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Ageev et al., 1998 - Google Patents

Electron-stimulated desorption of sodium atoms from an oxidized molybdenum surface

Ageev et al., 1998

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Document ID
15747613118148699840
Author
Ageev V
Kuznetsov Y
Madey T
Publication year
Publication venue
Physical Review B

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Snippet

Electron-stimulated desorption (ESD) yields and energy distributions for sodium (Na) atoms have been measured from Na layers adsorbed at 300 K on oxidized molybdenum surfaces with various degrees of oxidation. ESD measurements have been made as a function of …
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Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer
    • H01L21/18Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer, carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials

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