifies or epoxy attachment, but, in these attachment solidification or
A few percent is punctured into when person solidifies.If attachment thickness is thicker, the vertical position shunk with cement part can be produced
Put skew, the horizontal position offset caused by inclined change and uneven residual stress.Also, it is thicker in attachment thickness
In the case of, the attachment of adjacent optical components flow out and interfere before curing, it is impossible to precision higher by optical component
It is fixed on desired position.Need to make attachment thickness thinning to suppress these situations, but, in this case cannot
Ensure the adjusting range of the position and angle in required vertical direction.
As the position and angle of the optical component realized in vertical direction adjustment and correct the light path of optical system
The mode at heart angle can enumerate patent document 2 and patent document 3.In patent document 2, so that the center-of-curvature line of cylindrical lens
Mode around inclined light shaft constitutes optical module.There is following method disclosed in patent document 2：Can be by making cylindrical lens
Move to change the height at lens face center in the horizontal direction, change the center line of lens face and the height at input path center
Difference, change light Lu Zhizheng the angle of pitch.Also, there is following method disclosed in patent document 3：In order in reflecting plate
On carry out around any axle angle adjustment, angle changing mechanism is formed on reflecting plate.
Prior art literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2014-102498 publications
Patent document 2：Japanese Unexamined Patent Publication 2012-083401 publications
Patent document 3：Japanese Unexamined Patent Publication 2013-205629 publications
The content of the invention
The invention problem to be solved
However, in the method described in above-mentioned patent document 2, light beam is produced on the incline direction of lens face center line
Deformation, even if optical axis alignment also can reduce coupling efficiency.Have disclosed in patent document 2 to prevent the reduction of coupling efficiency
And suppress at least less than 30 degree the inclination of central line of lens, but, in this case, in order to obtain desired optical axis correction
Angle and need significantly to move in the horizontal direction, it will produce and the interference of adjacent optical components.Also, in optical axis horizontal plane
The correction of light path central angle additionally need optical component.
Also, in the method described in patent document 3, need configuration a large amount of in the case of the complicated optical system of assembling
Reflecting plate and adjust each reflecting plate, it is necessary to the position alignment of each reflecting plate and the pivot that aligns.Want to realize the situation,
Need to import complicated mechanism to temporarily keeping and configure the head of reflecting plate.
What the present invention was exactly completed in view of the foregoing, it is intended that obtaining suitably adjusting hanging down for light path
Straight position and the light part of the angle of pitch.
Means for solving the problems
Achieved the goal to solve above-mentioned problem, it is a feature of the present invention that light part has：Substrate；Prism, its with
The upper surface of the substrate is mutually grounded configuration；Lens integrated glass prism, it forms lens and prism integration；And connect
Part is closed, it passes through light, and the prism is engaged with the lens integrated glass prism via the attachment, described
The lower surface in the face of prism side, the prism described in of mirror integrated glass prism connect as the upper surface with the substrate
Face lower surface and the prism upper surface it is parallel with the upper surface of the substrate, the lens integrated glass prism and rib
The minute surface of mirror is not parallel with the upper surface of the substrate respectively and not parallel with the optical axis of the lens of the lens integrated glass prism,
The light Lu Zhizheng for inciding the light of the prism is parallel with the upper surface of the substrate, the lens of the lens integrated glass prism
Optical axis is parallel with the upper surface of the substrate.
Invention effect
Smooth part of the invention plays the effect of the upright position and the angle of pitch that can suitably adjust light path.
Brief description of the drawings
Fig. 1 is the sectional view of the light part of implementation method 1.
Fig. 2 is the figure of of the manufacture method of the light part for showing implementation method 1.
Fig. 3 is the figure of of the manufacture method of the light part for showing implementation method 1.
Fig. 4 is shown during the light part of implementation method 1 from the light Lu Zhizheng in the case of -Z direction incident light
The figure of of track.
Fig. 5 is the figure of the sectional view of the light part for showing implementation method 2.
Fig. 6 is the sectional view of the light part of implementation method 3.
Fig. 7 is the sectional view of the light part of implementation method 4.
Fig. 8 is the top view of the light part of the implementation method 4 with multiple LD and secondary pedestal.
Fig. 9 is the sectional view of the light part of implementation method 5.
Figure 10 is the sectional view of the light part of implementation method 6.
Specific embodiment
Hereinafter, the reality of the manufacture method of smooth part of the invention, optical module and light part is explained with reference to the accompanying drawings
Apply mode.In addition, the invention is not restricted to present embodiment.Also, in drawings identified below, sometimes for being readily appreciated that and
Make the ratio of each part different from reality, be also identical between each accompanying drawing.
Implementation method 1
Fig. 1 is the figure of the sectional view of the light part for showing embodiments of the present invention 1.The light component mounting of present embodiment
On optical module in such as optical communication apparatus.As shown in figure 1, the light part of present embodiment has：By ceramics or glass
The prism 2 that the substrate 1 formed Deng face precision material higher connects with the 1st face of substrate 1 connects with prism 2 with substrate 1
The opposite face in the face attachment 3 that connect and formed and integrated with the lens that prism 2 is engaged via attachment 3
Prism 4.Figure 1 illustrates the example that convex lens are formed in lens integrated glass prism 4.
