Thielsch et al., 2005 - Google Patents
Optical, structural, and mechanical properties of gadolinium tri-fluoride thin films grown on amorphous substratesThielsch et al., 2005
- Document ID
- 11664270143232143264
- Author
- Thielsch R
- Heber J
- Uhlig H
- Kaiser N
- Publication year
- Publication venue
- Advances in Optical Thin Films II
External Links
Snippet
Since excimer laser applications extend to deep and vacuum UV wavelengths at 248 nm, 193 nm and 157 nm, renewed research interest has recently arisen on fluoride thin films due to their unrivaled position as wide-band-gap material for the vacuum UV (VUV). Among …
- 239000000758 substrate 0 title abstract description 81
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0891—Ultraviolet [UV] mirrors
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