Kondo et al., 2001 - Google Patents
Femtosecond laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystalsKondo et al., 2001
View PDF- Document ID
- 10848142770274452095
- Author
- Kondo T
- Matsuo S
- Juodkazis S
- Misawa H
- Publication year
External Links
Snippet
A simple optical interference method to fabricate microperiodic structures was demonstrated. Femtosecond laser pulse was split by a diffractive beam splitter and overlapped with two lenses. Temporal overlap of the split femtosecond pulses, which requires 10 μm order …
- 238000000034 method 0 title description 11
Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G02B6/00—Light guides
- G02B6/10—Light guides of the optical waveguide type
- G02B6/12—Light guides of the optical waveguide type of the integrated circuit kind
- G02B6/122—Light guides of the optical waveguide type of the integrated circuit kind basic optical elements, e.g. light-guiding paths
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Exposure apparatus for microlithography
- G03F7/70375—Imaging systems not otherwise provided for, e.g. multiphoton lithography; Imaging systems comprising means for converting one type of radiation into another type of radiation, systems comprising mask with photo-cathode
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