As shown in figure 1, the face connected with prism 2 for setting substrate 1 is upper surface of base plate 1a.Also, set the minute surface of prism 2 as
Minute surface 2a, if the face connected with substrate 1 of prism 2 is prism lower surface 2c, if rib when prism lower surface 2c is the back side of prism 2
The face equivalent to table side face of mirror 2 is prism upper surface 2b.Also, it is minute surface 4a to set the minute surface of lens integrated glass prism 4, if shape
Into being lens face 4b in the surface of the lens on lens integrated glass prism 4, if the face of the formation lens of lens integrated glass prism 4 is
Lens interarea 4c, if the face connected with attachment 3 of lens integrated glass prism 4 is prism lower surface 4d.In addition, will be from substrate
1 is referred to as upper direction towards the direction of prism 2, will be referred to as lower direction from prism 2 towards the direction of substrate 1, by the top of each part
To face be referred to as upper surface, the face in lower direction is referred to as lower surface.
Even if attachment 3 are the attachment that transparent light is passed through, what is preferably solidified by heat or UV irradiations is transparent
Resin-bonded agent.The Thermocurable cement solidified by heat has bond strength higher and has reliability.Shone because of UV
Convenience is superior when the ultra-violet solidified cement penetrated and solidify engages multiple optical elements, if being individually arranged each
Optical element and be fixed.Also have after solidifying because UV irradiates in UV solidification cements and further heat and improve
The UV solidification cements of bond strength, when using such cement, convenience and heat cure with UV solidification cements
The reliability both sides of cement, therefore more preferably.
The prism lower surface 4d of lens integrated glass prism 4 is joined to the prism upper surface of prism 2 via attachment 3
2b.Prism 2 and lens integrated glass prism 4 are preferably identical material or the close material of linear expansion coefficient.Using identical
Material or the close material of linear expansion coefficient in the case of, when as engagement solidification in heated in the case of,
The prism 2 and lens that the stripping of the prism 2 and lens integrated glass prism 4 caused by heating can be suppressed and caused by heating
Position skew before and after the engagement of integrated glass prism 4.
Under normal circumstances, prism 2, the material of lens integrated glass prism 4 are glass, plastics, resin, but it is swollen to preferably use line
The swollen less glass of coefficient.By using the less glass of linear expansion coefficient, can suppress relative to carrying present embodiment
The light shaft offset of the temperature change when optical module of light part is acted.
Upper surface of base plate 1a, prism upper surface 2b, prism lower surface 2c, 4d is preferably parallel for prism lower surface, forms saturating
The lens interarea 4c of minute surface 4b is preferably vertical with upper surface of base plate 1a.Also, the minute surface 2a and lens integrated glass prism 4 of prism 2
Minute surface 4a it is not parallel with upper surface of base plate 1a respectively.Also, the minute surface 2a of the prism 2 and minute surface 4a of lens integrated glass prism 4
Optical axis respectively with the lens of lens integrated glass prism 4 is not parallel.In addition, the minute surface 2a of prism 2 and lens integrated glass prism 4
Minute surface 4a is preferably respectively with upper surface of base plate 1a in 45 degree of angle.
Also, it is Z axis to set light to the incident direction of light part, is located at side vertical with Z axis in the face of upper surface of base plate 1a
To being X-axis, if the direction orthogonal with upper surface of base plate 1a is Y-axis.Here, suppose that with upper surface of base plate 1a abreast from -Z direction
Incident light.
Then, the manufacture method to the light part of present embodiment is illustrated.Fig. 2,3 are the light for showing present embodiment
The figure of the manufacture method of part.First, as shown in Fig. 2 as step 1, with prism lower surface 2c and the upper surface of base plate of substrate 1
The mode that 1a connects configures prism 2, the 2b configurations attachment 3 in prism upper surface.Then, as step 2, as shown in figure 3,
Before attachment 3 solidify, lens integrated glass prism 4 is mutually grounded configuration with attachment 3, as described later, make lens integrally
Change prism 4 to be moved on the optical axis direction of the incident light of light part, thus adjust the angle of pitch of the light projected from light part.So
Afterwards, as step 3, solidify attachment 3.
Then, the height of optical system and the method for adjustment of the angle of pitch to the present embodiment in above-mentioned steps 2 are carried out
Explanation.In the present embodiment, fixed prism 2 on substrate 1, lens integrated glass prism 4 was made before attachment 3 are solidified
With light path center parallel it is mobile, thus adjust from light part project light height and the angle of pitch.
