CN106092510A - Laser test system - Google Patents
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- CN106092510A CN106092510A CN201610383976.0A CN201610383976A CN106092510A CN 106092510 A CN106092510 A CN 106092510A CN 201610383976 A CN201610383976 A CN 201610383976A CN 106092510 A CN106092510 A CN 106092510A
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- G—PHYSICS
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
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Abstract
The invention discloses a kind of laser test system, in order to solve measurement inefficiency existing for traditional test system and the highest problem of accuracy.This laser test system, including: light source generator, the first beam splitter, multiple first measured device and test control device；Wherein, light source generator, it is used for producing LASER Light Source；First beam splitter, is connected with light source generator, for LASER Light Source is divided into multiple first laser beam；The input of each the first measured device is respectively aligned to first laser beam, and, the power end of each the first measured device is connected with power supply by multiple power supplies switch, and the outfan of each the first measured device is connected with test control device by multi-channel rf switch；Further, laser test system farther includes: for the high-low temperature chamber being adjusted the temperature inside the box according to the control of test control device, and the first beam splitter and the first measured device are placed in high-low temperature chamber.
Description
Technical Field
The invention relates to the field of photoelectric testing, in particular to a laser testing system.
Background
The laser detector can realize photoelectric conversion, and relevant parameters of the optical signal, such as indexes of optical power and the like, can be determined by testing relevant parameters of the electrical signal. The relevant parameters of the optical signal measured by the laser detector change with the temperature change. Therefore, the high-temperature and low-temperature working performance can be evaluated by measuring the change rate of indexes such as responsivity, response time, noise, saturation optical power and the like of the photoelectric signal at different temperatures.
Currently, in order to measure the relevant parameters of optical signals at different temperatures, the relevant parameters at various temperature conditions such as high temperature, low temperature, and normal temperature need to be measured respectively. For example, the relevant parameters of the optical signal at the first temperature are measured in a manual operation mode, then the relevant parameters of the optical signal at the second temperature are measured in a manual operation mode, and so on, the measurement process can be completed only by manual operation for many times, the measurement efficiency is low, and the labor cost is high. Moreover, when multiple optical signals are measured at a time, crosstalk is likely to occur between the optical signals, thereby affecting the accuracy of measurement.
Disclosure of Invention
The invention provides a laser test system, which is used for solving the problems of low measurement efficiency and low test accuracy of a test system in the prior art.
The invention provides a laser test system, comprising: the device comprises a light source generating device, a first optical beam splitter, a plurality of first devices under test and a test control device; the light source generating device is used for generating a laser light source; the first beam splitter is connected with the light source generating device and used for splitting the laser light source into a plurality of first laser beams; the input end of each first tested device is respectively aligned to one first laser beam, the power supply end of each first tested device is connected with a power supply through a multi-channel power switch, and the output end of each first tested device is connected with a test control device through a multi-channel radio frequency switch; and, the laser test system further comprises: and the first optical beam splitter and the first tested device are arranged in the high-low temperature box.
Optionally, further comprising: a first test circuit board and a test fixture; the first test circuit board comprises a test area for fixing a plurality of first devices under test, and the first devices under test are fixed in the test area through the test fixture.
Optionally, the first test circuit board further includes a filter area for setting a filter circuit, the filter area is provided with a plurality of filter circuits corresponding to the first devices under test one to one, and the output end of each first device under test is connected to the test control device through the multi-channel rf switch and the filter circuit corresponding to the first device under test, where each filter circuit is configured to filter an output signal of the first device under test connected to the filter circuit.
Optionally, each of the multiple power switches corresponds to a power terminal of a first device under test, and each of the multiple rf switches corresponds to an output terminal of a first device under test.
Optionally, further comprising: and the optical power meter is connected with the optical beam splitter and used for monitoring the power value of the at least one first laser beam output by the optical beam splitter.
Optionally, the light source generating device further comprises: an optical platform and a light source and a light attenuator positioned on the optical platform.
Optionally, the test control apparatus further comprises: the input end of the oscilloscope is connected with the output end of each first tested device through a multi-channel radio frequency switch and is used for displaying relevant parameters of output signals of the first tested devices; the computer is connected with the oscilloscope and the first devices under test respectively and is used for controlling and calculating the output signals of the first devices under test.
Optionally, further comprising: the second optical beam splitter is connected with the light source generating device and is used for dividing the laser light source generated by the light source generating device into a plurality of second laser beams; the input end of each second tested device is respectively aligned with each second laser beam, the power supply end of each second tested device is connected with the power supply, and the output end of each second tested device is connected with the test control device.
