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MY169550A - Wet grinding apparatus and grinding stone segment used therein - Google Patents

Wet grinding apparatus and grinding stone segment used therein

Info

Publication number
MY169550A
MY169550A MYPI20080837A MYPI20080837A MY169550A MY 169550 A MY169550 A MY 169550A MY PI20080837 A MYPI20080837 A MY PI20080837A MY PI20080837 A MYPI20080837 A MY PI20080837A MY 169550 A MY169550 A MY 169550A
Authority
MY
Malaysia
Prior art keywords
face
grinding stone
grinding
rotation shaft
segment used
Prior art date
Application number
MYPI20080837A
Inventor
Nagai Minoru
Suzuki Tetsuo
Original Assignee
Kobe Steel Ltd
Kobe Precision Tech Sdn Bhd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kobe Steel Ltd, Kobe Precision Tech Sdn Bhd filed Critical Kobe Steel Ltd
Priority to MYPI20080837A priority Critical patent/MY169550A/en
Priority to JP2008332129A priority patent/JP5275788B2/en
Publication of MY169550A publication Critical patent/MY169550A/en

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)

Abstract

A wet grinding apparatus, includes: a first surface plate (1), having a first face, and being capable of rotating on a rotation shaft (3) in a first direction, the first face plate having at least one first hole (17a, 17c) which leads to the first face and to which a coolant (20) can be supplied; a second surface plate (2), having a second face facing the first face, and being capable of rotating on the rotation shaft in a second direction opposite to the first direction; first grinding stone segments (10a) each of which has substantially sectorial form, arranged into disk-like shape and attached to the first face; and second grinding stone segments (11a) each of which has substantially sectorial form, arranged into disk-like shape and attached to the second face. Each of the second grinding stone segments is formed with at least one groove (18) extending between opposite edges in the second direction along a circle at a center of which the rotation shaft is located and which includes a point facing the first hole.
MYPI20080837A 2008-03-26 2008-03-26 Wet grinding apparatus and grinding stone segment used therein MY169550A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
MYPI20080837A MY169550A (en) 2008-03-26 2008-03-26 Wet grinding apparatus and grinding stone segment used therein
JP2008332129A JP5275788B2 (en) 2008-03-26 2008-12-26 Wet grinding apparatus and grinding wheel segment therefor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI20080837A MY169550A (en) 2008-03-26 2008-03-26 Wet grinding apparatus and grinding stone segment used therein

Publications (1)

Publication Number Publication Date
MY169550A true MY169550A (en) 2019-04-22

Family

ID=41248452

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20080837A MY169550A (en) 2008-03-26 2008-03-26 Wet grinding apparatus and grinding stone segment used therein

Country Status (2)

Country Link
JP (1) JP5275788B2 (en)
MY (1) MY169550A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101164498B1 (en) * 2009-12-11 2012-07-18 주식회사 엔티에스 Grinding wheel
CN108068024A (en) * 2016-11-17 2018-05-25 上海域申光电科技有限公司 Polishing disk
JP7158813B2 (en) * 2018-06-28 2022-10-24 株式会社ディスコ grinding wheel

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4886191A (en) * 1972-02-18 1973-11-14
JPS60109859U (en) * 1983-12-28 1985-07-25 株式会社　デイスコ Semiconductor wafer surface grinding equipment
JP2000326235A (en) * 1999-05-17 2000-11-28 Inst Of Physical & Chemical Res Grinding wheel for elid and surface grinding machine therewith
JP3993856B2 (en) * 2004-01-22 2007-10-17 光洋機械工業株式会社 Double-head surface grinding machine

Also Published As

Publication number Publication date
JP2009233846A (en) 2009-10-15
JP5275788B2 (en) 2013-08-28

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