Fig. 4 is to show the figure from of the track of the light Lu Zhizheng in the case of -Z direction incident light.As shown in figure 4,
If the light Lu Zhizheng of the light to light Lu Zhizheng of light part when incident to the incidence of prism 2 is light Lu Zhizheng 5a.Light Lu Zhizheng 5a
It is parallel with substrate 1 (upper surface of base plate 1a).In addition, omitting the diagram of substrate 1 in fig. 4.If the face of-Z sides of prism 2 is side
2d.Light can be reflected under normal circumstances when incident to prism 2.If inciding the light Lu Zhizheng of the light after prism 2 in light path
Heart 5b.Also, light is reflected by minute surface 2a.If the light Lu Zhizheng of the light after being reflected by minute surface 2a is light Lu Zhizheng 5c.And then, light is saturating
Cross attachment 3 and incide lens integrated glass prism 4.In addition, it is assumed that lens integrated glass prism 4 is configured in ZX faces wearing
The position that the light crossed after light Lu Zhizheng 5c can be reflected by minute surface 4a.If in inciding the light path of the light of lens integrated glass prism 4
The heart is light Lu Zhizheng 5d.The light for inciding lens integrated glass prism 4 is reflected by minute surface 4a.If the light of the light after being reflected by minute surface 4a
Lu Zhizheng is light Lu Zhizheng 5e.Light after being reflected by minute surface 4a passes through lens face 4b.If through in the light path of the light of lens face 4b
The heart is light Lu Zhizheng 5f.The optical axis of the lens of lens integrated glass prism 4 is parallel with substrate 1 (upper surface of base plate 1a).
In the case of the radius of curvature infinity of lens face 4b, i.e. under lens face 4b is for the limiting case of plane, if
The minute surface 2a of prism 2 is parallel with the minute surface 4a of lens integrated glass prism 4 and side 2d of prism 2 and lens integrated glass prism 4
4c is parallel for lens interarea, then the optical component is parallel with the light Lu Zhizheng 5f after passing through through preceding light Lu Zhizheng 5a.Here,
Consider fixed prism 2 and lens integrated glass prism 4 is moved parallel to light Lu Zhizheng 5a, adjust the prism 2 fixed with it is saturating
The horizontal relative position of mirror integrated glass prism 4.In this case, the upright position of light Lu Zhizheng 5e is the position in Y direction
Position according to lens integrated glass prism 4 and change.Position in the Z-direction of the lens integrated glass prism 4 of the example for setting Fig. 4
When being set to 1 position, on the 2nd position after making lens integrated glass prism 4 be moved along -Z direction, light Lu Zhizheng 5d is by minute surface 4a
The position of reflection than lens integrated glass prism 4 be located at 1 position when it is high.
Here in the case where the radius of curvature of lens face 4b is limited, when the Level Change of light Lu Zhizheng 5e, with lens
The off-centring ground of face 4b is incident, the angle of emergence change of light Lu Zhizheng 5f.So, by making lens integrated glass prism 4 in light path
The side of center 5a moves up, and is free to adjust the angle of pitch of light Lu Zhizheng 5f.Also, by making lens integrated glass prism
4 move up in the horizontal plane of substrate 1 in the side vertical with light Lu Zhizheng 5a, can adjust the light Lu Zhizheng 5f in horizontal plane
Angle.As described above, solidify attachment 3 after the adjustment for carrying out angle, thus, it is possible to keep the angle after adjustment
Degree.
As described above, in the light part of present embodiment, by make lens integrated glass prism 4 on prism 2 flatly
It is mobile, can freely control the angle as the light Lu Zhizheng 5f of the outgoing beam of the light projected from light part.Also, if
Outgoing beam is collimated light, then beam angle is deflected and can be controlled by the position equivalence of the picture of lens light gathering, correspondence
In the position control of light path.Even also, non-collimated light, the Angulation changes of light Lu Zhizheng also correspond to control real image and
The position of the virtual image, it is particularly useful.Therefore, outgoing beam is that collimated light is not necessary condition.
Additionally, in the case where non-collimated light is converted into collimated light using lens, be typically due to the relation of focal length without
Lens can be made to move in the direction of the optical axis.But, in the optical component of present embodiment, in the minute surface 2a and lens of prism 2
In the case that the minute surface 4a of integrated glass prism 4 is parallel, regardless of whether making lens, heart 5a side moves up in the optical path, can expire
Foot collimation condition.That is, the horizontal relative position of lens integrated glass prism 4 and prism 2 on optical path direction is not dependent on, can
Fixed light path center 5d and light Lu Zhizheng 5e apart from sum, therefore, easily realize the state that outgoing beam is collimation.
Control described above can by make lens integrated glass prism 4 on the prism 2 only in horizontal direction on move come
Realize, therefore attachment 3 need not be thickeied.Therefore, it is possible to suppress attachment 3 solidify when contraction, can expect with compared with
Positional precision high is installed.
In addition, the optical module in optical communication apparatus is here as listed using the device of the light part of present embodiment,
But, the optical module in optical communication apparatus being not limited to using the device of the light part of present embodiment, can be applied to use light
The device in the various fields of system.As one, it is also possible to be applied to small-sized camera, seat etc. sensor, to swash
The processing laser that optical arrays are focused.
Also, figure 1 illustrates the example of the formation convex lens on lens integrated glass prism 4, but it is also possible to
Concavees lens face is formed on lens integrated glass prism 4.Also, lens integrated glass prism 4 be not limited to it is integrally formed, as long as in lens
The integrated rib of the lens fitted by the heart is fixed with the relative altitude of prism centers, or by lens and prism
Mirror or lens integrated glass prism that lens and prism are fixed on shared substrate etc..
