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Zhang et al., 2013 - Google Patents

High resolution laser patterning of ITO on PET substrate

Zhang et al., 2013

Document ID
15817660403500202049
Author
Zhang T
Liu D
Park H
Yu D
Hwang D
Publication year
Publication venue
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII

External Links

Snippet

Cost-effective laser patterning of indium tin oxide (ITO) thin film coated on flexible polyethylene terephthalate (PET) film substrate for touch panel was studied. The target scribing width was set to the order of 10 μm in order to examine issues involved with higher …
Continue reading at ui.adsabs.harvard.edu (other versions)

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