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Zhang et al., 2021 - Google Patents

Field nonuniformity of limited-aperture planar SAWs and its implications for designing SSAW acoustofluidics

Zhang et al., 2021

Document ID
2988000716068166982
Author
Zhang Y
Huang J
Guo X
Publication year
Publication venue
Journal of Micromechanics and Microengineering

External Links

Snippet

Acoustofluidics operating at high frequencies usually use surface acoustic waves (SAWs), and those emitted by limited-aperture planar interdigital transducers (IDTs) are prevalent. In such devices, field nonuniformity along the lateral direction is observed by many, but there …
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