Implementation method 2
Fig. 5 is the figure of the sectional view of the light part for showing embodiments of the present invention 2.Present embodiment is implementation method 1
Variation.As shown in figure 5, the light part of present embodiment adds mutually to be grounded with substrate 1 in the light part of implementation method 1 matching somebody with somebody
The platform 6 put and the lens 7 that configuration is mutually grounded with platform 6.As shown in figure 5, the lower surface of platform 6 connects with upper surface of base plate 1a, platform 6
Upper surface connects with lens 7.In addition, in the present embodiment, when the lens of lens integrated glass prism 4 are referred to as into 1 lens,
Lens 7 are the 2nd lens.Lens 7 are configured to relative with the lens face 4b of lens integrated glass prism 4.Lens 7 are configured in can
Receive from the position of the light of lens face 4b injections.Pair with the identical structural element of implementation method 1 mark it is identical with implementation method 1
Label and the repetitive description thereof will be omitted.Hereinafter, pair aspect different from implementation method 1 is illustrated.
In the case of implementation method 1, in the case of not being collimated light in the light that lens face 4b is projected, by making lens
Integrated glass prism 4 is that light Lu Zhizheng 5a side moves up and the real image of light after making injection and the formation of the virtual image in optical axis direction
Position offsets in optical axis direction.Moved in the direction of the optical axis by making lens 7, the forming position of real image and the virtual image can be corrected.
In addition, the optical axis of lens 7 is preferably parallel with upper surface of base plate 1a.Also, according to present embodiment, can enter to exercise by lens face
Light after 4b convergences again returns to being adjusted flexibly for the beam shape on the optical axis directions such as collimated light.
In addition, in the configuration example of Fig. 5, lens 7 are configured on platform 6, but, platform 6 is not required, and can make platform 6
With the sharing of prism 2, it is also possible to directly configure lens 7 on substrate 1, can also be come using the ladder being formed on substrate 1
Substitution platform 6.
Implementation method 3
Fig. 6 is the sectional view of the light part of embodiments of the present invention 3.Present embodiment is the variation of implementation method 1.
As shown in fig. 6, the light part of present embodiment adds the prism 8 that configuration is mutually grounded with substrate 1 in the light part of implementation method 1
And the prism 9 of configuration is mutually grounded with prism 8.As shown in fig. 6, the lower surface of prism 8 connects with upper surface of base plate 1a, prism 8
Upper surface connects with prism 9.Also, prism 9 is configured on the position of the light that can receive to project from lens face 4b.In addition,
In the present embodiment, when prism 2 is referred to as into 1 prism, prism 8 is the 2nd prism, and prism 9 is the 3rd prism.Pair with implement
The identical structural element of mode 1 mark with the identical label of implementation method 1 and the repetitive description thereof will be omitted.And embodiment party hereinafter, pair
The different aspect of formula 1 is illustrated.
The minute surface of prism 8 and prism 9 is not parallel with upper surface of base plate 1a respectively.The minute surface of prism 8 and the minute surface of prism 9
Can be with not parallel.In the present embodiment, the light after being moved upward by prism 2 and lens integrated glass prism 4 can be made
Axle returns to lower section.The height of optical axis alignment is the basic of optical system, also, the optical module being prescribed in the position for projecting window
Medium-altitude adjustment is especially important key element.Prism 8 and the horizontal direction of prism 9 are that the optical axis in ZX faces can also differ
Cause.Can also for example be rotated around Y-axis relative to the optical axis of prism 8 by making the optical axis of prism 9, make the light from present embodiment
The horizontal direction deflection of the outgoing beam of part.Also, prism 8,9 need not necessarily be individually arranged, it is also possible to as
The parallelogram prism of one and configure on substrate 1.
Implementation method 4
Fig. 7 is the sectional view of the light part of embodiments of the present invention 4.Present embodiment is the variation of implementation method 1.
As shown in fig. 7, the light part of present embodiment adds the ladder that configuration is mutually grounded with substrate 1 in the light part of implementation method 1
The 10 secondary pedestals (sub mount) 11 for being mutually grounded configuration with ladder 10, as the light-emitting component for being mutually grounded with secondary pedestal 11 configuration
LD 12 and the lens 13 of configuration are mutually grounded with substrate 1.As shown in fig. 7, the lower surface of ladder 10 and upper surface of base plate 1a
Connect, the upper surface of ladder 10 connects with the lower surface of secondary pedestal 11, and the upper surface of secondary pedestal 11 connects with LD 12.Also, thoroughly
Mirror 13 is configured on the position of the light that can receive to project from LD 12, and prism 2 is configured in can be received to be projected from lens 13
Light position on.In addition, in the present embodiment, when the lens of lens integrated glass prism 4 are referred to as into 1 lens, lens
13 is the 2nd lens.Lens 13 are configured to relative with prism 2.Pair with the identical structural element of implementation method 1 mark and embodiment party
The identical label of formula 1 and the repetitive description thereof will be omitted.Hereinafter, pair aspect different from implementation method 1 is illustrated.
