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von Dardel, 1953 - Google Patents

Combined Pirani and ionization gauge circuit

von Dardel, 1953

Document ID
18012118371312788610
Author
von Dardel G
Publication year
Publication venue
Journal of Scientific Instruments

External Links

Snippet

The construction of a combined Pirani and ionization gauge vacuum-meter is described. The Pirani gauge is of the constant temperature type with a working range of 10-3 to 10 mm of mercury. As a leak detector it may be used even at atmospheric pressure or higher. A relay …
Continue reading at iopscience.iop.org (other versions)

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/24Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/243Beam current control or regulation circuits

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