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Zielony et al., 2021 - Google Patents

Investigation of micro-strain in ZnO/(Cd, Zn) O multiple quantum well nanowires grown on Si by MBE

Zielony et al., 2021

Document ID
2354526726133896412
Author
Zielony E
Wierzbicka A
Szymon R
Pietrzyk M
Placzek-Popko E
Publication year
Publication venue
Applied Surface Science

External Links

Snippet

The present work is dedicated to ZnO/CdO and ZnO/ZnCdO multiple quantum well (MQW) nanowires grown by molecular beam epitaxy (MBE) on Si substrates. The samples were investigated by means of micro-Raman (μ-Raman) spectroscopy and X-ray diffraction (XRD) …
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Classifications

    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H—ELECTRICITY
    • H01—BASIC ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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