When in implementation method 1 by incident outgoing extended corner light beam wider, except the rib integrated with lens of prism 2
The light that position beyond the junction surface of mirror 4 passes through cannot carry out projecting the adjustment of light path, as the loss of so-called vignetting.In this implementation
In mode, though in the case where the LD 12 of the generation larger light of outgoing extended corner is used as light source, by lens 13 make from
The light of the outputs of LD 12 turns into the narrower light beam of outgoing extended corner, thus can also suppress vignetting loss.Generally, although LD 12,
Secondary pedestal 11, ladder 10, prism 2, lens integrated glass prism 4 can produce height tolerance, but, the optical axis caused by height tolerance
Skew can be carried out by moving up the side of the heart 5a in the optical path of lens integrated glass prism 4 as tdescribed in embodiment 1
Correction.Also, by configure each part so that from LD12 export light be converged after through lens 13, thus, it is possible to reduce
Vignetting loss in prism 2 and lens integrated glass prism 4.
Also, in the present embodiment, due to LD 12 optical axis height than through the light after lens integrated glass prism 4
The height of axle is low, therefore, in the case where light part is installed into encapsulation, LD 12 easily makes LD 12 close to the bottom surface of encapsulation
Heating to outside encapsulation radiate.
In the present embodiment, it is that the example of LD 12 is illustrated to the incident source of light, but is not limited to LD 12, in light
Incident source be the waveguide of wave multiplexer chip, waveguide-type light receiving element and manufacturing method thereof, side incident type photo detector, optical fiber etc. in the case of,
Also can apply and use the method for adjustment of said lens 13.Also, in the present embodiment, to the incident direction of light relative to base
The example of the level of plate 1 is illustrated, but, even if in the case where the incident direction of light is vertical with substrate 1, it is also possible to pass through
Turn into the light path parallel with substrate 1 using mirror reflection etc., so as to carry out identical adjustment.
In addition, ladder 10 is used to correct the difference in height of LD 12 and secondary pedestal 11 and lens 13, do not needing
Can also not have ladder 10 in the case of calibrated altitude difference.
Also, LD and secondary pedestal are not limited to 1, it would however also be possible to employ be abreast configured with the structure of multiple LD and secondary pedestal.
Fig. 8 is the top view of the light part of the present embodiment with multiple LD and secondary pedestal.As shown in figure 8, on ladder 10 side by side
The secondary pedestal 11-1~11-4 of ground configuration, configures LD 12-1~12-4 on each secondary pedestal 11-1~11-4.Also, with LD 12-1
~12-4 respectively correspondingly configures on substrate 1 lens 13-1~13-4, and lens integrated glass prism 4-1~4-4 configurations are existed
On prism 2.Multiple LD and secondary pedestal are generally so abreast configured in integrated optical module, thus, is easily input into each LD defeated
Go out high frequency electrical signal.In addition, the deviation in order to suppress short transverse, preferably makes the sharing of ladder 10.More preferably make secondary pedestal 11
Sharing and each LD of flip-chip configuration or integrated multiple can project access ports in LD itself on secondary pedestal 11.By making
LD has multiple injection access ports, can be coupled with multi-core fiber or be collected by wave multiplexer, can increase transmit capacity.It is special
Be not when LD can be configured in the state of multiple relative altitudes and relative spacing for projecting access ports is critically aligned,
Can collectively be installed using lens array, convenience is improved.Also, lens 13-1~13-4 can also be lenticule battle array
Row.Figure 8 illustrates the example with 4 LD and secondary pedestal, but, the quantity of LD and secondary pedestal is not limited to 4.
Implementation method 5
Fig. 9 is the sectional view of the light part of embodiments of the present invention 5.Present embodiment is the variation of implementation method 4.
As shown in figure 9, the light part of present embodiment is added as the photo detector for determining luminous intensity in the light part of implementation method 4
Monitoring PD 14.Monitor that the active aspect of PD 14 is parallel with substrate 1.In addition, omitting in fig .9 for fixed surveillance PD 14
Structure diagram.Monitoring the fixing means of PD 14 can use any method, but, can be used as one as follows
Method：Bridge pier is erect on substrate 1, and the monitoring PD substrates for being pasted with monitoring PD 14 are carried on bridge pier.Pair and implementation method
4 identical structural elements mark with the identical label of implementation method 4 and the repetitive description thereof will be omitted.Hereinafter, pair with implementation method 4 not
Same aspect is illustrated.
In the present embodiment, the reflectivity of the minute surface 4a of lens integration mirror 4 is somewhat declined, make to incide minute surface 4a
Light pass through certain ratio.Thus, a part for the light exported from LD 12 is projected to the top of lens integration mirror 4.It is configured
The light of the top of lens integration mirror 4 is injected into monitoring PD 14 receiving relative with the upper surface of lens integration mirror 4, by
This, can monitor the luminous intensity of LD 12., it is necessary to monitor the monitoring PD 14 of the luminous intensity of LD 12 in this wise in optical module.Have
When at the rear of LD 12 be configuration driven device in -Z direction, be difficult in this case will monitoring PD configurations at rear.To monitor
In the case that PD configurations are in Z-direction in front, additional prism is needed under normal circumstances and light path is separated a part, due to this
The light part of implementation method has had lens integrated glass prism 4, therefore, it is possible to easily real in the case of not new additional prism
The now front configuration of monitoring PD 14.
