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Guo et al., 2017 - Google Patents

Observation of abnormal mobility enhancement in multilayer MoS2 transistor by synergy of ultraviolet illumination and ozone plasma treatment

Guo et al., 2017

Document ID
9401540012678088065
Author
Guo J
Yang B
Zheng Z
Jiang J
Publication year
Publication venue
Physica E: Low-dimensional Systems and Nanostructures

External Links

Snippet

Mobility engineering through physical or chemical process is a fruitful approach for the atomically-layered two-dimensional electronic applications. Unfortunately, the usual process with either illumination or oxygen treatment would greatly deteriorate the mobility in two …
Continue reading at www.sciencedirect.com (other versions)

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