Optionally, further comprising: the control switch is used for controlling the light source generating device to be communicated with the first optical beam splitter and disconnected with the second optical beam splitter; or the light source generating device is controlled to be communicated with the second optical beam splitter and disconnected with the first optical beam splitter.
Optionally, the first device under test is a photodetector.
In the laser test system provided by the invention, on one hand, the laser light source is split into a plurality of laser beams by the beam splitter, and the temperature and the on-off of the multipath optical signals are controlled by the test control device, so that the effect of automatically measuring the multipath optical signals is realized, and the measurement efficiency is improved. On the other hand, the on-off and the signal on-off of each tested device are respectively controlled through the multi-path power switch and the multi-path radio frequency switch, each tested device can be independently switched on and off, so that each path of photoelectric signal can be respectively transmitted, and the multi-path power switch and the multi-path radio frequency switch have the function of isolating each path of signal, so that the crosstalk phenomenon among signals can be remarkably reduced, the anti-interference capability of the whole test system is improved, and the test accuracy is improved.
Drawings
FIG. 1 is a schematic diagram illustrating an exemplary configuration of a laser test system according to an embodiment of the present invention;
FIG. 2 is a block diagram of a laser test system provided in accordance with an embodiment of the present invention;
FIG. 3 is a schematic diagram illustrating a portion of components in a laser test system provided in accordance with an exemplary embodiment of the present invention;
FIG. 4 is a schematic diagram illustrating a workflow of a laser test system according to an embodiment of the present invention;
FIG. 5 is a diagram illustrating system inherent delay calibration in a laser test system provided by an embodiment of the present invention;
fig. 6 shows a software interface diagram of a laser test system provided by an embodiment of the present invention.
Detailed Description
The present invention will be described in detail with reference to the following embodiments in order to fully understand the objects, features and effects of the invention, but the present invention is not limited thereto.
The invention provides a laser test system, which can solve the problems of low measurement efficiency and low test accuracy of a test system in the prior art.
Fig. 1 shows a schematic structural diagram of a laser test system according to an embodiment of the present invention. As shown in fig. 1, the laser test system includes: a light source generating device 10, a first optical beam splitter 20, a plurality of first devices under test 30, and a test control device 40. Wherein, the light source generating device 10 is used for generating a laser light source; a first beam splitter 20 connected to the light source generating device 10 for splitting the laser light source into a plurality of first laser beams; the input terminal of each first device under test 30 is aligned with one of the first laser beams, and the power terminal of each first device under test 30 is connected to the power supply 60 through the multi-way power switch 50, and the output terminal of each first device under test 30 is connected to the test control device 40 through the multi-way radio frequency switch 70; and, the laser test system further comprises: a high-low temperature chamber 80 for adjusting the temperature inside the chamber according to the control of the test control device, and the first optical beam splitter 20 and the first device under test 30 are placed inside the high-low temperature chamber 80.
Therefore, in the laser test system provided by the invention, on one hand, the laser light source is split into a plurality of laser beams by the beam splitter, and the temperature and the on-off of the multipath optical signals are controlled by the test control device, so that the effect of automatically measuring the multipath optical signals is realized, and the measurement efficiency is improved. On the other hand, the on-off and the signal on-off of each tested device are respectively controlled through the multi-path power switch and the multi-path radio frequency switch, each tested device can be independently switched on and off, so that each path of photoelectric signal can be respectively transmitted, and the multi-path power switch and the multi-path radio frequency switch have the function of isolating each path of signal, so that the crosstalk phenomenon among signals can be remarkably reduced, the anti-interference capability of the whole test system is improved, and the test accuracy is improved.
Fig. 2 is a block diagram of a laser test system according to an embodiment of the present invention. As shown in fig. 2, the light source 101 and the optical attenuator 102 together constitute the light source generating device mentioned above. In particular implementations, the light source 101 and the optical attenuator 102 may be placed on a custom optical platform to reduce the effect of vibration on light quality, as shown in FIG. 3. Specifically, the light source 101 is configured to generate a laser light source, and the optical attenuator 102 is configured to perform attenuation processing on the laser light source generated by the light source 101 so as to accurately control the power of the input optical signal, so that the power of the input optical signal finally incident into the device under test meets the test requirement.