Also, due to that can be configured such that the real image of the LD 12 that lens 13 are formed is coupling on monitoring PD 14, because
This, compared with the situation without lens 13, can reduce the size of monitoring PD 14, can realize the suppression and monitoring of veiling glare
The cost cutting of PD.Further, it is possible to carry out position adjustment on the basis of by monitoring the luminous intensity that PD 14 is monitored.For example,
By monitor the luminous intensities that monitor of PD 14 in the case of less it is believed that position skew is larger, therefore, it is possible to by making lens one
Body mirror 4 is moved so that luminous intensity becomes greatly to carry out position adjustment.
Implementation method 6
Figure 10 is the figure of the sectional view of the light part for showing embodiments of the present invention 6.Present embodiment is implementation method 4
Variation.As shown in Figure 10, the light part of present embodiment adds what is connected with substrate 1 in the light part of implementation method 4
Platform 15 and the lens 16 connected with platform 15 and waveguide 17.Also, it is in the present embodiment, during fabrication, incident using observation
The observation device 18,19 of light.As shown in Figure 10, the lower surface of platform 15 connects with upper surface of base plate 1a, the upper surface of platform 15 with it is saturating
Mirror 16 and waveguide 17 connect.Also, lens 16 are configured on the position of the light that can receive to project from lens face 4b, waveguide 17
It is configured on the position of the light that can receive to project from lens 16.In addition, in the present embodiment, by lens integration rib
The lens of mirror 4 are referred to as the 1st lens, and when lens 13 are referred to as into 2 lens, lens 16 are the 3rd lens.Lens 16 be configured to thoroughly
The lens face 4b of mirror integrated glass prism 4 is relative.Also, waveguide 17 configures the outgoing in lens 16 in the mode relative with lens 16
Side.Pair with the identical structural element of implementation method 4 mark with the identical label of implementation method 4 and the repetitive description thereof will be omitted.Hereinafter,
Pair aspect different from implementation method 4 is illustrated.
In the present embodiment, from LD 12 project and through lens face 4b after just collimated light in the case of, lens
16 assemble incident to waveguide 17 from the light of lens face 4b injections.The situation of the just non-collimated light after through lens face 4b
Under, it is also possible to without lens 16.Observation device 18,19 is only used during fabrication, therefore, it can not be light part, optical module
And the structural element of the manufacture method of light part.
After the configuration for securing LD 12 and waveguide 17, can be by making lens integrated glass prism 4 and lens 16 in water
Square move up and adjust optical axis.Here, the reflectivity of the minute surface 4a of lens integrated glass prism 4 is somewhat declined, make incidence
Light to minute surface 4a passes through certain ratio.Also, work as the side that observation device 18,19 is arranged respectively at lens integrated glass prism 4
When face, upper surface direction, can observe that the optical axis of the injection light from LD 12 is inclined with the optical axis of the outgoing end face of waveguide 17
Move.Specifically, the injection light from LD 12 is made to converge to the end face of waveguide 17 using lens 16.Light after the convergence is in ripple
Lead and scattered on 17 end face, the light can be observed through lens integrated glass prism 4 by observation device 18.Here, when making light also
When being round about that -Z direction is projected from waveguide 17, the injection light can be through lens integrated glass prism 4 by observation device
18 observations.As a result, observation device 18 can observe the injection light both sides for projecting light and waveguide 17 from LD 12, can
The optical axis of both adjustment.In the case of using observation device 19, the injection light for carrying out self-waveguide 17 can be observed in the end faces of LD 12
On be converged and the light after scattering and the injection light from LD 12.On observation device 18 and observation device 19, it is possible to use appoint
Anticipate a side, it is also possible to uses both sides.
Implementation method 7
Then, the light part to embodiments of the present invention 7 is illustrated.In the present embodiment, by implementation method 1~
Light part described in implementation method 6 is sealed in metal or resin-encapsulated.Thus, can obtain being able to ensure that air-tightness, energy
Enough absorb impact, easily carry, be easily connected with miscellaneous part and other effects.
Structure shown in implementation method above shows of present disclosure, it is also possible to other known technology group
Close, can also without departing from the scope of the subject in the invention omit, change a part for structure.
Label declaration
1：Substrate；1a：Upper surface of base plate；2、8、9：Prism；2a、4a：Minute surface；2b：Prism upper surface；2c、4d：Under prism
Surface；3：Attachment；4th, 4-1~4-4：Lens integrated glass prism；4b：Lens face；4c：Lens interarea；5a、5b、5c、5d、
5e、5f：Light Lu Zhizheng；6、15：Platform；7th, 13,13-1~13-4,16：Lens；10：Ladder；11st, 11-1~11-4：Secondary pedestal；
12nd, 12-1~12-4：LD；14：Monitoring PD；17：Waveguide.
Claims (15)
1. a kind of smooth part, it is characterised in that the light part has：
Substrate；
Prism, it is mutually grounded configuration with the upper surface of the substrate；
Lens integrated glass prism, it forms lens and prism integration；And
Attachment, it passes through light,
The prism is engaged with the lens integrated glass prism via the attachment,
The lens integrated glass prism described in the lower surface in the face of prism side, the prism as with the substrate
The upper surface of the lower surface in the face that upper surface connects and the prism is parallel with the upper surface of the substrate,
The minute surface of the lens integrated glass prism and prism it is not parallel with the upper surface of the substrate respectively and with the lens one
The optical axis of the lens of body prism is not parallel,
The light Lu Zhizheng for inciding the light of the prism is parallel with the upper surface of the substrate, the lens integrated glass prism it is saturating
The optical axis of mirror is parallel with the upper surface of the substrate.
