von Dardel, 1953 - Google Patents
Combined Pirani and ionization gauge circuitvon Dardel, 1953
- Document ID
- 18012118371312788610
- Author
- von Dardel G
- Publication year
- Publication venue
- Journal of Scientific Instruments
External Links
Snippet
The construction of a combined Pirani and ionization gauge vacuum-meter is described. The Pirani gauge is of the constant temperature type with a working range of 10-3 to 10 mm of mercury. As a leak detector it may be used even at atmospheric pressure or higher. A relay …
- 150000002500 ions 0 abstract description 11
Classifications
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
- H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
- H01J37/243—Beam current control or regulation circuits
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