Zhang et al., 2013 - Google Patents
High resolution laser patterning of ITO on PET substrateZhang et al., 2013
- Document ID
- 15817660403500202049
- Author
- Zhang T
- Liu D
- Park H
- Yu D
- Hwang D
- Publication year
- Publication venue
- Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII
External Links
Snippet
Cost-effective laser patterning of indium tin oxide (ITO) thin film coated on flexible polyethylene terephthalate (PET) film substrate for touch panel was studied. The target scribing width was set to the order of 10 μm in order to examine issues involved with higher …
- 239000000758 substrate 0 title abstract description 35
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