As can be seen from fig. 2, the input optical signal emitted from the optical attenuator 102 may be input to the room temperature test component for optical signal measurement at room temperature, or may be input to the high and low temperature test component for optical signal measurement at high and low temperatures. Specifically, the normal temperature measurement or the high and low temperature measurement can be selected by controlling the switch. For example, room temperature measurement can be performed when the control switch is located above; the high and low temperature measurement can be performed when the control switch is located below. In another embodiment of the present invention, the control switch is not provided, and the optical signal emitted from the optical attenuator 102 may be partially input to the room temperature test unit to perform the optical signal measurement at the room temperature, and the other part thereof may be input to the high/low temperature test unit to perform the optical signal measurement at the high/low temperature, thereby simultaneously realizing the test at the room temperature and the high/low temperature.
The specific operation principle of the room temperature test part will be described first. The normal temperature test part specifically includes: a second beam splitter 91, a small spot system 93, a second device under test 94 and a normal temperature test fixture 95. The optical signal emitted from the optical attenuator 102 is input to the second beam splitter 91, split by the second beam splitter 91, and the laser light source is equally divided into a plurality of laser beams, and the laser signal constituted by the laser beams is sent to the second device under test 94 via the small spot system 93. The second device under test 94 is disposed in the normal temperature test fixture 95. The normal temperature test fixture 95 mainly includes a test circuit board, a test fixture, and the like, and is used for fixing and electrically connecting a device to be tested. It can be seen that the second device under test 94 has an input for receiving the input optical signal and an output connected to the oscilloscope 402 for transmitting the output electrical signal to the oscilloscope 402 for parameter monitoring.
Next, the specific operation principle of the high and low temperature test part will be described. The high and low temperature test part includes: the high-low temperature box 80, the first optical beam splitter 20, the first device under test 30, the high-low temperature test fixture 301 and the like which are positioned inside the high-low temperature box 80. The optical signal emitted from the optical attenuator 102 is introduced into the high and low temperature chamber 80 by an optical fiber and fixed by a certain jig so as to be transmitted to the first optical splitter 20, and is subjected to a splitting process by the first optical splitter 20, thereby equally dividing the laser light source into a plurality of laser beams. The plurality of first devices under test 30 are disposed on the high and low temperature test fixture 301. Specifically, the high and low temperature test fixture 301 mainly includes a test circuit board, a test fixture, and the like, for fixing and electrically connecting the first device under test 30. The test circuit board in the high and low temperature test fixture 301 includes a test area for fixing the first devices under test 30, and the first devices under test 30 are fixed in the test area by the test fixture. In particular, the test area can be set as a plurality of recessed insertable areas, so that each device under test can be inserted into one recessed insertable area, and reliable coupling is performed through the optical fiber coupler, so that each device under test can be aligned to one laser beam, and accurate calibration of incident light power of the device under test can be realized.
In addition, in order to control each device under test individually, the test system shown in fig. 2 further includes a multi-way power switch 50. The multi-way power switch 50 includes a plurality of independent switches corresponding to the first devices under test 30 one by one, and each of the independent switches can control one first device under test 30 independently. In specific implementation, one end of each independent power switch is connected to the power supply 60, and the other end is connected to a power end of a first device under test (in specific implementation, the independent power switch may be connected to the first device under test through a test circuit board in the high and low temperature test tool). Each first device under test can be independently powered by a multi-way power switch 50. In addition, a multi-channel rf switch 70 is further included in the test system shown in fig. 2. The multi-way rf switch 70 includes a plurality of independent switches corresponding to the devices under test, and each of the independent switches can control one device under test independently. During specific implementation, one end of each independent radio frequency switch is connected with the output end of the tested device, and the other end of each independent radio frequency switch is connected with the oscilloscope, so that whether the output signal of the corresponding tested device is transmitted to the oscilloscope or not is controlled, and accurate measurement of parameters such as the amplitude, time and the like of the output signal is realized. Independent signal transmission can be realized by controlling each tested device through the multi-path radio frequency switch 70. In specific implementation, in order to facilitate operation, the test area on the test circuit board may be directly connected to the multi-way power switch 50 and the multi-way rf switch 70, so that the device under test may be electrically connected to the multi-way power switch 50 and the multi-way rf switch 70 after being inserted into the test area, thereby simplifying the operation process.
