CN105810769A - 一种背钝化太阳能电池的激光开槽结构 - Google Patents
一种背钝化太阳能电池的激光开槽结构 Download PDFInfo
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Abstract
本发明公开了一种背钝化太阳能电池的激光开槽结构。它包括在钝化膜上从内到外依次由开槽线围成的边长逐渐增大的多个正方形,每个正方形的各条边均由开槽的实线段和未开槽的虚线段间隔设置构成,内外相邻的正方形之间的间距相等,内外相邻的正方形的实线段和虚线段相互错开。采用上述的结构后,由于在钝化膜上从内到外依次由开槽线围成的边长逐渐增大的多个正方形,内外相邻的正方形的实线段和虚线段相互错开,由此在减少背表面钝化膜的开槽面积的基础上,还增强了钝化效果,同时能够更多的收集少数载流子,其结构设计简单巧妙,缩短了加工时间,提高了太阳能电池的转换效率和产能。
Description
技术领域
本发明涉及一种太阳能电池结构,具体地说是一种背钝化太阳能电池的激光开槽结构;属于太阳能电池的制造技术领域。
背景技术
由于Al2O3薄膜与SiN薄膜均为绝缘层无法导电,因此需要通过激光将背面膜层划开使硅基体露出,在完成背电场印刷烧结后使得硅基体能够和铝背场形成良好的欧姆接触,这样使得激光开槽结构对氧化铝的钝化效果有着重要的影响,激光开槽面积大会使氧化铝的钝化效果降低,导致少子寿命降低;开槽面积小则导致金属与硅的欧姆接触变差,从而影响到导电性能。这就要求设计背面开槽结构时要考虑尽可能的降低开槽面积,提高钝化效果,同时又能保证更多的传导少数载流子。
目前常见的激光开槽结构为直线型(图1)和直线实虚型(图2)两种,直线型具有激光加工时间短,图形简单等优点,但对膜层的破坏严重,收集少子只有两个方向,限制了少子的传输,直线实虚型降低了对膜层的破坏程度,但由于图形复杂,使得加工时间增加,加大了生产成本。
发明内容
本发明要解决的技术问题是提供一种结构设计巧妙,产能高且钝化效果好的背钝化太阳能电池的激光开槽结构。
为了解决上述技术问题,本发明的背钝化太阳能电池的激光开槽结构,包括在钝化膜上从内到外依次由开槽线围成的边长逐渐增大的多个正方形,每个正方形的各条边均由开槽的实线段和未开槽的虚线段间隔设置构成,内外相邻的正方形之间的间距相等,内外相邻的正方形的实线段和虚线段相互错开。
所述实线段所占比例为50%-100%。
所述实线段的长度为0.5-5mm,虚线段的长度为0.5-5mm。
所述实线段和虚线段的长度相等。
所述内外相邻的正方形之间的间距为0.5-5mm。
采用上述的结构后,由于在钝化膜上从内到外依次由开槽线围成的边长逐渐增大的多个正方形,内外相邻的正方形的实线段和虚线段相互错开,由此在减少背表面钝化膜的开槽面积的基础上,还增强了钝化效果,同时能够更多的收集少数载流子,其结构设计简单巧妙,缩短了加工时间,提高了太阳能电池的转换效率和产能。
附图说明
图1为目前常用背钝化太阳能电池的激光开槽结构的直线形结构示意图;
图2为本目前常用背钝化太阳能电池的激光开槽结构直线实虚形结构示意图;
图3为本发明背钝化太阳能电池的激光开槽结构的结构示意图。
具体实施方式
下面结合附图和具体实施方式,对本发明背钝化太阳能电池的激光开槽结构作进一步详细说明。
如图3所示,本发明的背钝化太阳能电池的激光开槽结构,包括利用激光在钝化膜4上从内到外或从外到内依次由开槽线围成的边长逐渐增大的多个正方形1,多个正方形1形成类似回字形的结构,由此缩短了激光加工时间,提高了产能,降低了生产成本;每个正方形的各条边均由开槽的实线段2和未开槽的虚线段3间隔设置构成,内外相邻的正方形之间的间距相等,内外相邻的正方形的实线段2和虚线段3相互错开,从而减小了开槽面积,增强了钝化效果,提高了收集少子能力。
其中,本发明中,所说的实线段所占比例可以选择为50%-100%,即当实线比例为100%时为一个整体的正方形;所说的实线段2的长度优选为0.5-5mm,虚线段的长度优选为0.5-5mm,其中,优选地,所说的实线段2和虚线段3的长度相等,即实线段和虚线段的比例各为50%,所说的内外相邻的正方形之间的间距为0.5-5mm。
进一步地说,每个所说的正方形1结构中的开槽线为具有两条分别位于两个边角部位的类似于L形结构的开槽线或具有三条分别位于三个边角部位的类似于L形结构的开槽线,最内层的正方形结构具有类似于U形结构的开槽线。
其加工方法如下:
1、对单晶硅片进行制绒处理,形成金字塔绒面;
2、扩散制备PN结;
3、抛光去除边结及表面缺陷,使背表面平整;
4、通过ALD、PECVD使正背面形成钝化膜层;
5、在背表面形成如图3所示激光开槽结构;
6、丝网印刷形成正电极,背电极及背场;
7、烧结使金属与硅之间形成良好的欧姆接触;
8、测试电池的电性能。
按照上述开槽结构制备出PERC电池的电性能见表1,可以看出相比于直线形开槽形电池效率提高0.2-0.4%,单片时间缩短0.5s,相比于直线实虚形开槽形提高0.1-0.3%,但单片时间综合考虑正方形(回字互补填充型)从电性能及生产成本上更具有优势。
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Claims (5)
1.一种背钝化太阳能电池的激光开槽结构,包括在钝化膜上从内到外依次由开槽线围成的边长逐渐增大的多个正方形(1),每个所述正方形的各条边均由开槽的实线段(2)和未开槽的虚线段(3)间隔设置构成,内外相邻的正方形之间的间距相等,内外相邻的正方形的实线段(2)和虚线段(3)相互错开。
2.按照权利要求1或2所述的背钝化太阳能电池的激光开槽结构,其特征在于:所述实线段(2)所占比例为50%-100%。
3.按照权利要求1或2所述的背钝化太阳能电池的激光开槽结构,其特征在于:所述实线段(2)的长度为0.5-5mm,虚线段的长度为0.5-5mm。
4.按照权利要求3所述的背钝化太阳能电池的激光开槽结构,其特征在于:所述实线段(2)和虚线段(3)的长度相等。
5.按照权利要求1或2所述的背钝化太阳能电池的激光开槽结构,其特征在于:所述内外相邻的正方形之间的间距为0.5-5mm。
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CN112510116A (zh) * | 2020-11-30 | 2021-03-16 | 山东力诺太阳能电力股份有限公司 | 一种抗LeTID钝化接触太阳能电池及其生产工艺 |
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