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Authors: I. Bányász 1 ; S. Pelli 2 ; G. Nunzi-Conti 3 ; G. C. Righini 4 ; S. Berneschi 3 ; E. Szilágyi 1 ; A. Németh 1 ; M. Fried 5 ; P. Petrik 6 ; E. Agócs 6 ; B. Kalas 6 ; Z. Zolnai 6 ; N. Q. Khanh 6 ; I. Rajta 7 ; G. U. L. Nagy 7 ; V. Havranek 8 ; V. Vosecek 8 ; M. Veres 1 and L. Himics 1

Affiliations: 1 Wigner Research Centre for Physics, Hungary ; 2 IFAC-CNR and "Enrico Fermi" Center for Study and Research, Italy ; 3 IFAC-CNR, Italy ; 4 “Enrico Fermi” Center for Study and Research, Italy ; 5 Research Institute for Technical Physics and Materials Science, Centre for Energy Research, Hungarian Academy of Sciences and Óbuda University, Hungary ; 6 Research Institute for Technical Physics and Materials Science, Centre for Energy Research and Hungarian Academy of Sciences, Hungary ; 7 MTA Atomki, Hungary ; 8 Nuclear Physics Institute AV CR and Řež near Prague, Czech Republic

Keyword(s): Ion Implantation, Integrated Optics, Optical Planar Waveguide, Optical Channel Waveguide, Optical Grating, M-Line Spectroscopy, Spectroscopic Ellipsometry, Micro Raman Spectroscopy, Rutherford Backscattering.

Related Ontology Subjects/Areas/Topics: Optical Communications and Networking ; Optics ; Photonic and Optoelectronic Materials and Devices ; Photonics ; Photonics, Optics and Laser Technology

Abstract: Various methods, based on the use of ion beams, were used for the fabrication of planar and channel optical waveguides and Bragg gratings in optical crystals and glasses. Some examples of the results of these researches are presented in this review. Researches were initiated on ion beam fabrication of planar and channel optical waveguides in tellurite glasses. The ions used in the experiments were mainly helium, carbon, nitrogen and oxygen. In case of the two dimensional elements, like channel waveguides, both masked ion implantation and direct writing with ion microbeam were used. Optical microscopy (phase contrast, interference and interference contrast (INTERPHAKO), spectroscopic ellipsometry, m-line spectroscopy, Rutherford Backscattering and micro Raman spectroscopy were used to test the integrated optical elements.

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Paper citation in several formats:
Bányász, I. ; Pelli, S. ; Nunzi-Conti, G. ; Righini, G. ; Berneschi, S. ; Szilágyi, E. ; Németh, A. ; Fried, M. ; Petrik, P. ; Agócs, E. ; Kalas, B. ; Zolnai, Z. ; Khanh, N. ; Rajta, I. ; Nagy, G. ; Havranek, V. ; Vosecek, V. ; Veres, M. and Himics, L. (2018). Design, Ion Beam Fabrication and Test of Integrated Optical Elements . In Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS; ISBN 978-989-758-286-8; ISSN 2184-4364, SciTePress, pages 279-285. DOI: 10.5220/0006679002790285

@conference{photoptics18,
author={I. Bányász and S. Pelli and G. Nunzi{-}Conti and G. C. Righini and S. Berneschi and E. Szilágyi and A. Németh and M. Fried and P. Petrik and E. Agócs and B. Kalas and Z. Zolnai and N. Q. Khanh and I. Rajta and G. U. L. Nagy and V. Havranek and V. Vosecek and M. Veres and L. Himics},
title={Design, Ion Beam Fabrication and Test of Integrated Optical Elements },
booktitle={Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS},
year={2018},
pages={279-285},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0006679002790285},
isbn={978-989-758-286-8},
issn={2184-4364},
}

TY - CONF

JO - Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS
TI - Design, Ion Beam Fabrication and Test of Integrated Optical Elements
SN - 978-989-758-286-8
IS - 2184-4364
AU - Bányász, I.
AU - Pelli, S.
AU - Nunzi-Conti, G.
AU - Righini, G.
AU - Berneschi, S.
AU - Szilágyi, E.
AU - Németh, A.
AU - Fried, M.
AU - Petrik, P.
AU - Agócs, E.
AU - Kalas, B.
AU - Zolnai, Z.
AU - Khanh, N.
AU - Rajta, I.
AU - Nagy, G.
AU - Havranek, V.
AU - Vosecek, V.
AU - Veres, M.
AU - Himics, L.
PY - 2018
SP - 279
EP - 285
DO - 10.5220/0006679002790285
PB - SciTePress

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