2. smooth part according to claim 1, it is characterised in that
The attachment are Thermocurable cement or ultraviolet curing cement.
3. smooth part according to claim 1 and 2, it is characterised in that
The lens of the lens integrated glass prism are convex lens.
4. smooth part according to claim 1 and 2, it is characterised in that
The lens of the lens integrated glass prism are concavees lens.
5. the light part described in any one in Claims 1 to 4, it is characterised in that
The light part also has the 2nd lens, and the 2nd lens are configured to the with the lens as the lens integrated glass prism
The lens face of 1 lens is relative,
2nd lens are configured in the upper surface of the substrate,
The optical axis of the 2nd lens is parallel with the upper surface of the substrate.
6. the light part described in any one in Claims 1 to 4, it is characterised in that
The light part also has：
Platform, its upper surface for being configured in the substrate；And
2nd lens, its be configured to it is relative with the lens face of the 1st lens of the lens as the lens integrated glass prism,
2nd lens are configured in the upper surface of described,
The optical axis of the 2nd lens is parallel with the upper surface of the substrate.
7. the light part described in any one in Claims 1 to 4, it is characterised in that
If the prism is the 1st prism,
The light part also has：
2nd prism, it is mutually grounded configuration with the upper surface of the substrate；And
3rd prism, it is mutually grounded configuration with the upper surface of the 2nd prism,
The minute surface of the 2nd prism and the 3rd prism is not parallel with the substrate respectively.
8. the light part described in any one in Claims 1 to 4, it is characterised in that
If the lens of the lens integrated glass prism are the 1st lens,
The light part also has：
Light-emitting component；And
2nd lens, its assemble the light that is projected from the light-emitting component and to the prism incidence.
9. smooth part according to claim 8, it is characterised in that
The light part has multiple lens integrated glass prisms, multiple 2nd lens and multiple luminous units respectively
Part.
10. smooth part according to claim 8, it is characterised in that
The light part also have photo detector, the photo detector be configured to it is relative with the upper surface of the prism,
The active aspect of the photo detector and the substrate-parallel.
11. smooth parts according to claim 8, it is characterised in that
The light part also has：
3rd lens, it is configured to relative with the lens face of the 1st lens；And
Waveguide, it is configured to relative with the lens face of the 3rd lens in the exiting side of the 3rd lens.
Light part described in 12. any one in claim 1~11, it is characterised in that
The minute surface of the lens integrated glass prism is parallel with the minute surface of the prism.
Light part described in 13. any one in claim 1~12, it is characterised in that
The light part is sealed in metal or resin-encapsulated.
A kind of 14. optical modules, it is characterised in that
The optical module has the light part described in any one in claim 1~13.
15. a kind of manufacture methods of smooth part, it is characterised in that the manufacture method of the light part has：
1st step, the upper surface with substrate is mutually grounded configuration prism, is configured to engage the prism and lens integrated glass prism
Attachment；
Second step, before attachment solidification, the integrated rib of the configuration lens is mutually grounded with the attachment
Mirror, makes the lens integrated glass prism be moved on the optical axis direction of the incident light of the smooth part, thus adjusts from the light
The angle of pitch of the light that part is projected；And
Third step, solidifies the attachment after the second step,
The attachment are the parts for passing through light,
The lens integrated glass prism described in the lower surface in the face of prism side, the prism as with the substrate
The upper surface of the lower surface in the face that upper surface connects and the prism is parallel with the upper surface of the substrate,
The minute surface of the lens integrated glass prism and prism it is not parallel with the substrate respectively and with the lens integrated glass prism
Lens optical axis it is not parallel,
The light Lu Zhizheng for inciding the light of the prism is parallel with the upper surface of the substrate, the lens integrated glass prism it is saturating
The optical axis of mirror is parallel with the upper surface of the substrate.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014-204114 | 2014-10-02 | ||
| JP2014204114 | 2014-10-02 | ||
| PCT/JP2015/062153 WO2016051836A1 (en) | 2014-10-02 | 2015-04-21 | Optical component, optical module, and method for manufacturing optical component |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106716187A true CN106716187A (en) | 2017-05-24 |
| CN106716187B CN106716187B (en) | 2018-05-15 |
Family
ID=55629893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580051648.4A Expired - Fee Related CN106716187B (en) | 2014-10-02 | 2015-04-21 | The manufacture method of light component, optical module and light component |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6230720B2 (en) |
| CN (1) | CN106716187B (en) |