Therefore, the multiple power switches 50 and the multiple radio frequency switches 70 can isolate and independently control the respective photoelectric paths corresponding to the respective devices under test, thereby avoiding the signal crosstalk phenomenon between the channels to the greatest extent and improving the test accuracy. In addition, in order to further improve the testing accuracy, in the present invention, a filtering region may be further disposed on the testing circuit board, and a plurality of filtering circuits corresponding to the first devices under test 30 are disposed in the filtering region, so that the output end of each first device under test 30 is connected to the oscilloscope through the multi-channel rf switch and the filtering circuit corresponding to the first device under test, where each filtering circuit is configured to filter the output signal of the first device under test connected to the filtering circuit. During specific implementation, each device to be tested can be connected to the multi-channel radio frequency switch firstly, then connected to the corresponding filter circuit through the multi-channel radio frequency switch, and further connected with the oscilloscope through the filter circuit; each tested device can also be connected to the corresponding filter circuit firstly, then connected to the multi-path radio frequency switch through the filter circuit, and further connected with the oscilloscope through the multi-path radio frequency switch. In short, the present invention is not limited to the specific details, as long as the effect of individually filtering the output signals of the respective devices under test can be achieved. In order to facilitate the operation, the test area can be set on the test circuit board in advance to be connected with the filter circuit and the multi-path radio frequency switch, so that the purpose of connecting the tested device with the oscilloscope through the multi-path radio frequency switch 70 and the filter circuit can be realized after the tested device is inserted into the test area, and the operation process is simplified.
By arranging a separate filter circuit for each path of output signal, the problem of crosstalk between channels can be reduced more effectively.
In addition, in order to eliminate the parasitic influence of the radio frequency cable output from the high-low temperature box, the driving compensation design can be carried out on the test circuit board according to the actual condition of the tested device. In addition, a mounting hole, an optical fiber fixing hole, and the like are usually designed on the test circuit board to ensure the stability of optical path transmission. In particular, the test Circuit Board may be implemented in various manners such as a PCB (Printed Circuit Board).
After the normal temperature test component and the high and low temperature test component are introduced, the test control device is introduced, and the test control device can control, measure, calculate and the like the electric signals output by the normal temperature test component and/or the high and low temperature test component so as to obtain a test result. Specifically, the test control apparatus includes an oscilloscope 402, a computer 401, and an operation box 403 in fig. 2. The oscilloscope 402 is connected to the output end of each device under test, and is configured to receive the electrical signal output by each device under test and display the corresponding waveform and parameters. The computer 401 is connected to the oscilloscope 402 and each device under test, and is used for controlling and calculating the oscilloscope and the device under test. The operation box 403 is connected to the computer 401, and is mainly used for accommodating relevant external devices.
Fig. 3 shows a schematic diagram of part of the components in the test system described above. As shown in fig. 3, a light source and a light attenuator are placed on the optical platform. The optical signal output by the optical attenuator is transmitted to the high-low temperature box through an optical fiber. High and low temperature test tools and a device to be tested (shown as a DUT) positioned above the high and low temperature test tools are further arranged in the high and low temperature box. The device under test is connected to the optical splitter mounted on the light fixture by 100 optical fibers (shown as multiple optical fibers). The device to be tested is connected with the cabinet through a cable, and the inside of the cabinet further comprises a computer, an oscilloscope, a multi-way switch and a power supply.
In the test system, the oscilloscope, the light source, the optical attenuator, the power supply and the high-low temperature box are all realized by adopting programmable equipment, so that the whole test system can be automatically controlled by a computer and upper computer software to finish the automatic test of indexes such as the responsivity, the response time, the noise, the saturated optical power and the like of a tested device.
In addition, the test system further comprises an optical power meter 92, wherein the optical power meter 92 is connected to the second optical splitter 91 and is used for monitoring whether the optical power of the second optical splitter 91 meets a preset value. Of course, the optical power meter 92 may further be connected to the first optical splitter 20 for monitoring whether the optical power of the first optical splitter 20 satisfies a predetermined value. The optical power meter can monitor the power value of at least one beam of light emitted by the optical beam splitter to realize the monitoring of the stability of the optical path, thereby effectively improving the detection precision of input light.
After the specific structure of the test system is introduced, the specific workflow of the test system is described next. The preparatory work that needs to be done before the test is performed is as follows: firstly, the tested device is inserted into a test circuit board, the optical fiber coupler is reliably coupled with the tested device, and then the power switch socket is connected, and the high-speed signal output cable of the tested device is connected in sequence. Fig. 4 shows a schematic workflow diagram of a laser test system provided by an embodiment of the present invention. As shown in fig. 4, after the preparation work is completed, firstly, the system is powered on to perform self-test, and if there is a fault, the system is debugged until the self-test is normal. Then, setting relevant parameters, specifically including: oscilloscope channel parameters, pulse width and repetition frequency of a laser, power supply voltage, high and low temperature test parameters (including parameters such as device numbers, test temperature, heat preservation time and the like); next, when the laser light source is stable, the high-low temperature box reaches a set temperature and is kept for a set time, the test software is clicked to test, in the test process, the test system sequentially completes the tests of parameters such as responsivity, response time, noise, saturation optical power and the like of the tested device according to the designed power supply sequence and signal output sequence through the control of the upper computer, and completes the output of related data to form a test report until the test of the batch of devices is finished, and the power supply is powered off; finally, the devices of the next batch are replaced until all the batches are tested.
The automatic test of the tested device can be realized through the process, the crosstalk phenomenon among all channels is eliminated to the greatest extent, and the test accuracy is improved. The device under test may be a photodetector.
In addition, since any electronic component has a certain delay characteristic, the influence of the system delay on the measurement result is reduced. The invention can also calibrate the inherent delay of the system so as to consider the influence of the inherent delay when calculating the measuring result, thereby ensuring that the measuring result is as accurate as possible. FIG. 5 shows a schematic diagram of the system inherent delay calibration. The inherent delay time of the system includes both optical delay and point delay due to the transmission loss of the optical path and the circuit. The light synchronization signal generated by the light source is connected into a CH1 channel of the oscilloscope, and then the light pulse generated by the light source is connected with an output signal into a CH2 channel of the oscilloscope through a standard fast photosensitive tube. The system inherent delay time is obtained by reading the delay time between CH1 and CH 2. The accuracy of the test result can be further improved by measuring the inherent delay time of the system.
Fig. 6 shows a software interface diagram of the high and low temperature test system. The device comprises 5 modules of parameter setting, system state, real-time display of the indexes of the tested device, test results and control keys. The parameter setting module can set parameters such as test temperature, device power supply voltage, laser pulse width, repetition frequency and the like; the system state module can display information such as the current temperature of the incubator, the current test channel, the system working state and the like in real time; the real-time display module of the device under test index can display parameters such as delay time, response time, voltage responsivity, NEP, saturation input optical power, working wavelength and the like of the current device under test in real time; the test result module can display the total number of tested devices and the number of qualified and unqualified devices in real time; the control key module is mainly used for controlling the functions of starting, pausing/continuing, stopping, returning, checking the result and the like of the system.
In conclusion, the invention can complete the high, normal and low temperature photoelectric performance parameters (response time, delay time, voltage responsivity, NEP and the like) test of the unit and quadrant laser detectors by ingenious tool design and reasonable photoelectric test equipment collocation, and realize the automatic acquisition, processing and storage of test data. The invention adopts the optical beam splitter, the multi-channel radio frequency switch and the multi-channel power switch to independently isolate the optical/electrical signals among the test channels, reduces the problem of high-speed signal crosstalk among the channels, and can simultaneously carry out automatic photoelectric parameter test on a plurality of laser detectors by controlling the upper computer software of a computer. Finally, the system is suitable for the field of testing of a large number of photoelectric devices, the testing precision and efficiency are effectively improved, and the workload is reduced.
In a traditional centralized power supply type photoelectric test system, when a plurality of devices are tested simultaneously and high-speed signals are transmitted from a high-temperature box and a low-temperature box to the outside, the problem of test crosstalk among channels is easily caused, and the test accuracy is reduced. Moreover, in the conventional mode, the operation, data acquisition and recording of the test process are completed manually, so that the test result is greatly influenced by the manual work, time is consumed, and errors are easy to occur. The test system is a high-low temperature test system of a multi-channel anti-interference high-speed laser detector, can respectively carry out independent isolation processing on a laser light source, a power supply and an output signal, and can effectively reduce the problem of crosstalk between channels by carrying out independent circuit filtering on each path of signal on a test tool, and the software of an upper computer can automatically control the light source, an optical beam splitter, an optical attenuator, an oscilloscope, a multi-path switch and other equipment to carry out automatic test. The problems of crosstalk, interference and the like when multiple devices are measured simultaneously can be avoided, labor can be greatly saved, and errors caused by manual operation can be avoided. In addition, the operation stability and the data reliability of the whole system are high.
It will be appreciated by those skilled in the art that although the steps of the method are described sequentially for ease of understanding, it should be noted that the order of the steps is not strictly limited.
Those skilled in the art will appreciate that all or part of the steps in the method for implementing the above embodiments may be implemented by relevant hardware instructed by a program, and the program may be stored in a computer readable storage medium, such as: ROM/RAM, magnetic disk, optical disk, etc.
It will also be appreciated that the arrangement of devices shown in the figures or embodiments is merely schematic and represents a logical arrangement. Where modules shown as separate components may or may not be physically separate, components shown as modules may or may not be physical modules.
It will be apparent to those skilled in the art that various changes and modifications may be made in the present invention without departing from the spirit and scope of the invention. Thus, if such modifications and variations of the present invention fall within the scope of the claims of the present invention and their equivalents, the present invention is also intended to include such modifications and variations.
Claims (10)
1. A laser test system, comprising: the device comprises a light source generating device, a first optical beam splitter, a plurality of first devices under test and a test control device; wherein,
the light source generating device is used for generating a laser light source;
the first beam splitter is connected with the light source generating device and used for splitting the laser light source into a plurality of first laser beams;
the input end of each first tested device is respectively aligned to one first laser beam, the power supply end of each first tested device is connected with a power supply through a multi-channel power switch, and the output end of each first tested device is connected with a test control device through a multi-channel radio frequency switch;
and, the laser test system further comprises: and the first optical beam splitter and the first tested device are arranged in the high-low temperature box.
2. The laser test system of claim 1, further comprising: a first test circuit board and a test fixture;
the first test circuit board comprises a test area for fixing a plurality of first devices under test, and the first devices under test are fixed in the test area through the test fixture.
3. The laser test system according to claim 2, wherein the first test circuit board further comprises a filter area for setting a filter circuit, the filter area is provided with a plurality of filter circuits corresponding to the first devices under test one to one, the output terminal of each first device under test is connected to the test control device through the multi-channel rf switch and the filter circuit corresponding to the first device under test, and each filter circuit is configured to filter the output signal of the first device under test connected to the filter circuit.
4. A laser test system according to any one of claims 1-3, wherein each of the plurality of power switches corresponds to a respective power terminal of a first device under test, and each of the plurality of rf switches corresponds to a respective output terminal of a first device under test.
5. The laser test system of claim 1, further comprising: and the optical power meter is connected with the optical beam splitter and used for monitoring the power value of the at least one first laser beam output by the optical beam splitter.
6. The laser test system of claim 1, wherein the light source generating means further comprises: an optical platform and a light source and a light attenuator positioned on the optical platform.
7. The laser test system of claim 1, wherein the test control means further comprises: a computer and an oscilloscope, wherein,
the input end of the oscilloscope is connected with the output end of each first tested device through the multi-channel radio frequency switch and is used for displaying relevant parameters of output signals of the first tested devices;
the computer is connected with the oscilloscope and the first devices under test respectively and is used for controlling and calculating the output signals of the first devices under test.
8. The laser test system of claim 1, further comprising: a second optical splitter and a plurality of second devices under test, wherein,
the second beam splitter is connected with the light source generating device and used for splitting the laser light source generated by the light source generating device into a plurality of second laser beams;
the input end of each second tested device is respectively aligned with each second laser beam, the power supply end of each second tested device is connected with the power supply, and the output end of each second tested device is connected with the test control device.
9. The laser test system of claim 8, further comprising: the control switch is used for controlling the light source generating device to be communicated with the first optical beam splitter and disconnected with the second optical beam splitter; or the light source generating device is controlled to be communicated with the second optical beam splitter and disconnected with the first optical beam splitter.
10. The laser test system of claim 1, wherein the first device-under-test is a photodetector.
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| CN107290115A (en) * | 2017-07-05 | 2017-10-24 | 应达利电子股份有限公司 | A kind of detection means and its detection method of piezoelectric element air-tightness |
| CN111122124A (en) * | 2019-12-14 | 2020-05-08 | 杭州电子科技大学 | A device and method for multi-channel synchronous characterization based on semiconductor laser beam |
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| CN111122124A (en) * | 2019-12-14 | 2020-05-08 | 杭州电子科技大学 | A device and method for multi-channel synchronous characterization based on semiconductor laser beam |
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| CN116430202A (en) * | 2023-03-22 | 2023-07-14 | 镇江矽佳测试技术有限公司 | Chip burn-in test system, method, storage medium and electronic device |
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