Gramse et al., 2015 - Google Patents
Quantitative sub-surface and non-contact imaging using scanning microwave microscopyGramse et al., 2015
View PDF- Document ID
- 8613573505932563043
- Author
- Gramse G
- Brinciotti E
- Lucibello A
- Patil S
- Kasper M
- Rankl C
- Giridharagopal R
- Hinterdorfer P
- Marcelli R
- Kienberger F
- Publication year
- Publication venue
- Nanotechnology
External Links
Snippet
The capability of scanning microwave microscopy for calibrated sub-surface and non- contact capacitance imaging of silicon (Si) samples is quantitatively studied at broadband frequencies ranging from 1 to 20 GHz. Calibrated capacitance images of flat Si test samples …
- 238000003384 imaging method 0 title abstract description 46
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means
- G01N27/72—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating magnetic variables
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