| WO (1) | WO2016051836A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110058355A (en) * | 2019-03-19 | 2019-07-26 | 武汉光迅科技股份有限公司 | A kind of automatic coupling device and automatic coupling method |
| CN111239931A (en) * | 2018-11-01 | 2020-06-05 | 青岛海信宽带多媒体技术有限公司 | Coupling method of light emitter and light emitter |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018190864A (en) * | 2017-05-09 | 2018-11-29 | ウシオ電機株式会社 | Semiconductor laser device |
| WO2020194501A1 (en) * | 2019-03-26 | 2020-10-01 | 三菱電機株式会社 | Semiconductor laser light source device |
| JP7460880B2 (en) | 2019-10-31 | 2024-04-03 | 日亜化学工業株式会社 | Light-emitting device |
| CN113484850B (en) * | 2021-07-31 | 2024-07-02 | 武夷科技信息(北京)有限公司 | Three-dimensional laser radar |
| JP2024018651A (en) | 2022-07-29 | 2024-02-08 | 日亜化学工業株式会社 | light emitting module |
| JP7518404B2 (en) | 2022-07-29 | 2024-07-18 | 日亜化学工業株式会社 | Light-emitting device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10339851A (en) * | 1997-06-06 | 1998-12-22 | Shin Etsu Chem Co Ltd | Optical circulator |
| CN1746710A (en) * | 2004-09-06 | 2006-03-15 | 三菱电机株式会社 | Optical transmitter and receiver module |
| WO2013099685A1 (en) * | 2011-12-28 | 2013-07-04 | 日本電気株式会社 | Optical module and method for manufacturing same |
| WO2014034428A1 (en) * | 2012-08-29 | 2014-03-06 | 株式会社フジクラ | Light guiding device, method for producing same, and ld module |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3735146B2 (en) * | 1995-09-20 | 2006-01-18 | オリンパス株式会社 | Optical axis adjustment mechanism and optical axis adjustment method |
| JP3837689B2 (en) * | 1999-10-13 | 2006-10-25 | 富士通株式会社 | Optical module testing machine, adjusting device and adjusting method |
-
2015
- 2015-04-21 WO PCT/JP2015/062153 patent/WO2016051836A1/en active Application Filing
- 2015-04-21 CN CN201580051648.4A patent/CN106716187B/en not_active Expired - Fee Related
- 2015-04-21 JP JP2016551569A patent/JP6230720B2/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10339851A (en) * | 1997-06-06 | 1998-12-22 | Shin Etsu Chem Co Ltd | Optical circulator |
| CN1746710A (en) * | 2004-09-06 | 2006-03-15 | 三菱电机株式会社 | Optical transmitter and receiver module |
| WO2013099685A1 (en) * | 2011-12-28 | 2013-07-04 | 日本電気株式会社 | Optical module and method for manufacturing same |
| WO2014034428A1 (en) * | 2012-08-29 | 2014-03-06 | 株式会社フジクラ | Light guiding device, method for producing same, and ld module |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111239931A (en) * | 2018-11-01 | 2020-06-05 | 青岛海信宽带多媒体技术有限公司 | Coupling method of light emitter and light emitter |
| CN110058355A (en) * | 2019-03-19 | 2019-07-26 | 武汉光迅科技股份有限公司 | A kind of automatic coupling device and automatic coupling method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP6230720B2 (en) | 2017-11-15 |
| WO2016051836A1 (en) | 2016-04-07 |
| CN106716187B (en) | 2018-05-15 |
| JPWO2016051836A1 (en) | 2017-04-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106716187B (en) | The manufacture method of light component, optical module and light component | |
| CN104360571B (en) | Optical device and imaging system | |
| US9977191B2 (en) | Optical connecting method | |
| US10012806B2 (en) | Methods of forming a fiber coupling device and fiber coupling device | |
| JP2019512736A (en) | Optical alignment of optical subassemblies to optoelectronic devices | |
| CN102439509B (en) | Passive alignment method and its application in micro projection devices | |
| US10884216B2 (en) | Method of manufacturing an optical multiplexer | |
| JP2017054132A (en) | Optical interposer | |
| US9151916B2 (en) | Compact optical package made with planar structures | |
| JP2003255166A (en) | Solid optical waveguide and its manufacturing method, optical module, and optical transmission system | |
| CN105467736B (en) | Optical unit, Optical devices, light supply apparatus and projection display equipment using it | |
| TW201721205A (en) | Optical component with beam deflection element, method for production thereof, and beam deflection elements suitable for the component | |
| US20110033152A1 (en) | Optical assembly | |
| US20110170831A1 (en) | Optical module and manufacturing method of the module | |
| US9679784B2 (en) | Wafer-level packaged optical subassembly and transceiver module having same | |
| CN1808193A (en) | Structure and method for mounting lsi package onto photoelectric wiring board | |
| US10481349B2 (en) | Optical path conversion device, optical interface apparatus, and optical transmission system | |
| CN109613654A (en) | Multi-channel parallel wavelength-division multiplex/demultiplexing spectrum groupware and its optical device | |
| US7520682B2 (en) | Transceiver module and optical bench for passive alignment | |
| US20200049909A1 (en) | Silicon photonic solder reflowable assembly | |
| US7466502B2 (en) | Optical wavelength division coupler and associated methods | |
| JP2014240958A (en) | Optical module | |
| JP7548413B2 (en) | Optical connection structure, package structure, optical module, and method for manufacturing package structure | |
| JPH1090565A (en) | Optical element and its production | |
| US11658457B2 (en) | Mounting structure for optical module |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180515 Termination date: 20200421 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |